KR102326115B1 - 도포 장치 및 도포 방법 - Google Patents

도포 장치 및 도포 방법 Download PDF

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Publication number
KR102326115B1
KR102326115B1 KR1020200045930A KR20200045930A KR102326115B1 KR 102326115 B1 KR102326115 B1 KR 102326115B1 KR 1020200045930 A KR1020200045930 A KR 1020200045930A KR 20200045930 A KR20200045930 A KR 20200045930A KR 102326115 B1 KR102326115 B1 KR 102326115B1
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KR
South Korea
Prior art keywords
substrate
floating
region
coating
area
Prior art date
Application number
KR1020200045930A
Other languages
English (en)
Korean (ko)
Other versions
KR20200123017A (ko
Inventor
유지 아베
Original Assignee
가부시키가이샤 스크린 홀딩스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 가부시키가이샤 스크린 홀딩스 filed Critical 가부시키가이샤 스크린 홀딩스
Publication of KR20200123017A publication Critical patent/KR20200123017A/ko
Application granted granted Critical
Publication of KR102326115B1 publication Critical patent/KR102326115B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020200045930A 2019-04-18 2020-04-16 도포 장치 및 도포 방법 KR102326115B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2019-079027 2019-04-18
JP2019079027A JP6916833B2 (ja) 2019-04-18 2019-04-18 塗布装置および塗布方法

Publications (2)

Publication Number Publication Date
KR20200123017A KR20200123017A (ko) 2020-10-28
KR102326115B1 true KR102326115B1 (ko) 2021-11-12

Family

ID=72913636

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200045930A KR102326115B1 (ko) 2019-04-18 2020-04-16 도포 장치 및 도포 방법

Country Status (4)

Country Link
JP (1) JP6916833B2 (zh)
KR (1) KR102326115B1 (zh)
CN (1) CN111822234B (zh)
TW (1) TWI748386B (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012195403A (ja) 2011-03-16 2012-10-11 Tokyo Electron Ltd 浮上式塗布装置
JP2018114475A (ja) 2017-01-20 2018-07-26 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4413789B2 (ja) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP5437134B2 (ja) * 2010-03-31 2014-03-12 大日本スクリーン製造株式会社 塗布装置
JP5258849B2 (ja) * 2010-07-09 2013-08-07 東京エレクトロン株式会社 塗布装置およびノズルのメンテナンス方法
CN201936121U (zh) * 2010-12-23 2011-08-17 北京京东方光电科技有限公司 基板烘烤设备
JP5663297B2 (ja) * 2010-12-27 2015-02-04 東京応化工業株式会社 塗布装置
JP5369128B2 (ja) * 2011-03-01 2013-12-18 東京エレクトロン株式会社 浮上式塗布装置
KR101280220B1 (ko) * 2011-03-23 2013-07-05 주식회사 케이씨텍 인라인 타입의 기판 코터 장치 및 그 방법
JP5869782B2 (ja) * 2011-05-30 2016-02-24 東レエンジニアリング株式会社 浮上搬送加熱装置
KR20180001117A (ko) * 2016-06-27 2018-01-04 주식회사 케이씨텍 기판 처리 장치
JP2018113327A (ja) * 2017-01-11 2018-07-19 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012195403A (ja) 2011-03-16 2012-10-11 Tokyo Electron Ltd 浮上式塗布装置
JP2018114475A (ja) 2017-01-20 2018-07-26 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法

Also Published As

Publication number Publication date
TWI748386B (zh) 2021-12-01
KR20200123017A (ko) 2020-10-28
TW202109713A (zh) 2021-03-01
JP6916833B2 (ja) 2021-08-11
CN111822234B (zh) 2021-11-23
CN111822234A (zh) 2020-10-27
JP2020175328A (ja) 2020-10-29

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