KR102279667B1 - 희토류 옥사이드 기반 모놀리식 챔버 재료 - Google Patents

희토류 옥사이드 기반 모놀리식 챔버 재료 Download PDF

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KR102279667B1
KR102279667B1 KR1020207015643A KR20207015643A KR102279667B1 KR 102279667 B1 KR102279667 B1 KR 102279667B1 KR 1020207015643 A KR1020207015643 A KR 1020207015643A KR 20207015643 A KR20207015643 A KR 20207015643A KR 102279667 B1 KR102279667 B1 KR 102279667B1
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molar
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ceramic
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KR20200066378A (ko
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제니퍼 와이. 선
비라자 피. 카눈고
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어플라이드 머티어리얼스, 인코포레이티드
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