KR102126240B1 - 기판 반송 설비 - Google Patents

기판 반송 설비 Download PDF

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Publication number
KR102126240B1
KR102126240B1 KR1020130127067A KR20130127067A KR102126240B1 KR 102126240 B1 KR102126240 B1 KR 102126240B1 KR 1020130127067 A KR1020130127067 A KR 1020130127067A KR 20130127067 A KR20130127067 A KR 20130127067A KR 102126240 B1 KR102126240 B1 KR 102126240B1
Authority
KR
South Korea
Prior art keywords
container
substrate
low
mounting portion
point
Prior art date
Application number
KR1020130127067A
Other languages
English (en)
Korean (ko)
Other versions
KR20140059716A (ko
Inventor
시게토 무라야마
Original Assignee
가부시키가이샤 다이후쿠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 다이후쿠 filed Critical 가부시키가이샤 다이후쿠
Publication of KR20140059716A publication Critical patent/KR20140059716A/ko
Application granted granted Critical
Publication of KR102126240B1 publication Critical patent/KR102126240B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020130127067A 2012-11-07 2013-10-24 기판 반송 설비 KR102126240B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012245744A JP5928304B2 (ja) 2012-11-07 2012-11-07 基板搬送設備
JPJP-P-2012-245744 2012-11-07

Publications (2)

Publication Number Publication Date
KR20140059716A KR20140059716A (ko) 2014-05-16
KR102126240B1 true KR102126240B1 (ko) 2020-06-24

Family

ID=50700704

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130127067A KR102126240B1 (ko) 2012-11-07 2013-10-24 기판 반송 설비

Country Status (4)

Country Link
JP (1) JP5928304B2 (zh)
KR (1) KR102126240B1 (zh)
CN (1) CN103803230B (zh)
TW (1) TWI599528B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6593287B2 (ja) * 2016-09-09 2019-10-23 株式会社ダイフク 物品搬送設備
TWI684993B (zh) * 2019-05-31 2020-02-11 群翊工業股份有限公司 水平校正設備
KR102170507B1 (ko) * 2020-06-04 2020-10-29 이태구 부품 이송 시스템

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006044920A (ja) * 2004-08-09 2006-02-16 Murata Mach Ltd 天井走行車システム
KR100646906B1 (ko) * 1998-09-22 2006-11-17 동경 엘렉트론 주식회사 기판처리장치 및 기판처리방법
KR100925240B1 (ko) * 2003-03-25 2009-11-05 다다모토 다마이 진공용기의 내외로 처리대상물을 반출입할 수 있는진공처리장치
JP2010137961A (ja) 2008-12-11 2010-06-24 Muratec Automation Co Ltd 保管庫及び入出庫方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758127A (en) * 1983-06-24 1988-07-19 Canon Kabushiki Kaisha Original feeding apparatus and a cassette for containing the original
US5588790A (en) * 1993-11-01 1996-12-31 Lichti Robert D High speed storage system
JPH10297710A (ja) * 1997-04-30 1998-11-10 Fujitsu Ltd キャリア搬送装置
JPH11329989A (ja) * 1998-05-21 1999-11-30 Kokusai Electric Co Ltd 基板処理装置
JP3352636B2 (ja) * 1998-09-22 2002-12-03 東京エレクトロン株式会社 処理装置及びその方法
JP3462405B2 (ja) * 1998-10-29 2003-11-05 東京エレクトロン株式会社 処理装置
JP3829633B2 (ja) * 2001-02-22 2006-10-04 株式会社ダイフク 荷保管設備
US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
US7771151B2 (en) * 2005-05-16 2010-08-10 Muratec Automation Co., Ltd. Interface between conveyor and semiconductor process tool load port
JP4756372B2 (ja) 2006-09-13 2011-08-24 株式会社ダイフク 基板処理方法
JP4887332B2 (ja) * 2007-09-20 2012-02-29 東京エレクトロン株式会社 基板の処理装置
JP5212165B2 (ja) * 2009-02-20 2013-06-19 東京エレクトロン株式会社 基板処理装置
JP5273479B2 (ja) * 2009-10-23 2013-08-28 株式会社ダイフク 基板用収納容器、及び、それを搬送する搬送設備

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100646906B1 (ko) * 1998-09-22 2006-11-17 동경 엘렉트론 주식회사 기판처리장치 및 기판처리방법
KR100925240B1 (ko) * 2003-03-25 2009-11-05 다다모토 다마이 진공용기의 내외로 처리대상물을 반출입할 수 있는진공처리장치
JP2006044920A (ja) * 2004-08-09 2006-02-16 Murata Mach Ltd 天井走行車システム
JP2010137961A (ja) 2008-12-11 2010-06-24 Muratec Automation Co Ltd 保管庫及び入出庫方法

Also Published As

Publication number Publication date
TWI599528B (zh) 2017-09-21
CN103803230A (zh) 2014-05-21
KR20140059716A (ko) 2014-05-16
JP2014096415A (ja) 2014-05-22
JP5928304B2 (ja) 2016-06-01
TW201422507A (zh) 2014-06-16
CN103803230B (zh) 2017-09-01

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