KR101993501B1 - 임프린트 장치, 임프린트 방법 및 물품 제조 방법 - Google Patents

임프린트 장치, 임프린트 방법 및 물품 제조 방법 Download PDF

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KR101993501B1
KR101993501B1 KR1020150134262A KR20150134262A KR101993501B1 KR 101993501 B1 KR101993501 B1 KR 101993501B1 KR 1020150134262 A KR1020150134262 A KR 1020150134262A KR 20150134262 A KR20150134262 A KR 20150134262A KR 101993501 B1 KR101993501 B1 KR 101993501B1
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South Korea
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unit
substrate
imprint material
dummy
imprint
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Korean (ko)
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KR20160040425A (ko
Inventor
요오스케 곤도
도시노리 고바시
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캐논 가부시끼가이샤
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    • H01L21/0274—
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
    • H01L21/67225—
    • H01L21/683—

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020150134262A 2014-10-03 2015-09-23 임프린트 장치, 임프린트 방법 및 물품 제조 방법 Active KR101993501B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014205201A JP6429573B2 (ja) 2014-10-03 2014-10-03 インプリント装置、インプリント方法および物品製造方法
JPJP-P-2014-205201 2014-10-03

Publications (2)

Publication Number Publication Date
KR20160040425A KR20160040425A (ko) 2016-04-14
KR101993501B1 true KR101993501B1 (ko) 2019-06-26

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KR1020150134262A Active KR101993501B1 (ko) 2014-10-03 2015-09-23 임프린트 장치, 임프린트 방법 및 물품 제조 방법

Country Status (5)

Country Link
US (1) US9405193B2 (https=)
JP (1) JP6429573B2 (https=)
KR (1) KR101993501B1 (https=)
CN (1) CN105487334B (https=)
TW (1) TWI610795B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6025079B2 (ja) * 2014-10-07 2016-11-16 大日本印刷株式会社 インプリント装置およびその制御方法
JP6821414B2 (ja) * 2016-12-13 2021-01-27 キヤノン株式会社 インプリント装置、及び物品の製造方法
CN106681105A (zh) * 2017-02-09 2017-05-17 深圳市华星光电技术有限公司 光阻涂布装置检测机构及光阻涂布机
JP6993791B2 (ja) * 2017-05-08 2022-01-14 キヤノン株式会社 インプリント装置
JP7154839B2 (ja) * 2018-06-26 2022-10-18 キヤノン株式会社 インプリント装置、インプリント方法および、物品製造方法
JP7495814B2 (ja) 2020-05-13 2024-06-05 キヤノン株式会社 インプリント装置、および物品の製造方法
JP7596134B2 (ja) * 2020-12-09 2024-12-09 キヤノン株式会社 形成装置、形成方法及び物品の製造方法
JP2025075158A (ja) * 2023-10-31 2025-05-15 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法。

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009266841A (ja) * 2008-04-21 2009-11-12 Toshiba Corp ナノインプリント方法
JP2012049471A (ja) 2010-08-30 2012-03-08 Canon Inc インプリント装置及び物品の製造方法
JP2012164809A (ja) 2011-02-07 2012-08-30 Canon Inc インプリント装置、および、物品の製造方法
JP2014041861A (ja) 2012-08-21 2014-03-06 Dainippon Printing Co Ltd インプリント装置およびインプリント方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5565034A (en) * 1993-10-29 1996-10-15 Tokyo Electron Limited Apparatus for processing substrates having a film formed on a surface of the substrate
KR100877472B1 (ko) * 2002-01-22 2009-01-07 도쿄엘렉트론가부시키가이샤 기판의 처리방법 및 기판의 처리장치
JP3760131B2 (ja) * 2002-01-22 2006-03-29 東京エレクトロン株式会社 処理方法
US7309225B2 (en) 2004-08-13 2007-12-18 Molecular Imprints, Inc. Moat system for an imprint lithography template
JP5198071B2 (ja) * 2004-12-01 2013-05-15 モレキュラー・インプリンツ・インコーポレーテッド インプリントリソグラフィ・プロセスにおける熱管理のための露光方法
US7670530B2 (en) * 2006-01-20 2010-03-02 Molecular Imprints, Inc. Patterning substrates employing multiple chucks
JP4736821B2 (ja) * 2006-01-24 2011-07-27 株式会社日立製作所 パターン形成方法およびパターン形成装置
JP2010080630A (ja) * 2008-09-25 2010-04-08 Canon Inc 押印装置および物品の製造方法
US20100101493A1 (en) * 2008-10-27 2010-04-29 Molecular Imprints, Inc. Dispense System
JP5451450B2 (ja) * 2010-02-24 2014-03-26 キヤノン株式会社 インプリント装置及びそのテンプレート並びに物品の製造方法
JP5686779B2 (ja) * 2011-10-14 2015-03-18 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP6123321B2 (ja) * 2013-02-06 2017-05-10 大日本印刷株式会社 インプリント方法およびインプリント装置
JP6234207B2 (ja) * 2013-12-18 2017-11-22 キヤノン株式会社 インプリント方法、インプリント装置および物品の製造方法
WO2016052345A1 (ja) * 2014-10-01 2016-04-07 大日本印刷株式会社 インプリント装置、インプリント方法およびインプリント装置の制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009266841A (ja) * 2008-04-21 2009-11-12 Toshiba Corp ナノインプリント方法
JP2012049471A (ja) 2010-08-30 2012-03-08 Canon Inc インプリント装置及び物品の製造方法
JP2012164809A (ja) 2011-02-07 2012-08-30 Canon Inc インプリント装置、および、物品の製造方法
JP2014041861A (ja) 2012-08-21 2014-03-06 Dainippon Printing Co Ltd インプリント装置およびインプリント方法

Also Published As

Publication number Publication date
CN105487334A (zh) 2016-04-13
KR20160040425A (ko) 2016-04-14
TWI610795B (zh) 2018-01-11
TW201613740A (en) 2016-04-16
JP6429573B2 (ja) 2018-11-28
US9405193B2 (en) 2016-08-02
JP2016076558A (ja) 2016-05-12
CN105487334B (zh) 2019-11-05
US20160097975A1 (en) 2016-04-07

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