KR101739410B1 - 도금조 및 방법 - Google Patents

도금조 및 방법 Download PDF

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Publication number
KR101739410B1
KR101739410B1 KR1020110022943A KR20110022943A KR101739410B1 KR 101739410 B1 KR101739410 B1 KR 101739410B1 KR 1020110022943 A KR1020110022943 A KR 1020110022943A KR 20110022943 A KR20110022943 A KR 20110022943A KR 101739410 B1 KR101739410 B1 KR 101739410B1
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KR
South Korea
Prior art keywords
copper
alkyl
aryl
plating
substrate
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Korean (ko)
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KR20110103891A (ko
Inventor
주크라 아이. 니아짐베토바
엘리 에이취. 나자르
마리아 애너 르제즈닉
에릭 레딩톤
Original Assignee
롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D233/00—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings
    • C07D233/54—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings having two double bonds between ring members or between ring members and non-ring members
    • C07D233/56—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings having two double bonds between ring members or between ring members and non-ring members with only hydrogen atoms or radicals containing only hydrogen and carbon atoms, attached to ring carbon atoms
    • C07D233/60—Heterocyclic compounds containing 1,3-diazole or hydrogenated 1,3-diazole rings, not condensed with other rings having two double bonds between ring members or between ring members and non-ring members with only hydrogen atoms or radicals containing only hydrogen and carbon atoms, attached to ring carbon atoms with hydrocarbon radicals, substituted by oxygen or sulfur atoms, attached to ring nitrogen atoms

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Chemically Coating (AREA)
KR1020110022943A 2010-03-15 2011-03-15 도금조 및 방법 Active KR101739410B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/661,301 2010-03-15
US12/661,301 US20110220512A1 (en) 2010-03-15 2010-03-15 Plating bath and method

Publications (2)

Publication Number Publication Date
KR20110103891A KR20110103891A (ko) 2011-09-21
KR101739410B1 true KR101739410B1 (ko) 2017-05-24

Family

ID=43984124

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110022943A Active KR101739410B1 (ko) 2010-03-15 2011-03-15 도금조 및 방법

Country Status (6)

Country Link
US (2) US20110220512A1 (https=)
EP (1) EP2366692B1 (https=)
JP (1) JP6054594B2 (https=)
KR (1) KR101739410B1 (https=)
CN (2) CN102888629B (https=)
TW (1) TWI428326B (https=)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8268157B2 (en) * 2010-03-15 2012-09-18 Rohm And Haas Electronic Materials Llc Plating bath and method
US8262895B2 (en) * 2010-03-15 2012-09-11 Rohm And Haas Electronic Materials Llc Plating bath and method
US8454815B2 (en) 2011-10-24 2013-06-04 Rohm And Haas Electronics Materials Llc Plating bath and method
US10405422B2 (en) * 2012-07-09 2019-09-03 Shikoku Chemicals Corporation Copper film-forming agent and method for forming copper film
KR20140092626A (ko) 2013-01-16 2014-07-24 삼성전자주식회사 구리 전해 도금액, 구리 도금 장치 및 이를 이용한 구리 범프 형성 방법
US20140238868A1 (en) * 2013-02-25 2014-08-28 Dow Global Technologies Llc Electroplating bath
US20140262801A1 (en) * 2013-03-14 2014-09-18 Rohm And Haas Electronic Materials Llc Method of filling through-holes
US9598787B2 (en) * 2013-03-14 2017-03-21 Rohm And Haas Electronic Materials Llc Method of filling through-holes
US9403762B2 (en) * 2013-11-21 2016-08-02 Rohm And Haas Electronic Materials Llc Reaction products of guanidine compounds or salts thereof, polyepoxides and polyhalogens
US9273407B2 (en) 2014-03-17 2016-03-01 Hong Kong Applied Science and Technology Research Institute Company Limited Additive for electrodeposition
CN104005061B (zh) * 2014-06-05 2016-05-18 中节能太阳能科技有限公司 一种用于太阳能电池前电极电镀铜的负整平剂
US9809891B2 (en) 2014-06-30 2017-11-07 Rohm And Haas Electronic Materials Llc Plating method
US10154598B2 (en) 2014-10-13 2018-12-11 Rohm And Haas Electronic Materials Llc Filling through-holes
US9611560B2 (en) 2014-12-30 2017-04-04 Rohm And Haas Electronic Materials Llc Sulfonamide based polymers for copper electroplating
US9783905B2 (en) 2014-12-30 2017-10-10 Rohm and Haas Electronic Mateirals LLC Reaction products of amino acids and epoxies
US9725816B2 (en) 2014-12-30 2017-08-08 Rohm And Haas Electronic Materials Llc Amino sulfonic acid based polymers for copper electroplating
CN105002527B (zh) * 2015-07-31 2017-06-16 广东光华科技股份有限公司 整平剂溶液及其制备方法和应用
US10100421B2 (en) 2015-08-06 2018-10-16 Dow Global Technologies Llc Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of imidazole and bisepoxide compounds
EP3135709B1 (en) 2015-08-31 2018-01-10 ATOTECH Deutschland GmbH Imidazoyl urea polymers and their use in metal or metal alloy plating bath compositions
US10988852B2 (en) 2015-10-27 2021-04-27 Rohm And Haas Electronic Materials Llc Method of electroplating copper into a via on a substrate from an acid copper electroplating bath
US10508357B2 (en) 2016-02-15 2019-12-17 Rohm And Haas Electronic Materials Llc Method of filling through-holes to reduce voids and other defects
US10512174B2 (en) * 2016-02-15 2019-12-17 Rohm And Haas Electronic Materials Llc Method of filling through-holes to reduce voids and other defects
US10190228B2 (en) * 2016-03-29 2019-01-29 Rohm And Haas Electronic Materials Llc Copper electroplating baths and electroplating methods capable of electroplating megasized photoresist defined features
JP7039601B2 (ja) * 2016-09-22 2022-03-22 マクダーミッド エンソン インコーポレイテッド マイクロエレクトロニクスにおける銅電着
US10718059B2 (en) 2017-07-10 2020-07-21 Rohm And Haas Electronic Materials Llc Nickel electroplating compositions with cationic polymers and methods of electroplating nickel
CN107217283B (zh) * 2017-07-25 2018-11-16 上海新阳半导体材料股份有限公司 整平剂、含其的金属电镀组合物、制备方法及应用
CN107236976B (zh) * 2017-07-25 2018-11-16 上海新阳半导体材料股份有限公司 整平剂、含其的金属电镀组合物及制备方法、应用
CN111892706A (zh) * 2020-07-23 2020-11-06 中国科学院大学温州研究院(温州生物材料与工程研究所) 一种peg偶联杂环化合物及其在酸性光亮镀铜中的应用
US20240132453A1 (en) 2021-02-15 2024-04-25 Adeka Corporation Additive for electroplating solution, electroplating solution, electroplating method, and method of producing metal layer
KR102339862B1 (ko) * 2021-07-06 2021-12-16 와이엠티 주식회사 레벨링제 및 이를 포함하는 회로패턴 형성용 전기도금 조성물
KR102339868B1 (ko) * 2021-07-30 2021-12-16 와이엠티 주식회사 레벨링제 및 이를 포함하는 비아홀 충진을 위한 전기도금 조성물
KR102339867B1 (ko) * 2021-07-30 2021-12-16 와이엠티 주식회사 레벨링제 및 이를 포함하는 비아홀 충진을 위한 전기도금 조성물
CN115894908B (zh) * 2021-09-30 2025-06-06 华为技术有限公司 聚合物、整平剂及其制备方法、电镀液和电镀方法
CN114381769B (zh) * 2021-12-24 2023-06-09 广州市慧科高新材料科技有限公司 一种超速填孔镀铜整平剂的合成方法以及应用
US20230279577A1 (en) 2022-03-04 2023-09-07 Rohm And Haas Electronic Materials Llc Method of filling through-holes to reduce voids
CN119663384A (zh) * 2024-12-16 2025-03-21 哈尔滨工业大学 一种咪唑基表面处理添加剂及其制备方法与应用

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008087985A1 (ja) 2007-01-18 2008-07-24 Nippon Chemical Industrial Co., Ltd. 改質ペロブスカイト型複合酸化物、その製造方法及び複合誘電体材料
JP2009034846A (ja) 2007-07-31 2009-02-19 Chisso Corp 転写フィルム

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4066625A (en) * 1967-05-02 1978-01-03 Amicon Corporation Unitary curable resin compositions
FR1566468A (https=) * 1968-03-04 1969-05-09
DE2007968A1 (de) * 1970-01-16 1971-07-22 R.T. Vanderbilt Company, Inc., New York, N.Y. (V.St.A.) Propy lenoxid-Imidazol-Reaktionsprodukte, Verfahren zu ihrer Herstellung und ihre Verwendung als Hartungsmittel fur Epoxidharze
US3954575A (en) * 1972-11-10 1976-05-04 Dipsol Chemicals Co., Ltd. Zinc electroplating
US3843667A (en) * 1973-09-12 1974-10-22 M Cupery N-imidazole compounds and their complex metal derivatives
DE2525264C2 (de) * 1975-06-04 1984-02-16 Schering AG, 1000 Berlin und 4709 Bergkamen Alkalisches cyanidfreies Zinkbad und Verfahren zur galvanischen Abscheidung von Zinküberzügen unter Verwendung dieses Bades
JPS607652B2 (ja) * 1976-06-12 1985-02-26 三菱油化株式会社 陰イオン交換体の製造法
DE2725930C2 (de) * 1976-06-12 1986-06-12 Mitsubishi Petrochemical Co., Ltd., Tokio/Tokyo Verfahren zur Herstellung eines Anionenaustauscherharzes und Verwendung derselben zur Herstellung einer Anionenaustauschermembran
US4169772A (en) * 1978-11-06 1979-10-02 R. O. Hull & Company, Inc. Acid zinc plating baths, compositions useful therein, and methods for electrodepositing bright zinc deposits
CA1151182A (en) * 1979-08-10 1983-08-02 Marvin L. Kaufman Chemically modified imidazole curing catalysts for epoxy resins and powder coatings containing them
US4397717A (en) * 1981-02-10 1983-08-09 Elektro-Brite Gmbh & Co. Kg. Alkaline zinc electroplating bath with or without cyanide content
JPS604524A (ja) * 1983-06-22 1985-01-11 Ajinomoto Co Inc エポキシ樹脂用潜在性硬化剤
JPS59138228A (ja) * 1983-01-27 1984-08-08 Mitsubishi Petrochem Co Ltd 新規な高分子四級塩
EP0145654B2 (de) * 1983-11-09 1992-05-13 Ciba-Geigy Ag Verfahren zum Innenauskleiden von Rohren oder Rohrteilstücken
US4536261A (en) * 1984-08-07 1985-08-20 Francine Popescu Alkaline bath for the electrodeposition of bright zinc
JPS61286369A (ja) * 1985-06-11 1986-12-16 Shikoku Chem Corp ２―フェニル―４，５―ジベンジルイミダゾール及び該化合物の合成方法
US4730022A (en) * 1987-03-06 1988-03-08 Mcgean-Rohco, Inc. Polymer compositions and alkaline zinc electroplating baths
US4792383A (en) * 1987-10-27 1988-12-20 Mcgean-Rohco, Inc. Polymer compositions and alkaline zinc electroplating baths and processes
JPH01219188A (ja) * 1988-02-26 1989-09-01 Okuno Seiyaku Kogyo Kk 亜鉛−ニッケル合金めっき浴
DE4010548A1 (de) * 1990-04-02 1991-10-10 Schering Ag Imidazolylderivate, ihre verwendung als haertungsmittel in epoxidharzzusammensetzungen, sie enthaltende haertbare epoxidharzzusammensetzungen und epoxidharzformkoerper
JPH03277631A (ja) * 1990-08-31 1991-12-09 Mitsubishi Petrochem Co Ltd 新規な高分子四級塩の製造方法
SU1743158A1 (ru) * 1990-09-04 1998-02-20 Институт физико-органической химии и углехимии АН УССР 1-глицидилимидазолы в качестве соотвердителей эпоксидных смол
US5607570A (en) * 1994-10-31 1997-03-04 Rohbani; Elias Electroplating solution
JPH1030015A (ja) * 1996-07-15 1998-02-03 Kansai Paint Co Ltd エポキシ樹脂用硬化触媒及びそれを用いてなる熱硬化性塗料組成物
DE69703739T2 (de) * 1997-10-02 2001-06-13 Hexcel Corp., Pleasanton Epoxidharzhärter
KR100659544B1 (ko) * 1999-11-12 2006-12-19 에바라 유지라이토 코포레이션 리미티드 비아 필링 방법
US6610192B1 (en) * 2000-11-02 2003-08-26 Shipley Company, L.L.C. Copper electroplating
US6515237B2 (en) * 2000-11-24 2003-02-04 Hitachi Chemical Company, Ltd. Through-hole wiring board
JP4392168B2 (ja) * 2001-05-09 2009-12-24 荏原ユージライト株式会社 銅めっき浴およびこれを用いる基板のめっき方法
JP2004250777A (ja) * 2002-06-03 2004-09-09 Shipley Co Llc レベラー化合物
JP4249438B2 (ja) * 2002-07-05 2009-04-02 日本ニュークローム株式会社 銅―錫合金めっき用ピロリン酸浴
JP4183999B2 (ja) * 2002-07-29 2008-11-19 日鉱金属株式会社 イミダゾールアルコールを有効成分とする表面処理剤
US7128822B2 (en) * 2003-06-04 2006-10-31 Shipley Company, L.L.C. Leveler compounds
KR100804293B1 (ko) * 2004-03-31 2008-02-18 아사히 가세이 케미칼즈 가부시키가이샤 에폭시 수지용 경화제 및 에폭시 수지 조성물
TW200613586A (en) * 2004-07-22 2006-05-01 Rohm & Haas Elect Mat Leveler compounds
EP1741804B1 (en) * 2005-07-08 2016-04-27 Rohm and Haas Electronic Materials, L.L.C. Electrolytic copper plating method
CN1931889A (zh) * 2006-09-27 2007-03-21 蓝星化工新材料股份有限公司无锡树脂厂 固态咪唑固化剂的改性方法及该方法得到的固化剂
JP5497261B2 (ja) 2006-12-15 2014-05-21 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． インジウム組成物
US8268157B2 (en) * 2010-03-15 2012-09-18 Rohm And Haas Electronic Materials Llc Plating bath and method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008087985A1 (ja) 2007-01-18 2008-07-24 Nippon Chemical Industrial Co., Ltd. 改質ペロブスカイト型複合酸化物、その製造方法及び複合誘電体材料
JP2009034846A (ja) 2007-07-31 2009-02-19 Chisso Corp 転写フィルム

Also Published As

Publication number Publication date
CN102888629A (zh) 2013-01-23
KR20110103891A (ko) 2011-09-21
JP6054594B2 (ja) 2016-12-27
TWI428326B (zh) 2014-03-01
EP2366692B1 (en) 2013-02-20
EP2366692A2 (en) 2011-09-21
EP2366692A3 (en) 2011-11-02
CN102888629B (zh) 2014-12-31
US20110220512A1 (en) 2011-09-15
US20110290660A1 (en) 2011-12-01
US8268158B2 (en) 2012-09-18
TW201139382A (en) 2011-11-16
JP2011190260A (ja) 2011-09-29
CN102250319A (zh) 2011-11-23

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