KR101649436B1 - 초음파 트랜스듀서 소자 칩 및 프로브, 및 전자 기기 및 초음파 진단 장치 - Google Patents
초음파 트랜스듀서 소자 칩 및 프로브, 및 전자 기기 및 초음파 진단 장치 Download PDFInfo
- Publication number
- KR101649436B1 KR101649436B1 KR1020147030048A KR20147030048A KR101649436B1 KR 101649436 B1 KR101649436 B1 KR 101649436B1 KR 1020147030048 A KR1020147030048 A KR 1020147030048A KR 20147030048 A KR20147030048 A KR 20147030048A KR 101649436 B1 KR101649436 B1 KR 101649436B1
- Authority
- KR
- South Korea
- Prior art keywords
- ultrasonic transducer
- substrate
- transducer element
- element chip
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4427—Device being portable or laptop-like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/46—Ultrasonic, sonic or infrasonic diagnostic devices with special arrangements for interfacing with the operator or the patient
- A61B8/461—Displaying means of special interest
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/52—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/5207—Devices using data or image processing specially adapted for diagnosis using ultrasonic, sonic or infrasonic waves involving processing of raw data to produce diagnostic data, e.g. for generating an image
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/8934—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a dynamic transducer configuration
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B42/00—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means
- G03B42/06—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means using ultrasonic, sonic or infrasonic waves
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/101—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Animal Behavior & Ethology (AREA)
- Veterinary Medicine (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Biophysics (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Mechanical Engineering (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gynecology & Obstetrics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Manufacturing & Machinery (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2012-078672 | 2012-03-30 | ||
| JP2012078672A JP6102075B2 (ja) | 2012-03-30 | 2012-03-30 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
| PCT/JP2013/002147 WO2013145764A1 (ja) | 2012-03-30 | 2013-03-28 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20140148452A KR20140148452A (ko) | 2014-12-31 |
| KR101649436B1 true KR101649436B1 (ko) | 2016-08-19 |
Family
ID=49234865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147030048A Active KR101649436B1 (ko) | 2012-03-30 | 2013-03-28 | 초음파 트랜스듀서 소자 칩 및 프로브, 및 전자 기기 및 초음파 진단 장치 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US9079220B2 (https=) |
| EP (1) | EP2832297A4 (https=) |
| JP (1) | JP6102075B2 (https=) |
| KR (1) | KR101649436B1 (https=) |
| CN (1) | CN104203109B (https=) |
| TW (1) | TWI620601B (https=) |
| WO (1) | WO2013145764A1 (https=) |
Families Citing this family (32)
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| US7750536B2 (en) | 2006-03-02 | 2010-07-06 | Visualsonics Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
| US9184369B2 (en) | 2008-09-18 | 2015-11-10 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| US9173047B2 (en) * | 2008-09-18 | 2015-10-27 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
| JP5990930B2 (ja) | 2012-02-24 | 2016-09-14 | セイコーエプソン株式会社 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
| JP5900107B2 (ja) * | 2012-03-30 | 2016-04-06 | セイコーエプソン株式会社 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
| JP6102075B2 (ja) * | 2012-03-30 | 2017-03-29 | セイコーエプソン株式会社 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
| JP6135088B2 (ja) | 2012-10-12 | 2017-05-31 | セイコーエプソン株式会社 | 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 |
| JP6175780B2 (ja) | 2013-01-28 | 2017-08-09 | セイコーエプソン株式会社 | 超音波デバイス、超音波プローブ、電子機器および超音波画像装置 |
| JP6291814B2 (ja) * | 2013-11-29 | 2018-03-14 | セイコーエプソン株式会社 | 超音波トランスデューサーデバイス、超音波測定装置及び超音波画像装置 |
| JP6233581B2 (ja) * | 2013-12-26 | 2017-11-22 | セイコーエプソン株式会社 | 超音波センサー及びその製造方法 |
| US10265047B2 (en) | 2014-03-12 | 2019-04-23 | Fujifilm Sonosite, Inc. | High frequency ultrasound transducer having an ultrasonic lens with integral central matching layer |
| JP6519212B2 (ja) * | 2014-03-27 | 2019-05-29 | セイコーエプソン株式会社 | 圧電素子、圧電デバイスおよびプローブ並びに電子機器および超音波画像装置 |
| USD756818S1 (en) | 2014-07-10 | 2016-05-24 | Fujifilm Corporation | Probe for photoacoustic measurement device |
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| JP2016033970A (ja) * | 2014-07-31 | 2016-03-10 | セイコーエプソン株式会社 | 超音波デバイスおよびその製造方法並びにプローブおよび電子機器 |
| JP6402983B2 (ja) * | 2014-08-29 | 2018-10-10 | セイコーエプソン株式会社 | 超音波デバイス、超音波デバイスの製造方法、超音波プローブ、超音波測定装置、電子機器 |
| JP6587051B2 (ja) * | 2015-03-24 | 2019-10-09 | セイコーエプソン株式会社 | 超音波センサー及びその製造方法 |
| JP6536792B2 (ja) * | 2015-03-25 | 2019-07-03 | セイコーエプソン株式会社 | 超音波センサー及びその製造方法 |
| JP6623596B2 (ja) * | 2015-07-24 | 2019-12-25 | セイコーエプソン株式会社 | 超音波デバイス、超音波モジュール、電子機器、及び超音波測定装置 |
| JP6597026B2 (ja) * | 2015-07-30 | 2019-10-30 | セイコーエプソン株式会社 | 超音波デバイス及び超音波モジュール |
| JP6672877B2 (ja) * | 2016-02-22 | 2020-03-25 | セイコーエプソン株式会社 | 超音波デバイス、超音波プローブ、超音波装置、及び超音波デバイスの製造方法 |
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| KR102019509B1 (ko) * | 2016-09-05 | 2019-09-09 | 엘지전자 주식회사 | 디스플레이 디바이스 |
| JP6753293B2 (ja) * | 2016-12-09 | 2020-09-09 | セイコーエプソン株式会社 | 超音波デバイス及び超音波装置 |
| CN108652669A (zh) * | 2018-03-14 | 2018-10-16 | 业成科技(成都)有限公司 | 超音波感测器及其运作方法 |
| JP7205191B2 (ja) * | 2018-11-22 | 2023-01-17 | セイコーエプソン株式会社 | 超音波センサー、及び電子機器 |
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| CN115398183A (zh) * | 2020-01-17 | 2022-11-25 | 大不列颠哥伦比亚大学 | 柔性电容式微加工超声换能器阵列 |
| JP7750049B2 (ja) * | 2021-11-19 | 2025-10-07 | セイコーエプソン株式会社 | 圧電デバイス |
| CN114367431B (zh) * | 2022-01-10 | 2023-05-23 | 京东方科技集团股份有限公司 | 一种换能器及其制备方法 |
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| JP5990930B2 (ja) * | 2012-02-24 | 2016-09-14 | セイコーエプソン株式会社 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
| JP6102075B2 (ja) * | 2012-03-30 | 2017-03-29 | セイコーエプソン株式会社 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
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| JP6135088B2 (ja) * | 2012-10-12 | 2017-05-31 | セイコーエプソン株式会社 | 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 |
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| US20070251324A1 (en) * | 2006-04-26 | 2007-11-01 | Denso Corporation | Ultrasonic sensor and manufacture method of the same |
| JP2008119318A (ja) | 2006-11-14 | 2008-05-29 | Hitachi Medical Corp | 超音波探触子及び超音波診断装置 |
Also Published As
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|---|---|
| CN104203109B (zh) | 2016-06-15 |
| US20170095838A1 (en) | 2017-04-06 |
| TW201338877A (zh) | 2013-10-01 |
| EP2832297A4 (en) | 2015-11-18 |
| WO2013145764A1 (ja) | 2013-10-03 |
| JP6102075B2 (ja) | 2017-03-29 |
| US20130258803A1 (en) | 2013-10-03 |
| JP2013208148A (ja) | 2013-10-10 |
| US9079220B2 (en) | 2015-07-14 |
| KR20140148452A (ko) | 2014-12-31 |
| TWI620601B (zh) | 2018-04-11 |
| EP2832297A1 (en) | 2015-02-04 |
| CN104203109A (zh) | 2014-12-10 |
| US9554775B2 (en) | 2017-01-31 |
| US10040098B2 (en) | 2018-08-07 |
| US20150265246A1 (en) | 2015-09-24 |
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