KR101477211B1 - 배선 기판의 제조 방법 - Google Patents

배선 기판의 제조 방법 Download PDF

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Publication number
KR101477211B1
KR101477211B1 KR1020080100736A KR20080100736A KR101477211B1 KR 101477211 B1 KR101477211 B1 KR 101477211B1 KR 1020080100736 A KR1020080100736 A KR 1020080100736A KR 20080100736 A KR20080100736 A KR 20080100736A KR 101477211 B1 KR101477211 B1 KR 101477211B1
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KR
South Korea
Prior art keywords
insulating layer
film
pad
opening
cured
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KR1020080100736A
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English (en)
Korean (ko)
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KR20090038375A (ko
Inventor
유지 유키이리
이즈미 다나카
Original Assignee
신꼬오덴기 고교 가부시키가이샤
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Publication of KR20090038375A publication Critical patent/KR20090038375A/ko
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H05K3/0035—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/421—Blind plated via connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0313—Organic insulating material
    • H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0366—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement reinforced, e.g. by fibres, fabrics
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203—Fillers and particles
    • H05K2201/0206—Materials
    • H05K2201/0209—Inorganic, non-metallic particles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09563—Metal filled via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01—Tools for processing; Objects used during processing
    • H05K2203/0191—Using tape or non-metallic foil in a process, e.g. during filling of a hole with conductive paste
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0264—Peeling insulating layer, e.g. foil, or separating mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06—Lamination
    • H05K2203/066—Transfer laminating of insulating material, e.g. resist as a whole layer, not as a pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1377—Protective layers
    • H05K2203/1383—Temporary protective insulating layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128—Assembling formed circuit to base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49158—Manufacturing circuit on or in base with molding of insulated base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49227—Insulator making

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
KR1020080100736A 2007-10-15 2008-10-14 배선 기판의 제조 방법 Active KR101477211B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00267562 2007-10-15
JP2007267562A JP5094323B2 (ja) 2007-10-15 2007-10-15 配線基板の製造方法

Publications (2)

Publication Number Publication Date
KR20090038375A KR20090038375A (ko) 2009-04-20
KR101477211B1 true KR101477211B1 (ko) 2014-12-30

Family

ID=40561998

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080100736A Active KR101477211B1 (ko) 2007-10-15 2008-10-14 배선 기판의 제조 방법

Country Status (4)

Country Link
US (3) US8196296B2 (enExample)
JP (1) JP5094323B2 (enExample)
KR (1) KR101477211B1 (enExample)
TW (1) TWI435676B (enExample)

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KR100704919B1 (ko) * 2005-10-14 2007-04-09 삼성전기주식회사 코어층이 없는 기판 및 그 제조 방법
US7344917B2 (en) * 2005-11-30 2008-03-18 Freescale Semiconductor, Inc. Method for packaging a semiconductor device
KR101103301B1 (ko) * 2009-12-10 2012-01-11 엘지이노텍 주식회사 다층인쇄회로기판 및 그 제조방법
US8541693B2 (en) * 2010-03-31 2013-09-24 Ibiden Co., Ltd. Wiring board and method for manufacturing the same
CN102340927A (zh) * 2010-07-27 2012-02-01 南亚电路板股份有限公司 印刷电路板
US8745860B2 (en) * 2011-03-11 2014-06-10 Ibiden Co., Ltd. Method for manufacturing printed wiring board
JP5385967B2 (ja) * 2011-12-22 2014-01-08 イビデン株式会社 配線板及びその製造方法
US20130241058A1 (en) * 2012-03-16 2013-09-19 Taiwan Semiconductor Manufacturing Company, Ltd. Wire Bonding Structures for Integrated Circuits
US10098242B2 (en) 2012-03-29 2018-10-09 Taiwan Green Point Enterprises Co., Ltd. Double-sided circuit board and method for preparing the same
JP6208411B2 (ja) * 2012-06-15 2017-10-04 新光電気工業株式会社 配線基板及びその製造方法
KR101412225B1 (ko) * 2012-08-10 2014-06-25 이비덴 가부시키가이샤 배선판 및 그 제조 방법
JP2015035496A (ja) * 2013-08-09 2015-02-19 イビデン株式会社 電子部品内蔵配線板の製造方法
JP6761224B2 (ja) * 2014-02-19 2020-09-23 味の素株式会社 プリント配線板、半導体装置及び樹脂シートセット
CN106356355B (zh) * 2015-07-15 2020-06-26 恒劲科技股份有限公司 基板结构及其制作方法
JP7320768B2 (ja) * 2016-01-26 2023-08-04 パナソニックＩｐマネジメント株式会社 樹脂付き金属箔、フレキシブルプリント配線板
JP2017228640A (ja) * 2016-06-22 2017-12-28 イビデン株式会社 プリント配線板の製造方法
CN107978586B (zh) * 2016-10-25 2019-11-26 上海新昇半导体科技有限公司 校准晶片及其制造方法
JP6915659B2 (ja) * 2017-12-06 2021-08-04 味の素株式会社 樹脂シート
WO2022003819A1 (ja) * 2020-06-30 2022-01-06 ギガフォトン株式会社 レーザ加工方法及び回路基板製造方法
WO2022070389A1 (ja) * 2020-10-01 2022-04-07 昭和電工マテリアルズ株式会社 配線基板の製造方法、半導体装置の製造方法、及び樹脂シート
FR3133482B1 (fr) * 2022-03-11 2025-02-28 St Microelectronics Grenoble 2 Substrat d’interconnexion et procédé de fabrication d’un tel substrat

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Publication number Priority date Publication date Assignee Title
JP2000244115A (ja) * 1999-02-17 2000-09-08 Ibiden Co Ltd プリント配線板の製造方法
JP2002324974A (ja) * 2001-04-24 2002-11-08 Sony Corp 多層プリント配線基板及び多層プリント配線基板の製造方法
JP2004241394A (ja) * 2000-02-08 2004-08-26 Ajinomoto Co Inc 接着フィルム及びこれを用いた積層板の製造法

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JPS62291087A (ja) 1986-06-10 1987-12-17 日立化成工業株式会社 配線板の製造方法
JPH06304774A (ja) * 1993-04-23 1994-11-01 Murata Mfg Co Ltd 積層型セラミック電子部品の製造方法
JP3395621B2 (ja) * 1997-02-03 2003-04-14 イビデン株式会社 プリント配線板及びその製造方法
DE69926939T2 (de) * 1998-04-01 2006-07-13 Mitsui Mining & Smelting Co., Ltd. Verfahren zur Herstellung einer mehrschichtigen gedruckten Leiterplatte
JP2000022337A (ja) * 1998-06-30 2000-01-21 Matsushita Electric Works Ltd 多層配線板及びその製造方法
JP3670487B2 (ja) 1998-06-30 2005-07-13 京セラ株式会社 配線基板の製造方法
ATE222046T1 (de) * 1999-03-23 2002-08-15 Circuit Foil Luxembourg Trading Sarl Verfahren zur herstellung einer mehrschichtigen gedruckten leiterplatte und verbundfolie zur verwendung darin
JP2001308536A (ja) * 2000-04-27 2001-11-02 Kyocera Corp 多層配線基板およびその製造方法
JP3992524B2 (ja) 2002-03-29 2007-10-17 住友ベークライト株式会社 多層配線板およびその製造方法ならびに半導体装置
JP2006203074A (ja) * 2005-01-21 2006-08-03 Sumitomo Bakelite Co Ltd 回路基板の製造方法および回路基板
JP2007051225A (ja) * 2005-08-18 2007-03-01 Ajinomoto Co Inc 高誘電率樹脂組成物
JP4334005B2 (ja) 2005-12-07 2009-09-16 新光電気工業株式会社 配線基板の製造方法及び電子部品実装構造体の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000244115A (ja) * 1999-02-17 2000-09-08 Ibiden Co Ltd プリント配線板の製造方法
JP2004241394A (ja) * 2000-02-08 2004-08-26 Ajinomoto Co Inc 接着フィルム及びこれを用いた積層板の製造法
JP2002324974A (ja) * 2001-04-24 2002-11-08 Sony Corp 多層プリント配線基板及び多層プリント配線基板の製造方法

Also Published As

Publication number Publication date
US20120204424A1 (en) 2012-08-16
US20120144666A1 (en) 2012-06-14
TWI435676B (zh) 2014-04-21
US20090100673A1 (en) 2009-04-23
JP2009099649A (ja) 2009-05-07
KR20090038375A (ko) 2009-04-20
TW200938044A (en) 2009-09-01
US8196296B2 (en) 2012-06-12
US8561293B2 (en) 2013-10-22
JP5094323B2 (ja) 2012-12-12

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