KR101368819B1 - 기판 이송장치 - Google Patents

기판 이송장치 Download PDF

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Publication number
KR101368819B1
KR101368819B1 KR1020110138695A KR20110138695A KR101368819B1 KR 101368819 B1 KR101368819 B1 KR 101368819B1 KR 1020110138695 A KR1020110138695 A KR 1020110138695A KR 20110138695 A KR20110138695 A KR 20110138695A KR 101368819 B1 KR101368819 B1 KR 101368819B1
Authority
KR
South Korea
Prior art keywords
plate
seating
substrate
support
guide
Prior art date
Application number
KR1020110138695A
Other languages
English (en)
Korean (ko)
Other versions
KR20130071284A (ko
Inventor
양상희
이기웅
김성진
차은희
Original Assignee
삼성디스플레이 주식회사
에이피시스템 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성디스플레이 주식회사, 에이피시스템 주식회사 filed Critical 삼성디스플레이 주식회사
Priority to KR1020110138695A priority Critical patent/KR101368819B1/ko
Priority to TW101146342A priority patent/TWI477428B/zh
Priority to CN201210555398.6A priority patent/CN103177993B/zh
Priority to JP2012278173A priority patent/JP5575869B2/ja
Publication of KR20130071284A publication Critical patent/KR20130071284A/ko
Application granted granted Critical
Publication of KR101368819B1 publication Critical patent/KR101368819B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020110138695A 2011-12-20 2011-12-20 기판 이송장치 KR101368819B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020110138695A KR101368819B1 (ko) 2011-12-20 2011-12-20 기판 이송장치
TW101146342A TWI477428B (zh) 2011-12-20 2012-12-10 基板傳送裝置
CN201210555398.6A CN103177993B (zh) 2011-12-20 2012-12-19 基板传送装置
JP2012278173A JP5575869B2 (ja) 2011-12-20 2012-12-20 基板移送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110138695A KR101368819B1 (ko) 2011-12-20 2011-12-20 기판 이송장치

Publications (2)

Publication Number Publication Date
KR20130071284A KR20130071284A (ko) 2013-06-28
KR101368819B1 true KR101368819B1 (ko) 2014-03-06

Family

ID=48637763

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110138695A KR101368819B1 (ko) 2011-12-20 2011-12-20 기판 이송장치

Country Status (4)

Country Link
JP (1) JP5575869B2 (zh)
KR (1) KR101368819B1 (zh)
CN (1) CN103177993B (zh)
TW (1) TWI477428B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101958694B1 (ko) 2016-03-03 2019-03-19 에이피시스템 주식회사 Ela 장치용 기판 지지모듈
TWI571420B (zh) * 2016-06-29 2017-02-21 The modified cassette support bar restructuring
CN108328506A (zh) * 2018-03-30 2018-07-27 苏州伊而雅精密部件有限公司 一种升降设备
CN108298457A (zh) * 2018-03-30 2018-07-20 苏州伊而雅精密部件有限公司 一种自动顶升设备
CN109520718A (zh) * 2018-12-25 2019-03-26 江苏省优联检测技术服务有限公司 汽车出风口耐久测试装置
KR102435298B1 (ko) * 2020-07-07 2022-08-24 디앤에이 주식회사 기판 지지장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073876A (ja) * 2004-09-03 2006-03-16 Seiko Epson Corp リフター機構、これを備えた液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置、および電子機器
JP2007022758A (ja) * 2005-07-15 2007-02-01 Ckd Corp 板状ワークの移載装置
JP2007042924A (ja) * 2005-08-04 2007-02-15 Nikon Corp ステージ装置及び露光装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3823027B2 (ja) * 2001-01-31 2006-09-20 東京エレクトロン株式会社 基板処理装置
JP4245138B2 (ja) * 2003-03-11 2009-03-25 富士通株式会社 基板貼合せ装置及び基板貼合せ方法
JP2008294100A (ja) * 2007-05-23 2008-12-04 Japan Steel Works Ltd:The 基板保持装置
JP2010064159A (ja) * 2008-09-09 2010-03-25 Seiko Epson Corp 吸引保持ハンド
WO2010113486A1 (ja) * 2009-03-31 2010-10-07 株式会社アルバック 保持装置、搬送装置及び回転伝達装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073876A (ja) * 2004-09-03 2006-03-16 Seiko Epson Corp リフター機構、これを備えた液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置、および電子機器
JP2007022758A (ja) * 2005-07-15 2007-02-01 Ckd Corp 板状ワークの移載装置
JP2007042924A (ja) * 2005-08-04 2007-02-15 Nikon Corp ステージ装置及び露光装置

Also Published As

Publication number Publication date
JP5575869B2 (ja) 2014-08-20
CN103177993B (zh) 2016-03-09
TWI477428B (zh) 2015-03-21
JP2013131759A (ja) 2013-07-04
TW201335049A (zh) 2013-09-01
CN103177993A (zh) 2013-06-26
KR20130071284A (ko) 2013-06-28

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