KR101237092B1 - 열적 처리 장치 - Google Patents

열적 처리 장치 Download PDF

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Publication number
KR101237092B1
KR101237092B1 KR1020060019378A KR20060019378A KR101237092B1 KR 101237092 B1 KR101237092 B1 KR 101237092B1 KR 1020060019378 A KR1020060019378 A KR 1020060019378A KR 20060019378 A KR20060019378 A KR 20060019378A KR 101237092 B1 KR101237092 B1 KR 101237092B1
Authority
KR
South Korea
Prior art keywords
substrate
heaters
cooling
heater
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020060019378A
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English (en)
Korean (ko)
Other versions
KR20060096903A (ko
Inventor
요시하루 오타
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20060096903A publication Critical patent/KR20060096903A/ko
Application granted granted Critical
Publication of KR101237092B1 publication Critical patent/KR101237092B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/10—Arrangements of rollers
    • B65G39/12—Arrangements of rollers mounted on framework
    • B65G39/18—Arrangements of rollers mounted on framework for guiding loads
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/012—Tempering or quenching glass products by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/04—Tempering or quenching glass products using gas

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020060019378A 2005-03-01 2006-02-28 열적 처리 장치 Expired - Fee Related KR101237092B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00055944 2005-03-01
JP2005055944A JP2006245110A (ja) 2005-03-01 2005-03-01 熱的処理装置

Publications (2)

Publication Number Publication Date
KR20060096903A KR20060096903A (ko) 2006-09-13
KR101237092B1 true KR101237092B1 (ko) 2013-02-25

Family

ID=37051248

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060019378A Expired - Fee Related KR101237092B1 (ko) 2005-03-01 2006-02-28 열적 처리 장치

Country Status (3)

Country Link
JP (1) JP2006245110A (https=)
KR (1) KR101237092B1 (https=)
TW (1) TWI295415B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100811695B1 (ko) * 2006-11-28 2008-03-11 엔티엠 주식회사 기판 건조장치
JP2008160011A (ja) * 2006-12-26 2008-07-10 Tokyo Electron Ltd 基板処理装置
JP2008172104A (ja) * 2007-01-12 2008-07-24 Tokyo Electron Ltd リフロー処理装置およびリフロー処理方法
JP4341978B2 (ja) * 2007-03-02 2009-10-14 東京エレクトロン株式会社 基板処理装置
JP5401015B2 (ja) * 2007-03-15 2014-01-29 光洋サーモシステム株式会社 連続式焼成炉
JP2008311250A (ja) * 2007-06-12 2008-12-25 Tokyo Electron Ltd リフローシステムおよびリフロー方法
KR101052758B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 평판 디스플레이 소자 제조 장치
JP4936567B2 (ja) * 2009-09-18 2012-05-23 東京エレクトロン株式会社 熱処理装置
WO2011148716A1 (ja) * 2010-05-25 2011-12-01 シャープ株式会社 ベーク装置
KR102410492B1 (ko) * 2015-07-23 2022-06-20 삼성디스플레이 주식회사 글라스 성형 장치
JP6814570B2 (ja) * 2016-08-18 2021-01-20 株式会社アルバック 搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237965A (ja) * 1996-02-29 1997-09-09 Furukawa Electric Co Ltd:The リフロー炉
KR20020046160A (ko) * 2000-12-08 2002-06-20 무네유키 가코우 기판반송장치 및 방법
JP2003332727A (ja) * 2002-05-15 2003-11-21 Sony Corp 熱遮蔽部分材及びリフロー装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237965A (ja) * 1996-02-29 1997-09-09 Furukawa Electric Co Ltd:The リフロー炉
KR20020046160A (ko) * 2000-12-08 2002-06-20 무네유키 가코우 기판반송장치 및 방법
JP2003332727A (ja) * 2002-05-15 2003-11-21 Sony Corp 熱遮蔽部分材及びリフロー装置

Also Published As

Publication number Publication date
KR20060096903A (ko) 2006-09-13
TWI295415B (en) 2008-04-01
TW200641553A (en) 2006-12-01
JP2006245110A (ja) 2006-09-14

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