KR101150312B1 - 본드 패드를 강화하기 위한 방법들 및 시스템 - Google Patents

본드 패드를 강화하기 위한 방법들 및 시스템 Download PDF

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KR101150312B1
KR101150312B1 KR1020040078075A KR20040078075A KR101150312B1 KR 101150312 B1 KR101150312 B1 KR 101150312B1 KR 1020040078075 A KR1020040078075 A KR 1020040078075A KR 20040078075 A KR20040078075 A KR 20040078075A KR 101150312 B1 KR101150312 B1 KR 101150312B1
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South Korea
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metal
layer
wire bonding
reinforcement layer
bonding pad
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KR20050032013A (ko
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마크아담배치만
데니얼패트릭체서
세일리쉬맨신머천트
존윌리엄오센바크
커트조지스타이너
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에이저 시스템즈 인크
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1020040078075A 2003-09-30 2004-09-30 본드 패드를 강화하기 위한 방법들 및 시스템 Expired - Lifetime KR101150312B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/675,260 US6960836B2 (en) 2003-09-30 2003-09-30 Reinforced bond pad
US10/675,260 2003-09-30

Publications (2)

Publication Number Publication Date
KR20050032013A KR20050032013A (ko) 2005-04-06
KR101150312B1 true KR101150312B1 (ko) 2012-06-08

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KR1020040078075A Expired - Lifetime KR101150312B1 (ko) 2003-09-30 2004-09-30 본드 패드를 강화하기 위한 방법들 및 시스템

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Country Link
US (1) US6960836B2 (enExample)
JP (2) JP4959929B2 (enExample)
KR (1) KR101150312B1 (enExample)
GB (1) GB2406707B (enExample)
TW (1) TWI364833B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7372153B2 (en) * 2003-10-07 2008-05-13 Taiwan Semiconductor Manufacturing Co., Ltd Integrated circuit package bond pad having plurality of conductive members
JP4517843B2 (ja) * 2004-12-10 2010-08-04 エルピーダメモリ株式会社 半導体装置
US7404513B2 (en) * 2004-12-30 2008-07-29 Texas Instruments Incorporated Wire bonds having pressure-absorbing balls
US20080014732A1 (en) * 2006-07-07 2008-01-17 Yanping Li Application of PVD W/WN bilayer barrier to aluminum bondpad in wire bonding
DE102006043133B4 (de) * 2006-09-14 2009-09-24 Infineon Technologies Ag Anschlusspad zu einem Kontaktieren eines Bauelements und Verfahren zu dessen Herstellung
US7652378B2 (en) * 2006-10-17 2010-01-26 Taiwan Semiconductor Manufacturing Company, Ltd. Aluminum-based interconnection in bond pad layer
DE102006052202B3 (de) * 2006-11-06 2008-02-21 Infineon Technologies Ag Halbleiterbauelement sowie Verfahren zur Herstellung eines Halbleiterbauelements
JP4694519B2 (ja) * 2007-02-28 2011-06-08 富士通株式会社 マイクロ構造体およびマイクロ構造体製造方法
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