JP2012028795A - ボンド・パッドを補強する方法およびシステム - Google Patents
ボンド・パッドを補強する方法およびシステム Download PDFInfo
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Abstract
【解決手段】 集積回路の接触パッドを補強する補強システムおよび方法を本願明細書において開示する。特に、この上部接触パッド層と下部金属層との間に挿置された補強構造を含むシステムおよび方法を例示する。
【選択図】 図1
Description
主張されるように、上記の一般的な説明および以下の詳細な説明は、例示的かつ説明目的のものであり、本発明を制限するものとして解釈されるべきではないことを理解されたい。本発明のこれらおよびその他の態様、特徴ならびに利点は、好適な実施形態および添付の特許請求の範囲の以下の説明を検証すれば、より明白となろう。
Claims (9)
- 半導体集積回路であって、
金属で形成されたワイヤボンディングパッドと、
前記ワイヤボンディングパッド下であってそれと接触して形成された金属補強層とを含み、前記金属補強層が、当該金属補強層の幅に渡って延伸する一連の平行ストリップを形成するようパターン形成され、そして、延伸領域に渡ってボンディング力を分散させて前記ワイヤボンディングパッドを強固させるように構成されており、前記金属補強層は金属ストリップを含み、前記金属ストリップは下方金属層上に位置し、前記金属ストリップはその間に空洞を有し、そして前記空洞は金属で充填されており、さらに、
前記金属補強層の下であってそれと接触するように配置された少なくとも一つの金属層と、
前記金属層の少なくとも二つの間に位置し、前記半導体集積回路内に延伸する少なくとも一つの脆弱インターレベル誘電体層とを備える、半導体集積回路。 - 前記金属補強層が、窒化チタン、窒化タングステン、窒化ニッケル、及びそれらの混合及び合金からなる群から選択された耐熱性金属窒化物である、請求項1に記載の半導体集積回路。
- 前記一連の平行ストリップは、相互接続する金属ストリップの格子である、請求項1に記載の半導体集積回路。
- 前記ワイヤボンディングパッドの前記金属が、アルミニウム、銅、ならびにアルミニウムおよび銅の合金からなる群から選択される、請求項1に記載の半導体集積回路。
- 前記補強層の厚さが100〜600ナノメートルである、請求項1に記載の半導体集積回路。
- 半導体集積回路内のワイヤボンディングパッドを補強する方法であって、
前記ワイヤボンディングパッドの下に少なくとも1つの金属層を提供する工程と、
前記ワイヤボンディングパッドと前記少なくとも1つの金属層との間に少なくとも1つの金属補強層を提供する工程とを含み、前記金属補強層が前記ワイヤボンディングパッド下であってそれと接触して形成され、前記金属補強層が、当該金属補強層の幅に渡って延伸する一連の平行ストリップを形成するようパターン形成され、そして、延伸領域に渡ってボンディング力を分散させて前記ワイヤボンディングパッドを強固させ、前記金属補強層は金属ストリップを含み、前記金属ストリップは下方金属層上に位置し、前記金属ストリップはその間に金属が充填した空洞を有し、前記ワイヤボンディングパッド、前記金属補強層、および前記少なくとも1つの金属層が導電接触し、さらに、前記少なくとも1つの金属層の各々の間には、前記半導体集積回路内に延伸する少なくとも一つの脆弱インターレベル誘電体層が位置する、方法。 - 前記ワイヤボンディングパッドが、アルミニウム、銅又はそれらの混合又は合金であり、前記少なくとも一つの金属層が、アルミニウム、銅又はそれらの混合又は合金であり、前記金属補強層はパターン形成された耐熱性金属の構造である、請求項6に記載の方法。
- 前記金属補強層の厚さが約100〜600ナノメートルである、請求項6に記載の方法。
- 前記一連の平行ストリップは、相互接続する金属ストリップの格子である、請求項6に記載の方法。
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US10/675,260 US6960836B2 (en) | 2003-09-30 | 2003-09-30 | Reinforced bond pad |
US10/675260 | 2003-09-30 |
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JP5677115B2 (ja) * | 2011-02-07 | 2015-02-25 | セイコーインスツル株式会社 | 半導体装置 |
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GB0420953D0 (en) | 2004-10-20 |
KR101150312B1 (ko) | 2012-06-08 |
US6960836B2 (en) | 2005-11-01 |
JP2005109491A (ja) | 2005-04-21 |
TWI364833B (en) | 2012-05-21 |
TW200515577A (en) | 2005-05-01 |
GB2406707A (en) | 2005-04-06 |
GB2406707B (en) | 2006-10-11 |
US20050067709A1 (en) | 2005-03-31 |
JP5562308B2 (ja) | 2014-07-30 |
KR20050032013A (ko) | 2005-04-06 |
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