KR101107810B1 - 레이저 가공 장치 및 방법 - Google Patents

레이저 가공 장치 및 방법 Download PDF

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Publication number
KR101107810B1
KR101107810B1 KR1020040092435A KR20040092435A KR101107810B1 KR 101107810 B1 KR101107810 B1 KR 101107810B1 KR 1020040092435 A KR1020040092435 A KR 1020040092435A KR 20040092435 A KR20040092435 A KR 20040092435A KR 101107810 B1 KR101107810 B1 KR 101107810B1
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KR
South Korea
Prior art keywords
liquid
feature
laser
substrate
liquid supply
Prior art date
Application number
KR1020040092435A
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English (en)
Korean (ko)
Other versions
KR20050046614A (ko
Inventor
오티스찰스
카발리메흐르간
폴라드제프리알
후쓰마크씨
Original Assignee
휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. filed Critical 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피.
Publication of KR20050046614A publication Critical patent/KR20050046614A/ko
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Publication of KR101107810B1 publication Critical patent/KR101107810B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/447—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using arrays of radiation sources
    • B41J2/455—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using arrays of radiation sources using laser arrays, the laser array being smaller than the medium to be recorded
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
    • B41J2/471—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
    • B41J2/473—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror using multiple light beams, wavelengths or colours

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Laser Beam Processing (AREA)
KR1020040092435A 2003-11-14 2004-11-12 레이저 가공 장치 및 방법 KR101107810B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/713,298 2003-11-14
US10/713,298 US7893386B2 (en) 2003-11-14 2003-11-14 Laser micromachining and methods of same

Publications (2)

Publication Number Publication Date
KR20050046614A KR20050046614A (ko) 2005-05-18
KR101107810B1 true KR101107810B1 (ko) 2012-01-25

Family

ID=34435680

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040092435A KR101107810B1 (ko) 2003-11-14 2004-11-12 레이저 가공 장치 및 방법

Country Status (12)

Country Link
US (1) US7893386B2 (de)
EP (1) EP1533069A1 (de)
JP (1) JP4319610B2 (de)
KR (1) KR101107810B1 (de)
CN (1) CN1616178B (de)
AU (1) AU2004202047A1 (de)
BR (1) BRPI0402317A (de)
CA (1) CA2487209A1 (de)
MX (1) MXPA04006580A (de)
PL (1) PL205462B1 (de)
RU (1) RU2365477C2 (de)
SG (1) SG112011A1 (de)

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US7163640B2 (en) 2004-05-21 2007-01-16 Hewlett-Packard Development Company, L.P. Methods and systems for laser processing
US7923658B2 (en) 2004-09-13 2011-04-12 Hewlett-Packard Development Company, L.P. Laser micromachining methods and systems
JP2010240869A (ja) 2009-04-01 2010-10-28 Canon Inc 液体吐出ヘッド用基板の製造方法
US9044781B2 (en) * 2012-12-04 2015-06-02 Fei Company Microfluidics delivery systems
JP6378885B2 (ja) * 2014-01-27 2018-08-22 株式会社アマダホールディングス レーザ加工装置及びレーザ加工方法
US20190233321A1 (en) 2018-01-26 2019-08-01 Corning Incorporated Liquid-assisted laser micromachining of transparent dielectrics
RU2692153C1 (ru) * 2018-06-09 2019-06-21 Акционерное общество "Высокотехнологический научно-исследовательский институт неорганических материалов имени академика А.А. Бочвара" Способ лазерной обработки материалов в жидкой среде
WO2020222297A1 (en) * 2019-04-28 2020-11-05 Okinawa Institute Of Science And Technology School Corporation Method of fabricating a through glass via on a suspended nanocrystalline diamond
WO2022144808A1 (ru) * 2020-12-31 2022-07-07 Дмитрий ЧУХЛАНЦЕВ Установка для лазерного ударного упрочнения деталей

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4138468A1 (de) 1991-11-22 1993-06-03 Stiftung Fuer Lasertechnologie Einrichtung und verfahren zum abtragen von material von einem substrat
JPH09168877A (ja) * 1995-12-21 1997-06-30 Mitsubishi Electric Corp 配線基板の加工方法および加工装置
JP2003062683A (ja) 2001-06-14 2003-03-05 Sumitomo Electric Ind Ltd 硬質材料の加工方法および同方法により加工された硬質材料部品
JP2003025086A (ja) 2001-07-13 2003-01-28 Nippon Denro Kk Ｃｏ２レーザー切断機に取り付ける深彫マーキング用ヘッド

Also Published As

Publication number Publication date
SG112011A1 (en) 2005-06-29
RU2365477C2 (ru) 2009-08-27
MXPA04006580A (es) 2005-08-19
CA2487209A1 (en) 2005-05-14
CN1616178B (zh) 2010-09-29
US7893386B2 (en) 2011-02-22
RU2004133168A (ru) 2006-05-10
PL371143A1 (en) 2005-05-16
US20050103758A1 (en) 2005-05-19
PL205462B1 (pl) 2010-04-30
JP2005144557A (ja) 2005-06-09
AU2004202047A1 (en) 2005-06-02
JP4319610B2 (ja) 2009-08-26
EP1533069A1 (de) 2005-05-25
CN1616178A (zh) 2005-05-18
KR20050046614A (ko) 2005-05-18
BRPI0402317A (pt) 2006-01-24

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