KR101017234B1 - 감광성 수지 조성물 - Google Patents
감광성 수지 조성물 Download PDFInfo
- Publication number
- KR101017234B1 KR101017234B1 KR1020057017891A KR20057017891A KR101017234B1 KR 101017234 B1 KR101017234 B1 KR 101017234B1 KR 1020057017891 A KR1020057017891 A KR 1020057017891A KR 20057017891 A KR20057017891 A KR 20057017891A KR 101017234 B1 KR101017234 B1 KR 101017234B1
- Authority
- KR
- South Korea
- Prior art keywords
- azobis
- resin composition
- photosensitive resin
- acetoxy
- polymerization initiator
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003082067A JP3842750B2 (ja) | 2003-03-25 | 2003-03-25 | 感光性樹脂組成物 |
JPJP-P-2003-00082067 | 2003-03-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050114694A KR20050114694A (ko) | 2005-12-06 |
KR101017234B1 true KR101017234B1 (ko) | 2011-02-25 |
Family
ID=33094909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057017891A KR101017234B1 (ko) | 2003-03-25 | 2004-03-18 | 감광성 수지 조성물 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP3842750B2 (ja) |
KR (1) | KR101017234B1 (ja) |
CN (1) | CN100570482C (ja) |
TW (1) | TWI326802B (ja) |
WO (1) | WO2004086144A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200813635A (en) * | 2006-05-16 | 2008-03-16 | Nissan Chemical Ind Ltd | Positive type photosensitive resin composition and porous film obtained therefrom |
JP5560155B2 (ja) | 2010-09-30 | 2014-07-23 | 富士フイルム株式会社 | 組成物、並びに、該組成物を用いた膜、電荷輸送層、有機電界発光素子、及び電荷輸送層の形成方法 |
JP2013130816A (ja) * | 2011-12-22 | 2013-07-04 | Nippon Zeon Co Ltd | 永久膜用樹脂組成物及び電子部品 |
KR102222658B1 (ko) * | 2013-07-19 | 2021-03-05 | 디아이씨 가부시끼가이샤 | 페놀성 수산기 함유 화합물, 감광성 조성물, 레지스트용 조성물, 레지스트 도막, 경화성 조성물, 레지스트 하층막용 조성물, 및 레지스트 하층막 |
WO2015174199A1 (ja) * | 2014-05-15 | 2015-11-19 | Dic株式会社 | 変性フェノール性水酸基含有化合物、変性フェノール性水酸基含有化合物の製造方法、感光性組成物、レジスト材料及びレジスト塗膜 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002072473A (ja) * | 2000-08-25 | 2002-03-12 | Clariant (Japan) Kk | 感光性樹脂組成物 |
JP2002341521A (ja) * | 2001-05-17 | 2002-11-27 | Sumitomo Chem Co Ltd | 感放射線性樹脂組成物 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2927013B2 (ja) * | 1990-02-20 | 1999-07-28 | ジェイエスアール株式会社 | 感放射線性樹脂組成物 |
DE4120312C1 (ja) * | 1991-06-20 | 1993-02-18 | Roehm Gmbh, 6100 Darmstadt, De | |
JPH06102662A (ja) * | 1991-10-14 | 1994-04-15 | Sannopuko Kk | 感光性樹脂組成物 |
JPH0834898A (ja) * | 1994-07-22 | 1996-02-06 | Tokyo Ohka Kogyo Co Ltd | 水溶性感光性樹脂組成物 |
JP4091689B2 (ja) * | 1998-08-05 | 2008-05-28 | 三菱レイヨン株式会社 | メチルメタクリレート系重合体の製造方法およびプラスチック光ファイバの製造方法 |
JP2000112128A (ja) * | 1998-10-06 | 2000-04-21 | Fuji Photo Film Co Ltd | 感光性平版印刷版 |
JP4213366B2 (ja) * | 2001-06-12 | 2009-01-21 | Azエレクトロニックマテリアルズ株式会社 | 厚膜レジストパターンの形成方法 |
JP3894477B2 (ja) * | 2002-02-27 | 2007-03-22 | Azエレクトロニックマテリアルズ株式会社 | 感光性樹脂組成物 |
JP7069611B2 (ja) * | 2017-09-13 | 2022-05-18 | 株式会社豊田中央研究所 | 電気化学セル及び光合成装置 |
-
2003
- 2003-03-25 JP JP2003082067A patent/JP3842750B2/ja not_active Expired - Fee Related
-
2004
- 2004-03-18 WO PCT/JP2004/003621 patent/WO2004086144A1/ja active Application Filing
- 2004-03-18 CN CNB2004800076202A patent/CN100570482C/zh not_active Expired - Fee Related
- 2004-03-18 KR KR1020057017891A patent/KR101017234B1/ko not_active IP Right Cessation
- 2004-03-24 TW TW93107872A patent/TWI326802B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002072473A (ja) * | 2000-08-25 | 2002-03-12 | Clariant (Japan) Kk | 感光性樹脂組成物 |
JP2002341521A (ja) * | 2001-05-17 | 2002-11-27 | Sumitomo Chem Co Ltd | 感放射線性樹脂組成物 |
Also Published As
Publication number | Publication date |
---|---|
TW200424776A (en) | 2004-11-16 |
CN1774671A (zh) | 2006-05-17 |
WO2004086144A1 (ja) | 2004-10-07 |
JP2004287326A (ja) | 2004-10-14 |
KR20050114694A (ko) | 2005-12-06 |
TWI326802B (en) | 2010-07-01 |
JP3842750B2 (ja) | 2006-11-08 |
CN100570482C (zh) | 2009-12-16 |
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