KR100914386B1 - 다관절 로봇 - Google Patents

다관절 로봇 Download PDF

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Publication number
KR100914386B1
KR100914386B1 KR1020087010138A KR20087010138A KR100914386B1 KR 100914386 B1 KR100914386 B1 KR 100914386B1 KR 1020087010138 A KR1020087010138 A KR 1020087010138A KR 20087010138 A KR20087010138 A KR 20087010138A KR 100914386 B1 KR100914386 B1 KR 100914386B1
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KR
South Korea
Prior art keywords
forearm
arm
upper arm
column
support member
Prior art date
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Application number
KR1020087010138A
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English (en)
Korean (ko)
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KR20080082606A (ko
Inventor
사토시 스에요시
켄타로 타나카
토모히로 마츠오
Original Assignee
가부시키가이샤 야스카와덴키
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Application filed by 가부시키가이샤 야스카와덴키 filed Critical 가부시키가이샤 야스카와덴키
Publication of KR20080082606A publication Critical patent/KR20080082606A/ko
Application granted granted Critical
Publication of KR100914386B1 publication Critical patent/KR100914386B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • H10P72/3402—
    • H10P72/7602—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020087010138A 2006-07-11 2007-06-15 다관절 로봇 Active KR100914386B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00190822 2006-07-11
JP2006190822 2006-07-11

Related Child Applications (2)

Application Number Title Priority Date Filing Date
KR1020087018493A Division KR101120824B1 (ko) 2006-07-11 2007-06-15 다관절 로봇
KR1020087018494A Division KR100914387B1 (ko) 2006-07-11 2007-06-15 다관절 로봇

Publications (2)

Publication Number Publication Date
KR20080082606A KR20080082606A (ko) 2008-09-11
KR100914386B1 true KR100914386B1 (ko) 2009-08-28

Family

ID=38923081

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020087010138A Active KR100914386B1 (ko) 2006-07-11 2007-06-15 다관절 로봇
KR1020087018494A Active KR100914387B1 (ko) 2006-07-11 2007-06-15 다관절 로봇
KR1020087018493A Active KR101120824B1 (ko) 2006-07-11 2007-06-15 다관절 로봇

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020087018494A Active KR100914387B1 (ko) 2006-07-11 2007-06-15 다관절 로봇
KR1020087018493A Active KR101120824B1 (ko) 2006-07-11 2007-06-15 다관절 로봇

Country Status (5)

Country Link
JP (3) JP4168410B2 (enExample)
KR (3) KR100914386B1 (enExample)
CN (3) CN101844359B (enExample)
TW (3) TW200930524A (enExample)
WO (1) WO2008007516A1 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4655228B2 (ja) * 2006-07-11 2011-03-23 株式会社安川電機 多関節ロボットおよび多関節ロボットの移送方法
JP2010064219A (ja) * 2008-09-12 2010-03-25 Yaskawa Electric Corp 多関節ロボット
JP4591624B1 (ja) * 2010-03-12 2010-12-01 株式会社安川電機 産業用ロボット
KR200466172Y1 (ko) * 2010-04-28 2013-04-09 히라따기꼬오 가부시키가이샤 기판반송로봇
US8985537B2 (en) * 2010-09-13 2015-03-24 Toyota Jidosha Kabushiki Kaisha Support arm
KR101211911B1 (ko) * 2010-11-02 2012-12-13 주식회사 로보스타 표시장치용 패널의 반전로봇
KR101682465B1 (ko) * 2010-11-17 2016-12-05 삼성전자 주식회사 기판이송로봇
JP5847393B2 (ja) * 2010-11-30 2016-01-20 川崎重工業株式会社 搬送ロボット
CN102145488B (zh) * 2011-02-14 2012-12-26 山东爱通工业机器人科技有限公司 一种柔性四自由度机械手
JP5565345B2 (ja) * 2011-03-07 2014-08-06 株式会社安川電機 搬送ロボット
CN102126209B (zh) * 2011-03-16 2012-08-15 哈尔滨工业大学 一种用于硅片传输机器人的w轴差轴传动机构
CN102126208B (zh) * 2011-03-16 2012-09-19 哈尔滨工业大学 一种并联型r轴扩展机械臂
CN102152297B (zh) * 2011-03-16 2013-04-10 哈尔滨工业大学 一种串联型r轴扩展机械臂
CN102161199B (zh) * 2011-03-16 2012-09-19 哈尔滨工业大学 一种用于硅片传输机器人的w轴同轴传动机构
JP5387622B2 (ja) * 2011-06-17 2014-01-15 株式会社安川電機 搬送ロボット
JP5429256B2 (ja) * 2011-10-03 2014-02-26 株式会社安川電機 ロボットシステム
JP5768827B2 (ja) * 2013-03-14 2015-08-26 株式会社安川電機 ロボットシステムおよびワークの搬送方法
KR101458697B1 (ko) * 2013-04-19 2014-11-05 현대중공업 주식회사 기판 이송장치 및 이를 이용한 기판 이송방법
JP6295037B2 (ja) * 2013-08-08 2018-03-14 日本電産サンキョー株式会社 産業用ロボット
KR101506188B1 (ko) * 2013-08-30 2015-03-26 주식회사 로보스타 멀티플 암을 구비한 반송 로봇
JP6352016B2 (ja) * 2014-03-27 2018-07-04 日本電産サンキョー株式会社 産業用ロボット
CN106041876B (zh) * 2016-06-28 2019-01-29 江苏捷帝机器人股份有限公司 一种全方位移动的智能化机械臂及其工作方法
CN105922242B (zh) * 2016-06-28 2018-06-29 江苏捷帝机器人股份有限公司 一种高效的智能化机械臂及其工作方法
CN105922233B (zh) * 2016-06-28 2018-08-07 江苏捷帝机器人股份有限公司 一种高精准智能化机械臂及其工作方法
CN106078724B (zh) * 2016-06-29 2020-01-24 微创（上海）医疗机器人有限公司 机械臂及其手术机器人
CN106175934B (zh) * 2016-06-29 2019-04-30 微创（上海）医疗机器人有限公司 手术机器人及其机械臂
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
KR102059445B1 (ko) 2017-11-28 2019-12-27 주식회사 엠티에스이 이동식 워크 테이블
CN108608460A (zh) * 2018-04-23 2018-10-02 深圳市华星光电半导体显示技术有限公司 机械臂结构及机器人
CN110549354A (zh) * 2018-05-31 2019-12-10 北新集团建材股份有限公司 下抄式机械抓取夹具
CN110454554A (zh) * 2019-08-26 2019-11-15 苏州领裕电子科技有限公司 一种单轴折叠手臂直线模组
JP7599302B2 (ja) * 2020-09-30 2024-12-13 ニデックインスツルメンツ株式会社 産業用ロボット及びその制御方法
JP7578486B2 (ja) * 2020-12-28 2024-11-06 ニデックインスツルメンツ株式会社 産業用ロボット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
KR20030041805A (ko) * 2001-11-20 2003-05-27 가부시키가이샤 아이테크 기판용 카세트의 슬롯검출장치
KR20080102223A (ko) * 2006-07-11 2008-11-24 가부시키가이샤 야스카와덴키 다관절 로봇 및 배선 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58109284A (ja) * 1981-12-22 1983-06-29 株式会社小松製作所 ロボツト装置
GB2287045B (en) * 1994-03-04 1997-05-14 Joseph Michael Programmable materials
JP2599571B2 (ja) * 1994-05-11 1997-04-09 ダイトロンテクノロジー株式会社 基板搬送ロボット
JPH11347982A (ja) * 1998-06-02 1999-12-21 Mecs Corp 搬送ロボットの摺動部構造
CN2341778Y (zh) * 1998-12-02 1999-10-06 和椿事业股份有限公司 机械手臂
CN2637135Y (zh) * 2003-07-02 2004-09-01 陕西科技大学 凸轮式提升转位机械手
CN100342519C (zh) * 2003-07-16 2007-10-10 东京毅力科创株式会社 搬送装置及驱动机构
JP4063781B2 (ja) * 2004-03-04 2008-03-19 株式会社ラインワークス 搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
KR20030041805A (ko) * 2001-11-20 2003-05-27 가부시키가이샤 아이테크 기판용 카세트의 슬롯검출장치
KR20080102223A (ko) * 2006-07-11 2008-11-24 가부시키가이샤 야스카와덴키 다관절 로봇 및 배선 방법

Also Published As

Publication number Publication date
JP4168410B2 (ja) 2008-10-22
KR20080081196A (ko) 2008-09-08
TW200932456A (en) 2009-08-01
JP2008155361A (ja) 2008-07-10
TW200930524A (en) 2009-07-16
TWI315243B (enExample) 2009-10-01
WO2008007516A1 (en) 2008-01-17
CN101863015B (zh) 2012-02-15
JPWO2008007516A1 (ja) 2009-12-10
KR101120824B1 (ko) 2012-03-23
CN101360589A (zh) 2009-02-04
TWI357375B (enExample) 2012-02-01
JP5077406B2 (ja) 2012-11-21
JP4596375B2 (ja) 2010-12-08
KR20080081197A (ko) 2008-09-08
TW200817151A (en) 2008-04-16
CN101844359A (zh) 2010-09-29
KR20080082606A (ko) 2008-09-11
CN101844359B (zh) 2013-06-05
JP2010274413A (ja) 2010-12-09
CN101360589B (zh) 2011-02-09
KR100914387B1 (ko) 2009-08-28
CN101863015A (zh) 2010-10-20
TWI315244B (enExample) 2009-10-01

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