200817151 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於將液晶用的玻璃基板或半導體晶圓等之 薄片狀的工件搬進搬出儲存櫃之多關節機械手。 【先前技術】 習知的，提案的多關ir機械手係將肩關節部的旋轉中 心及台座的旋轉中心予以偏位來令台座旋轉時，縮小多關 節機械手的迴旋半徑（例如，參考日本專利文獻1 )。 習知的多關節機械手1係如第5圖所示，利用關節部 3、4、5來可迴轉地連結，傳達迴轉驅動源的迴轉力，致 使進行所要的動作之臂2具備有2組所組成，被設置在兩 組臂2的基端之關節部3的迴轉中心軸，向上下（或是軸 方向）配置所構成。 多關節機械手1係具備有兩組臂2，其中一方的臂驅 動型裝置2爲供應用，另一方則爲取出用，能夠同時進行 工件9的供應動作及其他工件9的取出動作。 另外，習知的多關節機械手1係利用臂2來保持工件 9之手部8能夠在圖中箭頭X所示之工件9的取出/供應 方向上進行直線移動所構成。 另外，習知的多關節機械手1係具備有令裝設著臂2 的支撐構件10向上下移動之移動構件11 (以下’稱爲上 下移動機構1 1 )，能夠調整臂2的上下位置。另外’上下 移動機構1 1的台座1 3係可轉動地設置，形成爲迴旋多關 -5 - 200817151 (2) 節機械手1來改變方向。 進而’本實施形態的多關節機械手1，在圖中 所示的方向上，即是在手部8的移動方向與支撐 的上下移動方向的各別所垂直的方向上，在基台1 移動地裝設台座13，而可調整上下移動機構11的亡 另外’習知的多關節機械手1所裝備的兩組臂 如具有複數個關節部，即是多關節機械手i由水平 型機械手所構成。本實施形態中的臂2則具備有第 (以下，稱爲上腕6)、及與上腕6相連結之第2 以下，稱爲前腕7 )、及與前腕7相連結並保持工 手部8。 上腕6的基端係藉由驅動軸來與支撐構件1 〇 ，構成可轉動的關節部3 (以下，稱爲肩關節部3 肩關節部3成爲臂2的基端之關節部3。另外，上 前端與前腕7的基端藉由驅動軸來予以相連結，構 、動的關節部4 (以下，稱爲肘關節部4 )。另外， 的前端與手部8藉由驅動軸來予以相連結，構成可 關節部5 (以下，稱爲手關節部5)。肩關節部3 中心輙爲相同軸上，以上下方向相對面的方式配置 臂2係利用迴轉驅動源（未圖示）來令肩關節 肘關節部4及手關節部5轉動，使手部8在工件取 應方向上移動。此時，臂2則該機構上，以手部8 個方向，在上腕6及前腕7完全伸展的伸展位置、 6及前腕7成爲折疊的狀態之回縮位置之間直線移 箭頭Y _件10 4上可 4置。 2，例 多關節 1臂6 臂7 ( 件9之 相連結 )。該 腕6的 成可轉 前腕7 轉動的 的迴轉 〇 部3及 出/供 朝向一 與上腕 動的方 -6- 200817151 (3) 式，進行伸縮動作。 此處，習知的多關節機械手1係以在第6圖所示之臂 2的回縮位置上，利用手部8來保持之工件9的中心，與 台座1 3的迴轉中心一致的方式所設計。進而，肩關節部4 的迴轉中心及台座1 3的迴轉中心，朝向對於手部8的移 動方向成垂直的方向偏位，令台座13迴轉時，肘關節部4 或手部8不會突出多關節機械手1的周圍所必要之最小區 域圓1 5 ’可以縮小多關節機械手1的迴旋半徑。 專利文獻 1:日本專利特開 200 1 — 2742 1 8 (第4〜5 頁，第1、2圖） 【發明內容】 <發明所欲解決之課題> 將液晶用的玻璃基板或半導體晶圓等之薄片狀的工件 搬進搬出儲存櫃之多關節機械手，已進展爲大型化，要求 處理基板的片數要增加並且要在短時間內處理，又爲了要 提高基板的良品率，還要求盡力抑制來自機械手的粉塵。 因而，機械手儘管配置基板的儲存櫃變成直達頂棚程度的 高度導致設備本身大型化，但實現高速、高精度、低粉塵 乃是最大的課題。一方面，大型化的設備，爲了要保持周 圍的乾淨度，必須要投資大金額的設備，因而，最好是令 儲存櫃配置更多的基板並進行處理。另外，最好是縮小多 關節機械手的機體，縮小迴旋半徑以使不會干涉到工廠中 所配置的裝置。 200817151 (4) 另外，液晶基板或半導體晶圓的生產片數逐年增加中 ，爲了要提升生產速度，機械手則被要求搬送的流量。然 而，機械手包含有機械零件，因而必須要維修，維修時間 也成爲關係到流量的因素，最好是很容易就可以進行維修 〇 然而，習知的多關節機械手係以臂基端突出移動面而 與搬送基板相對向的方式來配置的構造，故會發生無法防 範來自上下移動機構的粉塵導致微細的粉塵堆積在基板上 的問題。 另外，臂藉利用上下移動機構來往下方移動的情況， 臂的支撐構件會與台座起衝突，故會發生無法移動到上下 移動機構的最下面爲止，可動範圍變小的問題，且會發生 液晶基板或半導體晶圓搬進搬出之儲存櫃.的高度變高的問 題。進一部來說明，儲存櫃的高度會受限於工廠建築物的 高度，故會發生面板或基板的配置片數，因上下移動機構 的可動範圍變小而減少，使生產速度下降的問題。 另外，在臂基端設有電動機或皮帶輪，故會成爲上下 方向很厚的構造。因而，會發生儲存櫃內液晶基板或半導 體晶圓的配置間隔不得不加大的問題。也就是會發生儲存 櫃內所可以配置之面板或基板的片數變少致使生產速度下 降的問題。爲了要避免這個問題，雖想要在利用上下移動 機構進行搬進搬出時改變臂的高度，但此情況，由於令臂 上下移動的順序反覆進行，故會發生耗費時間致使作業時 間變長的問題。 -8- 200817151 (5) 另外，習知的多關節機械手係向上下同軸地配置臂基 端的構造。因而，配置在臂基端之屬於機構組件之電動機 或皮帶輪要進行更換的話，不得不採用拆下其中一方的臂 後再進行更換等的方法，故會發生維修時間很長致使生產 性降低的問題。 另外，習知的多關節機械手係1個柱體上利用移動機 構來移動支撐構件，故儲存櫃高度直達頂棚部程度，則當 然必須加長柱體長度，剛性會降低，並且配置在內部之移 動機構的導引機構也必須設成符合柱體的長度。然而，加 長導引機構的情況，導引精度會因增長而降低，故利用移 動機構來移動之支撐構件的移動精度降低，且載置在臂先 端的手部8之液晶基板或半導體晶圓的定位精度降低，會 發生引起基板或晶圓與儲存櫃起衝突導致良品率降低的問 題。 發明係鑑於上述的問題點而提案，其目的是提供將防 , 止來自上下移動軸的粉塵對基板的污染，並且讓生產性提 高之液晶用的玻璃基板或半導體晶圓等之薄片狀的工件搬 進搬出儲存櫃之多關節機械手。 '<用以解決課題之手段> 爲了要解決上述問題，本發明的構成如以下所述。 本發明的申請專利範圍第1項所述之多關節機械手， 是一種由載置搬送物之手部、及與前述手部相連結，具備 至少2個以上的迴轉關節，以朝向丨個方向移動前述手部 -9- 200817151 (6) 的方式進行伸縮，且以在軸方向上相對向的方式配置之多 關節臂、及將前述多關節臂與向上下移動的被安裝在柱體 之移動機構予以相連結之支撐構件、及被裝備在前述移動 機構之具有迴旋功能之台座所組成之多關節機械手，前述 移動機構係朝向與前述手部的移動方向相同的方向配置在 柱體，被配置在前述移動機構之支撐構件則是朝向與前述 手部的移動方向成垂直的方向突出前述柱體，與前述多關 f . 節臂相連結。 本發明的申請專利範圍第2項所述之多關節機械手， 係前述支撐構件，利用前述移動機構來移動到前述柱體的 最下側位置時，會形成爲以不會干涉到前述台座的方式來 朝向前述手部的移動方向偏位的形狀。 本發明的申請專利範圍第3項所述之多關節機械手， 係向上下配置之前述支撐構件的前述迴轉關節，配置在相 對偏位的位置。 | 本發明的申請專利範圍第4項所述之多關節機械手， 係向上下配置之前述支撐構件的前述迴轉關節的任何一方 ，配置在相對朝向前述手部的移動方向偏位的位置。 本發明的申請專利範圍第5項所述之多關節機械手， 係被配置在向上下配置之前述支撐構件的前述迴轉關節的 下側之前述迴轉關節，配置在對於上側的前述迴轉關節會 朝向前述手部的移動方向偏位的位置。 本發明的申請專利範圍第6項所述之多關節機械手， 係前述移動機構具有遮蔽功能。 - 10- 200817151 (7) 本發明的申請專利範圍第7項所述之多關節機械手， 是一種由載置搬送物之手部、及與前述手部相連結’具備 至少2個以上的迴轉關節，以朝向1個方向移動前述手部 的方式進行伸縮，且以在軸方向上相對向的方式配置之多 關節臂、及將前述多關節臂與向上下移動的被安裝在柱體 之移動機構予以相連結之支撐構件、及被裝備在前述移動 機構之具有迴旋功能之台座所組成之多關節機械手，形成 爲以被配置在前述支撐構件之前述迴轉關節的迴轉中心、 及手部的迴轉中心.、及台座的迴轉中心均一致於手部的移 動方向的軸線上的方式來進行偏位。 本發明的申請專利範圍第8項所述之多關節機械手， 係前述迴轉關節的迴轉中心、與手部的迴轉中心、與台座 的迴轉中心的位置關係，形成爲進行移動來引進前述手部 時，在手部的移動方向相關的軸線上，從前方起依照前述 迴轉關節的迴轉中心、台座的迴轉中心、手部的迴轉中心 的順序來配置。 本發明的申請專利範圍第9項所述之多關節機械手， 係是一種由載置搬送物之手部、及與前述手部相連結，具 備至少2個以上的迴轉關節，以朝向1個方向移動前述手 部的方式進行伸縮，且以在軸方向上相對向的方式配置之 多關節臂、及將前述多關節臂與向上下移動的被安裝在柱 體之移動機構予以相連結之支撐構件、及被裝備在前述移 動機構之具有迴旋功能之台座所組成之多關節機械手，前 述柱體爲複數個柱塊相連結的構造。 -11 - 200817151 (8) 本發明的申請專利範圍第10項所述之多關節機械手 ’係在前述柱體的柱塊，具備有調整前述移動機構之導引 機構的配置之開口部。 本發明的申請專利範圍第1 1項所述之多關節機械手 ’係前述柱體的柱塊之連結體形成有嵌合構造。 [發明效果] 依據本發明的申請專利範圍第1和6項所述之多關節 機械手，移動機構爲朝向與前述手部的移動方向相伺的方 向配置在柱體，被配置在移動機構之支撐構件則是朝向與 前述手部的移動方向成垂直的方向突出，與前述多關節臂 相連結的構造，因而被配置成滑動部不會與液晶基板或半 導體晶圓相對面，又來自滑動部的粉塵不會堆積在液晶基 板或半導體晶圓上，因而減低液晶基板或半導體晶圓的污 染，並且可以使基板或晶圓之生產上的良品率提高。 依據本發明的申請專利範圍第2項所述之多關節機械 手，支撐構件，利用前述移動機構來移動到前述柱體的最 下側位置時，會形成爲以不會干涉到前述台座的方式來朝 向前述手部的移動方向偏位的形狀，以使支撐購件不會與 台座起衝突，可以移動到上下移動機構的最下面爲止，又 可以加大可動範圍。因而，形成爲即使液晶基板或半導體 晶圓搬進搬出之儲存櫃的高度沒有增高，在儲存櫃的下部 仍可以配置液晶基板或半導體晶圓，由於可以加大上下移 動機構的可動範圍，因而基板或晶圓增多配置片數，這樣 -12- 200817151 Ο) 就可以提高工廠全體的生產量。 依據本發明的申請專利範圍第3至5項所述之多關節 機械手，向上下配置之前述支撐構件的前述迴轉關節，配 置在相對偏位的位置，且依據本發明的申請專利範圍第7 和8項所述之多關節機械手，形成爲以被配置在前述支撐 ’ 構件之前述迴轉關節的迴轉中心、及手部的迴轉中心、及 台座的迴轉中心均一致於手部的移動方向的軸線上的方式 f 來進行偏位，故手部來到引進液晶基板或半導體晶圓的位 置的情況，即使利用台座的迴轉功能仍可以不超出液晶基 板或半導體晶圓的迴旋半徑來進行迴旋，所以可以縮小機 體，而以不會干涉到工廠中所配置的裝置的方式來配置機 械手。 依據本發明的申請專利範圍第9至1 1項所述之多關 節機械手，前述柱體爲複數個柱塊相連結的構造，即使以 連結柱塊的柱體的方式，對於高度直達工廠的頂棚部的儲 ( 存櫃仍可對應，並且對於變長的移動機構之導引機構也不 會降低導引精度，所以利用移動機構來移動之支撐構件的 移動精度也不會降低。因而，被載置在手部之液晶基板或 半導體晶圓的定位精度也不會降低來予以搬運，且不會因 * 基板或晶圓與儲存櫃起衝突而導致良品率的降低。 【實施方式】 以下，參考圖面來說明本發明的實施形態。 -13- 200817151 (10) 實施例1 : 第1圖爲本發明的多關節機器人之立體圖。第2圖爲 本發明的多關節機械手之上面圖。第3圖爲本發明的多關 節機械手之正面圖。 本發明的多關節機械手1係爲了要對應於儲存櫃（未 圖示）的高層化而連結被區分成複數個柱塊之柱體12的 構造。如此，依序連結各柱塊1 6來形成具有對應於高層 的高度之多關節機械手1。本實施例則是連結了 4個柱塊 1 6的構造。各柱塊1 6的兩端面爲以柱塊1 6間相連結的方 式嵌合的構造，又爲了要精度良好地配置由直線導引所組 成的導引機構而具有定位孔（未圖示），進而用定位治具 進行調整來予以組裝。 另外，本發明的多關節機械手1係利用關節部3、4、 5來可迴轉地連結以傳達迴轉驅動源的迴轉力使進行所要 的動作之臂2，具備有2組。另外，利用臂2來保持工件 9之手部8係以朝圖中箭頭X所示之工件9的取出/供應 方向，可直線移動的方式構成。另外，設置在2組臂2的 基端之關節部3的迴轉中心軸的關係，係如第2圖所示， 構成爲以對於上臂的基端之關節部3來朝手部8的移動方 向偏移的方方式配置下臂22的基端之關節部3。 另外，具備有令設置臂2之支撐構件10向上下移動 之上下移動構件11，而成爲可調整整臂2的上下位置。另 外，上下移動構件1 1的台座1 3係被設置成可轉動，以迴 旋多關節機械手1來改變方向的方式所形成。此處，上下 -14- 200817151 (11) 移動機構11係朝向與手部8的移動方向相同的方向來配 置，支撐構件10則是朝向對於手部8的移動方向成垂直 的方向來突出上下移動機構11，連結至臂2的基端之關節 部3。另外，連結至下臂22之支撐構件10，當臂2利用 上下移動機構11來往下方移動時，會形成爲以不會干涉 •到台座1 3的方式來如第2圖所示朝向手部8的移動方向 偏位的形狀。另外，上下移動機構1 1係以具有遮蔽功能 的保護罩（未圖式）來覆蓋，抑制來自柱體12內部的粉 塵。 本發明與日本專利文獻1不同的部分是上下移動機構 朝向與手部的移動方向相同的方向來配置，上下移動機構 與臂2的基端之關節部相連結之支撐構件1 〇以朝向與前 述手部的移動方向成垂直的方式突出，且與下臂22相連 結之支撐構件以不會干涉到台座1 3的方式，朝向手部的 移動方向偏位的方式所形成的部分。 丨 其次，針對動作來進行說明。本發明的多關節機械手 1所裝備之2組臂2，例如具有複數個關節部，即是多關 節機械手1由水平多關節型機械手所構成。本實施形態中 的臂2係具備有與習知的臂2的構造同樣的構造。 ' 上腕6的基端係藉由驅動軸來與支撐構件10相連結 ，而構成可轉動的肩關節臂部3。該肩關節臂部3成爲臂 2的基端之關節部3。另外，上腕6的前端與前腕7的基 端藉由驅動軸來相連結，而構成可轉動的肘關節部4。另 外，前腕7的前端與手部8藉由驅動軸來相連結，而構成 -15- 200817151 (12) 可轉動的手關節部5。 臂2係利用迴轉驅動源（未圖示）來令肩關節臂部3 及肘關節部4及手關節部5轉動，使手部8朝向工件取出 /供應方向移動。此時，臂2則是該構造上，手部8朝向 1個方向，在上腕6及前腕7完全伸出的伸展位置與在上 腕6及前腕7摺疊在一起的狀態下的回縮位置之間進行直 線移動，進行伸縮動作。 此處，利用下臂22來針對本實施例的多關節機械手1 的迴旋半徑進行說明。在第4圖所示之臂22的回縮位置 ，利用手部8來保持之工件9的中心，被設計成與台座1 3 的迴轉中心一致。進而，以肩關節臂部3的迴轉中心、及 手關節部5的迴轉中心、及台座1 3的迴轉中心一致於手 部8的移動方向之軸線上的方式偏位來令台座13轉動時 ，肘關節部4或手部8不會突出多關節機械手1的周圍所 必要之最小區域圓1 5，而可以縮小多關節機械手1的迴旋 ί 半徑。 此處，爲了避免圖面變複雜，已利用下臂來進行說明 過，至於上臂21也是同樣，工件9的中心，被設計成與 台座1 3的迴轉中心一致，肩關節臂部3、手關節部5以及 台座13之迴轉中心的位置關係也是與下臂相同的構成。 其次，針對上下方向的動作進行說明。臂2係被安裝 在支撐構件1 〇，利用上下移動機構1 1，依據控制器（未 圖示）的指令，在上下方向上進行移動。如第3圖所示向 下方移動時，會形成以支撐構件10不會與台座13起衝突 -16- 200817151 (13) 的方式來朝向手部8的移動方向偏位的形狀’因而支撐構 件10能夠下降到上下移動機構11之最下點的移動位置爲 止。 此外，本發明中，已針對具有上臂和下臂之多關節機 械手進行述說過，不過即使是由上下任何一方的臂所組成 之多關節機械手，當然也是同樣。另外，還針對具有肩關 節、肘關節以及手關節的迴轉關節之多關節機械手進行述 說過，不過有關手關節部被固定之多關節機械手，當然也 具有同樣的作用和效果。 [產業上的可利用性] 在這種手部上載置物品來進行搬運，就可以進行物品 收授的作業，所以用途上可適用於厚板或箱狀物品的搬運 作業。 【圖式簡單說明】 第1圖爲表示本發明的實施例的多關節機械手之立體 圖。 第2圖爲表示本發明的實施例的多關節機械手之上面 圖。 第3圖爲表示本發明的實施例的多關節機械手之正面 圖。 第4圖爲表示本發明的實施例中多關節機械手的迴旋 半徑之圖。 -17- 200817151 (14) 第5圖爲習知的多關節機械手之立體圖。 第6圖爲表示習知的多關節機械手的迴旋半徑之圖。 【主要元件符號說明】 1 :多關節機械手 • 2 :臂 2 1 ·•上臂 ， 22 :下臂 3 :肩關節部 4 :肘關節部 5 :手關節部 6 :上腕 7 :前腕 8 :手部 9 :工件 1 〇 :支撐構件 1 1 :上下移動機構 1 2 :柱體 13 :台座 14 :基台 1 5 :最小區域圓 1 6 :柱塊 -18-[Technical Field] The present invention relates to a multi-joint robot in which a sheet-like workpiece such as a glass substrate for liquid crystal or a semiconductor wafer is carried into and out of a storage cabinet. [Prior Art] Conventionally, the proposed multi-axis robot system biases the rotation center of the shoulder joint portion and the rotation center of the pedestal to reduce the radius of rotation of the multi-joint manipulator when the pedestal is rotated (for example, refer to Japan Patent Document 1). As shown in Fig. 5, the conventional multi-joint robot 1 is rotatably coupled by the joint portions 3, 4, and 5, and transmits the turning force of the turning drive source, so that the arm 2 that performs the desired operation has two sets. The composition is configured such that the center axis of rotation of the joint portion 3 provided at the base end of the two sets of arms 2 is arranged up and down (or in the axial direction). The multi-joint robot 1 includes two sets of arms 2, one of which is for supply and the other for take-out, and can simultaneously supply the workpiece 9 and take out other workpieces 9. Further, the conventional multi-joint robot 1 is configured by the arm 2 for holding the hand 8 of the workpiece 9 linearly movable in the take-out/supply direction of the workpiece 9 indicated by the arrow X in the figure. Further, the conventional multi-joint robot 1 includes a moving member 11 (hereinafter referred to as an up-and-down moving mechanism 1 1) for moving the support member 10 on which the arm 2 is mounted up and down, and the vertical position of the arm 2 can be adjusted. Further, the pedestal 13 of the upper and lower moving mechanism 1 is rotatably provided, and is formed to be multi-turned -5 - 200817151 (2) The manipulator 1 is changed in direction. Further, the multi-joint robot 1 of the present embodiment moves in the direction shown in the drawing, that is, in the direction perpendicular to the moving direction of the hand 8 and the vertical movement direction of the support, on the base 1 The pedestal 13 is installed, and the upper and lower moving mechanism 11 can be adjusted. The two sets of arms equipped with the conventional multi-joint robot 1 have a plurality of joints, that is, the multi-joint robot i is a horizontal robot. Composition. The arm 2 of the present embodiment includes a first (hereinafter referred to as an upper wrist 6), a second or lower portion coupled to the upper wrist 6, and is referred to as a front wrist 7), and is coupled to the front wrist 7 to hold the hand portion 8. The proximal end of the upper wrist 6 is coupled to the support member 1 by a drive shaft to constitute a rotatable joint portion 3 (hereinafter, the shoulder joint portion 3 is referred to as a joint portion 3 of the base end of the arm 2). The upper end and the proximal end of the front wrist 7 are coupled to each other by a drive shaft, and the joint portion 4 (hereinafter referred to as the elbow joint portion 4) is constructed. The front end and the hand 8 are coupled by a drive shaft. The arm joints 5 (hereinafter referred to as the hand joints 5) are connected to each other. The center joints of the shoulder joints 3 are on the same axis, and the arms 2 are arranged by the turning drive source (not shown). The shoulder joint elbow joint portion 4 and the hand joint portion 5 are rotated to move the hand 8 in the direction in which the workpiece is taken. At this time, the arm 2 is completely in the direction of the hand, and the upper wrist 6 and the front wrist 7 are completely completed in the mechanism. The extended stretching position, 6 and the retracted position of the front wrist 7 in the folded state are linearly shifted by the arrow Y_piece 10 4 and can be placed 4. 4. The multi-joint 1 arm 6 arm 7 (the connection of the pieces 9). The swivel jaw 3 of the wrist 6 which can be rotated by the front wrist 7 and the side of the wrist 6-200 which is rotated toward the upper wrist 817151 (3), the telescopic operation is performed. Here, the conventional multi-joint robot 1 is the center of the workpiece 9 held by the hand 8 at the retracted position of the arm 2 shown in Fig. 6 . It is designed to match the center of rotation of the pedestal 13. Further, the center of rotation of the shoulder joint portion 4 and the center of rotation of the pedestal 13 are displaced in a direction perpendicular to the direction of movement of the hand 8, so that the pedestal 13 is rotated. The elbow joint portion 4 or the hand portion 8 does not protrude the minimum area circle 1 5 ' necessary for the circumference of the multi-joint robot 1 to narrow the radius of gyration of the multi-joint robot 1. Patent Document 1: Japanese Patent Laid-Open No. 2001 1 2742 1 8 (Pages 4 to 5, Figs. 1 and 2) [Problem to be Solved by the Invention] A sheet-like workpiece such as a glass substrate for liquid crystal or a semiconductor wafer is carried in, carried out, and stored. The multi-joint manipulator of the cabinet has been advanced to a large size, and it is required to increase the number of substrates to be processed and to be processed in a short period of time, and in order to increase the yield of the substrate, it is also required to suppress the dust from the robot. Manipulator despite the base The height of the storage cabinet has become a direct ceiling, which makes the equipment itself large, but achieving high speed, high precision, and low dust is the biggest problem. On the one hand, large-scale equipment must invest heavily in order to maintain cleanliness around it. The amount of equipment, therefore, is best to have the storage cabinet configured with more substrates and to handle. In addition, it is best to reduce the body of the multi-joint robot and reduce the radius of the gyration so that it does not interfere with the device configured in the factory. 200817151 (4) In addition, the number of productions of liquid crystal substrates or semiconductor wafers is increasing year by year. In order to increase the production speed, the robot is required to carry the flow. However, the robots contain mechanical parts and must be repaired and repaired. The time is also a factor related to the flow rate, and it is preferable that the maintenance is easy. However, the conventional multi-joint robot is configured such that the base end of the arm protrudes from the moving surface and faces the transport substrate. There is a problem in that it is impossible to prevent dust from the moving mechanism from being caused to cause fine dust to accumulate on the substrate. Further, when the arm is moved downward by the vertical movement mechanism, the support member of the arm collides with the pedestal, so that the movable portion cannot be moved to the lowermost position of the vertical movement mechanism, and the liquid crystal substrate may occur. Or the problem that the height of the storage cabinet in which the semiconductor wafer is moved in and out is high. In addition, the height of the storage cabinet is limited by the height of the factory building. Therefore, the number of panels or substrates to be arranged is reduced, and the movable range of the vertical moving mechanism is reduced to reduce the production speed. Further, since the motor or the pulley is provided at the base end of the arm, the structure is thick in the up and down direction. Therefore, there arises a problem that the arrangement interval of the liquid crystal substrate or the semiconductor wafer in the storage cabinet has to be increased. That is, there is a problem that the number of panels or substrates that can be disposed in the storage cabinet is reduced, resulting in a decrease in production speed. In order to avoid this problem, it is desirable to change the height of the arm when moving in and out by the vertical movement mechanism. However, in this case, since the order of moving the arm up and down is repeated, it takes time and the working time becomes long. . -8- 200817151 (5) In addition, the conventional multi-joint robot is configured such that the base end of the arm is disposed coaxially upward and downward. Therefore, if the motor or the pulley that belongs to the mechanism unit at the base end of the arm is to be replaced, it is necessary to remove one of the arms and then replace it, so that the maintenance time is long and the productivity is lowered. . In addition, the conventional multi-joint robot system uses a moving mechanism to move the supporting member on one cylinder, so that the height of the storage cabinet reaches the ceiling portion, of course, the length of the cylinder must be lengthened, the rigidity is lowered, and the movement is arranged inside. The guiding mechanism of the mechanism must also be set to match the length of the cylinder. However, in the case where the guiding mechanism is lengthened, the guiding accuracy is lowered due to the increase, so that the movement accuracy of the supporting member moved by the moving mechanism is lowered, and the liquid crystal substrate or the semiconductor wafer of the hand 8 placed at the tip end of the arm is lowered. The positioning accuracy is lowered, and there is a problem that the substrate or the wafer collides with the storage cabinet, resulting in a decrease in the yield. The present invention has been made in view of the above-mentioned problems, and an object of the invention is to provide a sheet-like workpiece such as a glass substrate or a semiconductor wafer for preventing liquid crystal contamination from the upper and lower moving shafts and preventing productivity from being improved. A multi-joint robot that moves in and out of the storage cabinet. '< means for solving the problem> In order to solve the above problems, the configuration of the present invention is as follows. The multi-joint robot according to the first aspect of the present invention is characterized in that the hand is attached to the hand and is connected to the hand, and has at least two or more swivel joints facing each other. a multi-joint arm that is stretched and moved in such a manner as to move the hand -9-200817151 (6), and the multi-joint arm that moves in the axial direction and the movement of the multi-joint arm that moves up and down a multi-joint manipulator composed of a support member coupled to the mechanism and a pedestal equipped with a whirling function of the moving mechanism, wherein the moving mechanism is disposed in the column in the same direction as the moving direction of the hand, and is The support member disposed in the moving mechanism protrudes from the column in a direction perpendicular to the moving direction of the hand, and is coupled to the plurality of arms. In the multi-joint robot according to the second aspect of the present invention, the support member is formed so as not to interfere with the pedestal when moving to the lowermost position of the column by the moving mechanism. The shape is a shape that is biased toward the moving direction of the aforementioned hand. In the multi-joint robot according to the third aspect of the present invention, the swivel joint of the support member disposed upward and downward is disposed at a position of a relative offset. The multi-joint robot according to the fourth aspect of the present invention is the one of the above-mentioned rotary joints of the support member disposed upward and downward, and is disposed at a position offset from the moving direction of the hand. The multi-joint robot according to the fifth aspect of the present invention is disposed on the lower side of the swivel joint of the support member disposed upward and downward, and is disposed on the upper side of the swivel joint. The position where the moving direction of the hand is displaced. The multi-joint robot according to claim 6 of the present invention is characterized in that the moving mechanism has a shielding function. (b) The multi-joint robot according to the seventh aspect of the present invention is characterized in that the hand is attached to the hand and the hand is connected to the hand. a joint that expands and contracts in such a manner as to move the hand in one direction, and a multi-joint arm that is disposed to face in the axial direction and a movement in which the multi-joint arm is moved up and down a multi-joint robot composed of a support member coupled to the mechanism and a pedestal equipped with a swing function of the moving mechanism, and configured to be disposed at a center of rotation of the swivel joint of the support member and a hand The center of rotation of the center of rotation and the center of rotation of the pedestal are offset in a manner consistent with the axis of the direction of movement of the hand. The multi-joint robot according to the eighth aspect of the present invention is the positional relationship between the center of rotation of the rotary joint, the center of rotation of the hand, and the center of rotation of the pedestal, and is formed to move to introduce the hand At the time, the axis related to the moving direction of the hand is arranged from the front in accordance with the order of the center of rotation of the swivel joint, the center of rotation of the pedestal, and the center of rotation of the hand. The multi-joint robot according to the ninth aspect of the invention is characterized in that the hand is attached to the hand and is connected to the hand, and has at least two or more rotary joints facing one. a multi-joint arm that is stretched in a direction to move the hand, and that is disposed so as to face in the axial direction, and a support mechanism that connects the multi-joint arm to a moving mechanism that is mounted on the column to move up and down A member and a multi-joint robot equipped with a pedestal having a turning function of the moving mechanism, wherein the column has a structure in which a plurality of columns are connected. The multi-joint robot according to claim 10 of the present invention is characterized in that the column of the column body is provided with an opening for adjusting the arrangement of the guiding means of the moving mechanism. The multi-joint robot described in the first aspect of the invention is a joint structure of the column block of the column body. According to the multi-joint robot according to the first and sixth aspects of the present invention, the moving mechanism is disposed in the column in a direction facing the moving direction of the hand, and is disposed in the moving mechanism. The support member protrudes in a direction perpendicular to the moving direction of the hand, and is coupled to the multi-joint arm, and is configured such that the sliding portion does not face the liquid crystal substrate or the semiconductor wafer, and the sliding portion The dust does not accumulate on the liquid crystal substrate or the semiconductor wafer, thereby reducing contamination of the liquid crystal substrate or the semiconductor wafer, and can improve the yield of the substrate or the wafer. According to the multi-joint robot of the second aspect of the invention, the support member is formed so as not to interfere with the pedestal when moving to the lowermost position of the column by the moving mechanism. The shape is biased toward the moving direction of the hand so that the support purchase does not collide with the pedestal, and can be moved to the lowermost position of the vertical movement mechanism, and the movable range can be increased. Therefore, even if the height of the storage cabinet in which the liquid crystal substrate or the semiconductor wafer is carried in and out is not increased, the liquid crystal substrate or the semiconductor wafer can be disposed in the lower portion of the storage cabinet, and since the movable range of the vertical movement mechanism can be increased, the substrate Or increase the number of wafers, so that -12-200817151 Ο) can increase the overall production capacity of the factory. According to the multi-joint robot of the third to fifth aspects of the present invention, the above-described swivel joint of the above-described support member disposed up and down is disposed at a position of a relative offset, and the seventh patent application scope according to the present invention And the multi-joint robot according to the eighth aspect, wherein the center of rotation of the swivel joint disposed on the support member, the center of rotation of the hand, and the center of rotation of the pedestal are both aligned with the moving direction of the hand. The mode f on the axis is offset, so that when the hand comes to the position where the liquid crystal substrate or the semiconductor wafer is introduced, even if the turret function of the pedestal is used, the gyration of the liquid crystal substrate or the semiconductor wafer can be rotated. Therefore, the body can be reduced, and the robot can be configured in such a manner that it does not interfere with the device configured in the factory. According to the multi-joint robot of the ninth to eleventh aspect of the invention, the column body has a structure in which a plurality of column blocks are connected, even in the manner of connecting the columns of the column block, to the height of the factory. The storage of the ceiling portion (the storage cabinet can still correspond, and the guiding mechanism for the variable length moving mechanism does not reduce the guiding precision, so the movement accuracy of the supporting member moved by the moving mechanism is not lowered. The positioning accuracy of the liquid crystal substrate or the semiconductor wafer placed on the hand is not lowered, and the yield is not lowered by the collision of the * substrate or the wafer with the storage cabinet. [Embodiment] Hereinafter, Embodiments of the present invention will be described with reference to the drawings. -13- 200817151 (10) Embodiment 1 : Fig. 1 is a perspective view of a multi-joint robot of the present invention. Fig. 2 is a top view of the multi-joint robot of the present invention. Fig. 3 is a front view of the multi-joint robot of the present invention. The multi-joint robot 1 of the present invention is divided into a plurality of columns in order to correspond to a high-rise of a storage cabinet (not shown). The structure of the body 12. Thus, each of the column blocks 16 is sequentially connected to form a multi-joint robot 1 having a height corresponding to the upper layer. This embodiment is a structure in which four column blocks 16 are connected. The both end faces of the 6 are configured such that the column blocks 16 are coupled to each other, and the positioning holes (not shown) are provided in order to accurately arrange the guide mechanism composed of the linear guides, and the positioning is further performed. In addition, the multi-joint robot 1 of the present invention is configured such that the joints 3, 4, and 5 are rotatably coupled to each other to transmit the turning force of the turning drive source, and the arm 2 for performing the desired operation is provided. In addition, the hand 8 of the workpiece 9 is held by the arm 2 so as to be linearly movable toward the take-out/supply direction of the workpiece 9 indicated by the arrow X in the figure. In addition, the two sets of arms 2 are provided. As shown in Fig. 2, the relationship between the center axis of rotation of the joint portion 3 at the proximal end is configured such that the lower arm is disposed in a direction in which the joint portion 3 of the proximal end of the upper arm is displaced in the moving direction of the hand 8. The joint portion 3 at the base end of 22 is provided with the arm 2 The support member 10 moves the upper and lower moving members 11 up and down to become an up and down position of the adjustable arm 2. Further, the pedestal 13 of the upper and lower moving members 1 1 is set to be rotatable, and is rotated to rotate the multi-joint robot 1 to change The direction is formed. Here, the upper and lower-14-200817151 (11) movement mechanism 11 is disposed in the same direction as the movement direction of the hand 8, and the support member 10 is oriented perpendicular to the movement direction of the hand 8. The direction of the vertical movement mechanism 11 is extended to the joint portion 3 of the base end of the arm 2. Further, the support member 10 coupled to the lower arm 22 is formed to be moved downward when the arm 2 is moved downward by the vertical movement mechanism 11. It does not interfere with the shape of the pedestal 13 as shown in Fig. 2, which is shifted toward the moving direction of the hand 8. Further, the vertical movement mechanism 1 1 is covered with a protective cover (not shown) having a shielding function, and dust from the inside of the column 12 is suppressed. The present invention differs from the Japanese Patent Laid-Open Publication No. 1 in that the vertical movement mechanism is disposed in the same direction as the movement direction of the hand, and the support member 1 that is connected to the joint portion of the base end of the arm 2 is oriented in the foregoing direction. The moving direction of the hand protrudes in a vertical manner, and the support member coupled to the lower arm 22 is formed so as not to interfere with the pedestal 13 and to be displaced toward the moving direction of the hand.丨 Next, explain the action. The two sets of arms 2 equipped in the multi-joint robot 1 of the present invention have, for example, a plurality of joint portions, that is, the multi-joint robot 1 is composed of a horizontal articulated manipulator. The arm 2 in the present embodiment has the same structure as that of the conventional arm 2. The base end of the upper wrist 6 is coupled to the support member 10 by a drive shaft to constitute a rotatable shoulder joint arm 3. The shoulder joint arm portion 3 serves as a joint portion 3 of the base end of the arm 2. Further, the front end of the upper wrist 6 and the base end of the front wrist 7 are coupled by a drive shaft to constitute a rotatable elbow joint portion 4. Further, the front end of the front wrist 7 and the hand 8 are coupled by a drive shaft to constitute a pivotable hand joint portion 5 of -15-200817151 (12). The arm 2 rotates the shoulder joint arm portion 3, the elbow joint portion 4, and the hand joint portion 5 by a turning drive source (not shown) to move the hand 8 toward the workpiece take-out/supply direction. At this time, the arm 2 is in this configuration, the hand 8 is oriented in one direction, between the extended position in which the upper wrist 6 and the front wrist 7 are completely extended, and the retracted position in the state in which the upper wrist 6 and the front wrist 7 are folded together. Perform a linear movement to perform the telescopic movement. Here, the turning radius of the multi-joint robot 1 of the present embodiment will be described using the lower arm 22. At the retracted position of the arm 22 shown in Fig. 4, the center of the workpiece 9 held by the hand 8 is designed to coincide with the center of rotation of the pedestal 13. Further, when the center of rotation of the shoulder joint arm portion 3, the center of rotation of the hand joint portion 5, and the center of rotation of the pedestal 13 are aligned with the axis of the moving direction of the hand portion 8, the pedestal 13 is rotated. The elbow joint portion 4 or the hand portion 8 does not protrude the minimum area circle 15 necessary for the circumference of the multi-joint robot 1, and the radius of the multi-joint robot 1 can be reduced. Here, in order to avoid the complexity of the drawing, the lower arm has been used for explanation. As for the upper arm 21, the center of the workpiece 9 is designed to coincide with the center of rotation of the pedestal 13, the shoulder joint arm 3, and the hand joint. The positional relationship between the portion 5 and the center of rotation of the pedestal 13 is also the same as that of the lower arm. Next, the operation in the vertical direction will be described. The arm 2 is attached to the support member 1 and is moved in the vertical direction by the vertical movement mechanism 1 1 in accordance with a command from a controller (not shown). When moving downward as shown in FIG. 3, a shape in which the support member 10 does not collide with the pedestal 13 in a manner of collision - 16 - 2008 17151 (13) toward the moving direction of the hand 8 is formed. It is possible to descend to the moving position of the lowest point of the vertical movement mechanism 11. Further, in the present invention, the multi-joint robot having the upper arm and the lower arm has been described, but the same is true even for a multi-joint robot composed of one of the upper and lower arms. In addition, the multi-joint robot having a joint of the shoulder joint, the elbow joint, and the hand joint has been described, but the multi-joint robot with the hand joint portion fixed has the same effect and effect. [Industrial Applicability] When the article is placed on the hand and transported, the article can be transported. Therefore, the application can be applied to the handling of thick plates or box-shaped articles. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a multi-joint robot of an embodiment of the present invention. Fig. 2 is a top view showing a multi-joint robot of an embodiment of the present invention. Fig. 3 is a front elevational view showing the multi-joint robot of the embodiment of the present invention. Fig. 4 is a view showing the radius of gyration of the multi-joint robot in the embodiment of the present invention. -17- 200817151 (14) Figure 5 is a perspective view of a conventional multi-joint robot. Fig. 6 is a view showing the radius of gyration of a conventional multi-joint robot. [Main component symbol description] 1 : Multi-joint robot • 2: Arm 2 1 ·• Upper arm, 22: Lower arm 3: Shoulder joint 4: Elbow joint 5: Hand joint 6: Upper wrist 7: Front wrist 8: Hand Part 9: Workpiece 1 〇: Support member 1 1 : Up and down moving mechanism 1 2 : Column 13 : pedestal 14 : Abutment 1 5 : Minimum area circle 1 6 : Column -18 -