CN101360589A - Multijoint robot - Google Patents
Multijoint robot Download PDFInfo
- Publication number
- CN101360589A CN101360589A CNA2007800014784A CN200780001478A CN101360589A CN 101360589 A CN101360589 A CN 101360589A CN A2007800014784 A CNA2007800014784 A CN A2007800014784A CN 200780001478 A CN200780001478 A CN 200780001478A CN 101360589 A CN101360589 A CN 101360589A
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- China
- Prior art keywords
- hand
- articulated robot
- supporting member
- pivot
- travel mechanism
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/04—Arms extensible rotatable
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Provided is a multijoint robot which prevents contamination of a substrate due to dusts generated from a vertically moving shaft, and puts in and takes out thin-board-shaped works having improved productivity, such as a glass substrate for liquid crystal and a semiconductor wafer, to and from a stocker. The multijoint robot is composed of a hand section for placing an object to be transferred; a multijoint arm, which is connected to the hand section, has at least two or more rotating joints, extends and retracts to move the hand section in one direction and faces a shaft direction; a supporting member for connecting the multijoint arm with a moving mechanism which vertically moves; and a base, which is arranged on the moving mechanism and has a turning function. The moving mechanism has a column in the same direction as the moving direction of the hand section, and the supporting member, which is arranged on the moving mechanism (11), protrudes in a direction orthogonally intersecting with the moving direction of the hand section and is connected to the multijoint arm.
Description
Technical field
The present invention relates to liquid crystal is taken out the articulated robot of sending into accumulator with laminal workpiece such as glass substrate, semiconductor crystal wafer.
Background technology
As existing articulated robot, proposed when pedestal is rotated, to reduce the articulated robot (for example, with reference to patent documentation 1) of the radius of turn of articulated robot by the pivot of biasing shoulder joint portion and the pivot of pedestal.
Existing articulated robot 1 constitutes, as shown in Figure 5, possess two groups and rotatably be connected and transmit the revolving force that rotary driving source produces by joint portion 3,4,5, expect the arm 2 that moves, make (or direction of principal axis) configuration about the rotary middle spindle of the joint portion 3 that is arranged on two groups of cardinal extremities on the arm 2.
And existing articulated robot 1 constitutes, by arm 2 keep the hand 8 of workpiece 9 can be in by figure on the taking-up direction of the supply of the workpiece shown in the arrow X 9 straight line move.
And existing articulated robot 1 possesses mobile member 11 that the supporting member 10 that is provided with arm 2 is moved up and down (below, be called reciprocating mechanism 11), upper-lower position that can regulating arm 2.And the pedestal 13 of reciprocating mechanism 11 is provided with rotationally, can make articulated robot 1 rotation and change direction.
In addition, in the articulated robot 1 of present embodiment, direction shown in the arrow Y in the drawings, promptly distinguish on the direction of quadrature, the position that pedestal 13 also can be regulated reciprocating mechanism 11 is set movably with respect to base station 14 with the moving direction of hand 8 and the direction that moves up and down of supporting member 10.
And two groups of arms 2 that existing articulated robot 1 is possessed for example have a plurality of joint portions, and promptly articulated robot 1 constitutes horizontal articulated robot.Second arm 7 that arm 2 in the present embodiment possesses the first arm 6 (below, be called upper arm 6), be connected with upper arm 6 (below, be called forearm 7) and be connected and keep the hand 8 of workpiece 9 with forearm 7.
The cardinal extremity of upper arm 6 is connected in supporting member 10 by driving shaft, constitutes rotating joint portion 3 (below, be called shoulder joint portion 3).This shoulder joint portion 3 becomes the joint portion 3 of the cardinal extremity of arm 2.And the front end of upper arm 6 is connected by driving shaft with the cardinal extremity of forearm 7, constitutes rotating joint portion 4 (below, be called elbow joint portion 4).And the front end of forearm 7 and hand 8 are connected by driving shaft, constitute rotating joint portion 5 (below, be called swivel of hand portion 5).For the rotary middle spindle that makes shoulder joint portion 3 be in coaxial on, be configured on above-below direction relatively.
Here, in existing articulated robot 1, in the shortening position of arm shown in Figure 62, the center of the workpiece 9 that is kept by hand 8 is designed to consistent with the pivot of pedestal 13.In addition, the pivot by making shoulder joint portion 3 and the pivot of pedestal 13 with respect to the moving direction of hand 8 at the orthogonal direction upper offset, elbow joint portion 4 on every side or hand 8 at articulated robot 1 when pedestal 13 is rotated can be outstanding from required minimum zone circle 15, can reduce the radius of turn of articulated robot 1.
[patent documentation 1] spy of Japan opens 2001-274218 (the 4th page～5 pages, Fig. 1, Fig. 2)
Summary of the invention
Liquid crystal is sent into the articulated robot of accumulator to large scale development with laminal workpiece taking-up such as glass substrate, semiconductor crystal wafer, requirement is handled when increasing the substrate number of handling at short notice, in order to improve the qualification rate of substrate, the dust that requires as far as possible to suppress robot produces in addition.Therefore for robot, almost arrive the height of ceiling to the accumulator of placement substrate, realize that high speed, high accuracy, low dust still become important problem although equipment self maximizes.On the other hand, the equipment of maximization keeps the clean equipment investment that needs great number in order to make cleannes on every side, therefore wishes to dispose more substrate and handle in accumulator.And, wish to reduce occupied area for articulated robot, reduce radius of turn so that do not interfere with the device that is configured in factory.
And the production number average annual growth of crystal liquid substrate, semiconductor crystal wafer etc. is in order to enhance productivity for robot requirement carrying productivity ratio.But, so because robot comprises that machine components need to safeguard that maintenance time also becomes the key factor that relates to productivity ratio, hope can easily be safeguarded.
But existing articulated robot is the arm cardinal extremity from the outstanding structure that is configured to the carrying substrate subtend of all-moving surface, therefore, produces owing to can't prevent the dust of reciprocating mechanism, so produced the problem that fine dust is piled up etc. on substrate.
And, arm is by reciprocating mechanism when mobile downwards, because so the supporting member of arm and pedestal collision can't move to the bottom of reciprocating mechanism, produce the problem that movable range narrows down, produced the problem that the height that takes out the accumulator of sending into crystal liquid substrate or semiconductor crystal wafer uprises.Furthermore, the height of accumulator is limited by the height of shop building, and therefore, the panel of configuration or the number of substrate tail off because of the movable range of reciprocating mechanism narrows down, and have produced the problem that production efficiency is reduced.
And, have motor, belt wheel etc. at the arm cardinal extremity, therefore, on above-below direction thicker structure.Therefore, produced the problem at the interval of having to widely to set configuration crystal liquid substrate in the accumulator or semiconductor substrate.That is to say, thus since the configurable panel or the number of substrate in accumulator tail off and produced production efficiency and reduce such problem.For fear of such problem, take out when sending into by reciprocating mechanism, can consider to change the height of arm, at this moment,, produced the problem of elongated grade of activity duration for the sequentially-operating that arm is moved up and down needs spended time.
And existing articulated robot is that the arm cardinal extremity is configured to coaxial structure up and down.Therefore, for the machine components that are configured at the arm cardinal extremity are the exchange of motor, belt wheel etc., must take to unload the method that exchanges behind next group arm etc., therefore, it is long to have produced maintenance time, the problem of production efficiency reduction.
And, existing articulated robot is, because supporting member moves by travel mechanism on a pillar, so when accumulator becomes the height that almost reaches ceiling, need to make a column length elongated inevitably, when rigidity reduced, the guiding mechanism that is configured in inner travel mechanism also needed to become and a consistent length of column length.But, when making guiding mechanism elongated, because guiding accuracy reduces because of elongated, so the mobile accuracy of the supporting member that moves by travel mechanism reduces, mounting reduces in the crystal liquid substrate of the hand 8 of arm front end or the positioning accuracy of semiconductor crystal wafer, because substrate or wafer and accumulator case of collision take place, produced the problem that causes qualification rate to reduce.
The present invention is based on the problems referred to above and carries out, purpose provides the pollution that a kind of dust that prevents to move up and down axle produces caused substrate, has improved the articulated robot of liquid crystal being sent into accumulator with laminal workpiece taking-up such as glass substrate, semiconductor crystal wafer of production efficiency simultaneously.
For addressing the above problem, the present invention is following formation.
According to scheme 1 and 6 described inventions, travel mechanism is configured on the pillar on the direction identical with the moving direction of hand, the supporting member that is disposed at travel mechanism be with the direction of the moving direction quadrature of hand on outstanding, the structure that is connected with described multi-joint arm, therefore, sliding part be configured to not can with crystal liquid substrate or semiconductor crystal wafer opposite, the dust that is derived from sliding part can directly not be piled up in crystal liquid substrate or semiconductor crystal wafer, therefore, the pollution of crystal liquid substrate or semiconductor crystal wafer can be reduced, the qualification rate in the production of substrate or wafer can be improved simultaneously.
According to scheme 2 described inventions, because supporting member forms the shape at the moving direction upper offset of described hand, so that do not interfere when moving to the lowest positions of described pillar with described pedestal by described travel mechanism, so supporting member can not collide with pedestal, can move to the bottom of reciprocating mechanism, movable range is broadened.Therefore, even do not make the height that takes out the accumulator of sending into crystal liquid substrate or semiconductor crystal wafer very high, also owing to can the movable range of reciprocating mechanism be broadened, so can more ground placement substrate or the number of wafer at accumulator bottom configuration crystal liquid substrate or semiconductor crystal wafer.Can improve the production efficiency of factory's integral body in view of the above.
According to scheme 3 to 5 described inventions, the described rotary joint of Pei Zhi described supporting member is disposed at the position of relative biasing up and down, according to scheme 7 and 8 described inventions, form the pivot that makes the described rotary joint that is disposed at described supporting member, the pivot of hand and the pivot of pedestal be biasing as one man on the axis of the moving direction of hand, therefore, when hand is come the position that retracts crystal liquid substrate or semiconductor crystal wafer, even the spinfunction by pedestal is rotated, can be not be rotated highlightedly from the radius of turn of substrate or wafer yet, therefore, reduce occupied area, can not interfere the ground configuration of robotic with the device that is configured in factory.
According to scheme 9 to 11 described inventions, described pillar is to connect a plurality of structure, therefore, can tackle the higher accumulator of the ceiling that almost arrives factory by connecting the block structured pillar, guiding mechanism at elongated travel mechanism can not reduce guiding accuracy yet simultaneously, therefore, the mobile accuracy of the supporting member that moves by travel mechanism can not reduce yet.Therefore, the crystal liquid substrate or the semiconductor die fenestra that are positioned in are not on hand carried with can not reducing positioning accuracy, can not cause the reduction of substrate or the caused qualification rate of bumped wafer accumulator yet.
Description of drawings
Fig. 1 is the stereogram of the articulated robot of expression embodiments of the invention.
Fig. 2 is the vertical view of the articulated robot of expression embodiments of the invention.
Fig. 3 is the front view of the articulated robot of expression embodiments of the invention.
Fig. 4 is the figure of radius of turn of the articulated robot of expression embodiments of the invention.
Fig. 5 is the stereogram of the existing articulated robot of expression.
Fig. 6 is the figure of the radius of turn of the existing articulated robot of expression.
Symbol description
The 1-articulated robot; The 2-arm; The 21-upper arm; The 22-underarm; 3-shoulder joint portion; 4-elbow joint portion; 5-swivel of hand portion; The 6-upper arm; The 7-forearm; The 8-hand; The 9-workpiece; The 10-supporting member; The 11-reciprocating mechanism; The 12-pillar; The 13-pedestal; The 14-base station; The 15-minimum zone circle; 16-pillar piece.
The specific embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
Fig. 1 is the stereogram of articulated robot of the present invention.Fig. 2 is the vertical view of articulated robot of the present invention.Fig. 3 is the front view of articulated robot of the present invention.
And articulated robot 1 of the present invention possesses two groups and rotatably is connected by joint portion 3,4,5 and transmits the revolving force that rotary driving source produces, and expects the arm 2 that moves.And, constitute by arm 2 keep the hand 8 of workpiece 9 can be in by figure on the taking-up direction of the supply of the workpiece shown in the arrow X 9 straight line move.And the relation of rotary middle spindle that is arranged at the joint portion 3 of two groups of cardinal extremities on the arm 2 constitutes, and as shown in Figure 2, with respect to the joint portion 3 of the cardinal extremity of upper arm 21, the joint portion 3 of the cardinal extremity of underarm 22 is configured to be offset on the moving direction of hand 8.
And, possess make that the supporting member 10 that is provided with arm 2 moves up and down move up and down member 11, upper-lower position that can regulating arm 2.And the pedestal 13 of reciprocating mechanism 11 is provided with rotationally, can make articulated robot 1 rotation and change direction.Here, reciprocating mechanism 11 is configured on the direction identical with the moving direction of hand 8, and supporting member 10 is outstanding to the direction with respect to the moving direction quadrature of hand 8 from reciprocating mechanism 11, is linked to the joint portion 3 of the cardinal extremity of arm 2.And the supporting member 10 that is linked to underarm 22 forms, and by moving up and down member 11 when mobile downwards, as shown in Figure 2, does not interfere the shape of ground at the moving direction upper offset of hand 8 with pedestal 13 at arm 2.And reciprocating mechanism 11 is covered by the not shown over cap with sealing function, produces with the dust that suppresses pillar 12 inside.
The present invention and patent documentation 1 different part is, reciprocating mechanism is configured on the direction identical with the moving direction of hand, outstanding orthogonally to the supporting member 10 that the joint portion of the reciprocating mechanism and the cardinal extremity of arm 2 is connected with the moving direction of hand, and the supporting member 10 that is connected with underarm 22 form at the moving direction upper offset of hand so as with pedestal 13 these parts of interference.
Below, action is described.Two groups of arms 2 that articulated robot 1 of the present invention is possessed for example have a plurality of joint portions, and promptly articulated robot 1 constitutes horizontal articulated robot.Arm 2 in the present embodiment possesses the structure identical with the structure of existing arm 2.
The cardinal extremity of upper arm 6 is connected in supporting member 10 by driving shaft, constitutes rotating shoulder joint portion 3.This shoulder joint portion 3 is the joint portion 3 of the cardinal extremity of arm 2.And the front end of upper arm 6 is connected by driving shaft with the cardinal extremity of forearm 7, constitutes rotating elbow joint portion 4.And the front end of forearm 7 and hand 8 are connected by driving shaft, constitute rotating swivel of hand portion 5.
Here, utilize the radius of turn of the articulated robot 1 of 22 pairs of present embodiments of underarm to describe.Be designed to the shortening position at arm shown in Figure 4 22, the center of the workpiece 9 that is kept by hand 8 is consistent with the pivot of pedestal 13.In addition, by the pivot that makes shoulder joint portion 3, the pivot of swivel of hand portion 5 and pivot biasing as one man on the axis of the moving direction of hand 8 of pedestal 13, elbow joint portion 4 on every side or hand 8 at articulated robot 1 when pedestal 13 is rotated can be outstanding from required minimum zone circle 15, can make the radius of turn of articulated robot 1 very little.
Here, utilize underarm to be illustrated for fear of the accompanying drawing complexity that becomes, but for upper arm 21 too, the center that is designed to workpiece 9 is consistent with the pivot of pedestal 13, and the position relation of the pivot of shoulder joint portion 3, swivel of hand portion 5 and pedestal 13 also is the formation identical with underarm.
Action to above-below direction describes below.Arm 2 is installed on supporting member 10, moves in above-below direction by the instruction of not shown controller on reciprocating mechanism 11.When mobile downwards as shown in Figure 3, supporting member 10 does not form and collides the shape of ground at the moving direction upper offset of hand 8 with pedestal 13, and therefore, supporting member 10 can drop to the shift position of descending point most of reciprocating mechanism 11.
In addition, in the present invention, though the articulated robot with upper arm and underarm is illustrated, self-evident also can be by any one group of articulated robot that arm constitutes up and down.And though the articulated robot of rotary joint with shoulder joint, elbow joint and swivel of hand is illustrated, naturally the articulated robot that is fixed for swivel of hand portion also has same effect and effect.
Owing to can the article mounting be carried the exchanging operation that carries out article on hand by this, so can be applied to the such purposes of transport operation of slab or case shape article.
Claims (11)
1. an articulated robot possesses: the hand of mounting load; Be connected with described hand, possess the rotary joint more than at least 2, described hand is stretched movably to a direction, be configured to the multi-joint arm of subtend in the axial direction; To described multi-joint arm and the supporting member that the travel mechanism on the pillar is connected that is installed in that moves up and down; And be installed on the pedestal with spinfunction of described travel mechanism, it is characterized in that,
Described travel mechanism is configured on the pillar on the direction identical with the moving direction of described hand, the supporting member that is disposed at described travel mechanism with the direction of the moving direction quadrature of described hand on outstanding, be connected with described multi-joint arm.
2. articulated robot according to claim 1, it is characterized in that, described supporting member forms the shape at the moving direction upper offset of described hand, so that do not interfere with described pedestal when moving to the lowest positions of described pillar by described travel mechanism.
3. articulated robot according to claim 1 is characterized in that, the described rotary joint of Pei Zhi described supporting member is disposed at the position of relative biasing up and down.
4. articulated robot according to claim 1 is characterized in that, any one in the described rotary joint of Pei Zhi described supporting member is disposed at the position of setovering relatively on the moving direction of described hand up and down.
5. articulated robot according to claim 1, it is characterized in that, the described rotary joint that is configured in downside of the described rotary joint of Pei Zhi described supporting member is disposed at the position at the moving direction upper offset of described hand with respect to the described rotary joint of upside up and down.
6. articulated robot according to claim 1 is characterized in that described travel mechanism has sealing function.
7. an articulated robot possesses: the hand of mounting load; Be connected with described hand, possess the rotary joint more than at least 2, described hand is stretched movably to a direction, be configured to the multi-joint arm of subtend in the axial direction; To described multi-joint arm and the supporting member that the travel mechanism on the pillar is connected that is installed in that moves up and down; And be installed on the pedestal with spinfunction of described travel mechanism, it is characterized in that,
Form the pivot that makes the described rotary joint that is disposed at described supporting member, the pivot of hand and pivot biasing as one man on the axis of the moving direction of hand of pedestal.
8. articulated robot according to claim 7, it is characterized in that, the position relation of the pivot of the pivot of described rotary joint, the pivot of hand and pedestal forms, described hand is carried out when mobile with retracting, on the axis about the moving direction of hand, the order from the place ahead with the pivot of the pivot of the pivot of described rotary joint, pedestal and hand is configured.
9. an articulated robot possesses: the hand of mounting load; Be connected with described hand, possess the rotary joint more than at least 2, described hand is stretched movably to a direction, be configured to the multi-joint arm of subtend in the axial direction; To described multi-joint arm and the supporting member that the travel mechanism on the pillar is connected that is installed in that moves up and down; And be installed on the pedestal with spinfunction of described travel mechanism, it is characterized in that,
Described pillar is to connect a plurality of structure.
10. articulated robot according to claim 9 is characterized in that, possesses the peristome that the configuration of the guiding mechanism of described travel mechanism is regulated on the piece of described pillar.
11. articulated robot according to claim 9 is characterized in that, the connecting portion of the piece of described pillar forms embedded structure.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006190822 | 2006-07-11 | ||
| JP190822/2006 | 2006-07-11 | ||
| PCT/JP2007/062154 WO2008007516A1 (en) | 2006-07-11 | 2007-06-15 | Multijoint robot |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010188567 Division CN101844359B (en) | 2006-07-11 | 2007-06-15 | Multijoint robot |
| CN2010101885593A Division CN101863015B (en) | 2006-07-11 | 2007-06-15 | Multi-joint robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101360589A true CN101360589A (en) | 2009-02-04 |
| CN101360589B CN101360589B (en) | 2011-02-09 |
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ID=38923081
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101885593A Active CN101863015B (en) | 2006-07-11 | 2007-06-15 | Multi-joint robot |
| CN2007800014784A Active CN101360589B (en) | 2006-07-11 | 2007-06-15 | Multijoint robot |
| CN 201010188567 Active CN101844359B (en) | 2006-07-11 | 2007-06-15 | Multijoint robot |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101885593A Active CN101863015B (en) | 2006-07-11 | 2007-06-15 | Multi-joint robot |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010188567 Active CN101844359B (en) | 2006-07-11 | 2007-06-15 | Multijoint robot |
Country Status (5)
| Country | Link |
|---|---|
| JP (3) | JP4168410B2 (en) |
| KR (3) | KR100914387B1 (en) |
| CN (3) | CN101863015B (en) |
| TW (3) | TW200817151A (en) |
| WO (1) | WO2008007516A1 (en) |
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| CN102825598A (en) * | 2011-06-17 | 2012-12-19 | 株式会社安川电机 | Transfer robot |
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| CN108608460A (en) * | 2018-04-23 | 2018-10-02 | 深圳市华星光电半导体显示技术有限公司 | Mechanical arm configuration and robot |
| CN110454554A (en) * | 2019-08-26 | 2019-11-15 | 苏州领裕电子科技有限公司 | A kind of uniaxial folding linear arm mould group |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4655228B2 (en) * | 2006-07-11 | 2011-03-23 | 株式会社安川電機 | Articulated robot and transfer method of articulated robot |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI315243B (en) | 2009-10-01 |
| KR101120824B1 (en) | 2012-03-23 |
| JP5077406B2 (en) | 2012-11-21 |
| CN101360589B (en) | 2011-02-09 |
| TW200932456A (en) | 2009-08-01 |
| KR20080081196A (en) | 2008-09-08 |
| TWI315244B (en) | 2009-10-01 |
| KR20080082606A (en) | 2008-09-11 |
| CN101863015B (en) | 2012-02-15 |
| CN101844359B (en) | 2013-06-05 |
| KR100914386B1 (en) | 2009-08-28 |
| JP2010274413A (en) | 2010-12-09 |
| JP2008155361A (en) | 2008-07-10 |
| TW200817151A (en) | 2008-04-16 |
| TWI357375B (en) | 2012-02-01 |
| TW200930524A (en) | 2009-07-16 |
| KR20080081197A (en) | 2008-09-08 |
| KR100914387B1 (en) | 2009-08-28 |
| CN101863015A (en) | 2010-10-20 |
| JP4596375B2 (en) | 2010-12-08 |
| CN101844359A (en) | 2010-09-29 |
| JP4168410B2 (en) | 2008-10-22 |
| WO2008007516A1 (en) | 2008-01-17 |
| JPWO2008007516A1 (en) | 2009-12-10 |
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