CN104108606A - Substrate carrying device and substrate carrying method utilizing the same - Google Patents
Substrate carrying device and substrate carrying method utilizing the same Download PDFInfo
- Publication number
- CN104108606A CN104108606A CN201410160849.5A CN201410160849A CN104108606A CN 104108606 A CN104108606 A CN 104108606A CN 201410160849 A CN201410160849 A CN 201410160849A CN 104108606 A CN104108606 A CN 104108606A
- Authority
- CN
- China
- Prior art keywords
- support portion
- described support
- arm
- unit
- arm base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1628—Programme controls characterised by the control loop
- B25J9/1633—Programme controls characterised by the control loop compliant, force, torque control, e.g. combined with position control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Abstract
The invention relates to a substrate carrying device and a substrate carrying method utilizing the same. The substrate carrying device comprises a supporting portion for supporting substrates; an arm unit, wherein the supporting portion can be combined with the arm unit in a rotatable manner; an arm pedestal, wherein the arm unit can be combined with the arm pedestal in a rotatable manner; and a driving portion which enables the arm unit and the supporting portion to rotate so as to move the supporting portion. While the driving portion is moving the supporting portion, the supporting portion is moved in a direction opposite to a snaking direction of the supporting portion.
Description
Technical field
The present invention relates in the manufacturing process of electronic unit substrate transfer apparatus and board carrying method for carrying substrate.
Background technology
Read out instrument, solar cell, semiconductor element etc. (hereinafter referred to as " electronic unit ") are manufactured by various operations.In this operation, use the substrate (substrate) for the manufacture of described electronic unit.For example, described Fabrication procedure can be included in the deposition procedures of the films such as deposited conductor on substrate, quartz conductor, dielectric and with post-depositional film-shaped, become etching work procedure of predetermined pattern etc.This Fabrication procedure completes in the processing chamber that carries out concerned process steps.Substrate transfer apparatus is for carrying substrate between described chamber.
Fig. 1 is the birds-eye view of the substrate transfer apparatus that relates to of prior art.
With reference to Fig. 1, the substrate transfer apparatus 10 that prior art relates to comprises: arm base 11; The first arm mechanism 12, with described arm base 11 combinations; The second arm mechanism 13, with described the first arm mechanism 12 combinations; And support portion 14, with described the second arm mechanism 13 combinations.
Described arm base 11 is by supporting described the first arm mechanism 12, thus the substrate 100 that supports described the second arm mechanism 13, described support portion 14 and supported by described support portion 14.
Described the first arm mechanism 12 is rotatably combined on described arm base 11.Described the first arm mechanism 12 take that to be combined in position on described arm base 11 be S. A. 12a rotation.
Described the second arm mechanism 13 is rotatably combined on described the first arm mechanism 12.Described the second arm mechanism 13 take that to be combined in position on described the first arm mechanism 12 be S. A. 13a rotation.
The bottom surface of described support portion 14 supporting substrates 100.Described support portion 14 is rotatably combined on described the second arm mechanism 13.Described support portion 14 take that to be combined in position on described the second arm mechanism 13 be S. A. 14a rotation.
Although not shown, described arm base 11 is provided with the propulsion source (not shown) for mobile described the first arm mechanism 12, described the second arm mechanism 13 and described support portion 14.On described the first arm mechanism 12, described the second arm mechanism 13 and described support portion 14, be respectively equipped with pulley (not shown).Described propulsion source is connected with described pulley by driving band (not shown).Thus, when described propulsion source rotates described the first arm mechanism 12 centered by S. A. 12a, by this 13 interlock effects, described the second arm mechanism 13 and described support portion 14 rotate respectively centered by S. A. 13a, 14a.Thus, the substrate transfer apparatus 10 that prior art relates to moves described the first arm mechanism 12 and described the second arm mechanism 13 in mode overlapped or that launch described the first arm mechanism 12 and described the second arm mechanism 13, thereby can move described support portion 14, in this way, carry out carrying the operation of described substrate 100 between described processing chamber.
Wherein, the substrate transfer apparatus 10 that prior art relates to regulates hand of rotation and the rotation degree of described the first arm mechanism 12, described the second arm mechanism 13 and described support portion 14, so that described support portion 14 can be moved along straight path 20.But, owing to occurring in respectively the antagonistic force that the speed of the distortion on described the first arm mechanism 12, described the second arm mechanism 13 and described support portion 14, described the first arm mechanism 12, described the second arm mechanism 13 and 14 each spinnings of described support portion and when rotation produce, a variety of causes such as rigidity of driving band, as shown in the long and short dash line in Fig. 1, described support portion 14 cannot be moved along described straight path 20, but crawl (Meandering).
Thus, there are the following problems for the substrate transfer apparatus 10 that prior art relates to.
The first, the substrate transfer apparatus 10 that prior art relates to, because described support portion 14 cannot be moved along described straight path 20, but crawls, and therefore described support portion 14 is likely clashed into by utensils such as described processing chamber, Storage Boxes.Therefore the substrate transfer apparatus 10 that, prior art relates to has because of described support portion 14 and described substrate 100 is damaged or the damaged problem that causes the cost of technology to rise.
Second, the substrate transfer apparatus 10 relating to for prior art, following scheme was once proposed: by reducing the rotative speed of described the first arm mechanism 12, described the second arm mechanism 13 and described support portion 14, to reduce described support portion 14, depart from the degree that described straight path 20 crawls.But according to this scheme, the substrate transfer apparatus 10 that prior art relates to, owing to increasing the required time of carrying substrate 100, causes reducing capacity rating and the qualification rate of described electronic unit.
Summary of the invention
The present invention proposes in order to address the above problem, and its object is the board carrying method that a kind of substrate transfer apparatus is provided and utilizes this substrate transfer apparatus, and it can reduce support portion and depart from the degree that straight path crawls.
The board carrying method that the object of the present invention is to provide a kind of substrate transfer apparatus and utilize this substrate transfer apparatus can shorten the required time of carrying substrate in electronic unit manufacturing process.
In order to solve as above problem, the present invention can comprise following structure.
The substrate transfer apparatus the present invention relates to can comprise: support portion, for supporting substrate; Arm unit, described support portion is rotatably incorporated into described arm unit; Arm base, described arm unit is rotatably incorporated into described arm base; Drive division, rotates described arm unit and described support portion with mobile described support portion; And rotating part, rotate described arm base, with change described support portion towards, wherein, at described drive division, move in the process of described support portion, described rotating part is towards arm base described in the opposite spin of the direction of crawling of described support portion.
The substrate transfer apparatus the present invention relates to can comprise: support portion, for supporting substrate; Arm unit, described support portion is rotatably incorporated into described arm unit; Arm base, described arm unit is rotatably incorporated into described arm base; Drive division, rotates described arm unit and described support portion with mobile described support portion; And lifting unit, for arm base described in lifting, to change the height of described support portion, at described drive division, move in the process of described support portion arm base described in the reversing sense lifting of the direction of crawling that described lifting unit can be in the vertical direction of described support portion.
The substrate transfer apparatus the present invention relates to can comprise: support portion, for supporting substrate; Arm unit, described support portion is rotatably incorporated into described arm unit; Arm base, described arm unit is rotatably incorporated into described arm base; Drive division, rotates described arm unit and described support portion with mobile described support portion; Rotating part, rotates described arm base, with change described support portion towards; And correction portion, at described drive division, moving in the process of described support portion, the reversing sense of the direction of crawling in the vertical direction of described support portion or at least one direction in horizontal direction moves described arm base or described arm unit.
The board carrying method the present invention relates to can comprise: make to be combined with arm unit and the rotation of described support portion of support portion, the step of mobile described support portion; And in the process of mobile described support portion, towards the reversing sense of the direction of crawling of described support portion, move described support portion, to revise the step of the movement of described support portion.
The present invention has following effect.
The present invention departs from by reducing support portion the degree that straight path crawls, thereby can prevent that the substrate that support portion or supported portion support from being caused the phenomenon of cost of technology rising by breakage, can reduce thus and manufacture the required cost of technology of electronic unit and the manufacture unit price of electronic unit.
Because the present invention can reduce the degree of crawling in the moving process of support portion, and can improve the speed while carrying support portion, therefore shorten the required time of carrying substrate, thereby can improve capacity rating and the qualification rate of electronic unit.
Accompanying drawing explanation
Fig. 1 is the approximate vertical view of the substrate transfer apparatus that relates to of prior art.
Fig. 2 is the schematic block diagram of the substrate transfer apparatus that the present invention relates to.
Fig. 3 is the approximate three-dimensional map of the substrate transfer apparatus that the present invention relates to.
Fig. 4 and Fig. 5 are for illustrating that the substrate transfer apparatus the present invention relates to take the approximate vertical view of the action of crawling that horizontal direction is benchmark correction support portion.
Fig. 6 is for illustrating that the substrate transfer apparatus the present invention relates to take the approximate vertical view of the action of crawling that vertical direction is benchmark correction support portion.
Fig. 7 means the moving velocity of support portion and the chart of time Relationship of the substrate transfer apparatus the present invention relates to.
Fig. 8 is the schematic block diagram of the substrate transfer apparatus that relates to of variant embodiment of the present invention.
Fig. 9 is the approximate three-dimensional map of the substrate transfer apparatus that relates to of variant embodiment of the present invention.
Figure 10 is the summary precedence diagram of the board carrying method that the present invention relates to.
Reference numeral
1: substrate transfer apparatus
2: support portion
3: arm unit
4: arm base
5: drive division
6: rotating part
7: lifting unit
8: moving part
9: correction portion
100: substrate
The specific embodiment
Referring to accompanying drawing, describe the embodiment of the substrate transfer apparatus the present invention relates in detail.
With reference to Fig. 2 to Fig. 5, the substrate transfer apparatus 1 the present invention relates to is for carrying substrate 100.Described substrate 100 is for the manufacture of electronic units such as read out instrument, solar cell, semiconductor elements.For example, the substrate transfer apparatus 1 the present invention relates to can be carried described substrate 100 between the chamber that described substrate 100 is carried out to the Fabrication procedurees such as precipitation equipment, Etaching device.
The substrate transfer apparatus 1 the present invention relates to comprises: support portion 2, for supporting described substrate 100; Arm unit 3, for the rotatably combination of described support portion 2; Arm base 4, for the rotatably combination of described arm unit 3; Drive division 5, rotates described arm unit 3 and described support portion 2 for mobile described support portion 2; Rotating part 6, rotates described arm base 4, with change described support portion towards; And lifting unit 7, arm base 4 described in lifting, to change the residing height in described support portion 2.
Wherein, described support portion 2 likely cannot be moved along straight path 20 in the process moving by described drive division 5.For example, as shown in Figure 4, described support portion 2 at primary importance P1 and second place P2 mutually towards identical reference direction, and the process moving to described second place P2 from described primary importance P1 by described drive division 5, with respect to described reference direction, described support portion 2 is likely towards different direction rotations, thereby crawls.
In order to prevent this phenomenon, the substrate transfer apparatus 1 the present invention relates to, is moving in the process of described support portion 2 by described drive division 5, and described rotating part 6 can make described arm base 2 towards the opposite spin of the direction of crawling of described support portion 2.Thus, the substrate transfer apparatus that the present invention relates to 1 by reduce described support portion 2 in moving process with respect to described reference direction, towards the degree of different direction rotations, thereby reduce the degree of crawling in described support portion 2.
For example, as shown in Figure 4, when described reference direction is usingd while crawling to right rotation as benchmark in described support portion 2 between described primary importance P1 and described second place P2, as shown in Figure 5, described rotating part 6 rotates described arm base 4 by anticlockwise direction, thereby can reduce the degree of crawling of described handle 2.
Thus, the substrate transfer apparatus 1 the present invention relates to can have following effect.
First, the substrate transfer apparatus 1 the present invention relates to departs from by reducing described support portion 2 degree that described straight path 20 crawls, thereby can prevent the phenomenon that described support portion 2 or the substrate 100 being supported by described support portion 2 are clashed into by utensils such as described processing chamber, Storage Boxes.Thus, the substrate transfer apparatus 1 the present invention relates to can prevent described support portion 2 and described substrate 100 is damaged or the damaged phenomenon that causes the cost of technology to rise.Thus, with respect to prior art, because the substrate transfer apparatus 1 the present invention relates to has reduced, utilize described substrate 100 to manufacture the cost of technology of electronic unit, thereby can reduce the manufacture unit price of described electronic unit.
Second, because the substrate transfer apparatus 1 the present invention relates to has reduced the degree that described handle 2 crawls, therefore without reduction, make the speed of the described drive division 5 of described arm unit 3 and 2 rotations of described support portion, also can make described handle 2 along described straight path 20 or approach straight path 20 tracks to move.Thus, with respect to prior art, the substrate transfer apparatus 1 the present invention relates to passes through to shorten the required time of carrying substrate 100, thereby can improve capacity rating and the qualification rate of described electronic unit.
Referring to accompanying drawing, described support portion 2, described arm unit 3, described arm base 4, described drive division 5, described rotating part 6 and described lifting unit 7 are elaborated.
With reference to Fig. 2 and Fig. 3, described support portion 2 is for supporting described substrate 100.Described support portion 2 is rotatably combined on described arm unit 3.Described support portion 2 can rotatably be combined on described arm unit 3 centered by the S. A. 2a of support portion.
Described support portion 2 comprises the fork 21 that contacts described substrate 100.Described fork 21 passes through the bottom surface of the described substrate 100 of contact, thereby can support described substrate 100.Although Fig. 3 illustrates the structure that described support portion 2 comprises four forks 21, is not defined in this, described support portion 2 can comprise one, two, three or five above forks 21.
With reference to Fig. 2 and Fig. 3, described arm unit 3 moves described support portion 2.Described arm unit 3 is rotatably combined on described arm base 4.The described arm unit 3 of described drive division 5 rotation is with overlapping or launch described arm unit 3, thereby can make described support portion 2 move between described primary importance P1 and described second place P2.Now, described drive division 5 also can rotate described support portion 2.Described arm unit 3 comprises the first arm mechanism 31 and the second arm mechanism 32.
Described the first arm mechanism 31 is rotatably combined on described arm base 4.Described the first arm mechanism 31 can rotatably be combined on described arm base 4 centered by described the first arm S. A. 31a.
Described the second arm mechanism 32 is rotatably combined on described the first arm mechanism 31.Described the second arm mechanism 32 can rotatably be combined on described the first arm mechanism 31 centered by described the second arm S. A. 32a.Described drive division 5 can be overlapping or be launched the mode of described the first arm mechanism 31 and described the second arm mechanism 32, thereby can make described the first arm mechanism 31 and described the second arm mechanism 32 rotate round about.
With reference to Fig. 2 and Fig. 3, described arm base 4 is combined on described lifting unit 7.Described the first arm mechanism 31 is rotatably combined on described arm base 4.Described arm base 4 can be by described lifting unit 7 liftings.Along with described arm base 4 is by described lifting unit 7 liftings, described arm unit 3 and described support portion 2 be lifting simultaneously also.Thus, described lifting unit 7 can regulate described support portion 2 residing height in vertical direction.
With reference to Fig. 2 and Fig. 3, shown in described drive division 5(Fig. 2) by the described arm unit 3 of rotation and described support portion 2, thus mobile described support portion 2.Described drive division 5 makes described arm unit 3 and described support portion 2 respectively to clockwise direction and anticlockwise direction rotation.Thus, described drive division 5 can move from described primary importance P1 to described second place P2 described support portion 2, and can move from described second place P2 to described primary importance P1 described support portion 2.When described support portion 2 is positioned at described second place P2, can be positioned at the inside of described processing chamber or described Storage Box.When described support portion 2 is positioned at described primary importance P1, can be positioned at the outside of described processing chamber or described Storage Box.The substrate transfer apparatus 1 the present invention relates to is by described support portion 2 is moved at described primary importance P1 and described second place P2, thus carry out by described substrate 100 be carried to described processing chamber or Storage Box move into operation and described substrate 100 is taken out of from described processing chamber or Storage Box take out of operation.
Described drive division 5 can comprise the driver element 51 (shown in Fig. 2) that is arranged on described arm base 4 inside.Described driver element 51 produces for rotating the propulsive effort of described arm unit 3 and described support portion 2, so that move between described primary importance P1 and described second place P2 described support portion 2.Described driver element 51 can comprise the drive motor (not shown) for generation of propulsive effort.Described driver element 51 can also comprise: retarder (not shown), is separately positioned on described the first arm S. A. 31a, the second arm S. A. 32a and support portion S. A. 2a; And driving band (not shown), for connecting described retarder and described driver element 51.Described drive motor brings driving retarder by described transmission, thereby can rotate described arm unit 3 and described support portion 2.
Although not shown, described drive division 5 can also comprise a plurality of described driver elements 51.Now, described drive division 5 can comprise for rotating the first driver element of described the first arm mechanism 31 and for rotating the second driver element of described the second arm mechanism 32.Described the second driver element, by retarder and driving band, rotates described the second arm mechanism 32 and described support portion 2 simultaneously.
With reference to Fig. 2 to Fig. 5, described rotating part 6 can rotate described arm base 4, with change described support portion 2 towards.Described rotating part 6 passes through the described lifting unit 7 of rotation, thereby can rotate described arm base 4.Described rotating part 6 can rotatably be combined on moving part 8 centered by S. A. 6a.Because described rotating part 6 rotates centered by described S. A. 6a, thereby can make described lifting unit 7 and described arm base 4 rotate centered by described S. A. 6a.Described moving part 8 is for moving described rotating part 6 to service direction.
Described rotating part 6 can rotate described arm base 4, with change described support portion 2 towards.For example, described rotating part 6 can rotate described arm base 4 so that described support portion 2 move into described in will carry out operation and described in take out of processing chamber or the Storage Box of operation.
At described drive division 5, move in the process of described support portion 2 arm base 4 described in the opposite spin of the direction of crawling that described rotating part 6 can be in the horizontal direction of described support portion 2.
For example, as shown in Figure 4, in the process of mobile described support portion 2, when the described reference direction of take is crawled as benchmark to right rotation, as described in Figure 5, described rotating part 6 rotates described arm base 4 to anticlockwise direction, thereby can reduce the degree of crawling in the described horizontal direction of described support portion 2.Now, described rotating part 6 also can make the angle that described arm base 4 can not crawl to described support portion 2 to anticlockwise direction rotation in described reference direction to the right.
For example, described reference direction be take while crawling as benchmark to anticlockwise in described support portion 2 in moving process, and described rotating part 6 rotates described arm base 4 to clockwise direction, thereby can reduce the degree of crawling in the horizontal direction of described support portion 2.Now, described rotating part 6 also can make the angle that described arm base 4 can not crawl to described support portion 2 to clockwise direction rotation in described reference direction left.
The time point that starts to crawl in described support portion 2 or approach the time point that described support portion 2 starts to crawl, described rotating part 6 can be towards arm base 4 described in the opposite spin of crawling of described support portion 2.
Described rotating part 6 can be according to the rules control signal, towards arm base 4 described in the opposite spin of the direction of crawling of described support portion 2.Described control signal can be generated by question blank (look-up table), in this question blank, each position coordinate of process while moving between described primary importance P1 and described second place P2 according to described support portion 2, coupling has the degree of crawling of crawl direction and the described support portion 2 of described support portion 2.Described question blank can generate in advance by simulation, action experiment etc., and is kept at shown in control part 1a(Fig. 2) in.
The information that described control part 1a can have according to described question blank and the position coordinate of described support portion 2 generate described control signal.When definite described primary importance P1 and described second place P2, described control part 1a also can be according to the position coordinate of the position coordinate of described primary importance P1, described second place P2 and described primary importance P1 and described second place P2 spacing spaced apart from each other etc., by described question blank, is generated in advance and is comprised described support portion 2 all control signals of the time point of the described arm base 4 of rotating part 6 rotation, place, the anglec of rotation etc. described in mobile process between described primary importance P1, described second place P2.The substrate transfer apparatus 1 the present invention relates to can be independent of described control part 1a and form, or also can comprise described control part 1a.
Described rotating part 6 can comprise shown in rotary unit 61(Fig. 2).Described rotation unit 61 produces for rotating the propulsive effort of described arm base 4.Described rotary unit 61 can produce for rotating the propulsive effort of described arm base 4, with change described support portion 2 towards.At described drive division 5, move in the process of described support portion 2, described rotary unit 61 produces the opposite spin that propulsive effort makes the crawl direction of described arm base 4 in the horizontal direction of described support portion 2.Described rotary unit 61 can comprise the rotating machine (not shown) for generation of propulsive effort.Described rotary unit 61 can further include the retarder that is connected with described rotating machine, driving band etc.
With reference to Fig. 2 and Fig. 3, described lifting unit 7 can lifting described in arm base 4, to change the residing height in described support portion 2.Described lifting unit 7 can be combined on described rotating part 6.Described arm base 4 is liftably combined on described lifting unit 7 in described vertical direction.
With reference to Fig. 2, Fig. 3 and Fig. 6, at described drive division 5, move in the process of described support portion 2 arm base 4 described in the reversing sense lifting of the direction of crawling that described lifting unit 7 can be in the vertical direction of described support portion 2.
For example, as shown in Figure 6, while crawling downwards in support portion described in moving process 2, described lifting unit 7 is by the described arm base 4 that rises, and can reduce described support portion 2 to the degree of crawling in described vertical direction.Now, described lifting unit 7 also can make described arm base 4 rise to the height can not crawling in described support portion 2 downwards.
For example, while upwards crawling in support portion described in moving process 2, the described arm base 4 of described lifting unit 7 decline, thus can reduce the degree of crawling to described vertical direction in described support portion 2.Now, described lifting unit 7 also can make described arm base 4 drop to the height can upwards not crawling in described support portion 2.
Described lifting unit 7 can comprise shown in lifting unit 7a(Fig. 2).Described lifting unit 7a produces the propulsive effort for arm base 4 described in lifting.Described lifting unit 7a can produce the propulsive effort for arm base 4 described in lifting, to change the residing height in described support portion 2.At described drive division 5, move in the process of described support portion 2, described lifting unit 7a produces the reversing sense lifting that propulsive effort makes the crawl direction of described arm base 4 in the vertical direction of described support portion 2.Described lifting unit 7a also may further include the rack-and-pinion being connected with described lifting motor.Described lifting unit 7a also may further include ball screw and the ball nut who is connected with described lifting motor.
With reference to Fig. 2 and Fig. 3, described lifting unit 7 can comprise the first lifting mechanism 71 and the second lifting mechanism 72.
Described the first lifting mechanism 71 is combined on described rotating part 6.Along with described rotating part 6 rotates centered by described S. A. 6a, described the first lifting mechanism 71 can rotation simultaneously centered by described S. A. 6a.Described the first lifting mechanism 71 can lifting described in the second lifting mechanism 72.
Described the second lifting mechanism 72 is liftably combined on described the first lifting mechanism 71.Described arm base 4 is combined on described the second lifting mechanism 72.Thus, when described the second lifting mechanism 72 is during by described the first lifting mechanism 71 lifting, described arm base 4 is lifting simultaneously along with the lifting of described the second lifting mechanism 72.Described the second lifting mechanism 72 can lifting described in arm base 4.Now, described arm base 4 is liftably combined on described the second lifting mechanism 72.Thus, according to the distance of the first lifting mechanism 71 described in the distance of the second lifting mechanism 72 described in described the first lifting mechanism 71 liftings and described the second lifting mechanism 72 liftings, the height of described support portion 2 is subject to variation.
Although not shown, when described lifting unit 7 can comprise the first lifting mechanism 71 and the second lifting mechanism 72, described lifting unit 7 can comprise: the first lifting unit, produces the propulsive effort for the second lifting mechanism 72 described in lifting; The second lifting unit, produces the propulsive effort for arm base 4 described in lifting.Described lifting unit 7 is by described the first lifting unit and described the second lifting unit are moved individually, thereby can more accurately adjust the residing height in described support portion 2.In addition, described lifting unit 7 is by described the first lifting unit and described the second lifting unit are moved individually, thereby can further reduce the degree of crawling to described vertical direction in described support portion 2.
In described support portion, 2 start the time point crawling in described vertical direction or approach the time point that described support portion 2 starts to crawl, and described lifting unit 7 can be towards arm base 4 described in the reversing sense lifting of the direction of crawling of described support portion 2.
Described lifting unit 7 can be according to the rules control signal, arm base 4 described in the reversing sense lifting of crawling in the described vertical direction of described support portion 2.Described control signal can be generated by question blank (look-up table), in this question blank, each position coordinate of process while moving between described primary importance P1 and described second place P2 according to described support portion 2, coupling has the degree of crawling of crawl direction and the described support portion 2 of described support portion 2.Described question blank can generate in advance by simulation, action experiment etc., and is kept at shown in control part 1a(Fig. 2) in.
The information that described control part 1a can have according to described question blank and the position coordinate of described support portion 2 generate described control signal.When having determined described primary importance P1 and described second place P2, described control part 1a also can be according to the position coordinate of the position coordinate of described primary importance P1, described second place P2 and described primary importance P1 and described second place P2 spacing spaced apart from each other etc., generates in advance all control signals of the time point that comprises described support portion 2 rotating part 6 described in mobile process between described primary importance P1 and described second place P2 and make described arm base 4 rotations, place, the anglec of rotation etc. by described question blank.
As mentioned above, the substrate transfer apparatus 1 the present invention relates to, due to described rotating part 6 take described horizontal direction as benchmark rotates described arm base 4, thereby can reduce the degree of crawling in support portion described in moving process 2 in described horizontal direction.The substrate transfer apparatus 1 the present invention relates to, because described lifting unit 7 rotates up described arm base 4 at described Vertical Square, thereby can reduce the degree of crawling in support portion described in moving process 2 in described vertical direction.
Thus, the substrate transfer apparatus 1 the present invention relates to can further reduce the crawl degree of described support portion 2 in moving process, the degree such as further reduce thus the vibration of described support portion 2 in moving process, rock, thus can make support portion 2 move along described straight path 20 or the track that more approaches described straight path 20.
Thus, the substrate transfer apparatus 1 the present invention relates to prevents described support portion 2 or described substrate 100 is damaged or and the damaged phenomenon that causes the cost of technology to rise.
In addition, the substrate transfer apparatus 1 the present invention relates to is the moving velocity for the described support portion 2 of carrying substrate 100 by raising, thereby can improve capacity rating and the qualification rate of electronic unit.This is described in detail.
First, with crawling independently of described support portion 2, when the described drive division 5 described arm units 3 of rotation and described support portion 2, move with the speed of the First Speed curve G1 that represents with solid line in Fig. 7 described support portion 2.Needs T1 the first opening time when thus, move from described primary importance P1 to described second place P2 described support portion 2.
Secondly, when the degree of crawling in order to reduce described support portion 2, when described drive division 5 reduces the rotative speed of described arm units 3 and described support portion 2, move with the speed of the second speed curve G2 that represents with dotted line in Fig. 7 described support portion 2.Thus, when move from described primary importance P1 to described second place P2 described support portion 2, need second opening time T2, this second opening time T1 be longer than described first opening time T1.
Secondly, when at least one in described rotating part 6 and described lifting unit 7 reduces the degree of crawling described support portion 2, described drive division 5 can improve the rotative speed of described arm unit 3 and described support portion 2.Thus, move with the speed of the third speed curve G3 that represents with long and short dash line in Fig. 7 described support portion 2.Therefore, when move from described primary importance P1 to described second place P2 described support portion 2, need the 3rd opening time T3, the 3rd opening time T3 be shorter than described first opening time T1 and described second opening time T2.
Thus, the substrate transfer apparatus 1 the present invention relates to can reduce the degree of crawling in 2 moving process of described support portion, can improve the speed of the mobile described support portion 2 in order to carry described substrate 100 simultaneously, thereby can prevent the damaged or damaged phenomenon that causes the cost of technology to rise of described support portion 2 and described substrate 100, and can improve capacity rating and the qualification rate of described electronic unit.
The substrate transfer apparatus 1 the present invention relates to, due to the described arm base 4 of described rotating part 6 rotation, arm base 4 described in described lifting unit 7 liftings, thus the crawl degree of described support portion 2 in horizontal direction described in moving process and described vertical direction can be reduced.Therefore, the substrate transfer apparatus 1 the present invention relates to can further reduce the degree of crawling in 2 moving process of described support portion, thereby the degree such as further reduce the vibration in 2 moving process of described support portion and rock, thus, support portion 2 can be moved along described straight path 20 or the track that more approaches described straight path 20.In addition, because the substrate transfer apparatus 1 the present invention relates to can further improve the moving velocity of the described support portion 2 of carrying during described substrate 100, thereby can improve capacity rating and the qualification rate of described electronic unit.
With reference to Fig. 8 and Fig. 9, the substrate transfer apparatus 1 the present invention relates to can also comprise correction portion 9, this correction portion 9 described drive division 5 move in 2 processes of described support portion, revise described support portion 2 towards.
At described drive division 5, move in the process of described support portion 2, described correction portion 9 can move described arm base 4 towards the described vertical direction of described support portion 2 and the reversing sense of the direction of crawling at least one direction in described horizontal direction.Thus, at described drive division 5, move in the process of described support portion 2, described correction portion 9 can reduce the degree of crawling of the described support portion 2 at least one direction in described vertical direction and described horizontal direction.
When described correction portion 9 reduces the degree of crawling of the described support portion 2 in described horizontal direction, because described correction portion 9 is by shown in first S. A. 4a(Fig. 9) centered by rotate described arm base 4, thereby the reversing sense of the direction of crawling that can be in the described horizontal direction of described support portion 2 moves described arm base 4.Now, described correction portion 9 can, according to the control signal being provided by described control part 1a, be rotated described arm base 4 centered by described the first S. A. 4a.Described correction portion 9 can comprise shown in amending unit 91a(Fig. 8).Described amending unit 91 produces for rotating the propulsive effort of described arm base 4.At described drive division 5, move in the process of described support portion 2, described amending unit 91 can produce propulsive effort, and this propulsive effort makes the opposite spin of described arm base 4 direction of crawling in described horizontal direction towards described support portion 2.Described amending unit 91 can comprise the correction motor (not shown) for generation of propulsive effort.Described amending unit 91 also may further include the retarder that is connected with described correction motor, driving band etc.When described correction portion 9 reduces the crawl degree of described support portions 2 in described vertical direction, described correction portion 9 can be by arm base 4 described in lifting, and the reversing sense of the direction of crawling towards described support portion 2 in described vertical direction moves described arm base 4.Now, described amending unit 91 can produce the propulsive effort for arm base 4 described in lifting.Described amending unit 91 can produce propulsive effort, thereby moves in the process of described support portion 2 at described drive division 5, arm base 4 described in the reversing sense lifting of the direction of crawling in the described horizontal direction of described support portion 2.Described correction portion 9 can be carried out arm base 4 described in lifting according to the control signal being provided by described control part 1a.
The degree of crawling in order to reduce described support portion 2, described correction portion 9 can replace described rotating part 6 and described lifting unit 7 to move described arm base 4.Now, described correction portion 9 can comprise: the first amending unit, for generation of the propulsive effort of the described arm base 4 of rotation; The second amending unit, for generation of the propulsive effort of arm base 4 described in lifting.Described correction portion 9 also may further include linkage unit, and this linkage unit is used for connecting described correction motor and described arm base 4.Described linkage unit can be pulley, driving band, gear and chain.When described arm base 4 is during with traveling priority, described linkage unit can be any in pulley, driving band, gear, chain, tooth bar, miniature gears, ball screw or ball nut.Described correction portion 9 is passed through mobile described arm unit 3, thereby can reduce the degree of crawling in described support portion 2.Now, described correction portion 9 can move at least one in described the first arm mechanism 31 or described the second arm mechanism 32.The substrate transfer apparatus 1 the present invention relates to, because described rotating part 6, described lifting unit 7 and described correction portion 9 are moved in the mode mutually linking, thereby can reduce the degree of crawling in described support portion 2.
Described correction portion 9 is by by shown in second S. A. 4b(Fig. 9) centered by rotate described arm base 4, the reversing sense of the direction of crawling that can be in the described vertical direction of described support portion 2 moves described arm base 4.Described the second S. A. 4b refers to, perpendicular to the S. A. of described the first S. A. 4a.By rotate described arm base 4 centered by described the second S. A. 4b, described correction portion 9 can reduce the degree that described support portion 2 tilts towards described vertical direction in moving process.Described correction portion 9, according to the control signal being provided by described control part 1a, can be rotated described arm base 4 centered by described the second S. A. 4a.
Referring to accompanying drawing, describe the preferred embodiment of the board carrying method the present invention relates in detail.
With reference to Fig. 2 to Figure 10, the board carrying method the present invention relates to can utilize the substrate transfer apparatus the present invention relates to carry out.The board carrying method the present invention relates to can comprise following structure.
First, move described support portion 2(S10).This operation S10 can be by being realized by the described drive division 5 described arm units 3 of rotation and described support portion 2.The operation S10 of mobile described support portion 2 can be by moving described support portion 2 or moving described support portion from described second place P2 to described primary importance P1 and realize from described primary importance P1 to described second place P2.
Secondly, revise the movement (S20) of described support portion 2.This operation S20 can carry out in the process of operation S10 that moves described support portion 2.The operation S20 that revises the movement of described support portion 2 can be by the process in mobile described support portion 2, and the reversing sense by the direction of crawling towards described support portion 2 moves described support portion 2 and realizes.The operation S20 that revises the movement of described support portion 2 can be undertaken by any in described rotating part 6, described lifting unit 7 and described correction portion 9.
The operation S20 that revises the movement of described support portion 2 can be included in the process of mobile described support portion 2, the operation of support portion 2 described in the opposite spin of the direction of crawling in the described horizontal direction of described support portion 2.This operation can be by by the described lifting unit 7 of described rotating part 6 rotation, thereby rotates described arm base 4 and realize.Rotate the operation of described support portion 2, also can be by being realized by the described correction portion 9 described arm bases 4 of rotation or described arm unit 3.The operation of rotating described support portion 2 also can be by realizing described rotating part 6 and described correction portion 9 linkage actions.
The operation S20 that revises the movement of described support portion 2 can be included in the process of mobile described support portion 2, the operation of support portion 2 described in the reversing sense lifting of the direction of crawling in the described vertical direction of described support portion 2.This operation can be by being realized by arm base 4 described in described lifting unit 7 liftings.The operation of support portion 2 described in lifting, also can be by being realized by arm base 4 described in described correction portion 9 liftings or described arm unit 3.Described in lifting, the operation of support portion 2 also can be by realizing described lifting unit 7 and described correction portion 9 linkage actions.
The present invention described above is not defined in above-described embodiment and accompanying drawing, and within not departing from the scope of technological thought of the present invention, the present invention can carry out various replacements, distortion and change, and this easily expects to those of ordinary skill in the art.
Claims (10)
1. a substrate transfer apparatus, is characterized in that, comprising:
Support portion, for supporting substrate;
Arm unit, described support portion is rotatably incorporated into described arm unit;
Arm base, described arm unit is rotatably incorporated into described arm base;
Drive division, rotates described arm unit and described support portion with mobile described support portion; And
Rotating part, rotates described arm base, with change described support portion towards,
Wherein, at described drive division, move in the process of described support portion, described rotating part is towards arm base described in the opposite spin of the direction of crawling of described support portion.
2. substrate transfer apparatus according to claim 1, is characterized in that,
Comprise lifting unit, described lifting unit is for arm base described in lifting, to change the residing height in described support portion,
Described arm base is combined on described lifting unit,
Described lifting unit is combined on described rotating part,
Described rotating part is towards lifting unit described in the opposite spin of the direction of crawling of described support portion, thereby rotates described arm base.
3. substrate transfer apparatus according to claim 1, is characterized in that,
Comprise lifting unit, described lifting unit is for arm base described in lifting, to change the residing height in described support portion,
Arm base described in the opposite spin of the direction of crawling of described rotating part in the horizontal direction of described support portion,
Arm base described in the reversing sense lifting of the direction of crawling of described lifting unit in the vertical direction of described support portion.
4. substrate transfer apparatus according to claim 1, is characterized in that,
Described drive division comprises driver element, described driver element produces propulsive effort and rotates described arm unit and described support portion, so that make described support portion moves between the outside primary importance at processing chamber or Storage Box and the second place in the inside of described processing chamber or described Storage Box
Described rotating part comprises rotary unit, when being moved between described primary importance and the described second place in the process of described support portion by described drive division, described rotary unit produces propulsive effort with arm base described in the opposite spin of the direction of crawling towards described support portion.
5. a substrate transfer apparatus, is characterized in that, comprising:
Support portion, for supporting substrate;
Arm unit, described support portion is rotatably incorporated into described arm unit;
Arm base, described arm unit is rotatably incorporated into described arm base;
Drive division, rotates described arm unit and described support portion with mobile described support portion; And
Lifting unit, for arm base described in lifting, to change the height of described support portion,
In the process that moves described support portion by described drive division, arm base described in the reversing sense lifting of the direction of crawling of described lifting unit in the vertical direction of described support portion.
6. substrate transfer apparatus according to claim 5, is characterized in that,
Described drive division comprises driver element, described driver element produces propulsive effort and rotates described arm unit and described support portion, so that make described support portion moves between the outside primary importance at processing chamber or Storage Box and the second place in the inside of described processing chamber or described Storage Box
Described lifting unit comprises lifting unit, when being moved between described primary importance and the described second place in the process of described support portion by described drive division, described lifting unit produces propulsive effort with arm base described in the reversing sense lifting of the direction of crawling in the described vertical direction towards described support portion.
7. a substrate transfer apparatus, is characterized in that, comprising:
Support portion, for supporting substrate;
Arm unit, described support portion is rotatably incorporated into described arm unit;
Arm base, described arm unit is rotatably incorporated into described arm base;
Drive division, rotates described arm unit and described support portion with mobile described support portion;
Rotating part, rotates described arm base, with change described support portion towards; And
Correction portion, in the process that moves described support portion by described drive division, the reversing sense of the crawl direction of described correction portion in the vertical direction of described support portion or at least one direction in horizontal direction moves described arm base or described arm unit.
8. a board carrying method, is characterized in that, comprising:
The arm unit and the described support portion that are combined with support portion are rotated, with the step of mobile described support portion; And
In the process of mobile described support portion, towards the reversing sense of the direction of crawling of described support portion, move described support portion, to revise the step of the movement of described support portion.
9. board carrying method according to claim 8, is characterized in that,
The step of revising the movement of described support portion comprises: in the process of mobile described support portion, and the step of support portion described in the opposite spin of the direction of crawling in the horizontal direction of described support portion.
10. board carrying method according to claim 8, is characterized in that,
The step of revising the movement of described support portion comprises: in the process of mobile described support portion, and the step of support portion described in the reversing sense lifting of the direction of crawling in the vertical direction of described support portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0043857 | 2013-04-19 | ||
| KR1020130043857A KR101458697B1 (en) | 2013-04-19 | 2013-04-19 | Apparatus and Method for Transferring Substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104108606A true CN104108606A (en) | 2014-10-22 |
Family
ID=51705636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410160849.5A Pending CN104108606A (en) | 2013-04-19 | 2014-04-21 | Substrate carrying device and substrate carrying method utilizing the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2014212321A (en) |
| KR (1) | KR101458697B1 (en) |
| CN (1) | CN104108606A (en) |
| TW (1) | TWI519459B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6352016B2 (en) * | 2014-03-27 | 2018-07-04 | 日本電産サンキョー株式会社 | Industrial robot |
| KR102274172B1 (en) * | 2015-03-03 | 2021-07-07 | 현대중공업지주 주식회사 | Apparatus for Transferring Substrate and Supporting Hand Device for Transferring Substrate |
| CN106625589B (en) * | 2016-12-06 | 2023-08-15 | 东莞市科纯电子有限公司 | Manipulator for conveying PCBA (printed Circuit Board Assembly) and manufacturing method thereof |
| CN114619433B (en) * | 2022-03-18 | 2023-08-15 | 唐山因泰智能科技发展有限公司 | Telescopic operating mechanism |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11165283A (en) * | 1997-12-04 | 1999-06-22 | Yaskawa Electric Corp | Control method for scalar type robot |
| JP3170493B2 (en) * | 1999-06-16 | 2001-05-28 | 川崎重工業株式会社 | Robot arm deflection correction device |
| TW457173B (en) * | 1998-12-10 | 2001-10-01 | Komatsu Mfg Co Ltd | Work carrier device and attitude holding method of work carrier device |
| JP2007030163A (en) * | 2006-10-16 | 2007-02-08 | Nidec Sankyo Corp | Double arm type robot |
| CN101360589A (en) * | 2006-07-11 | 2009-02-04 | 株式会社安川电机 | Multijoint robot |
| KR100889957B1 (en) * | 2007-09-12 | 2009-03-20 | (주) 에스.피.시스템스 | Robot module for conveying glass substrates |
| JP4591624B1 (en) * | 2010-03-12 | 2010-12-01 | 株式会社安川電機 | Industrial robot |
| JP2012231041A (en) * | 2011-04-27 | 2012-11-22 | Hitachi High-Tech Control Systems Corp | Substrate carrier |
| JP2013018617A (en) * | 2011-07-12 | 2013-01-31 | Murata Machinery Ltd | Carrying vehicle |
| US20130041505A1 (en) * | 2011-08-08 | 2013-02-14 | Applied Materials, Inc. | Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000176876A (en) * | 1998-12-10 | 2000-06-27 | Komatsu Ltd | Work carrier device and attitude holding method of work carrier device |
| JP2000183128A (en) * | 1998-12-17 | 2000-06-30 | Komatsu Ltd | Controller for work carrying apparatus |
| JP4840599B2 (en) * | 2007-07-19 | 2011-12-21 | 株式会社安川電機 | Work transfer device |
| CN102985231B (en) * | 2010-07-14 | 2015-06-10 | 日本电产三协株式会社 | Industrial robot, method for controlling industrial robot, and method for teaching industrial robot |
-
2013
- 2013-04-19 KR KR1020130043857A patent/KR101458697B1/en active IP Right Grant
-
2014
- 2014-04-18 JP JP2014086345A patent/JP2014212321A/en active Pending
- 2014-04-21 TW TW103114407A patent/TWI519459B/en active
- 2014-04-21 CN CN201410160849.5A patent/CN104108606A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11165283A (en) * | 1997-12-04 | 1999-06-22 | Yaskawa Electric Corp | Control method for scalar type robot |
| TW457173B (en) * | 1998-12-10 | 2001-10-01 | Komatsu Mfg Co Ltd | Work carrier device and attitude holding method of work carrier device |
| JP3170493B2 (en) * | 1999-06-16 | 2001-05-28 | 川崎重工業株式会社 | Robot arm deflection correction device |
| CN101360589A (en) * | 2006-07-11 | 2009-02-04 | 株式会社安川电机 | Multijoint robot |
| JP2007030163A (en) * | 2006-10-16 | 2007-02-08 | Nidec Sankyo Corp | Double arm type robot |
| KR100889957B1 (en) * | 2007-09-12 | 2009-03-20 | (주) 에스.피.시스템스 | Robot module for conveying glass substrates |
| JP4591624B1 (en) * | 2010-03-12 | 2010-12-01 | 株式会社安川電機 | Industrial robot |
| JP2012231041A (en) * | 2011-04-27 | 2012-11-22 | Hitachi High-Tech Control Systems Corp | Substrate carrier |
| JP2013018617A (en) * | 2011-07-12 | 2013-01-31 | Murata Machinery Ltd | Carrying vehicle |
| US20130041505A1 (en) * | 2011-08-08 | 2013-02-14 | Applied Materials, Inc. | Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201441123A (en) | 2014-11-01 |
| KR101458697B1 (en) | 2014-11-05 |
| TWI519459B (en) | 2016-02-01 |
| KR20140125692A (en) | 2014-10-29 |
| JP2014212321A (en) | 2014-11-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104108606A (en) | Substrate carrying device and substrate carrying method utilizing the same | |
| JP6862233B2 (en) | Industrial robot | |
| JP5922284B2 (en) | Transfer robot | |
| CN104973420B (en) | Board carrying machine people drive device and the board carrying method using the device | |
| JP6295037B2 (en) | Industrial robot | |
| CN107530876A (en) | Horizontal articulated robot | |
| JP2012510160A (en) | Method and apparatus for conditioning a pad by linear motion | |
| JP6314161B2 (en) | Substrate transfer system and method | |
| CN103806095A (en) | Planetary rotary tray device | |
| TW201347074A (en) | Carrier device | |
| JP2009018406A (en) | Polishing machine and its transport tool | |
| KR102279408B1 (en) | Transfer robot with multi arm | |
| KR102577020B1 (en) | Industrial robot and manufacturing system | |
| KR100863439B1 (en) | Apparatus And Method for Scribing Substrate | |
| KR20160041178A (en) | Apparatus for guiding transportation and apparatus for transferring substrate | |
| JP6606319B2 (en) | Industrial robot | |
| JP2013084823A (en) | Transfer robot and vacuum device | |
| JP2003051525A6 (en) | Substrate transport apparatus and substrate transport method | |
| KR20150115130A (en) | Transfer arm and apparatus for transferring substrate | |
| KR100576509B1 (en) | Cassette sending apparatus | |
| KR20150009189A (en) | Apparatus for driving and apparatus for transferring substrate | |
| KR102274172B1 (en) | Apparatus for Transferring Substrate and Supporting Hand Device for Transferring Substrate | |
| JP2005329361A (en) | Paste coating apparatus and method | |
| JPH09234681A (en) | Carrying device | |
| JP2013082031A (en) | Conveyance robot and vacuum device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141022 |