JP2022104004A - Industrial robot - Google Patents

Abstract

To provide an industrial robot which includes a hand linearly reciprocating in a longitudinal direction with respect to an arm, conveys a conveyance object in a vacuum, can properly guide and protect wiring between the arm and the hand even if wiring is laid between the arm and the hand, and can suppress generation of dust.SOLUTION: An industrial robot 1 includes a link mechanism 23 which has one end rotatably connected to a link support member 21 fixed to a rear end of an arm 9 and the other end rotatably connected to a rear end of a hand 6. Wiring is laid between the link support member 21 and the hand 6 along the link mechanism 23. The link mechanism 23 has a link member 85 having a base end rotatably connected to the link support member 21 and a link member 86 having a tip rotatably connected to the rear end of the hand 6 and a base end rotatably connected to a tip of the link member 85.SELECTED DRAWING: Figure 1

Description

The present invention relates to an industrial robot for transporting an object to be transported in a vacuum.

Conventionally, an industrial robot that conveys a glass substrate in a vacuum is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 includes two hands on which a glass substrate is mounted, two hand support members to which the hands are fixed, an arm for holding the two hand support members, and an arm. It has a main body to be connected. The arm is formed in a substantially rectangular cuboid shape elongated in the front-rear direction. The hand support member can reciprocate linearly in the front-rear direction with respect to the arm. In the industrial robot described in Patent Document 1, the hand and the arm are arranged in a vacuum chamber (in a vacuum).

Japanese Unexamined Patent Publication No. 2019-25587

The inventor of the present application attaches a sensor for detecting a transported object to a hand in an industrial robot that transports a transported object such as a glass substrate in a vacuum like the industrial robot described in Patent Document 1. I am considering that. In this case, it is necessary to route the wiring between the arm and the hand. Therefore, the inventor of the present application has considered installing a cable bear (registered trademark) between the arm and the hand in order to guide and protect the wiring between the arm and the hand.

However, the cable bear (registered trademark) is composed of a large number of link members rotatably connected to each other and includes many moving parts. Therefore, if a cable bear (registered trademark) is installed between the arm and the hand, many movable parts become sliding points when the hand moves with respect to the arm, and dust is likely to be generated. That is, if a cable bear (registered trademark) is installed between the arm and the hand, dust is likely to be generated in a vacuum, and as a result, the disposal of dust in a vacuum becomes a problem.

Therefore, an object of the present invention is to provide an industrial robot on which an object to be transported is mounted and a hand that linearly reciprocates in the front-rear direction with respect to the arm, and transports the object to be transported in a vacuum. An industrial robot that can properly guide and protect the wiring between the arm and the hand and suppress the generation of dust even if the wiring is routed between the arm and the hand. Is to provide.

In order to solve the above problems, the industrial robot of the present invention is an industrial robot that transports an object to be transported in a vacuum, and includes a hand on which the object to be transported is mounted, a hand support member to which the hand is fixed, and a hand support member to which the hand is fixed. An arm that holds the hand support member so that the hand support member can reciprocate linearly in the horizontal direction, a main body to which the arm is connected, and a drive mechanism that reciprocates the hand support member with respect to the arm. When the reciprocating movement direction of the hand support member with respect to the arm is set to the front-rear direction, the link support member fixed to the rear end portion of the arm and one end portion are rotatably connected to the link support member and the other end portion. The link mechanism comprises a link mechanism that is rotatably connected to the rear end of the hand and wiring that is routed between the link support member and the hand along the link mechanism. The first link member rotatably connected to the support member and the tip end rotatably connected to the rear end of the hand and the base end rotatably connected to the tip of the first link member. The first link member is capable of rotating with respect to the link support member in the vertical direction as the axial direction of rotation, and the second link member is a hand and a second link member. It is characterized in that it can rotate with respect to one link member in the vertical direction as the axial direction of rotation.

In the industrial robot of the present invention, one end is rotatably connected to a link support member fixed to the rear end of the arm, and the other end is rotatably connected to the rear end of the hand. The mechanism is provided, and the wiring is routed between the link support member and the hand along the link mechanism. Therefore, in the present invention, the link mechanism makes it possible to appropriately guide the wiring between the arm and the hand and to appropriately protect the wiring.

Further, in the present invention, in the link mechanism, the base end portion is rotatably connected to the first link member whose base end portion is rotatably connected to the link support member, and the tip end portion is rotatably connected to the rear end portion of the hand. The portion includes a second link member rotatably connected to the tip end portion of the first link member. Therefore, in the present invention, the sliding portion when the hand moves with respect to the arm is the connecting portion between the base end portion of the first link member and the link support member, and the tip end portion of the second link member and the rear end of the hand. Only the connecting portion with the portion and the connecting portion between the tip end portion of the first link member and the base end portion of the second link member can be used. Therefore, in the present invention, it is possible to suppress the generation of dust even if the wiring is routed between the arm and the hand.

In the present invention, for example, in the link mechanism, a first fulcrum portion that is a connecting portion between the base end portion of the first link member and the link support member, and a connection between the tip end portion of the second link member and the rear end portion of the hand. It is provided with a second fulcrum portion as a portion and a third fulcrum portion as a connecting portion between the tip end portion of the first link member and the base end portion of the second link member, and the first fulcrum portion is the first link member. A first fixed shaft fixed to either a base end portion or a link support member and a first bearing that rotatably supports the first fixed shaft are provided, and a second fulcrum portion is a second link member. A second fixed shaft fixed to either the tip portion or the rear end portion of the hand and a second bearing for rotatably supporting the second fixed shaft are provided, and the third fulcrum portion is a first link member. It is provided with a third fixed shaft fixed to either the tip end portion or the base end portion of the second link member, and a third bearing that rotatably supports the third fixed shaft.

In the present invention, the first link member and the second link member are formed in an elongated square groove shape, and the wiring routed along the link mechanism is formed in a square groove shape as the first link member and the second link. It is housed inside the member, and the first link member and the second link member hold a part of the wiring housed inside the first link member and a part of the wiring housed inside the second link member. It is preferable that the wiring holding member for this purpose is fixed. With such a configuration, a relatively simple configuration makes it possible to appropriately guide the wiring between the arm and the hand and to appropriately protect the wiring.

In the present invention, assuming that the direction orthogonal to the vertical direction and the front-back direction is the left-right direction, the base end portion of the first link member is connected to the link support member on one side in the left-right direction with respect to the arm, and the second link member is connected. The tip of the hand is connected to one end in the left-right direction of the hand, and the connection between the tip of the first link member and the base end of the second link member is connected to the base end of the first link member. It is preferable that the portion is arranged on the other side in the left-right direction from the connecting portion with the link support member and the connecting portion between the tip end portion of the second link member and the hand. With this configuration, the movement distance of the hand with respect to the arm is long, and as a result, even if the lengths of the first link member and the second link member are long, the industry when the link mechanism is bent and contracted. It is possible to reduce the outer shape of the industrial robot.

In the present invention, the industrial robot is, for example, rotatably connected to a first hand and a second hand as hands, one end thereof to a link support member, and the other end to the rear end portion of the first hand. The first link mechanism as a link mechanism that is rotatably connected, one end is rotatably connected to the link support member, and the other end is rotatably connected to the rear end of the second hand. A second link mechanism is provided as a link mechanism, and the first hand and the second hand overlap each other in the vertical direction when viewed from the front-rear direction, and one end of the first link mechanism connected to the link support member. The portion and one end of the second link mechanism overlap in the vertical direction.

In this case, since one end of the first link mechanism and one end of the second link mechanism are connected to a common link support member, the link support member to which one end of the first link mechanism is connected and the first one are connected. It is possible to simplify the configuration of the industrial robot as compared with the case where the link support member to which one end of the two-link mechanism is connected is individually provided. Further, in this case, since one end of the first link mechanism connected to the link support member and one end of the second link mechanism overlap each other in the vertical direction, the first link mechanism and the second link mechanism are combined. Even if two link mechanisms are installed in an industrial robot, it is possible to compactly arrange the two link mechanisms.

As described above, in the present invention, in an industrial robot in which a transport object is mounted and a hand that linearly reciprocates in the front-rear direction with respect to the arm is provided, and the transport object is transported in a vacuum, the arm and the arm are provided. Even if the wiring is routed between the hand and the hand, the wiring can be appropriately guided and protected between the arm and the hand, and the generation of dust can be suppressed.

It is a top view of the industrial robot which concerns on embodiment of this invention. It is a side view of the industrial robot shown in FIG. It is a rear view of the industrial robot shown in FIG. 1. It is a top view for demonstrating the structure of the industrial robot shown in FIG. It is a side view for demonstrating the structure of the drive mechanism and the guide mechanism shown in FIG. It is a back view for demonstrating the structure of the guide mechanism shown in FIG. (A) is a plan view for explaining the structure of the link mechanism shown in FIG. 1, and (B) is a side view for explaining the structure of the link mechanism shown in FIG. (A) is an enlarged view of part E of FIG. 7 (A), and (B) is an enlarged view of part F of FIG. 7 (A). It is an enlarged view of the part G of FIG. 7B. It is an enlarged view of the H part of FIG. 7B. It is an enlarged view of the J part of FIG. 7B. (A) is a cross-sectional view taken along the line KK of FIG. 7 (A), and FIG. 7 (B) is a cross-sectional view taken along the line LL of FIG. 7 (A).

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Overall configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a side view of the industrial robot 1 shown in FIG. FIG. 3 is a rear view of the industrial robot 1 shown in FIG. FIG. 4 is a plan view for explaining the configuration of the industrial robot 1 shown in FIG. FIG. 5 is a side view for explaining the configuration of the drive mechanism 18 and the guide mechanism 20 shown in FIG. FIG. 6 is a rear view for explaining the configuration of the guide mechanisms 19 and 20 shown in FIG.

The industrial robot 1 (hereinafter referred to as “robot 1”) of the present embodiment is a robot for transporting a transport object 2 (hereinafter referred to as “work 2”) in a vacuum. The weight of the work 2 conveyed by the robot 1 is relatively heavy. For example, the weight of the work 2 is about 270 kg. The work 2 is formed in the shape of a rectangular flat plate. The robot 1 has two hands 5 and 6 on which the work 2 is mounted, a hand support member 7 (see FIG. 6) to which the hand 5 is fixed, and a hand support member 8 to which the base end portion of the hand 6 is fixed. And an arm 9 for holding the hand support members 7 and 8, and a main body portion 10 to which the arm 9 is connected are provided. The hand 5 of this embodiment is the first hand, and the hand 6 is the second hand.

The main body 10 includes a rotation shaft 11 to which the arm 9 is fixed, a rotation mechanism 12 for rotating the rotation shaft 11, and an elevating mechanism for raising and lowering the rotation shaft 11 and the rotation mechanism 12. It is provided with a case body 13 for accommodating. The rotation shaft 11 is formed in an elongated cylindrical shape. The rotating shaft 11 is arranged so that the axial direction of the rotating shaft 11 and the vertical direction coincide with each other, and the rotating shaft 11 can rotate with the vertical direction as the axial direction of rotation. The rotation mechanism 12 includes, for example, a motor for rotating the rotation shaft 11, a pulley and a belt for transmitting the power of the motor to the rotation shaft 11. The case body 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case body 13. The flange 14 is formed with a through hole in which the upper end side portion of the rotating shaft 11 is arranged.

The hands 5, 6, the hand support members 7, 8 and the arm 9 are arranged on the upper side of the main body 10. As described above, the robot 1 conveys the work 2 in a vacuum. In this embodiment, the portion of the robot 1 above the lower end surface of the flange 14 is arranged in the vacuum region VR, and the hands 5, 6, the hand support members 7, 8 and the arm 9 are in the vacuum chamber ( (In a vacuum). On the other hand, the portion of the robot 1 below the lower end surface of the flange 14 is arranged in the atmospheric region AR (in the atmosphere).

The arm 9 holds the hand support members 7 and 8 so that the hand support members 7 and 8 can reciprocate linearly in the horizontal direction. Specifically, the arm 9 allows the hand support member 7 and the hand support member 8 to linearly reciprocate in the same horizontal direction (that is, the hand 5 and the hand 6 are the same in the horizontal direction). The hand support members 7 and 8 are held (so that they can reciprocate linearly in the direction). In this embodiment, the moving distance of the hand support members 7 and 8 with respect to the arm 9 is relatively long. For example, the moving distance of the hand support members 7 and 8 with respect to the arm 9 is 4700 mm.

In the following description, the reciprocating movement direction (X direction in FIG. 1 and the like) of the hand support members 7 and 8 with respect to the arm 9 is defined as the “front-back direction”, and FIG. The Y direction is defined as the "left-right direction". Further, the X1 direction side of FIG. 1, which is one side in the front-rear direction, is the "front" side, and the X2 direction side of FIG. 1, which is the opposite side, is the "rear" side, and is one side in the left-right direction. The Y1 direction side of the first magnitude is the "right" side, and the opposite side, the Y2 direction side of FIG. 1 etc., is the "left" side.

The robot 1 guides the drive mechanism 17 that reciprocates the hand support member 7 with respect to the arm 9, the drive mechanism 18 that reciprocates the hand support member 8 with respect to the arm 9, and the hand support member 7 in the front-rear direction. It includes a guide mechanism 19 and a guide mechanism 20 that guides the hand support member 8 in the front-rear direction.

Further, the robot 1 has a link support member 21 fixed to the rear end portion of the arm 9, one end thereof is rotatably connected to the link support member 21, and the other end portion is rotated to the rear end portion of the hand 5. A link mechanism 22 that is movably connected, and a link mechanism 23 that has one end rotatably connected to the link support member 21 and the other end rotatably connected to the rear end of the hand 6. A wiring (cable) 24 routed between the link support member 21 and the hands 5 and 6 along the link mechanisms 22 and 23 is provided. The link mechanism 22 of this embodiment is a first link mechanism, and the link mechanism 23 is a second link mechanism.

The arm 9 is arranged below the hands 5 and 6. The arm 9 is formed in a substantially rectangular cuboid shape elongated in the front-rear direction. The arm 9 includes a block-shaped arm main body 27 (see FIG. 4) constituting the central portion of the arm 9, and a plurality of flat plate-shaped flat plate members 28 fixed to the arm main body 27. The arm body 27 is formed in a rectangular cuboid shape elongated in the front-rear direction. The flat plate members 28 are arranged on both sides of the arm main body 27 in the front-rear direction and on both sides in the left-right direction. As shown in FIG. 6, the heights of both ends of the arm 9 in the left-right direction are higher than the height of the center portion in the left-right direction of the arm 9.

The arm body 27 is fixed to the rotation shaft 11. Specifically, the central portion of the arm body 27 in the left-right direction is fixed to the upper end surface of the rotation shaft 11. A through hole 27a that penetrates the arm body 27 in the vertical direction is formed at a position of the arm body 27 where the rotation shaft 11 is fixed (see FIG. 4). The through hole 27a is formed in a circular shape centered on the axis of the rotating shaft 11 formed in a cylindrical shape.

The hand 5 includes a plurality of forks 40 on which the work 2 is mounted, and a hand base 41 to which the base ends of the plurality of forks 40 are fixed. Like the hand 5, the hand 6 includes a plurality of forks 40 on which the work 2 is mounted, and a hand base 42 to which the base ends of the plurality of forks 40 are fixed. The hands 5 and 6 of this embodiment include four forks 40. The fork 40 is formed in a straight line elongated in the front-rear direction. The rear end portion of the fork 40 is fixed to the hand bases 41 and 42. The hand base 41 constitutes the rear end of the hand 5, and the hand base 42 constitutes the rear end of the hand 6.

The hand bases 41 and 42 are formed in a substantially rectangular flat plate shape elongated in the left-right direction. The length of the hand base 41 (length in the left-right direction) is shorter than the length of the hand base 42 (length in the left-right direction). The hand base 41 and the hand base 42 are arranged so as to overlap each other in the vertical direction when viewed from the front-rear direction. That is, the hand 5 and the hand 6 overlap each other in the vertical direction when viewed from the front-rear direction. In this embodiment, the hand 6 is arranged on the upper side and the hand 5 is arranged on the lower side when viewed from the front-rear direction.

The width of the hands 5 and 6 in the left-right direction is wider than the width of the arm 9 in the left-right direction. As shown in FIGS. 3 and 6, the hand 5 and the hand 6 are arranged so that the center of the hand 5 and the center of the hand 6 coincide with each other in the left-right direction when viewed from the front-rear direction. Further, the hands 5 and 6 are arranged so that the center of the hands 5 and 6 and the center of the arm 9 coincide with each other in the left-right direction when viewed from the front-rear direction.

The tip (front end) of the fork 40 is arranged in front of the main body 10 even when the hands 5 and 6 are moved to the rearmost side with respect to the arm 9 (see FIG. 1). That is, the tips of the hands 5 and 6 are arranged in front of the main body 10 even when the hand support members 7 and 8 are moved to the rearmost side with respect to the arm 9. Therefore, the tips of the hands 5 and 6 move away from the main body 10 as the hand support members 7 and 8 move forward with respect to the arm 9.

The hand support member 7 is composed of two slide members 43 arranged under the hand base 41 (see FIG. 6). The two slide members 43 are arranged so as to be spaced apart from each other in the left-right direction. In the left-right direction, the two slide members 43 are arranged between both ends of the arm 9 having a high height in the left-right direction. The shape of the slide member 43 when viewed from the front-rear direction is substantially L-shaped. The hand base 41 is fixed to the upper end surface of the slide member 43.

The hand support member 8 is composed of two slide members 44 arranged under the hand base 42. The two slide members 44 are arranged so as to be spaced apart from each other in the left-right direction. Further, the two slide members 44 are arranged outside the arm 9 in the left-right direction. The shape of the slide member 44 when viewed from the front-rear direction is substantially L-shaped. The hand base 42 is fixed to the upper end surface of the slide member 44.

The drive mechanism 17 includes a motor 46 and a power transmission mechanism 45 for transmitting the power of the motor 46 to the hand support member 7. The motor 46 is housed in a motor housing member 56 fixed to the rear surface of the arm 9. As shown in FIG. 4, the power transmission mechanism 45 includes pulleys 47, 48, 51, belts 53, 55, and the like. The belt 55 is arranged on the upper surface side of the rear end portion of the arm 9 and rotates with the vertical direction as the axial direction of rotation, and the belt 55 is arranged on the upper surface side of the front end portion of the arm 9 and rotates with the vertical direction as the axial direction of rotation. It is hung on the pulley. A hand support member 7 is fixed to the belt 55. The belt 55 is arranged between the two slide members 43 in the left-right direction.

The drive mechanism 18 includes a motor 61 and a power transmission mechanism 60 for transmitting the power of the motor 61 to the hand support member 8. The motor 61 is housed in a motor housing member 71 fixed to the right end of the rear surface of the arm 9. As shown in FIGS. 4 and 5, the power transmission mechanism 60 includes pulleys 62 to 64, 66, 67 and belts 68 to 70. The belt 70 is arranged on both sides of the rear end portion of the arm 9 in the left-right direction and rotates in the left-right direction as the axis direction of rotation, and the belt 70 is arranged on both sides of the front end portion of the arm 9 in the left-right direction and rotates in the left-right direction. It is hung on a pulley 67 that rotates in the axial direction. A hand support member 8 is fixed to the belt 70. The belt 70 is arranged on the outer side of the arm 9 in the left-right direction.

The guide mechanism 19 is arranged on the upper surface side of the arm 9. Further, the guide mechanism 19 is arranged below the slide member 43. The guide mechanism 19 includes four guide rails 76 having a longitudinal direction in the front-rear direction, and a plurality of guide blocks 77 that engage with the guide rails 76 from above. The guide rail 76 is fixed to the upper surface of the arm 9. The guide block 77 is fixed to the lower end surface of the slide member 43. A cover 78 that covers the guide mechanism 19 and the belt 55 from above is fixed to the arm 9 (see FIG. 6).

The guide mechanism 20 is arranged on both sides of the arm 9 in the left-right direction. The guide mechanism 20 includes four guide rails 80 whose longitudinal direction is the front-rear direction, and a plurality of guide blocks 81 that engage with the guide rails 80 from the outside in the left-right direction. Two of the four guide rails 80 are arranged on the right side of the arm 9, and the remaining two guide rails 80 are arranged on the left side of the arm 9. Belts 70 are arranged between the two guide rails 80 on both sides of the arm 9 in the left-right direction. The guide block 81 is fixed to the inner surface of the slide member 44 in the left-right direction. A cover 82 is fixed to the arm 9 to cover the guide mechanism 20 and the belt 70 from the outside in the left-right direction and to cover both sides in the up-down direction (see FIG. 6).

(Structure of link support member and link mechanism, wiring routing)
7 (A) is a plan view for explaining the configuration of the link mechanism 23 shown in FIG. 1, and FIG. 7 (B) is a side surface for explaining the configuration of the link mechanisms 22 and 23 shown in FIG. It is a figure. 8 (A) is an enlarged view of a portion E of FIG. 7 (A), and FIG. 8 (B) is an enlarged view of a portion F of FIG. 7 (A). FIG. 9 is an enlarged view of the G portion of FIG. 7 (B). FIG. 10 is an enlarged view of the H portion of FIG. 7 (B). FIG. 11 is an enlarged view of the J portion of FIG. 7 (B). 12 (A) is a cross-sectional view taken along the line KK of FIG. 7 (A), and FIG. 12 (B) is a cross-sectional view taken along the line LL of FIG. 7 (A).

The link support member 21 is fixed to the rear surface of the arm 9. The link support member 21 includes a first support portion 21a extending from the rear surface of the arm 9 toward the rear side, a second support portion 21b extending from the rear end of the first support portion 21a toward the right side, and a second support portion 21b. It is composed of a third support portion 21c extending upward from the right end of the. The first support portion 21a, the second support portion 21b, and the third support portion 21c are formed in a square columnar shape. The third support portion 21c is arranged on the right side of the arm 9.

When viewed from the front-rear direction, the link mechanism 22 is arranged below the link mechanism 23. In the link mechanisms 22 and 23, the link member 85 whose base end portion is rotatably connected to the link support member 21 and the link member 86 whose tip end portion is rotatably connected to the rear end portions of the hands 5 and 6. And have. The link members 85 and 86 are formed in a straight line. The base end portion of the link member 86 is rotatably connected to the tip end portion of the link member 85. The link member 85 of this embodiment is a first link member, and the link member 86 is a second link member.

Further, the link mechanisms 22 and 23 connect the fulcrum portion 87, which is the connecting portion between the base end portion of the link member 85 and the link support member 21, and the front end portion of the link member 86 and the rear end portions of the hands 5 and 6. It includes a fulcrum portion 88 as a portion, and a fulcrum portion 89 as a connecting portion between the tip end portion of the link member 85 and the base end portion of the link member 86. The fulcrum portion 87 of the present embodiment is the first fulcrum portion, the fulcrum portion 88 is the second fulcrum portion, and the fulcrum portion 89 is the third fulcrum portion.

The base end portion of the link member 85 is connected to the link support member 21 so that the link member 85 can rotate with respect to the link support member 21 in the vertical direction as the axial direction of rotation. That is, the link member 85 can rotate with respect to the link support member 21 with the vertical direction as the axial direction of rotation. Further, the base end portion of the link member 85 is connected to the rear surface side of the third support portion 21c. As described above, since the third support portion 21c is arranged on the right side of the arm 9, the base end portion of the link member 85 is connected to the link support member 21 on the right side of the arm 9.

What is the base end of the link member 85 of the link mechanism 22 connected to the rear surface side of the third support portion 21c and the base end portion of the link member 85 of the link mechanism 23 connected to the rear surface side of the third support portion 21c? , They are arranged at the same position in the front-back and left-right directions, and overlap in the up-down direction. That is, one end of the link mechanism 22 connected to the link support member 21 and one end of the link mechanism 23 connected to the link support member 21 overlap in the vertical direction.

The tip of the link member 86 is the rear end of the hands 5 and 6 (specifically, so that the link member 86 can rotate with the vertical direction as the axial direction of rotation with respect to the hands 5 and 6). Is connected to the rear side of the hand bases 41 and 42). Further, the base end portion of the link member 86 is connected to the tip end portion of the link member 85 so that the link member 86 can rotate with respect to the link member 85 in the vertical direction as the axial direction of rotation. There is. That is, the link member 86 can rotate with respect to the hands 5 and 6 and the link member 85 with the vertical direction as the axial direction of rotation.

Further, the tip portion of the link member 86 is rotatably connected to the right end portions of the hand bases 41 and 42. That is, the tip end portion of the link member 86 is connected to the right end portion of the hands 5 and 6. The tip of the link member 86 of the link mechanism 22 connected to the rear surface side of the hand base 41 and the tip of the link member 86 of the link mechanism 23 connected to the rear surface side of the hand base 42 are at the same position in the left-right direction. It is arranged in the vertical direction and overlaps in the vertical direction when viewed from the front-back direction. That is, the other end of the link mechanism 22 connected to the hand 5 and the other end of the link mechanism 23 connected to the hand 6 overlap each other in the vertical direction when viewed from the front-rear direction.

The fulcrum portion 89 (that is, the connecting portion between the tip end portion of the link member 85 and the base end portion of the link member 86) is the fulcrum portion 87 (that is, the connecting portion between the base end portion of the link member 85 and the link support member 21). And the fulcrum portion 88 (that is, the connecting portion between the link member 86 and the hand bases 41 and 42) is arranged on the left side. As shown by the alternate long and short dash line in FIG. 1, when the hands 5 and 6 move forward with respect to the main body 10, the link mechanisms 22 and 23 extend. On the other hand, as shown by the solid line in FIG. 1, when the hands 5 and 6 move to the rear side with respect to the main body portion 10, the link mechanisms 22 and 23 bend and shrink.

The link members 85 and 86 are formed in an elongated square groove shape (see FIG. 12). Specifically, the link members 85 and 86 are formed in the shape of an elongated square groove that opens on one side in the horizontal direction, and has a flat plate-shaped bottom surface parallel to the vertical direction and horizontal directions from both upper and lower ends of the bottom surface portion. It is composed of two flat plate-shaped side surface portions extending to one side. In this embodiment, the right side of the link members 85 and 86 is open when the link mechanisms 22 and 23 are extended. The vertical width (height) of the link member 85 is wider than the vertical width (height) of the link member 86.

The fulcrum portion 87 includes a fixed shaft 90 fixed to the base end portion of the link member 85, and a bearing 91 that rotatably supports the fixed shaft 90. The fulcrum portion 88 includes a fixed shaft 92 fixed to the tip end portion of the link member 86, and a bearing 93 that rotatably supports the fixed shaft 92. The fulcrum portion 89 includes a fixed shaft 94 fixed to the tip end portion of the link member 85, and a bearing 95 that rotatably supports the fixed shaft 94. Bearings 91, 93 and 95 are rolling bearings. Specifically, the bearings 91, 93, and 95 are ball bearings for a vacuum environment. The fixed shaft 90 of this embodiment is the first fixed shaft, the bearing 91 is the first bearing, the fixed shaft 92 is the second fixed shaft, the bearing 93 is the second bearing, and the fixed shaft 94 is the third fixed. It is a shaft, and the bearing 95 is a third bearing.

The fixed shaft 90 is fixed to each of the upper and lower sides of the base end portion of the link member 85. That is, two fixed shafts 90 are fixed to the base end portion of the link member 85. The fixed shaft 90 projects from the base end portion of the link member 85 on both the upper and lower sides. The bearing 91 is attached to the rear surface of the third support portion 21c. The fixed shaft 90 fixed to the base end of the link member 85 of the link mechanism 22 and the fixed shaft 90 fixed to the base end of the link member 85 of the link mechanism 23 are arranged at the same positions in the front-back and left-right directions. ing.

The fixed shaft 92 is fixed to each of the upper and lower sides of the tip portion of the link member 86. That is, two fixed shafts 92 are fixed to the tip of the link member 86. The fixed shaft 92 protrudes from the tip of the link member 86 on both the upper and lower sides. The bearing 93 is attached to the rear surface of the hand bases 41 and 42. The fixed shaft 92 fixed to the tip of the link member 86 of the link mechanism 22 and the fixed shaft 92 fixed to the base end of the link member 86 of the link mechanism 23 are arranged at the same position in the left-right direction. ..

The fixed shaft 94 is fixed to each of the upper and lower sides of the tip portion of the link member 85. That is, two fixed shafts 94 are fixed to the tip of the link member 85. The fixed shaft 94 is arranged inside the tip portion of the link member 85. The bearing 95 is attached to the base end portion of the link member 86.

The wiring 24 is routed from the inside of the main body 10 to the hands 5 and 6. One end of the wiring 24 is connected to a sensor installed on the hands 5 and 6. A part of the wiring 24 is arranged on the inner peripheral side of the rotating shaft 11 and in the through hole 27a of the arm main body 27. As shown in FIG. 4, the wiring 24 drawn out from the through hole 27a is routed toward the rear side along the upper surface of the arm 9, and then the upper surface of the first support portion 21a and the front surface of the second support portion 21b. And is routed along the front surface of the third support portion 21c to the upper end side of the third support portion 21c.

A connector for preventing air from flowing into the vacuum region VR is attached to the inner peripheral side of the upper end portion of the rotating shaft 11, and the wiring 24 is divided in this connector. Further, the terminal block 96 is attached to the vicinity of the through hole 27a on the upper surface of the arm main body 27 (specifically, the rear side of the through hole 27a) and the rear end portion of the upper surface of the first support portion 21a. The wiring 24 is also divided in the terminal block 96.

The wiring 24 routed to the upper end side of the third support portion 21c is routed to the hand bases 41 and 42 along the link mechanisms 22 and 23. The wiring 24 routed along the link mechanisms 22 and 23 is housed inside the link members 85 and 86 formed in a square groove shape. A wiring holding member 97 for holding a part of the wiring 24 housed inside the link member 85 is fixed to the link member 85. Similarly, a wiring holding member 97 for holding a part of the wiring 24 housed inside the link member 86 is fixed to the link member 86.

As shown in FIG. 7B, a plurality of wiring holding members 97 are arranged at predetermined intervals in the longitudinal direction of the link members 85 and 86. As shown in FIG. 12, the wiring holding member 97 is fixed to the bottom surface portions of the link members 85 and 86. The wiring holding member 97 is formed by bending a thin metal plate into a predetermined shape, and has a holding portion for holding a part of the wiring 24 between the thin metal plate and the bottom surface portions of the link members 85 and 86, and the link members 85 and 86. It is composed of a fixed part fixed to the bottom part of the. The upper surface of the arm 9, the upper surface of the first support portion 21a, the front surface of the second support portion 21b, and a part of the wiring 24 routed along the front surface of the third support portion 21c are also the same as the wiring holding member 97. It is held by a wiring holding member.

In the vicinity of the fulcrum portion 87, a guide member 98 for guiding the wiring 24 drawn from the third support portion 21c to the base end portion of the link member 85 is installed. The guide member 98 is fixed to the third support portion 21c. In the vicinity of the fulcrum portion 88, guide members 99 and 100 for guiding the wiring 24 drawn from the tip end portion of the link member 86 to the hand base portions 41 and 42 are installed. The guide member 99 is fixed to the hand bases 41 and 42, and the guide member 100 is fixed to the tip of the link member 86. In the vicinity of the fulcrum portion 89, a guide member 101 for guiding the wiring 24 at the fulcrum portion 89 is installed. The guide member 101 is fixed to the link member 85 and the link member 86. That is, two guide members 101 are installed in the vicinity of the fulcrum portion 89. The guide members 98 to 101 are leaf springs formed of a thin metal plate. In FIG. 8B, the guide member 100 is not shown.

In this embodiment, the rotation shaft 11 rotates in a state where the hands 5 and 6 are moved to the rearmost side with respect to the main body portion 10 (the state shown by the solid line in FIG. 1), and the hands 5 and 6 and the arm 9 rotates. That is, the hands 5, 6 and the arm 9 rotate while the link mechanisms 22 and 23 are bent. The maximum turning radius R1 (see FIG. 1) at this time is substantially equal to the maximum turning radius when the robot 1 does not have the link mechanisms 22 and 23. The link mechanisms 22 and 23 in a state where the hands 5 and 6 are moved to the rearmost side with respect to the main body 10 and are bent are arranged in the space above the motor accommodating members 56 and 71 which are dead spaces. ing.

(Main effect of this form)
As described above, in the robot 1 of the present embodiment, one end is rotatably connected to the link support member 21 fixed to the rear end of the arm 9, and the other end is connected to the rear end of the hand 5. A link mechanism 22 that is rotatably connected is provided, and the wiring 24 is routed between the link support member 21 and the hand 5 along the link mechanism 22. Further, the robot 1 is provided with a link mechanism 23 in which one end is rotatably connected to the link support member 21 and the other end is rotatably connected to the rear end of the hand 6. Is routed between the link support member 21 and the hand 6 along the link mechanism 23. Therefore, in the present embodiment, the link mechanisms 22 and 23 can appropriately guide the wiring 24 between the arm 9 and the hands 5 and 6, and can appropriately protect the wiring 24. ..

In the present embodiment, the link mechanisms 22 and 23 mainly have a link member 85 whose base end portion is rotatably connected to the link support member 21 and a tip end portion rotatably to the rear end portion of the hands 5 and 6. It is composed of a link member 86 which is connected and whose base end portion is rotatably connected to the tip end portion of the link member 85. Therefore, in the present embodiment, it is possible to set only three fulcrum portions 87 to 89 as sliding points when the hands 5 and 6 move with respect to the arm 9. Therefore, in the present embodiment, even if the wiring 24 is routed between the arm 9 and the hands 5 and 6, it is possible to suppress the generation of dust.

In this embodiment, since the moving distance of the hands 5 and 6 with respect to the arm 9 is relatively long and the length of the wiring 24 is relatively long, the wiring 24 is provided between the arm 9 and the hands 5 and 6. If a cable bear (registered trademark) is installed to route the cable bear (registered trademark), the installation space for this cable bear (registered trademark) may increase. On the other hand, in this embodiment, since the wiring 24 is routed along the two link members 85 and 86, the link members 85 and 86 are installed even if the length of the wiring 24 is relatively long. It is possible to reduce the space.

In this embodiment, the wiring 24 routed along the link mechanisms 22 and 23 is housed inside the link members 85 and 86 formed in an elongated square groove shape. Further, in the present embodiment, the wiring holding member 97 for holding a part of the wiring 24 housed inside the link members 85 and 86 is fixed to the link members 85 and 86. Therefore, in the present embodiment, the wiring 24 can be appropriately guided between the arm 9 and the hands 5 and 6 and the wiring 24 can be appropriately protected by a relatively simple configuration. ..

In this embodiment, the base end portion of the link member 85 is connected to the link support member 21 on the right side of the arm 9, and the tip end portion of the link member 86 is connected to the left end portion of the hands 5 and 6. Further, in the present embodiment, the fulcrum portion 89 is arranged on the left side of the fulcrum portion 87 and the fulcrum portion 88. Therefore, in this embodiment, the moving distances of the hands 5 and 6 with respect to the arm 9 are long, and as a result, even if the lengths of the link members 85 and 86 are long, the link mechanisms 22 and 23 are bent and shrunk. It becomes possible to reduce the outer shape of the robot 1 at the time.

For example, when the base end portion of the link member 85 is connected to the link support member 21 at the center of the arm 9 in the left-right direction, and the tip end portion of the link member 86 is connected to the center portion of the hands 5 and 6 in the left-right direction. In comparison, it becomes possible to reduce the outer shape of the robot 1 when the link mechanisms 22 and 23 are bent and contracted. Therefore, in the present embodiment, as described above, the maximum turning radius R1 can be made substantially equal to the maximum turning radius when the robot 1 does not have the link mechanisms 22 and 23.

In this embodiment, one end of the link mechanism 22 and one end of the link mechanism 23 are connected to a common link support member 21. Therefore, in the present embodiment, as compared with the case where the link support member to which one end of the link mechanism 22 is connected and the link support member to which one end of the link mechanism 23 is connected are individually provided, the robot 1 It becomes possible to simplify the configuration. Further, in this embodiment, since one end of the link mechanism 22 connected to the link support member 21 and one end of the link mechanism 23 overlap in the vertical direction, the two link mechanisms 22 and 23 are installed in the robot 1. Even if this is done, the two link mechanisms 22 and 23 can be arranged compactly.

(Other embodiments)
The above-mentioned embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited thereto, and various modifications can be carried out without changing the gist of the present invention.

In the above-described embodiment, the fixed shaft 90 may be fixed to the third support portion 21c of the link support member 21, and the bearing 91 may be attached to the base end portion of the link member 85. Further, in the above-described embodiment, the fixed shaft 92 may be fixed to the rear surfaces of the hand bases 41 and 42 (that is, the rear ends of the hands 5 and 6), and the bearing 93 may be attached to the tip of the link member 86. .. Further, in the above-described embodiment, the fixed shaft 94 may be fixed to the base end portion of the link member 86, and the bearing 95 may be attached to the tip end portion of the link member 85.

In the above-described form, the link members 85 and 86 may be formed in a groove shape other than the square groove shape, or may be formed in a shape other than the groove shape. Further, in the above-described embodiment, the number of hands included in the robot 1 may be one. In this case, the link mechanism 22 or the link mechanism 23 becomes unnecessary. Further, in the above-described embodiment, the hand support members 7 and 8 may be moved in the front-rear direction by using a ball screw.

1 Robot (industrial robot)
2 Work (object to be transported)
5 hands (1st hand)
6 hands (2nd hand)
7, 8 Hand support member 9 Arm 10 Main body 17, 18 Drive mechanism 21 Link support member 22 Link mechanism (first link mechanism)
23 Link mechanism (second link mechanism)
24 Wiring 85 Link member (1st link member)
86 link member (second link member)
87 fulcrum part (first fulcrum part)
88 fulcrum part (second fulcrum part)
89 fulcrum (third fulcrum)
90 Fixed shaft (1st fixed shaft)
91 Bearing (1st bearing)
92 Fixed shaft (second fixed shaft)
93 Bearing (2nd bearing)
94 Fixed shaft (3rd fixed shaft)
95 bearing (third bearing)
97 Wiring holding member X Front-back direction Y Left-right direction

Claims (5)

In an industrial robot that transports an object to be transported in a vacuum
A hand on which the object to be transported is mounted, a hand support member to which the hand is fixed, and an arm that holds the hand support member so that the hand support member can move linearly back and forth in the horizontal direction. It is provided with a main body to which the arm is connected and a drive mechanism for reciprocating the hand support member with respect to the arm.
When the reciprocating movement direction of the hand support member with respect to the arm is the front-back direction,
A link support member fixed to the rear end of the arm, and a link having one end rotatably connected to the link support member and the other end rotatably connected to the rear end of the hand. It comprises a mechanism and wiring routed between the link support member and the hand along the link mechanism.
The link mechanism includes a first link member whose base end portion is rotatably connected to the link support member, and a tip end portion rotatably connected to the rear end portion of the hand, and the base end portion is said to be the same. A second link member rotatably connected to the tip of the first link member is provided.
The first link member can rotate with respect to the link support member in the vertical direction as the axial direction of rotation.
The second link member is an industrial robot characterized in that it can rotate with respect to the hand and the first link member in a vertical direction as an axial direction of rotation. The link mechanism includes a first fulcrum portion that is a connecting portion between the base end portion of the first link member and the link supporting member, and a connecting portion between the tip end portion of the second link member and the rear end portion of the hand. It is provided with a second fulcrum portion to be a fulcrum, and a third fulcrum portion to be a connecting portion between the tip end portion of the first link member and the base end portion of the second link member.
The first fulcrum portion includes a first fixed shaft fixed to either a base end portion of the first link member or the link support member, and a first bearing that rotatably supports the first fixed shaft. And with
The second fulcrum portion has a second fixed shaft fixed to either the tip end portion of the second link member or the rear end portion of the hand, and a second fixed shaft that rotatably supports the second fixed shaft. Equipped with bearings,
The third fulcrum portion rotatably supports a third fixed shaft fixed to either the tip end portion of the first link member or the base end portion of the second link member, and the third fixed shaft. The industrial robot according to claim 1, further comprising a third bearing. The first link member and the second link member are formed in an elongated square groove shape.
The wiring routed along the link mechanism is housed inside the first link member and the second link member formed in a square groove shape.
The first link member and the second link member hold a part of the wiring housed inside the first link member and a part of the wiring housed inside the second link member. The industrial robot according to claim 1 or 2, wherein the wiring holding member for the robot is fixed. If the direction orthogonal to the vertical direction and the front-back direction is the left-right direction,
The base end portion of the first link member is connected to the link support member on one side in the left-right direction from the arm.
The tip of the second link member is connected to one end of the hand in the left-right direction.
The connecting portion between the tip end portion of the first link member and the base end portion of the second link member is a connecting portion between the base end portion of the first link member and the link support member, and the second link member. The industrial robot according to any one of claims 1 to 3, wherein the robot is arranged on the other side in the left-right direction from the connecting portion between the tip portion of the robot and the hand. The first hand and the second hand as the hand, one end thereof is rotatably connected to the link support member, and the other end portion is rotatably connected to the rear end portion of the first hand. As the first link mechanism as a link mechanism and the link mechanism in which one end is rotatably connected to the link support member and the other end is rotatably connected to the rear end of the second hand. Equipped with the second link mechanism of
The first hand and the second hand overlap in the vertical direction when viewed from the front-back direction.
The industry according to any one of claims 1 to 4, wherein one end of the first link mechanism connected to the link support member and one end of the second link mechanism overlap in the vertical direction. Robot for.

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