TWI315243B - - Google Patents
Info
- Publication number
- TWI315243B TWI315243B TW96125092A TW96125092A TWI315243B TW I315243 B TWI315243 B TW I315243B TW 96125092 A TW96125092 A TW 96125092A TW 96125092 A TW96125092 A TW 96125092A TW I315243 B TWI315243 B TW I315243B
- Authority
- TW
- Taiwan
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/04—Arms extensible rotatable
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006190822 | 2006-07-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200817151A TW200817151A (en) | 2008-04-16 |
TWI315243B true TWI315243B (en) | 2009-10-01 |
Family
ID=38923081
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW96125092A TW200817151A (en) | 2006-07-11 | 2007-07-10 | Multijoint robot |
TW98104232A TW200930524A (en) | 2006-07-11 | 2007-07-10 | Multijoint robot |
TW98104233A TW200932456A (en) | 2006-07-11 | 2007-07-10 | Multijoint robot |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW98104232A TW200930524A (en) | 2006-07-11 | 2007-07-10 | Multijoint robot |
TW98104233A TW200932456A (en) | 2006-07-11 | 2007-07-10 | Multijoint robot |
Country Status (5)
Country | Link |
---|---|
JP (3) | JP4168410B2 (en) |
KR (3) | KR100914387B1 (en) |
CN (3) | CN101360589B (en) |
TW (3) | TW200817151A (en) |
WO (1) | WO2008007516A1 (en) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4655228B2 (en) * | 2006-07-11 | 2011-03-23 | 株式会社安川電機 | Articulated robot and transfer method of articulated robot |
JP2010064219A (en) * | 2008-09-12 | 2010-03-25 | Yaskawa Electric Corp | Multi-joint robot |
JP4591624B1 (en) | 2010-03-12 | 2010-12-01 | 株式会社安川電機 | Industrial robot |
KR200466172Y1 (en) * | 2010-04-28 | 2013-04-09 | 히라따기꼬오 가부시키가이샤 | Substrate transferring robot |
CN103079774B (en) * | 2010-09-13 | 2015-03-04 | 丰田自动车株式会社 | Support arm |
KR101211911B1 (en) * | 2010-11-02 | 2012-12-13 | 주식회사 로보스타 | Robot for reversing panels of display apparatus |
KR101682465B1 (en) * | 2010-11-17 | 2016-12-05 | 삼성전자 주식회사 | Robot for transporting substrate |
JP5847393B2 (en) * | 2010-11-30 | 2016-01-20 | 川崎重工業株式会社 | Transfer robot |
CN102145488B (en) * | 2011-02-14 | 2012-12-26 | 山东爱通工业机器人科技有限公司 | Flexible four-DOF (Degree of Freedom) mechanical arm |
JP5565345B2 (en) * | 2011-03-07 | 2014-08-06 | 株式会社安川電機 | Transfer robot |
CN102161199B (en) * | 2011-03-16 | 2012-09-19 | 哈尔滨工业大学 | W-axis coaxial transmission mechanism for silicon wafer transmission robot |
CN102126209B (en) * | 2011-03-16 | 2012-08-15 | 哈尔滨工业大学 | W-shaft differential shaft transmission mechanism used for wafer-handling robot |
CN102126208B (en) * | 2011-03-16 | 2012-09-19 | 哈尔滨工业大学 | Parallel connection type R-shaft expansion mechanical arm |
CN102152297B (en) * | 2011-03-16 | 2013-04-10 | 哈尔滨工业大学 | Series type R-shaft expanding mechanical arm |
JP5387622B2 (en) * | 2011-06-17 | 2014-01-15 | 株式会社安川電機 | Transfer robot |
JP5429256B2 (en) * | 2011-10-03 | 2014-02-26 | 株式会社安川電機 | Robot system |
JP5768827B2 (en) * | 2013-03-14 | 2015-08-26 | 株式会社安川電機 | Robot system and workpiece transfer method |
KR101458697B1 (en) * | 2013-04-19 | 2014-11-05 | 현대중공업 주식회사 | Apparatus and Method for Transferring Substrate |
JP6295037B2 (en) * | 2013-08-08 | 2018-03-14 | 日本電産サンキョー株式会社 | Industrial robot |
KR101506188B1 (en) * | 2013-08-30 | 2015-03-26 | 주식회사 로보스타 | Transfer robot having multiple arm |
JP6352016B2 (en) * | 2014-03-27 | 2018-07-04 | 日本電産サンキョー株式会社 | Industrial robot |
CN105922233B (en) * | 2016-06-28 | 2018-08-07 | 江苏捷帝机器人股份有限公司 | A kind of high accurate intelligent mechanical arm and its working method |
CN106041876B (en) * | 2016-06-28 | 2019-01-29 | 江苏捷帝机器人股份有限公司 | A kind of the Intelligentized mechanical arm and its working method of all-around mobile |
CN105922242B (en) * | 2016-06-28 | 2018-06-29 | 江苏捷帝机器人股份有限公司 | A kind of efficient Intelligentized mechanical arm and its method of work |
CN106078724B (en) * | 2016-06-29 | 2020-01-24 | 微创(上海)医疗机器人有限公司 | Mechanical arm and surgical robot thereof |
CN106175934B (en) * | 2016-06-29 | 2019-04-30 | 微创(上海)医疗机器人有限公司 | Operating robot and its mechanical arm |
JP6873881B2 (en) * | 2017-10-13 | 2021-05-19 | 日本電産サンキョー株式会社 | Industrial robot |
KR102059445B1 (en) | 2017-11-28 | 2019-12-27 | 주식회사 엠티에스이 | Mobile work table |
CN108608460A (en) * | 2018-04-23 | 2018-10-02 | 深圳市华星光电半导体显示技术有限公司 | Mechanical arm configuration and robot |
CN110549354A (en) * | 2018-05-31 | 2019-12-10 | 北新集团建材股份有限公司 | Lower-copying type mechanical grabbing clamp |
CN110454554A (en) * | 2019-08-26 | 2019-11-15 | 苏州领裕电子科技有限公司 | A kind of uniaxial folding linear arm mould group |
JP2022104004A (en) * | 2020-12-28 | 2022-07-08 | 日本電産サンキョー株式会社 | Industrial robot |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58109284A (en) * | 1981-12-22 | 1983-06-29 | 株式会社小松製作所 | Robot device |
GB2287045B (en) * | 1994-03-04 | 1997-05-14 | Joseph Michael | Programmable materials |
JP2599571B2 (en) * | 1994-05-11 | 1997-04-09 | ダイトロンテクノロジー株式会社 | Substrate transfer robot |
JPH11347982A (en) * | 1998-06-02 | 1999-12-21 | Mecs Corp | Sliding part structure of carrying robot |
CN2341778Y (en) * | 1998-12-02 | 1999-10-06 | 和椿事业股份有限公司 | Mechanical arm |
JP3973006B2 (en) * | 2000-03-23 | 2007-09-05 | 日本電産サンキョー株式会社 | Double arm robot |
JP2003158170A (en) * | 2001-11-20 | 2003-05-30 | Aitec:Kk | Slot detector of cassette for substrate |
CN2637135Y (en) * | 2003-07-02 | 2004-09-01 | 陕西科技大学 | Can type lifting and position rotating mechanical hand |
CN100342519C (en) * | 2003-07-16 | 2007-10-10 | 东京毅力科创株式会社 | Transport device and drive mechanism |
JP4063781B2 (en) * | 2004-03-04 | 2008-03-19 | 株式会社ラインワークス | Transport device |
KR101108767B1 (en) * | 2006-07-11 | 2012-03-13 | 가부시키가이샤 야스카와덴키 | Multi-joint robot and wiring method |
-
2007
- 2007-06-15 WO PCT/JP2007/062154 patent/WO2008007516A1/en active Application Filing
- 2007-06-15 CN CN2007800014784A patent/CN101360589B/en active Active
- 2007-06-15 KR KR1020087018494A patent/KR100914387B1/en active IP Right Grant
- 2007-06-15 CN CN 201010188567 patent/CN101844359B/en active Active
- 2007-06-15 CN CN2010101885593A patent/CN101863015B/en active Active
- 2007-06-15 JP JP2007548639A patent/JP4168410B2/en active Active
- 2007-06-15 KR KR1020087018493A patent/KR101120824B1/en active IP Right Grant
- 2007-07-10 TW TW96125092A patent/TW200817151A/en unknown
- 2007-07-10 TW TW98104232A patent/TW200930524A/en unknown
- 2007-07-10 TW TW98104233A patent/TW200932456A/en unknown
- 2007-11-19 JP JP2007299111A patent/JP4596375B2/en active Active
-
2008
- 2008-04-28 KR KR20087010138A patent/KR100914386B1/en active IP Right Grant
-
2010
- 2010-09-01 JP JP2010195489A patent/JP5077406B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI357375B (en) | 2012-02-01 |
TW200817151A (en) | 2008-04-16 |
CN101360589A (en) | 2009-02-04 |
KR101120824B1 (en) | 2012-03-23 |
JP4596375B2 (en) | 2010-12-08 |
KR100914387B1 (en) | 2009-08-28 |
JP2008155361A (en) | 2008-07-10 |
JP4168410B2 (en) | 2008-10-22 |
TWI315244B (en) | 2009-10-01 |
JP2010274413A (en) | 2010-12-09 |
KR20080081196A (en) | 2008-09-08 |
CN101844359A (en) | 2010-09-29 |
JP5077406B2 (en) | 2012-11-21 |
CN101844359B (en) | 2013-06-05 |
KR100914386B1 (en) | 2009-08-28 |
TW200930524A (en) | 2009-07-16 |
WO2008007516A1 (en) | 2008-01-17 |
TW200932456A (en) | 2009-08-01 |
CN101863015B (en) | 2012-02-15 |
JPWO2008007516A1 (en) | 2009-12-10 |
KR20080082606A (en) | 2008-09-11 |
CN101360589B (en) | 2011-02-09 |
KR20080081197A (en) | 2008-09-08 |
CN101863015A (en) | 2010-10-20 |
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