KR100887272B1 - 기판 세정 방법 및 기판 세정 장치 - Google Patents

기판 세정 방법 및 기판 세정 장치 Download PDF

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Publication number
KR100887272B1
KR100887272B1 KR1020077007722A KR20077007722A KR100887272B1 KR 100887272 B1 KR100887272 B1 KR 100887272B1 KR 1020077007722 A KR1020077007722 A KR 1020077007722A KR 20077007722 A KR20077007722 A KR 20077007722A KR 100887272 B1 KR100887272 B1 KR 100887272B1
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KR
South Korea
Prior art keywords
cleaning
substrate
peripheral
cleaning member
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1020077007722A
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English (en)
Korean (ko)
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KR20070062538A (ko
Inventor
히로시 나가야스
노리오 미야모토
Original Assignee
도쿄엘렉트론가부시키가이샤
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Publication of KR20070062538A publication Critical patent/KR20070062538A/ko
Application granted granted Critical
Publication of KR100887272B1 publication Critical patent/KR100887272B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/50—Cleaning of wafers, substrates or parts of devices characterised by the part to be cleaned
    • H10P70/54—Cleaning of wafer edges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B08B1/34—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis parallel to the surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

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  • Cleaning Or Drying Semiconductors (AREA)
KR1020077007722A 2005-03-29 2006-02-28 기판 세정 방법 및 기판 세정 장치 Expired - Lifetime KR100887272B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00093435 2005-03-29
JP2005093435A JP3933670B2 (ja) 2005-03-29 2005-03-29 基板洗浄方法及び基板洗浄装置
PCT/JP2006/303691 WO2006103859A1 (ja) 2005-03-29 2006-02-28 基板洗浄方法および基板洗浄装置

Publications (2)

Publication Number Publication Date
KR20070062538A KR20070062538A (ko) 2007-06-15
KR100887272B1 true KR100887272B1 (ko) 2009-03-06

Family

ID=37053127

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077007722A Expired - Lifetime KR100887272B1 (ko) 2005-03-29 2006-02-28 기판 세정 방법 및 기판 세정 장치

Country Status (5)

Country Link
US (1) US20090050177A1 (enExample)
JP (1) JP3933670B2 (enExample)
KR (1) KR100887272B1 (enExample)
TW (1) TW200703495A (enExample)
WO (1) WO2006103859A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210089671A (ko) * 2018-11-16 2021-07-16 가부시키가이샤 에바라 세이사꾸쇼 세정 모듈, 세정 모듈을 구비하는 기판 처리 장치와 세정 방법

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4928343B2 (ja) * 2007-04-27 2012-05-09 大日本スクリーン製造株式会社 基板処理装置
JP4976949B2 (ja) 2007-07-26 2012-07-18 大日本スクリーン製造株式会社 基板処理装置
JP5064331B2 (ja) * 2008-08-11 2012-10-31 東京エレクトロン株式会社 洗浄ブラシ、基板洗浄装置及び基板洗浄方法
JP5651744B1 (ja) 2013-07-04 2015-01-14 株式会社カイジョー 超音波洗浄装置及び超音波洗浄方法
US20150107619A1 (en) * 2013-10-22 2015-04-23 Taiwan Semiconductor Manufacturing Company Limited Wafer particle removal
KR101673061B1 (ko) 2013-12-03 2016-11-04 가부시키가이샤 스크린 홀딩스 기판 처리 장치 및 기판 처리 방법
JP6302665B2 (ja) * 2013-12-24 2018-03-28 株式会社ディスコ スピンナー装置
US10128103B2 (en) * 2014-02-26 2018-11-13 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and process for wafer cleaning
JP6513492B2 (ja) * 2015-06-05 2019-05-15 東京エレクトロン株式会社 基板処理方法、基板処理装置及び記憶媒体
JP6784546B2 (ja) * 2016-09-08 2020-11-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6908474B2 (ja) * 2017-09-06 2021-07-28 株式会社ディスコ ウエーハ洗浄装置
JP7133403B2 (ja) * 2018-09-07 2022-09-08 東京エレクトロン株式会社 基板処理装置
US11717936B2 (en) * 2018-09-14 2023-08-08 Applied Materials, Inc. Methods for a web-based CMP system
JP7166132B2 (ja) 2018-10-12 2022-11-07 株式会社荏原製作所 基板洗浄部材および基板洗浄装置
JP7324621B2 (ja) * 2019-06-12 2023-08-10 株式会社ディスコ ウェーハ洗浄装置、及びウェーハの洗浄方法
JP7348021B2 (ja) * 2019-10-15 2023-09-20 株式会社荏原製作所 基板洗浄装置及び基板洗浄方法
JP7570778B2 (ja) * 2020-11-09 2024-10-22 株式会社ディスコ 洗浄装置及び加工装置
CN112435918A (zh) * 2020-12-10 2021-03-02 江西舜源电子科技有限公司 一种半导体材料的清洗装置
JP7554168B2 (ja) * 2021-09-30 2024-09-19 芝浦メカトロニクス株式会社 洗浄装置
JP2024034806A (ja) * 2022-09-01 2024-03-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及びブラシの脱落検知方法
CN116153803B (zh) * 2023-04-23 2023-07-14 苏州晶睿半导体科技有限公司 一种带有清理结构的半导体晶圆测试台及方法
KR200499749Y1 (ko) * 2024-05-29 2025-11-10 전동배 웨이트롤러를 구비한 액절장치

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JP2003163196A (ja) * 2001-11-28 2003-06-06 Kaijo Corp 半導体基板の基板洗浄装置及び洗浄方法

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JPH0810686B2 (ja) * 1990-09-14 1996-01-31 株式会社東芝 半導体基板エッチング処理装置
JPH0715897B2 (ja) * 1991-11-20 1995-02-22 株式会社エンヤシステム ウエ−ハ端面エッチング方法及び装置
KR0175278B1 (ko) * 1996-02-13 1999-04-01 김광호 웨이퍼 세정장치
US5901399A (en) * 1996-12-30 1999-05-11 Intel Corporation Flexible-leaf substrate edge cleaning apparatus
US5725414A (en) * 1996-12-30 1998-03-10 Intel Corporation Apparatus for cleaning the side-edge and top-edge of a semiconductor wafer
JP2000015190A (ja) * 1998-07-03 2000-01-18 Matsushita Electric Ind Co Ltd 基板洗浄方法及び装置
JP4040759B2 (ja) * 1998-07-29 2008-01-30 芝浦メカトロニクス株式会社 洗浄装置
US6622334B1 (en) * 2000-03-29 2003-09-23 International Business Machines Corporation Wafer edge cleaning utilizing polish pad material
US6186873B1 (en) * 2000-04-14 2001-02-13 International Business Machines Corporation Wafer edge cleaning
US6827814B2 (en) * 2000-05-08 2004-12-07 Tokyo Electron Limited Processing apparatus, processing system and processing method
JP2003151943A (ja) * 2001-11-19 2003-05-23 Speedfam Clean System Co Ltd スクラブ洗浄装置
US6910240B1 (en) * 2002-12-16 2005-06-28 Lam Research Corporation Wafer bevel edge cleaning system and apparatus
KR100562502B1 (ko) * 2003-07-02 2006-03-21 삼성전자주식회사 반도체 기판의 가장자리부 처리 장치 및 방법

Patent Citations (1)

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JP2003163196A (ja) * 2001-11-28 2003-06-06 Kaijo Corp 半導体基板の基板洗浄装置及び洗浄方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210089671A (ko) * 2018-11-16 2021-07-16 가부시키가이샤 에바라 세이사꾸쇼 세정 모듈, 세정 모듈을 구비하는 기판 처리 장치와 세정 방법
KR102778937B1 (ko) * 2018-11-16 2025-03-11 가부시키가이샤 에바라 세이사꾸쇼 세정 모듈과, 세정 모듈을 구비하는 기판 처리 장치

Also Published As

Publication number Publication date
JP3933670B2 (ja) 2007-06-20
KR20070062538A (ko) 2007-06-15
US20090050177A1 (en) 2009-02-26
JP2006278592A (ja) 2006-10-12
TWI300594B (enExample) 2008-09-01
WO2006103859A1 (ja) 2006-10-05
TW200703495A (en) 2007-01-16

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