TW200703495A - Method and apparatus for cleaning substrate - Google Patents

Method and apparatus for cleaning substrate

Info

Publication number
TW200703495A
TW200703495A TW095110738A TW95110738A TW200703495A TW 200703495 A TW200703495 A TW 200703495A TW 095110738 A TW095110738 A TW 095110738A TW 95110738 A TW95110738 A TW 95110738A TW 200703495 A TW200703495 A TW 200703495A
Authority
TW
Taiwan
Prior art keywords
wafer
cleaning
peripheral edge
attachment
cleaning member
Prior art date
Application number
TW095110738A
Other languages
English (en)
Chinese (zh)
Other versions
TWI300594B (enExample
Inventor
Hiroshi Nagayasu
Norio Miyamoto
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200703495A publication Critical patent/TW200703495A/zh
Application granted granted Critical
Publication of TWI300594B publication Critical patent/TWI300594B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/50—Cleaning of wafers, substrates or parts of devices characterised by the part to be cleaned
    • H10P70/54—Cleaning of wafer edges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B08B1/34—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis parallel to the surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
TW095110738A 2005-03-29 2006-03-28 Method and apparatus for cleaning substrate TW200703495A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005093435A JP3933670B2 (ja) 2005-03-29 2005-03-29 基板洗浄方法及び基板洗浄装置

Publications (2)

Publication Number Publication Date
TW200703495A true TW200703495A (en) 2007-01-16
TWI300594B TWI300594B (enExample) 2008-09-01

Family

ID=37053127

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095110738A TW200703495A (en) 2005-03-29 2006-03-28 Method and apparatus for cleaning substrate

Country Status (5)

Country Link
US (1) US20090050177A1 (enExample)
JP (1) JP3933670B2 (enExample)
KR (1) KR100887272B1 (enExample)
TW (1) TW200703495A (enExample)
WO (1) WO2006103859A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9815092B2 (en) 2013-07-04 2017-11-14 Kaijo Corporation Ultrasonic cleaning apparatus

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4928343B2 (ja) * 2007-04-27 2012-05-09 大日本スクリーン製造株式会社 基板処理装置
JP4976949B2 (ja) 2007-07-26 2012-07-18 大日本スクリーン製造株式会社 基板処理装置
JP5064331B2 (ja) * 2008-08-11 2012-10-31 東京エレクトロン株式会社 洗浄ブラシ、基板洗浄装置及び基板洗浄方法
US20150107619A1 (en) * 2013-10-22 2015-04-23 Taiwan Semiconductor Manufacturing Company Limited Wafer particle removal
KR101673061B1 (ko) 2013-12-03 2016-11-04 가부시키가이샤 스크린 홀딩스 기판 처리 장치 및 기판 처리 방법
JP6302665B2 (ja) * 2013-12-24 2018-03-28 株式会社ディスコ スピンナー装置
US10128103B2 (en) * 2014-02-26 2018-11-13 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and process for wafer cleaning
JP6513492B2 (ja) * 2015-06-05 2019-05-15 東京エレクトロン株式会社 基板処理方法、基板処理装置及び記憶媒体
JP6784546B2 (ja) * 2016-09-08 2020-11-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6908474B2 (ja) * 2017-09-06 2021-07-28 株式会社ディスコ ウエーハ洗浄装置
JP7133403B2 (ja) * 2018-09-07 2022-09-08 東京エレクトロン株式会社 基板処理装置
US11717936B2 (en) * 2018-09-14 2023-08-08 Applied Materials, Inc. Methods for a web-based CMP system
JP7166132B2 (ja) 2018-10-12 2022-11-07 株式会社荏原製作所 基板洗浄部材および基板洗浄装置
JP7265858B2 (ja) * 2018-11-16 2023-04-27 株式会社荏原製作所 洗浄モジュール、洗浄モジュールを備える基板処理装置と洗浄方法
JP7324621B2 (ja) * 2019-06-12 2023-08-10 株式会社ディスコ ウェーハ洗浄装置、及びウェーハの洗浄方法
JP7348021B2 (ja) * 2019-10-15 2023-09-20 株式会社荏原製作所 基板洗浄装置及び基板洗浄方法
JP7570778B2 (ja) * 2020-11-09 2024-10-22 株式会社ディスコ 洗浄装置及び加工装置
CN112435918A (zh) * 2020-12-10 2021-03-02 江西舜源电子科技有限公司 一种半导体材料的清洗装置
JP7554168B2 (ja) * 2021-09-30 2024-09-19 芝浦メカトロニクス株式会社 洗浄装置
JP2024034806A (ja) * 2022-09-01 2024-03-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及びブラシの脱落検知方法
CN116153803B (zh) * 2023-04-23 2023-07-14 苏州晶睿半导体科技有限公司 一种带有清理结构的半导体晶圆测试台及方法
KR200499749Y1 (ko) * 2024-05-29 2025-11-10 전동배 웨이트롤러를 구비한 액절장치

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JPH02130922A (ja) * 1988-11-11 1990-05-18 Toshiba Corp 半導体基板エッチング装置
JPH0810686B2 (ja) * 1990-09-14 1996-01-31 株式会社東芝 半導体基板エッチング処理装置
JPH0715897B2 (ja) * 1991-11-20 1995-02-22 株式会社エンヤシステム ウエ−ハ端面エッチング方法及び装置
KR0175278B1 (ko) * 1996-02-13 1999-04-01 김광호 웨이퍼 세정장치
US5901399A (en) * 1996-12-30 1999-05-11 Intel Corporation Flexible-leaf substrate edge cleaning apparatus
US5725414A (en) * 1996-12-30 1998-03-10 Intel Corporation Apparatus for cleaning the side-edge and top-edge of a semiconductor wafer
JP2000015190A (ja) * 1998-07-03 2000-01-18 Matsushita Electric Ind Co Ltd 基板洗浄方法及び装置
JP4040759B2 (ja) * 1998-07-29 2008-01-30 芝浦メカトロニクス株式会社 洗浄装置
US6622334B1 (en) * 2000-03-29 2003-09-23 International Business Machines Corporation Wafer edge cleaning utilizing polish pad material
US6186873B1 (en) * 2000-04-14 2001-02-13 International Business Machines Corporation Wafer edge cleaning
US6827814B2 (en) * 2000-05-08 2004-12-07 Tokyo Electron Limited Processing apparatus, processing system and processing method
JP2003151943A (ja) * 2001-11-19 2003-05-23 Speedfam Clean System Co Ltd スクラブ洗浄装置
JP2003163196A (ja) * 2001-11-28 2003-06-06 Kaijo Corp 半導体基板の基板洗浄装置及び洗浄方法
US6910240B1 (en) * 2002-12-16 2005-06-28 Lam Research Corporation Wafer bevel edge cleaning system and apparatus
KR100562502B1 (ko) * 2003-07-02 2006-03-21 삼성전자주식회사 반도체 기판의 가장자리부 처리 장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9815092B2 (en) 2013-07-04 2017-11-14 Kaijo Corporation Ultrasonic cleaning apparatus

Also Published As

Publication number Publication date
JP3933670B2 (ja) 2007-06-20
KR20070062538A (ko) 2007-06-15
KR100887272B1 (ko) 2009-03-06
US20090050177A1 (en) 2009-02-26
JP2006278592A (ja) 2006-10-12
TWI300594B (enExample) 2008-09-01
WO2006103859A1 (ja) 2006-10-05

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