KR100859818B1 - 기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법 - Google Patents

기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법 Download PDF

Info

Publication number
KR100859818B1
KR100859818B1 KR1020027016047A KR20027016047A KR100859818B1 KR 100859818 B1 KR100859818 B1 KR 100859818B1 KR 1020027016047 A KR1020027016047 A KR 1020027016047A KR 20027016047 A KR20027016047 A KR 20027016047A KR 100859818 B1 KR100859818 B1 KR 100859818B1
Authority
KR
South Korea
Prior art keywords
substrate
reactive material
measuring
penetration rate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020027016047A
Other languages
English (en)
Korean (ko)
Other versions
KR20030004438A (ko
Inventor
페트루스 세. 빼. 바우텐
기오바니 니사토
페터 예이. 슬리케르베어
헨리쿠스 에프. 예이. 예이. 반통에런
엘리아브 이. 하스칼
파울 반데어슬라위스
Original Assignee
코닌클리케 필립스 일렉트로닉스 엔.브이.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코닌클리케 필립스 일렉트로닉스 엔.브이. filed Critical 코닌클리케 필립스 일렉트로닉스 엔.브이.
Publication of KR20030004438A publication Critical patent/KR20030004438A/ko
Application granted granted Critical
Publication of KR100859818B1 publication Critical patent/KR100859818B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N15/082—Investigating permeability by forcing a fluid through a sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects
    • G01N15/12—Investigating individual particles by measuring electrical or magnetic effects by observing changes in resistance or impedance across apertures when traversed by individual particles, e.g. by using the Coulter principle
    • G01N15/131—Details
    • G01N15/132—Circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/086—Investigating permeability, pore-volume, or surface area of porous materials of films, membranes or pellicules

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
KR1020027016047A 2001-03-29 2002-03-13 기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법 Expired - Fee Related KR100859818B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP01201229.0 2001-03-29
EP01201229 2001-03-29
EP02075202.8 2002-01-17
EP02075202 2002-01-17
PCT/IB2002/000754 WO2002079757A2 (en) 2001-03-29 2002-03-13 Method and device for measuring a permeation rate

Publications (2)

Publication Number Publication Date
KR20030004438A KR20030004438A (ko) 2003-01-14
KR100859818B1 true KR100859818B1 (ko) 2008-09-24

Family

ID=26076870

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020027016047A Expired - Fee Related KR100859818B1 (ko) 2001-03-29 2002-03-13 기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법

Country Status (8)

Country Link
US (2) US6993956B2 (enExample)
EP (1) EP1373861A2 (enExample)
JP (1) JP4209194B2 (enExample)
KR (1) KR100859818B1 (enExample)
CN (1) CN1242250C (enExample)
AU (1) AU2002237478A1 (enExample)
TW (1) TWI229733B (enExample)
WO (1) WO2002079757A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104048901A (zh) * 2014-06-26 2014-09-17 河南省嵩阳高速公路有限公司 透层乳化沥青渗透效果测试方法

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2601665B2 (ja) * 1987-10-19 1997-04-16 富士写真フイルム株式会社 ハロゲン化銀カラー写真感光材料の処理方法
US5110713A (en) * 1987-10-30 1992-05-05 Fuji Photo Film Co., Ltd. Method for processing silver halide color photographic material
KR100859818B1 (ko) * 2001-03-29 2008-09-24 코닌클리케 필립스 일렉트로닉스 엔.브이. 기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법
US6998776B2 (en) * 2003-04-16 2006-02-14 Corning Incorporated Glass package that is hermetically sealed with a frit and method of fabrication
US7344901B2 (en) * 2003-04-16 2008-03-18 Corning Incorporated Hermetically sealed package and method of fabricating of a hermetically sealed package
GB0316106D0 (en) * 2003-07-09 2003-08-13 Cambridge Display Tech Ltd Test structures and methods
US7178384B2 (en) * 2004-02-04 2007-02-20 General Atomics Method and apparatus for measuring ultralow permeation
US7256542B2 (en) * 2004-02-20 2007-08-14 Au Optronics Corporation Method and device for detecting moisture in electroluminescence display devices
JP4460000B2 (ja) 2004-03-31 2010-04-28 エージェンシー フォー サイエンス，テクノロジー アンド リサーチ 試験材料のガス透過率を測定するためのセンサ
CN100507510C (zh) * 2004-09-30 2009-07-01 清华大学 一种水氧渗透率的测试方法及其测试设备
GB0505517D0 (en) 2005-03-17 2005-04-27 Dupont Teijin Films Us Ltd Coated polymeric substrates
US7257990B2 (en) * 2005-04-25 2007-08-21 General Atomics Accelerated ultralow moisture permeation measurement
DE102005057031B4 (de) * 2005-11-25 2011-04-21 Innovent E.V. Technologieentwicklung Vorrichtung für Permeations-oder Stoffdurchgangsuntersuchungen
US20080124558A1 (en) * 2006-08-18 2008-05-29 Heather Debra Boek Boro-silicate glass frits for hermetic sealing of light emitting device displays
EP1983079A1 (en) 2007-04-17 2008-10-22 Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO Barrier layer and method for making the same
CN101246095B (zh) * 2008-01-07 2011-03-30 电子科技大学 阻隔材料气体渗透率的测量装置
US20100095705A1 (en) 2008-10-20 2010-04-22 Burkhalter Robert S Method for forming a dry glass-based frit
WO2010093237A1 (en) 2009-02-11 2010-08-19 Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno Optoelectronic device and method for fabricating such device
US8388742B2 (en) * 2010-01-13 2013-03-05 E I Du Pont De Nemours And Company Apparatus to measure permeation of a gas through a membrane
EP2476784A1 (en) 2011-01-18 2012-07-18 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Method for manufacturing an electronic device by electrodeposition from an ionic liquid
CN102141504B (zh) * 2011-01-27 2013-06-12 中国商用飞机有限责任公司 在铺层厚度方向上测试气体渗透率的测试装置及其方法
CN102183444B (zh) * 2011-01-27 2013-09-25 中国商用飞机有限责任公司 在铺层面内方向上测试气体渗透率的测试装置及其方法
JP5810556B2 (ja) * 2011-03-09 2015-11-11 凸版印刷株式会社 ガス透過性試験片及びガス透過性評価方法
US9356070B2 (en) 2012-08-15 2016-05-31 Epistar Corporation Light-emitting device
US20140048824A1 (en) 2012-08-15 2014-02-20 Epistar Corporation Light-emitting device
US9086351B1 (en) * 2013-03-14 2015-07-21 The United States Of America As Represented By The Secretary Of The Army Fixture for system-level glove testing of contact permeation
CN103217459A (zh) * 2013-05-06 2013-07-24 深圳市华星光电技术有限公司 Oled面板封装效果的检测方法
KR101469533B1 (ko) * 2013-05-30 2014-12-05 전자부품연구원 외기 침투율 측정을 위한 반응 물질 카트리지 및 이를 포함하는 기판의 외기 침투율 측정 장치
DE102013022032A1 (de) 2013-12-19 2015-06-25 Technische Universität Ilmenau Verfahren zum Nachweis von Fremdstoffen oder Degradationsprodukten in verkapselten Systemen sowie dessen Verwendung
JP6635033B2 (ja) * 2014-06-17 2020-01-22 コニカミノルタ株式会社 水蒸気透過度評価方法及び水蒸気透過度評価装置
CN104465622B (zh) * 2014-12-08 2017-09-15 京东方科技集团股份有限公司 检测背板水氧透过率的方法和封装结构
US9529188B2 (en) 2015-03-25 2016-12-27 Amazon Technologies, Inc. Electrowetting device with multi layer support plate
CN105043935A (zh) * 2015-05-18 2015-11-11 华南理工大学 基于数字图像处理多孔金属材料浸润性能测量装置及方法
CN106442260B (zh) * 2016-09-27 2019-11-01 江西理工大学 一种测量稀土浸矿过程中渗透系数的方法
US11181460B1 (en) * 2019-06-20 2021-11-23 The United States Of America As Represented By The Secretary Of The Army Apparatus and method for measuring permeation of contaminants through a complex protective material swatch
CN110993521B (zh) * 2019-12-11 2025-09-09 浙江清华柔性电子技术研究院 封装测试方法和设备
US11624672B2 (en) * 2020-06-23 2023-04-11 Ateq Apparatus and method for automatic leak detection
CN114295602B (zh) * 2021-12-30 2024-03-01 中国石油大学(华东) 一种测试氢渗透路径的拉曼池系统
CN114414154A (zh) * 2022-01-21 2022-04-29 浙江省二建建设集团有限公司 一种垃圾焚烧发电厂构筑物池体工程防渗透监测装置
TW202432360A (zh) 2022-12-14 2024-08-16 德商巴斯夫塗料有限責任公司 經多層障壁膜塗覆之聚合物基板、其製造及其在電子裝置中之用途

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4326514A (en) * 1980-06-20 1982-04-27 Minnesota Mining And Manufacturing Company Cartridge respirator with service life indicator
JPS6020135A (ja) * 1983-07-15 1985-02-01 Daicel Chem Ind Ltd 膜性能測定用および漏洩検査用物質
JPS6131937A (ja) * 1984-07-25 1986-02-14 Mitsubishi Heavy Ind Ltd 漏洩欠陥部検知法
US4822743A (en) * 1984-12-13 1989-04-18 Lockheed Corporation Method and cloth for detecting leaks in closed bodies
JPS6232336A (ja) * 1985-08-05 1987-02-12 Toshiba Corp Ｉｔｖカメラによる液体漏洩検出方法
US5005557A (en) * 1985-11-29 1991-04-09 Baechli Emil Heat-insulating building and/or light element
JPH01307635A (ja) * 1988-06-03 1989-12-12 Hamamatsu Photonics Kk 被試験用薄膜の物質透過性能を評価する方法
US4848138A (en) * 1988-07-15 1989-07-18 Marshall John M Window gas monitor
DE3828531A1 (de) * 1988-08-23 1990-03-15 Rudolf Dr Ing Ernst Sauerstoffabsorptionsmittel und verwendung desselben
JPH02306132A (ja) * 1989-05-19 1990-12-19 Hitachi Cable Ltd 漏油検知法
US4987849A (en) * 1989-09-22 1991-01-29 Sherman Daniel A Signal device
US5001346A (en) * 1990-02-26 1991-03-19 Rockwell International Corporation Leak detection system with background compensation
US5128106A (en) * 1990-07-12 1992-07-07 Gte Products Corporation Lamp with an oxygen detector
US5047947A (en) * 1990-07-25 1991-09-10 Grumman Aerospace Corporation Method of modeling the assembly of products to increase production yield
US5447688A (en) * 1991-12-30 1995-09-05 Moore; Robert E. Detector, and method of using same
DE4214239C2 (de) * 1992-04-30 1994-06-16 Draegerwerk Ag Atemschutzmaske mit einem indikator
GB9311427D0 (en) * 1993-06-03 1993-07-21 Trigon Ind Ltd A multi-wall film
US5449912A (en) * 1994-06-15 1995-09-12 Modern Controls, Inc. Measurement cell for water vapor sensor
US5963881A (en) * 1995-09-22 1999-10-05 Texas Instruments Incorporated Method and system for enhancing the identification of causes of variations in the performance of manufactured articles
US5926262A (en) * 1997-07-01 1999-07-20 Lj Laboratories, L.L.C. Apparatus and method for measuring optical characteristics of an object
US5783110A (en) * 1997-04-17 1998-07-21 R-Tect, Inc. Composition for the detection of electrophilic gases and methods of use thereof
US6336753B1 (en) * 1999-01-20 2002-01-08 Sony Corporation Optical device, a fabricating method thereof, a driving method thereof and a camera system
JP2001051307A (ja) * 1999-01-20 2001-02-23 Sony Corp 光学装置、その製造方法、その駆動方法及びカメラシステム
US6259370B1 (en) * 1999-08-03 2001-07-10 Technical & Try Co., Ltd. Leak sensor
US7448258B2 (en) * 1999-10-29 2008-11-11 Avery Dennison Corporation High throughput screening for moisture barrier characteristics of materials
EP1153952A4 (en) * 1999-12-14 2004-04-28 Mitsui Chemicals Inc SEALANT FOR LIQUID CRYSTAL DISPLAY CELL, COMPOSITION FOR SEALING LIQUID CRYSTAL DISPLAY CELLS AND LIQUID CRYSTAL DISPLAY ELEMENT
US6622059B1 (en) * 2000-04-13 2003-09-16 Advanced Micro Devices, Inc. Automated process monitoring and analysis system for semiconductor processing
KR100859818B1 (ko) * 2001-03-29 2008-09-24 코닌클리케 필립스 일렉트로닉스 엔.브이. 기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법
CA2448460A1 (en) * 2001-05-24 2002-11-28 Test Advantage, Inc. Methods and apparatus for semiconductor testing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104048901A (zh) * 2014-06-26 2014-09-17 河南省嵩阳高速公路有限公司 透层乳化沥青渗透效果测试方法
CN104048901B (zh) * 2014-06-26 2016-03-30 河南省嵩阳高速公路有限公司 透层乳化沥青渗透效果测试方法

Also Published As

Publication number Publication date
US20060147346A1 (en) 2006-07-06
US20020152800A1 (en) 2002-10-24
CN1242250C (zh) 2006-02-15
KR20030004438A (ko) 2003-01-14
JP4209194B2 (ja) 2009-01-14
WO2002079757A3 (en) 2003-01-16
US7117720B2 (en) 2006-10-10
AU2002237478A1 (en) 2002-10-15
CN1460179A (zh) 2003-12-03
TWI229733B (en) 2005-03-21
EP1373861A2 (en) 2004-01-02
JP2004531711A (ja) 2004-10-14
US6993956B2 (en) 2006-02-07
WO2002079757A2 (en) 2002-10-10

Similar Documents

Publication Publication Date Title
KR100859818B1 (ko) 기판의 침투율을 측정하는 방법 및 장치, 배치로부터 기판 세트를 침투율에 대해 테스트하는 방법 및 캡슐화의 침투율을 측정하는 방법
US5030420A (en) Apparatus for oxygen determination
CN104458678B (zh) 用于光化学或电流型传感器的测量膜
CN103730071B (zh) Oled面板及其制作方法与封装效果的检测方法
US7552624B2 (en) Method and structures for detecting moisture in electroluminescence display devices
US4752447A (en) Optical filter with reversible color change
US20080199360A1 (en) Method and composition for a platinum embedded sol gel optical chemical sensor with improved sensitivity and chemical stability
RU2006133408A (ru) Колориметрический датчик
GB2132348A (en) Method and apparatus for determining the presence of oxygen
US20090289202A1 (en) Integrated Encapsulation Status Indicator
EP0514486A1 (en) RADIATION DOSE INDICATOR.
CN1894156A (zh) 用于控制微元件的封闭腔的气密性的方法和用于实施该方法的微元件
JP2020035749A (ja) 有機光電子素子のカプセル化
Liu et al. Oxygen permeability of sol-gel coatings
JP4534064B2 (ja) 有機ｅｌディスプレイの製造方法
WO2020089188A1 (en) Devices and method for measuring an analyte concentration in a sample of bodily fluid
WO2008098722A1 (en) Transillumination measurement device
JP3388412B2 (ja) 低酸素透過率用の画像形成システム
JP2000009847A (ja) シンチレータパネル、放射線イメージセンサ及びその製造方法
CN106124384A (zh) 透明膜的水汽/气体渗透率测试系统与测试方法
US9851453B2 (en) Method of manufacturing radiological image conversion panel and radiological image conversion panel
CN111668385B (zh) 显示面板及其封装方法
WO2015194558A1 (ja) 水蒸気透過度評価方法及び水蒸気透過度評価装置
KR100852890B1 (ko) 온도센서를 포함하는 세포 대사정보 측정장치
KR20150010227A (ko) 배리어 막의 결함 검출 방법 및 배리어 막의 결함 검출 장치

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20110919

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20120918

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20120918

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000