JP4209194B2 - 浸透率の測定及び検査方法並びに測定及び検査装置 - Google Patents

浸透率の測定及び検査方法並びに測定及び検査装置 Download PDF

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JP4209194B2
JP4209194B2 JP2002577538A JP2002577538A JP4209194B2 JP 4209194 B2 JP4209194 B2 JP 4209194B2 JP 2002577538 A JP2002577538 A JP 2002577538A JP 2002577538 A JP2002577538 A JP 2002577538A JP 4209194 B2 JP4209194 B2 JP 4209194B2
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reactive material
substrate
measurement method
layer
permeability
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Japanese (ja)
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JP2004531711A5 (enExample
JP2004531711A (ja
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セー ペー ボーテン ペートルス
ニサト ジョバンニ
イェー スリッケルフェール ペテル
エフ イェー イェー ファン トンゲレン ヘンリクス
イー ハスカル エリアヴ
ファン デル スライス ポール
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Koninklijke Philips NV
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Koninklijke Philips NV
Koninklijke Philips Electronics NV
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N15/082—Investigating permeability by forcing a fluid through a sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects
    • G01N15/12—Investigating individual particles by measuring electrical or magnetic effects by observing changes in resistance or impedance across apertures when traversed by individual particles, e.g. by using the Coulter principle
    • G01N15/131—Details
    • G01N15/132—Circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
    • G01N2015/086—Investigating permeability, pore-volume, or surface area of porous materials of films, membranes or pellicules

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  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
JP2002577538A 2001-03-29 2002-03-13 浸透率の測定及び検査方法並びに測定及び検査装置 Expired - Fee Related JP4209194B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP01201229 2001-03-29
EP02075202 2002-01-17
PCT/IB2002/000754 WO2002079757A2 (en) 2001-03-29 2002-03-13 Method and device for measuring a permeation rate

Publications (3)

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JP2004531711A JP2004531711A (ja) 2004-10-14
JP2004531711A5 JP2004531711A5 (enExample) 2005-06-09
JP4209194B2 true JP4209194B2 (ja) 2009-01-14

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JP2002577538A Expired - Fee Related JP4209194B2 (ja) 2001-03-29 2002-03-13 浸透率の測定及び検査方法並びに測定及び検査装置

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US (2) US6993956B2 (enExample)
EP (1) EP1373861A2 (enExample)
JP (1) JP4209194B2 (enExample)
KR (1) KR100859818B1 (enExample)
CN (1) CN1242250C (enExample)
AU (1) AU2002237478A1 (enExample)
TW (1) TWI229733B (enExample)
WO (1) WO2002079757A2 (enExample)

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Also Published As

Publication number Publication date
US20060147346A1 (en) 2006-07-06
US20020152800A1 (en) 2002-10-24
CN1242250C (zh) 2006-02-15
KR20030004438A (ko) 2003-01-14
WO2002079757A3 (en) 2003-01-16
US7117720B2 (en) 2006-10-10
AU2002237478A1 (en) 2002-10-15
CN1460179A (zh) 2003-12-03
TWI229733B (en) 2005-03-21
EP1373861A2 (en) 2004-01-02
JP2004531711A (ja) 2004-10-14
US6993956B2 (en) 2006-02-07
WO2002079757A2 (en) 2002-10-10
KR100859818B1 (ko) 2008-09-24

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