KR100820617B1 - 이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법 - Google Patents

이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법 Download PDF

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Publication number
KR100820617B1
KR100820617B1 KR1020010016597A KR20010016597A KR100820617B1 KR 100820617 B1 KR100820617 B1 KR 100820617B1 KR 1020010016597 A KR1020010016597 A KR 1020010016597A KR 20010016597 A KR20010016597 A KR 20010016597A KR 100820617 B1 KR100820617 B1 KR 100820617B1
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South Korea
Prior art keywords
door
slot
valve
actuator
wall
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Expired - Lifetime
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KR1020010016597A
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English (en)
Korean (ko)
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KR20010095110A (ko
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그레고리에이. 토마시
Original Assignee
램 리써치 코포레이션
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Publication of KR100820617B1 publication Critical patent/KR100820617B1/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K43/00—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose
    • F16K43/008—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose the main valve having a back-seat position, e.g. to service the spindle sealing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
KR1020010016597A 2000-03-30 2001-03-29 이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법 Expired - Lifetime KR100820617B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/541,069 2000-03-30
US09/541,069 US6913243B1 (en) 2000-03-30 2000-03-30 Unitary slot valve actuator with dual valves

Publications (2)

Publication Number Publication Date
KR20010095110A KR20010095110A (ko) 2001-11-03
KR100820617B1 true KR100820617B1 (ko) 2008-04-08

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020010016597A Expired - Lifetime KR100820617B1 (ko) 2000-03-30 2001-03-29 이중슬롯밸브, 이중슬롯밸브의 제조방법 및 이중슬롯밸브의 작동방법

Country Status (4)

Country Link
US (3) US6913243B1 (enExample)
JP (1) JP4404500B2 (enExample)
KR (1) KR100820617B1 (enExample)
TW (1) TW496935B (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101085241B1 (ko) * 2010-04-23 2011-11-21 주식회사 뉴파워 프라즈마 게이트밸브어셈블리와 이를 포함하는 기판처리시스템
KR101128877B1 (ko) * 2010-12-03 2012-03-26 위순임 기판처리시스템의 게이트밸브장치
KR20130055901A (ko) * 2011-11-21 2013-05-29 엘지디스플레이 주식회사 박막 증착장비용 밸브장치
KR20170141142A (ko) * 2016-06-14 2017-12-22 배트 홀딩 아게 흐름을 조절하고 유로를 차단하기 위한 진공 밸브
WO2020004868A1 (ko) * 2018-06-27 2020-01-02 (주) 엔피홀딩스 게이트 밸브 시스템

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US20070282480A1 (en) * 2003-11-10 2007-12-06 Pannese Patrick D Methods and systems for controlling a semiconductor fabrication process
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US8639489B2 (en) * 2003-11-10 2014-01-28 Brooks Automation, Inc. Methods and systems for controlling a semiconductor fabrication process
US8639365B2 (en) * 2003-11-10 2014-01-28 Brooks Automation, Inc. Methods and systems for controlling a semiconductor fabrication process
KR100960030B1 (ko) * 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
JP5080169B2 (ja) * 2006-09-20 2012-11-21 バット ホールディング アーゲー 真空バルブ
RU2337262C1 (ru) * 2006-12-26 2008-10-27 Институт физики прочности и материаловедения Сибирское отделение Российской академии наук (ИФПМ СО РАН) Вакуумный щелевой клапан
TWI462208B (zh) * 2007-11-23 2014-11-21 Jusung Eng Co Ltd 槽閥組件及其操作方法
KR101490454B1 (ko) * 2008-08-26 2015-02-09 주성엔지니어링(주) 슬롯밸브 어셈블리 및 그 작동 방법
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DE102008049353A1 (de) * 2008-09-29 2010-04-08 Vat Holding Ag Vakuumventil
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KR100994761B1 (ko) 2009-10-16 2010-11-16 프리시스 주식회사 도어밸브
TWI541465B (zh) * 2009-10-27 2016-07-11 Ｖａｔ控股股份有限公司 用於真空閥之封閉單元
TWI532114B (zh) * 2009-11-12 2016-05-01 Hitachi High Tech Corp Vacuum processing device and operation method of vacuum processing device
CN102668022B (zh) * 2010-01-18 2014-12-03 普利西斯株式会社 门阀
WO2011153562A1 (de) 2010-06-09 2011-12-15 Vat Holding Ag Vakuumventil
JP5806827B2 (ja) * 2011-03-18 2015-11-10 東京エレクトロン株式会社 ゲートバルブ装置及び基板処理装置並びにその基板処理方法
US10023954B2 (en) * 2011-09-15 2018-07-17 Applied Materials, Inc. Slit valve apparatus, systems, and methods
KR101293590B1 (ko) * 2011-12-16 2013-08-13 주식회사 뉴파워 프라즈마 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템
US9151408B2 (en) 2012-02-07 2015-10-06 Lam Research Corporation Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture
US8960641B2 (en) * 2012-11-14 2015-02-24 Vat Holding Ag Vacuum valve
TWI656293B (zh) * 2014-04-25 2019-04-11 瑞士商Ｖａｔ控股股份有限公司 閥
JP6677738B2 (ja) * 2015-03-09 2020-04-08 バット ホールディング アーゲー 真空バルブ
WO2016172429A1 (en) 2015-04-23 2016-10-27 General Plasma, Inc. Chamber valve
KR101597818B1 (ko) * 2015-06-19 2016-02-25 주식회사 퓨젠 사각 게이트 진공밸브
KR101784839B1 (ko) * 2015-09-25 2017-11-06 프리시스 주식회사 양방향 게이트밸브
TWI705212B (zh) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 用於對壁中開口進行真空密封的密封裝置
TWI740981B (zh) 2016-08-22 2021-10-01 瑞士商Ｖａｔ控股股份有限公司 真空閥
JP2019012670A (ja) * 2017-07-03 2019-01-24 日新イオン機器株式会社 弁体装置、弁体装置モジュール
JP7106866B2 (ja) * 2018-01-11 2022-07-27 Tdk株式会社 Ｅｆｅｍ及びｅｆｅｍのガス置換方法
US11749540B2 (en) 2020-08-21 2023-09-05 Applied Materials, Inc. Dual actuating tilting slit valve
JP7137385B2 (ja) * 2018-07-17 2022-09-14 株式会社荏原製作所 ゲートバルブ
DE102019001115A1 (de) * 2019-02-15 2020-08-20 Vat Holding Ag Torventil mit Kulissenführung
KR20200130075A (ko) * 2019-05-07 2020-11-18 이리에 고켕 가부시키가이샤 게이트 밸브
CN112530829A (zh) * 2019-09-18 2021-03-19 中微半导体设备(上海)股份有限公司 基片处理系统、阀板组件及其基片处理系统的工作方法
US11328943B2 (en) * 2020-04-03 2022-05-10 Applied Materials, Inc. Dual gate and single actuator system
WO2024083493A1 (en) * 2022-10-18 2024-04-25 Asml Netherlands B.V. A slit valve assembly for use in a vacuum chamber, for example in a vacuum chamber of a substrate processing system
KR102574233B1 (ko) * 2023-03-14 2023-09-04 주식회사 에스알티 U motion 게이트밸브

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101085241B1 (ko) * 2010-04-23 2011-11-21 주식회사 뉴파워 프라즈마 게이트밸브어셈블리와 이를 포함하는 기판처리시스템
KR101128877B1 (ko) * 2010-12-03 2012-03-26 위순임 기판처리시스템의 게이트밸브장치
KR20130055901A (ko) * 2011-11-21 2013-05-29 엘지디스플레이 주식회사 박막 증착장비용 밸브장치
KR101888433B1 (ko) 2011-11-21 2018-08-17 엘지디스플레이 주식회사 박막 증착장비용 밸브장치
KR20170141142A (ko) * 2016-06-14 2017-12-22 배트 홀딩 아게 흐름을 조절하고 유로를 차단하기 위한 진공 밸브
KR102291707B1 (ko) 2016-06-14 2021-08-23 배트 홀딩 아게 흐름을 조절하고 유로를 차단하기 위한 진공 밸브
WO2020004868A1 (ko) * 2018-06-27 2020-01-02 (주) 엔피홀딩스 게이트 밸브 시스템

Also Published As

Publication number Publication date
US6913243B1 (en) 2005-07-05
US20050139799A1 (en) 2005-06-30
KR20010095110A (ko) 2001-11-03
US7059583B2 (en) 2006-06-13
US20050178993A1 (en) 2005-08-18
TW496935B (en) 2002-08-01
JP2002002952A (ja) 2002-01-09
JP4404500B2 (ja) 2010-01-27
US7128305B2 (en) 2006-10-31

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