TW496935B - Unitary slot valve actuator with dual valves and method for implementing the same - Google Patents

Unitary slot valve actuator with dual valves and method for implementing the same Download PDF

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Publication number
TW496935B
TW496935B TW090107443A TW90107443A TW496935B TW 496935 B TW496935 B TW 496935B TW 090107443 A TW090107443 A TW 090107443A TW 90107443 A TW90107443 A TW 90107443A TW 496935 B TW496935 B TW 496935B
Authority
TW
Taiwan
Prior art keywords
door
slot
actuator
double
valve
Prior art date
Application number
TW090107443A
Other languages
English (en)
Chinese (zh)
Inventor
Gregory A Tomasch
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of TW496935B publication Critical patent/TW496935B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K43/00—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose
    • F16K43/008—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose the main valve having a back-seat position, e.g. to service the spindle sealing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
TW090107443A 2000-03-30 2001-03-28 Unitary slot valve actuator with dual valves and method for implementing the same TW496935B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/541,069 US6913243B1 (en) 2000-03-30 2000-03-30 Unitary slot valve actuator with dual valves

Publications (1)

Publication Number Publication Date
TW496935B true TW496935B (en) 2002-08-01

Family

ID=24158058

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090107443A TW496935B (en) 2000-03-30 2001-03-28 Unitary slot valve actuator with dual valves and method for implementing the same

Country Status (4)

Country Link
US (3) US6913243B1 (enExample)
JP (1) JP4404500B2 (enExample)
KR (1) KR100820617B1 (enExample)
TW (1) TW496935B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
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CN103307290A (zh) * 2011-12-16 2013-09-18 株式会社新动力等离子体 双向闸阀和具有双向闸阀的衬底加工系统
TWI722205B (zh) * 2016-06-14 2021-03-21 瑞士商Ｖａｔ控股股份有限公司 用於控制流動及用於中斷流動路徑的真空閥

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US8639365B2 (en) * 2003-11-10 2014-01-28 Brooks Automation, Inc. Methods and systems for controlling a semiconductor fabrication process
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JP6677738B2 (ja) * 2015-03-09 2020-04-08 バット ホールディング アーゲー 真空バルブ
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TWI705212B (zh) 2016-01-19 2020-09-21 瑞士商Ｖａｔ控股股份有限公司 用於對壁中開口進行真空密封的密封裝置
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103307290A (zh) * 2011-12-16 2013-09-18 株式会社新动力等离子体 双向闸阀和具有双向闸阀的衬底加工系统
TWI722205B (zh) * 2016-06-14 2021-03-21 瑞士商Ｖａｔ控股股份有限公司 用於控制流動及用於中斷流動路徑的真空閥

Also Published As

Publication number Publication date
US6913243B1 (en) 2005-07-05
US20050139799A1 (en) 2005-06-30
KR20010095110A (ko) 2001-11-03
US7059583B2 (en) 2006-06-13
US20050178993A1 (en) 2005-08-18
JP2002002952A (ja) 2002-01-09
JP4404500B2 (ja) 2010-01-27
US7128305B2 (en) 2006-10-31
KR100820617B1 (ko) 2008-04-08

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