JP4404500B2 - 複バルブを備えた単体スロットバルブアクチュエータ、およびその実装方法 - Google Patents

複バルブを備えた単体スロットバルブアクチュエータ、およびその実装方法 Download PDF

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Publication number
JP4404500B2
JP4404500B2 JP2001089638A JP2001089638A JP4404500B2 JP 4404500 B2 JP4404500 B2 JP 4404500B2 JP 2001089638 A JP2001089638 A JP 2001089638A JP 2001089638 A JP2001089638 A JP 2001089638A JP 4404500 B2 JP4404500 B2 JP 4404500B2
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JP
Japan
Prior art keywords
door
slot
actuator
valve
common
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001089638A
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English (en)
Japanese (ja)
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JP2002002952A (ja
JP2002002952A5 (enExample
Inventor
グレゴリー・エー．・トマッシュ
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Lam Research Corp
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Lam Research Corp
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Publication of JP2002002952A5 publication Critical patent/JP2002002952A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K43/00—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose
    • F16K43/008—Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure means; Devices for temporary replacement of parts of valves for the same purpose the main valve having a back-seat position, e.g. to service the spindle sealing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2001089638A 2000-03-30 2001-03-27 複バルブを備えた単体スロットバルブアクチュエータ、およびその実装方法 Expired - Fee Related JP4404500B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/541069 2000-03-30
US09/541,069 US6913243B1 (en) 2000-03-30 2000-03-30 Unitary slot valve actuator with dual valves

Publications (3)

Publication Number Publication Date
JP2002002952A JP2002002952A (ja) 2002-01-09
JP2002002952A5 JP2002002952A5 (enExample) 2008-08-14
JP4404500B2 true JP4404500B2 (ja) 2010-01-27

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ID=24158058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001089638A Expired - Fee Related JP4404500B2 (ja) 2000-03-30 2001-03-27 複バルブを備えた単体スロットバルブアクチュエータ、およびその実装方法

Country Status (4)

Country Link
US (3) US6913243B1 (enExample)
JP (1) JP4404500B2 (enExample)
KR (1) KR100820617B1 (enExample)
TW (1) TW496935B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012511672A (ja) * 2008-12-11 2012-05-24 バット ホールディング アーゲー バルブロッドに対するバルブプレートの懸架装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012511672A (ja) * 2008-12-11 2012-05-24 バット ホールディング アーゲー バルブロッドに対するバルブプレートの懸架装置

Also Published As

Publication number Publication date
US6913243B1 (en) 2005-07-05
US20050139799A1 (en) 2005-06-30
KR20010095110A (ko) 2001-11-03
US7059583B2 (en) 2006-06-13
US20050178993A1 (en) 2005-08-18
TW496935B (en) 2002-08-01
JP2002002952A (ja) 2002-01-09
US7128305B2 (en) 2006-10-31
KR100820617B1 (ko) 2008-04-08

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