KR100809726B1 - 얼라인 마크, 상기 얼라인 마크를 구비하는 반도체 칩,상기 반도체 칩을 구비하는 반도체 패키지 및 상기 반도체칩과 상기 반도체 패키지의 제조방법들 - Google Patents

얼라인 마크, 상기 얼라인 마크를 구비하는 반도체 칩,상기 반도체 칩을 구비하는 반도체 패키지 및 상기 반도체칩과 상기 반도체 패키지의 제조방법들 Download PDF

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KR100809726B1
KR100809726B1 KR20070046768A KR20070046768A KR100809726B1 KR 100809726 B1 KR100809726 B1 KR 100809726B1 KR 20070046768 A KR20070046768 A KR 20070046768A KR 20070046768 A KR20070046768 A KR 20070046768A KR 100809726 B1 KR100809726 B1 KR 100809726B1
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South Korea
Prior art keywords
metal
alignment
chip
pad
opening
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Expired - Fee Related
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KR20070046768A
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English (en)
Korean (ko)
Inventor
김성재
박용복
남정수
이인정
김승준
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삼성전자주식회사
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Application granted granted Critical
Publication of KR100809726B1 publication Critical patent/KR100809726B1/ko
Priority to JP2008126087A priority patent/JP2008283195A/ja
Priority to TW97117550A priority patent/TW200903588A/zh
Priority to US12/153,088 priority patent/US20080284048A1/en
Priority to CN2008101714342A priority patent/CN101369572B/zh
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H10W46/101—Marks applied to devices, e.g. for alignment or identification characterised by the type of information, e.g. logos or symbols
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H10W46/301—Marks applied to devices, e.g. for alignment or identification for alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H10W46/601—Marks applied to devices, e.g. for alignment or identification for use after dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/019—Manufacture or treatment of bond pads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07221—Aligning
    • H10W72/07223—Active alignment, e.g. using optical alignment using marks or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07231—Techniques
    • H10W72/07236—Soldering or alloying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/221—Structures or relative sizes
    • H10W72/227—Multiple bumps having different sizes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251—Materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/261—Functions other than electrical connecting
    • H10W72/263—Providing mechanical bonding or support, e.g. dummy bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/261—Functions other than electrical connecting
    • H10W72/267—Multiple bump connectors having different functions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/29—Bond pads specially adapted therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/921—Structures or relative sizes of bond pads
    • H10W72/923—Bond pads having multiple stacked layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/921—Structures or relative sizes of bond pads
    • H10W72/926—Multiple bond pads having different sizes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/941—Dispositions of bond pads
    • H10W72/944—Dispositions of multiple bond pads
    • H10W72/9445—Top-view layouts, e.g. mirror arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/951—Materials of bond pads
    • H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/981—Auxiliary members, e.g. spacers
    • H10W72/983—Reinforcing structures, e.g. collars

Landscapes

  • Wire Bonding (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR20070046768A 2007-05-14 2007-05-14 얼라인 마크, 상기 얼라인 마크를 구비하는 반도체 칩,상기 반도체 칩을 구비하는 반도체 패키지 및 상기 반도체칩과 상기 반도체 패키지의 제조방법들 Expired - Fee Related KR100809726B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR20070046768A KR100809726B1 (ko) 2007-05-14 2007-05-14 얼라인 마크, 상기 얼라인 마크를 구비하는 반도체 칩,상기 반도체 칩을 구비하는 반도체 패키지 및 상기 반도체칩과 상기 반도체 패키지의 제조방법들
JP2008126087A JP2008283195A (ja) 2007-05-14 2008-05-13 アラインマーク、該アラインマークを具備する半導体チップ、該半導体チップを具備する半導体パッケージ並びに該半導体チップ及び該半導体パッケージの製造方法
TW97117550A TW200903588A (en) 2007-05-14 2008-05-13 Align mark, semiconductor chip including the same, semiconductor package including the chip and methods of fabricating the same
US12/153,088 US20080284048A1 (en) 2007-05-14 2008-05-14 Alignment mark, semiconductor chip including the same, semiconductor package including the chip and methods of fabricating the same
CN2008101714342A CN101369572B (zh) 2007-05-14 2008-05-14 对准标记及其半导体芯片和封装以及其制造方法

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Application Number Priority Date Filing Date Title
KR20070046768A KR100809726B1 (ko) 2007-05-14 2007-05-14 얼라인 마크, 상기 얼라인 마크를 구비하는 반도체 칩,상기 반도체 칩을 구비하는 반도체 패키지 및 상기 반도체칩과 상기 반도체 패키지의 제조방법들

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KR100809726B1 true KR100809726B1 (ko) 2008-03-06

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KR20070046768A Expired - Fee Related KR100809726B1 (ko) 2007-05-14 2007-05-14 얼라인 마크, 상기 얼라인 마크를 구비하는 반도체 칩,상기 반도체 칩을 구비하는 반도체 패키지 및 상기 반도체칩과 상기 반도체 패키지의 제조방법들

Country Status (5)

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US (1) US20080284048A1 (https=)
JP (1) JP2008283195A (https=)
KR (1) KR100809726B1 (https=)
CN (1) CN101369572B (https=)
TW (1) TW200903588A (https=)

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KR101055432B1 (ko) * 2008-10-30 2011-08-08 삼성전기주식회사 정렬홀을 갖는 반도체칩 및 그 제조방법
WO2014100197A1 (en) * 2012-12-21 2014-06-26 Spansion Llc Chip positioning in multi-chip package
US9159675B2 (en) 2012-07-30 2015-10-13 Samsung Display Co., Ltd. Integrated circuit and display device including the same
KR20200053012A (ko) * 2018-11-07 2020-05-18 삼성디스플레이 주식회사 유기 발광 표시 장치
CN116466552A (zh) * 2023-04-28 2023-07-21 无锡兴华衡辉科技有限公司 对位标记及其应用、读出电路芯片及其应用
KR20240057501A (ko) * 2022-10-24 2024-05-03 세메스 주식회사 반도체 기판 장치와, 반도체 처리 방법 및 반도체 처리 장치
US12362286B2 (en) 2021-12-27 2025-07-15 Samsung Electronics Co., Ltd. Printed circuit board and semiconductor package including the same

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FR2913529B1 (fr) * 2007-03-09 2009-04-24 E2V Semiconductors Soc Par Act Boitier de circuit integre,notamment pour capteur d'image, et procede de positionnement
US7875988B2 (en) * 2007-07-31 2011-01-25 Seiko Epson Corporation Substrate and manufacturing method of the same, and semiconductor device and manufacturing method of the same
JP5658442B2 (ja) * 2009-06-02 2015-01-28 株式会社東芝 電子部品とその製造方法
JP5927756B2 (ja) * 2010-12-17 2016-06-01 ソニー株式会社 半導体装置及び半導体装置の製造方法
JP5795196B2 (ja) * 2011-06-09 2015-10-14 新光電気工業株式会社 半導体パッケージ
CN104798193B (zh) * 2012-11-21 2017-12-22 三菱电机株式会社 半导体装置及其制造方法
JP5763116B2 (ja) * 2013-03-25 2015-08-12 株式会社東芝 半導体装置の製造方法
US9355979B2 (en) * 2013-08-16 2016-05-31 Taiwan Semiconductor Manufacturing Company, Ltd. Alignment structures and methods of forming same
JP6287103B2 (ja) * 2013-11-22 2018-03-07 セイコーエプソン株式会社 半導体装置、半導体装置の製造方法
US20150187608A1 (en) * 2013-12-26 2015-07-02 Sanka Ganesan Die package architecture with embedded die and simplified redistribution layer
US9589900B2 (en) 2014-02-27 2017-03-07 Taiwan Semiconductor Manufacturing Company, Ltd. Metal pad for laser marking
US9343434B2 (en) 2014-02-27 2016-05-17 Taiwan Semiconductor Manufacturing Company, Ltd. Laser marking in packages
US9666522B2 (en) 2014-05-29 2017-05-30 Taiwan Semiconductor Manufacturing Company, Ltd. Alignment mark design for packages
US10170444B2 (en) * 2015-06-30 2019-01-01 Taiwan Semiconductor Manufacturing Company, Ltd. Packages for semiconductor devices, packaged semiconductor devices, and methods of packaging semiconductor devices
CN105654856A (zh) 2016-02-04 2016-06-08 京东方科技集团股份有限公司 一种显示装置及其芯片邦定方法
US10692813B2 (en) * 2016-11-28 2020-06-23 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor package with dummy bumps connected to non-solder mask defined pads
KR102554017B1 (ko) * 2018-10-02 2023-07-11 삼성전자주식회사 반도체 패키지
TWI730799B (zh) * 2020-06-04 2021-06-11 力晶積成電子製造股份有限公司 影像感測器的製造方法及對準標記結構
CN112420534B (zh) 2020-11-27 2021-11-23 上海易卜半导体有限公司 形成半导体封装件的方法及半导体封装件
US12293986B2 (en) 2020-12-04 2025-05-06 Yibu Semiconductor Co., Ltd. Method for forming chip packages and a chip package
CN112687619A (zh) 2020-12-25 2021-04-20 上海易卜半导体有限公司 形成半导体封装件的方法及半导体封装件
JP7629340B2 (ja) * 2021-05-13 2025-02-13 新光電気工業株式会社 配線基板、半導体装置及び配線基板の製造方法
KR20230083102A (ko) 2021-12-02 2023-06-09 삼성전자주식회사 인쇄회로기판 및 이를 포함하는 반도체 패키지
US20240186260A1 (en) * 2022-12-06 2024-06-06 Lx Semicon Co., Ltd. Semiconductor device
US20240213175A1 (en) * 2022-12-27 2024-06-27 Samsung Electronics Co., Ltd. Semiconductor package having alignment pattern

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Cited By (11)

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Publication number Priority date Publication date Assignee Title
KR101055432B1 (ko) * 2008-10-30 2011-08-08 삼성전기주식회사 정렬홀을 갖는 반도체칩 및 그 제조방법
US9159675B2 (en) 2012-07-30 2015-10-13 Samsung Display Co., Ltd. Integrated circuit and display device including the same
WO2014100197A1 (en) * 2012-12-21 2014-06-26 Spansion Llc Chip positioning in multi-chip package
US8901756B2 (en) 2012-12-21 2014-12-02 Spansion Llc Chip positioning in multi-chip package
US9196608B2 (en) 2012-12-21 2015-11-24 Cypress Semiconductor Corporation Method of chip positioning for multi-chip packaging
KR20200053012A (ko) * 2018-11-07 2020-05-18 삼성디스플레이 주식회사 유기 발광 표시 장치
KR102606567B1 (ko) 2018-11-07 2023-11-28 삼성디스플레이 주식회사 유기 발광 표시 장치
US12362286B2 (en) 2021-12-27 2025-07-15 Samsung Electronics Co., Ltd. Printed circuit board and semiconductor package including the same
KR20240057501A (ko) * 2022-10-24 2024-05-03 세메스 주식회사 반도체 기판 장치와, 반도체 처리 방법 및 반도체 처리 장치
KR102802969B1 (ko) * 2022-10-24 2025-05-08 세메스 주식회사 반도체 기판 장치와, 반도체 처리 방법 및 반도체 처리 장치
CN116466552A (zh) * 2023-04-28 2023-07-21 无锡兴华衡辉科技有限公司 对位标记及其应用、读出电路芯片及其应用

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