KR100809125B1 - 처리 장치, 위치설정 방법 및 컴퓨터 기억 매체 - Google Patents
처리 장치, 위치설정 방법 및 컴퓨터 기억 매체 Download PDFInfo
- Publication number
- KR100809125B1 KR100809125B1 KR1020060044442A KR20060044442A KR100809125B1 KR 100809125 B1 KR100809125 B1 KR 100809125B1 KR 1020060044442 A KR1020060044442 A KR 1020060044442A KR 20060044442 A KR20060044442 A KR 20060044442A KR 100809125 B1 KR100809125 B1 KR 100809125B1
- Authority
- KR
- South Korea
- Prior art keywords
- processing
- chamber
- positioning
- substrate
- processing chamber
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2005-00144886 | 2005-05-18 | ||
JP2005144886A JP4849825B2 (ja) | 2005-05-18 | 2005-05-18 | 処理装置、位置合わせ方法、制御プログラムおよびコンピュータ記憶媒体 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060119815A KR20060119815A (ko) | 2006-11-24 |
KR100809125B1 true KR100809125B1 (ko) | 2008-03-03 |
Family
ID=37425464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060044442A KR100809125B1 (ko) | 2005-05-18 | 2006-05-17 | 처리 장치, 위치설정 방법 및 컴퓨터 기억 매체 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4849825B2 (ja) |
KR (1) | KR100809125B1 (ja) |
CN (2) | CN100511633C (ja) |
TW (1) | TWI390657B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101007710B1 (ko) * | 2008-03-26 | 2011-01-13 | 주식회사 에스에프에이 | 화학 기상 증착 장치의 로드락 챔버 |
TWI458587B (zh) * | 2012-01-17 | 2014-11-01 | Chin Yen Wang | 位置校正裝置 |
CN103569672B (zh) * | 2012-07-20 | 2016-03-09 | 上海微电子装备有限公司 | 一种兼容硅片和玻璃基板的传输装置 |
JP2014075432A (ja) * | 2012-10-03 | 2014-04-24 | Hioki Ee Corp | 基板支持装置および基板検査装置 |
CN105529278B (zh) * | 2014-09-29 | 2019-08-16 | 盛美半导体设备(上海)有限公司 | 加工半导体结构的装置 |
JP6298109B2 (ja) * | 2016-07-08 | 2018-03-20 | キヤノントッキ株式会社 | 基板処理装置及びアライメント方法 |
JP7105629B2 (ja) * | 2018-06-20 | 2022-07-25 | 東京エレクトロン株式会社 | 自動教示方法及び制御装置 |
CN109904101B (zh) * | 2019-01-28 | 2021-09-03 | 拓荆科技股份有限公司 | 一种晶圆转移及测量系统 |
JP7259476B2 (ja) | 2019-03-27 | 2023-04-18 | 東京エレクトロン株式会社 | アライメント装置、基板処理装置、アライメント方法及び基板処理方法 |
CN110504185B (zh) * | 2019-08-27 | 2022-02-11 | 北京芯可鉴科技有限公司 | Esd保护单元的测试及加固方法 |
JP2022135185A (ja) * | 2021-03-04 | 2022-09-15 | 東京エレクトロン株式会社 | 基板位置制御方法、及び基板処理システム |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030043220A (ko) * | 2001-11-27 | 2003-06-02 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 유리 기판 파손 감지장치 |
KR20040106042A (ko) * | 2003-06-10 | 2004-12-17 | 브룩스오토메이션아시아(주) | 로드락 장치의 얼라이너 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2622525B2 (ja) * | 1989-03-31 | 1997-06-18 | 東京エレクトロン株式会社 | 液晶基板の製造装置 |
US5558482A (en) * | 1992-07-29 | 1996-09-24 | Tokyo Electron Limited | Multi-chamber system |
JP3139155B2 (ja) * | 1992-07-29 | 2001-02-26 | 東京エレクトロン株式会社 | 真空処理装置 |
JP3335983B2 (ja) * | 1993-02-26 | 2002-10-21 | 東京エレクトロン株式会社 | Lcd用ガラス基板の位置合わせ機構及び真空処理装置 |
JP3299338B2 (ja) * | 1993-04-28 | 2002-07-08 | 東京エレクトロン株式会社 | 真空処理装置 |
JP3350234B2 (ja) * | 1994-06-06 | 2002-11-25 | 東京エレクトロン株式会社 | 被処理体のバッファ装置、これを用いた処理装置及びその搬送方法 |
JP3650495B2 (ja) * | 1995-12-12 | 2005-05-18 | 東京エレクトロン株式会社 | 半導体処理装置、その基板交換機構及び基板交換方法 |
JP4674705B2 (ja) * | 1998-10-27 | 2011-04-20 | 東京エレクトロン株式会社 | 搬送システムの搬送位置合わせ方法及び搬送システム |
US7280883B2 (en) * | 2001-09-06 | 2007-10-09 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing system managing apparatus information of substrate processing apparatus |
EP1450392A1 (en) * | 2003-02-20 | 2004-08-25 | Applied Materials, Inc. | Methods and apparatus for positioning a substrate relative to a support stage |
-
2005
- 2005-05-18 JP JP2005144886A patent/JP4849825B2/ja not_active Expired - Fee Related
-
2006
- 2006-05-16 CN CNB2006100802949A patent/CN100511633C/zh active Active
- 2006-05-16 CN CN2008101866824A patent/CN101447444B/zh active Active
- 2006-05-17 TW TW095117510A patent/TWI390657B/zh active
- 2006-05-17 KR KR1020060044442A patent/KR100809125B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030043220A (ko) * | 2001-11-27 | 2003-06-02 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 유리 기판 파손 감지장치 |
KR20040106042A (ko) * | 2003-06-10 | 2004-12-17 | 브룩스오토메이션아시아(주) | 로드락 장치의 얼라이너 |
Also Published As
Publication number | Publication date |
---|---|
TWI390657B (zh) | 2013-03-21 |
CN1866493A (zh) | 2006-11-22 |
JP2006324366A (ja) | 2006-11-30 |
CN100511633C (zh) | 2009-07-08 |
TW200709327A (en) | 2007-03-01 |
JP4849825B2 (ja) | 2012-01-11 |
CN101447444A (zh) | 2009-06-03 |
CN101447444B (zh) | 2011-04-13 |
KR20060119815A (ko) | 2006-11-24 |
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