KR100634059B1 - 표시용 패널의 검사장치 - Google Patents

표시용 패널의 검사장치 Download PDF

Info

Publication number
KR100634059B1
KR100634059B1 KR1020040047704A KR20040047704A KR100634059B1 KR 100634059 B1 KR100634059 B1 KR 100634059B1 KR 1020040047704 A KR1020040047704 A KR 1020040047704A KR 20040047704 A KR20040047704 A KR 20040047704A KR 100634059 B1 KR100634059 B1 KR 100634059B1
Authority
KR
South Korea
Prior art keywords
panel
carrier
inspection
moving mechanism
arm
Prior art date
Application number
KR1020040047704A
Other languages
English (en)
Korean (ko)
Other versions
KR20050028298A (ko
Inventor
다께시 사이또
신지 후지와라
Original Assignee
가부시키가이샤 니혼 마이크로닉스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니혼 마이크로닉스 filed Critical 가부시키가이샤 니혼 마이크로닉스
Publication of KR20050028298A publication Critical patent/KR20050028298A/ko
Application granted granted Critical
Publication of KR100634059B1 publication Critical patent/KR100634059B1/ko

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/69—Arrangements or methods for testing or calibrating a device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
KR1020040047704A 2003-09-18 2004-06-24 표시용 패널의 검사장치 KR100634059B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00326124 2003-09-18
JP2003326124A JP4490066B2 (ja) 2003-09-18 2003-09-18 表示用パネルの検査装置

Publications (2)

Publication Number Publication Date
KR20050028298A KR20050028298A (ko) 2005-03-22
KR100634059B1 true KR100634059B1 (ko) 2006-10-16

Family

ID=34456394

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040047704A KR100634059B1 (ko) 2003-09-18 2004-06-24 표시용 패널의 검사장치

Country Status (4)

Country Link
JP (1) JP4490066B2 (ja)
KR (1) KR100634059B1 (ja)
CN (1) CN100401495C (ja)
TW (1) TWI272234B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101281075B1 (ko) * 2013-01-31 2013-07-09 주식회사 현성오토텍 3차원 형상의 차체 패키지 검사장치

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006317332A (ja) * 2005-05-13 2006-11-24 Micronics Japan Co Ltd 点灯検査装置
KR101166839B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 액정패널 검사 장치
JP4914702B2 (ja) * 2006-12-06 2012-04-11 新光電気工業株式会社 ワークの位置決め装置
JP5111285B2 (ja) * 2008-08-06 2013-01-09 株式会社日立ハイテクノロジーズ 試料搬送機構
KR101093646B1 (ko) * 2009-05-01 2011-12-15 가부시키가이샤 니혼 마이크로닉스 평판형상 피검사체의 시험장치
JP5631020B2 (ja) * 2009-05-01 2014-11-26 株式会社日本マイクロニクス 平板状被検査体の試験装置
KR101868083B1 (ko) * 2011-04-13 2018-06-19 삼성디스플레이 주식회사 표시 패널 검사용 지그 유닛
KR101367910B1 (ko) * 2011-12-30 2014-02-28 엘아이지에이디피 주식회사 기판 얼라인장치 및 이것을 포함하는 기판 검사장비
JP6084426B2 (ja) * 2012-10-15 2017-02-22 株式会社日本マイクロニクス 検査装置
KR101979903B1 (ko) * 2012-11-08 2019-05-20 삼성디스플레이 주식회사 패널 검사용 가이드 어셈블리 및 이를 포함하는 트레이
JP5978937B2 (ja) * 2012-11-13 2016-08-24 旭硝子株式会社 基板搬送用ハンド及び基板搬送方法
CN102998823B (zh) 2012-12-06 2015-04-08 京东方科技集团股份有限公司 点灯检查设备的偏光片支撑部件及点灯检查设备
JP7205823B2 (ja) * 2018-12-05 2023-01-17 株式会社ニックス 把持機構及び運搬物搬送装置
JP2020167256A (ja) * 2019-03-29 2020-10-08 日本電産サンキョー株式会社 パネル搬送装置およびパネル搬送システム
JP2020164282A (ja) * 2019-03-29 2020-10-08 日本電産サンキョー株式会社 パネル搬送システム
CN111999919B (zh) * 2020-08-31 2023-05-05 晟光科技股份有限公司 一种lcd显示屏定位检测机构

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4217370B2 (ja) * 2000-06-30 2009-01-28 芝浦メカトロニクス株式会社 基板搬送装置
JP3914717B2 (ja) * 2001-04-13 2007-05-16 武秀 林 フラットパネル搬送システム
JP4745536B2 (ja) * 2001-06-04 2011-08-10 株式会社日本マイクロニクス 表示用基板の搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101281075B1 (ko) * 2013-01-31 2013-07-09 주식회사 현성오토텍 3차원 형상의 차체 패키지 검사장치

Also Published As

Publication number Publication date
TWI272234B (en) 2007-02-01
KR20050028298A (ko) 2005-03-22
CN100401495C (zh) 2008-07-09
JP2005091862A (ja) 2005-04-07
JP4490066B2 (ja) 2010-06-23
TW200512143A (en) 2005-04-01
CN1598598A (zh) 2005-03-23

Similar Documents

Publication Publication Date Title
KR100634059B1 (ko) 표시용 패널의 검사장치
KR100829892B1 (ko) 표시용 패널의 검사장치
CN108535270B (zh) 一种基板外观检测机
JP2011017692A (ja) 基板収納容器、及びこれを具備した基板検査装置
CN208420726U (zh) 一种基板外观检测机
JP3414491B2 (ja) 基板保持部材及びこれを用いた基板外観検査装置
KR100693715B1 (ko) 검사장치
KR20180069676A (ko) 기판 절단 장치
TW201832313A (zh) 對準裝置
TWI231964B (en) LCD panel auto gripping apparatus and method for use in a panel carrier for an automatic probe unit
KR100693716B1 (ko) 검사장치
KR100663865B1 (ko) 평판 디스플레이용 글래스 스크라이빙장치 및 방법
JP2007278715A5 (ja)
JPH10160629A (ja) 液晶パネルの検査装置
JP4745536B2 (ja) 表示用基板の搬送装置
JP2012182273A (ja) ガラス基板インライン検査方法及びその装置
KR20130022126A (ko) 프로브 유닛 및 이를 포함하는 검사 장치
JP3526709B2 (ja) 液晶パネルのアライメント装置
KR20220002808A (ko) 기판 처리 시스템
JP3711169B2 (ja) 表示パネル基板の検査装置
JP4849744B2 (ja) 表示用基板の検査装置
JPH04332129A (ja) 被洗浄体の移載方法及びその装置並びに被移載体の位置決め装置
WO2018003577A1 (ja) アライメント装置
CN219608750U (zh) 一种检测装置
JP2018010273A (ja) アライメント装置

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20090714

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20120813

Year of fee payment: 9

FPAY Annual fee payment

Payment date: 20150824

Year of fee payment: 12

FPAY Annual fee payment

Payment date: 20180814

Year of fee payment: 13

FPAY Annual fee payment

Payment date: 20190823

Year of fee payment: 15