KR100533802B1 - 액정 패널용 기판, 액정 패널 및 이것을 사용한 전자기기및 액정 패널용 기판의 제조 방법 - Google Patents
액정 패널용 기판, 액정 패널 및 이것을 사용한 전자기기및 액정 패널용 기판의 제조 방법 Download PDFInfo
- Publication number
- KR100533802B1 KR100533802B1 KR10-2000-7004978A KR20007004978A KR100533802B1 KR 100533802 B1 KR100533802 B1 KR 100533802B1 KR 20007004978 A KR20007004978 A KR 20007004978A KR 100533802 B1 KR100533802 B1 KR 100533802B1
- Authority
- KR
- South Korea
- Prior art keywords
- liquid crystal
- film
- substrate
- crystal panel
- reflective electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 197
- 239000000758 substrate Substances 0.000 title claims abstract description 144
- 238000000034 method Methods 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000011229 interlayer Substances 0.000 claims abstract description 37
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 97
- 238000010586 diagram Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000005530 etching Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000003566 sealing material Substances 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000010365 information processing Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 210000000707 wrist Anatomy 0.000 description 3
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- 244000025254 Cannabis sativa Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- GDFCWFBWQUEQIJ-UHFFFAOYSA-N [B].[P] Chemical compound [B].[P] GDFCWFBWQUEQIJ-UHFFFAOYSA-N 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136277—Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25729098 | 1998-09-10 | ||
| JP98-257290 | 1998-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20010031885A KR20010031885A (ko) | 2001-04-16 |
| KR100533802B1 true KR100533802B1 (ko) | 2005-12-06 |
Family
ID=17304328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2000-7004978A Expired - Lifetime KR100533802B1 (ko) | 1998-09-10 | 1999-09-08 | 액정 패널용 기판, 액정 패널 및 이것을 사용한 전자기기및 액정 패널용 기판의 제조 방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6750836B1 (OSRAM) |
| JP (2) | JP3321807B2 (OSRAM) |
| KR (1) | KR100533802B1 (OSRAM) |
| TW (1) | TW442690B (OSRAM) |
| WO (1) | WO2000016153A1 (OSRAM) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6992652B2 (en) * | 2000-08-08 | 2006-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method thereof |
| TW522374B (en) * | 2000-08-08 | 2003-03-01 | Semiconductor Energy Lab | Electro-optical device and driving method of the same |
| TW518552B (en) * | 2000-08-18 | 2003-01-21 | Semiconductor Energy Lab | Liquid crystal display device, method of driving the same, and method of driving a portable information device having the liquid crystal display device |
| US7180496B2 (en) * | 2000-08-18 | 2007-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method of driving the same |
| US6987496B2 (en) * | 2000-08-18 | 2006-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device and method of driving the same |
| TW514854B (en) * | 2000-08-23 | 2002-12-21 | Semiconductor Energy Lab | Portable information apparatus and method of driving the same |
| US7184014B2 (en) * | 2000-10-05 | 2007-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
| US6747623B2 (en) * | 2001-02-09 | 2004-06-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method of driving the same |
| KR100803566B1 (ko) * | 2001-07-25 | 2008-02-15 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치용 어레이 기판 및 그의 제조 방법 |
| KR100461092B1 (ko) * | 2001-11-08 | 2004-12-09 | 에이유 오프트로닉스 코퍼레이션 | 거친 확산기를 갖는 반사형 tft-lcd의 제조 방법 |
| TWI273539B (en) | 2001-11-29 | 2007-02-11 | Semiconductor Energy Lab | Display device and display system using the same |
| JP3913534B2 (ja) * | 2001-11-30 | 2007-05-09 | 株式会社半導体エネルギー研究所 | 表示装置及びこれを用いた表示システム |
| JP4101533B2 (ja) * | 2002-03-01 | 2008-06-18 | 株式会社半導体エネルギー研究所 | 半透過型の液晶表示装置の作製方法 |
| JP4237442B2 (ja) | 2002-03-01 | 2009-03-11 | 株式会社半導体エネルギー研究所 | 半透過型液晶表示装置 |
| JP4087620B2 (ja) * | 2002-03-01 | 2008-05-21 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
| JP4067878B2 (ja) * | 2002-06-06 | 2008-03-26 | 株式会社半導体エネルギー研究所 | 発光装置及びそれを用いた電気器具 |
| US6982727B2 (en) * | 2002-07-23 | 2006-01-03 | Broadcom Corporation | System and method for providing graphics using graphical engine |
| JP4499481B2 (ja) | 2004-06-03 | 2010-07-07 | 富士通株式会社 | 液晶表示装置及びその製造方法 |
| JP4742851B2 (ja) * | 2005-12-22 | 2011-08-10 | エプソンイメージングデバイス株式会社 | 電気光学装置及び電子機器 |
| US7528907B2 (en) * | 2006-01-26 | 2009-05-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of forming mirror layers and structures thereof |
| TWI322374B (en) * | 2006-04-14 | 2010-03-21 | Ritdisplay Corp | Light transmission touch panel and manufacturing method thereof |
| TWI329232B (en) * | 2006-11-10 | 2010-08-21 | Au Optronics Corp | Pixel structure and fabrication method thereof |
| JP5019859B2 (ja) * | 2006-12-05 | 2012-09-05 | ソニーモバイルディスプレイ株式会社 | 液晶装置および電子機器 |
| KR100876235B1 (ko) * | 2007-06-28 | 2008-12-26 | 삼성모바일디스플레이주식회사 | 액정 표시 장치 |
| KR100876234B1 (ko) * | 2007-06-28 | 2008-12-26 | 삼성모바일디스플레이주식회사 | 액정 표시 장치 |
| KR100914978B1 (ko) | 2007-09-10 | 2009-09-02 | 주식회사 하이닉스반도체 | 반도체 소자 및 그의 제조 방법 |
| TWI474305B (zh) * | 2008-07-31 | 2015-02-21 | 矽創電子股份有限公司 | The polarity switching structure of point conversion system |
| BRPI0919823A2 (pt) * | 2008-09-24 | 2016-04-05 | Sharp Kk | dispositivo de visor de cristal líquido, substrato de matriz ativa, e dispositivo eletrônico |
| JP2010091612A (ja) * | 2008-10-03 | 2010-04-22 | Seiko Epson Corp | 電気泳動表示装置、電子機器及び電気泳動表示装置の駆動方法 |
| KR101540341B1 (ko) * | 2008-10-17 | 2015-07-30 | 삼성전자주식회사 | 패널 구조체, 패널 구조체를 포함하는 표시장치 및 이들의 제조방법 |
| US20120075270A1 (en) * | 2009-06-03 | 2012-03-29 | Sharp Kabushiki Kaisha | Liquid crystal display device |
| US9224759B2 (en) | 2010-12-20 | 2015-12-29 | Japan Display Inc. | Pixel array substrate structure, method of manufacturing pixel array substrate structure, display device, and electronic apparatus |
| CN117322166A (zh) * | 2021-12-02 | 2023-12-29 | 京东方科技集团股份有限公司 | 显示基板及电子设备 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5766472A (en) * | 1980-10-13 | 1982-04-22 | Suwa Seikosha Kk | Liquid crystal indicator unit |
| JPH0611711A (ja) * | 1992-06-26 | 1994-01-21 | Sharp Corp | 反射型液晶表示装置 |
| JPH0968719A (ja) * | 1995-09-01 | 1997-03-11 | Pioneer Video Corp | 反射型液晶表示装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69220643T2 (de) * | 1991-09-10 | 1998-01-22 | Sharp Kk | Flüssigkristall-Anzeigegerät vom Reflexionstyp und Verfahren zu dessen Herstellung |
| DE69317800T2 (de) * | 1992-01-28 | 1998-09-03 | Canon Kk | Verfahren zur Herstellung einer Halbleiteranordnung |
| JPH05241127A (ja) * | 1992-02-28 | 1993-09-21 | Canon Inc | 液晶表示装置 |
| JPH0675237A (ja) * | 1992-08-28 | 1994-03-18 | Sharp Corp | 反射型液晶表示装置 |
| JP2768313B2 (ja) * | 1995-06-13 | 1998-06-25 | 日本電気株式会社 | 反射型液晶表示装置 |
| US5945972A (en) * | 1995-11-30 | 1999-08-31 | Kabushiki Kaisha Toshiba | Display device |
| JP3249077B2 (ja) * | 1996-10-18 | 2002-01-21 | キヤノン株式会社 | マトリクス基板と液晶装置 |
| JP2952343B2 (ja) | 1997-01-31 | 1999-09-27 | 工業技術院長 | 上層階からの降下装置 |
| JP3270821B2 (ja) * | 1997-03-12 | 2002-04-02 | シャープ株式会社 | 反射型液晶表示装置およびその製造方法 |
-
1999
- 1999-09-08 JP JP56299499A patent/JP3321807B2/ja not_active Expired - Fee Related
- 1999-09-08 US US09/554,130 patent/US6750836B1/en not_active Expired - Lifetime
- 1999-09-08 KR KR10-2000-7004978A patent/KR100533802B1/ko not_active Expired - Lifetime
- 1999-09-08 WO PCT/JP1999/004891 patent/WO2000016153A1/ja not_active Ceased
- 1999-09-10 TW TW088115686A patent/TW442690B/zh not_active IP Right Cessation
-
2000
- 2000-05-11 JP JP2000138769A patent/JP3982148B2/ja not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5766472A (en) * | 1980-10-13 | 1982-04-22 | Suwa Seikosha Kk | Liquid crystal indicator unit |
| JPH0611711A (ja) * | 1992-06-26 | 1994-01-21 | Sharp Corp | 反射型液晶表示装置 |
| JPH0968719A (ja) * | 1995-09-01 | 1997-03-11 | Pioneer Video Corp | 反射型液晶表示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW442690B (en) | 2001-06-23 |
| JP2000352716A (ja) | 2000-12-19 |
| US6750836B1 (en) | 2004-06-15 |
| KR20010031885A (ko) | 2001-04-16 |
| JP3982148B2 (ja) | 2007-09-26 |
| JP3321807B2 (ja) | 2002-09-09 |
| WO2000016153A1 (en) | 2000-03-23 |
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