KR100233312B1 - 전반사 형광 x선 분석 장치 및 방법 - Google Patents

전반사 형광 x선 분석 장치 및 방법 Download PDF

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Publication number
KR100233312B1
KR100233312B1 KR1019970709579A KR19970709579A KR100233312B1 KR 100233312 B1 KR100233312 B1 KR 100233312B1 KR 1019970709579 A KR1019970709579 A KR 1019970709579A KR 19970709579 A KR19970709579 A KR 19970709579A KR 100233312 B1 KR100233312 B1 KR 100233312B1
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South Korea
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ray
sample
characteristic
intensity
measured
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English (en)
Korean (ko)
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KR19990028265A (ko
Inventor
이찌로 도이
쇼이찌로 도노무라
Original Assignee
야마모토 카즈모토
아사히 가세이 고교 가부시키가이샤
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Publication of KR19990028265A publication Critical patent/KR19990028265A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR1019970709579A 1995-08-09 1996-08-02 전반사 형광 x선 분석 장치 및 방법 Expired - Fee Related KR100233312B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20339395 1995-08-09
JP95-203393 1995-08-09

Publications (2)

Publication Number Publication Date
KR19990028265A KR19990028265A (ko) 1999-04-15
KR100233312B1 true KR100233312B1 (ko) 1999-12-01

Family

ID=16473307

Family Applications (1)

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KR1019970709579A Expired - Fee Related KR100233312B1 (ko) 1995-08-09 1996-08-02 전반사 형광 x선 분석 장치 및 방법

Country Status (4)

Country Link
US (1) US6041096A (https=)
KR (1) KR100233312B1 (https=)
TW (1) TW305934B (https=)
WO (1) WO1997006430A1 (https=)

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JP2002122558A (ja) * 2000-10-16 2002-04-26 Rigaku Industrial Co 蛍光ｘ線分析方法および装置
US7640547B2 (en) * 2002-02-08 2009-12-29 Jpmorgan Chase & Co. System and method for allocating computing resources of a distributed computing system
KR100432913B1 (ko) * 2002-03-21 2004-05-22 썬스타 산업봉제기계 주식회사 재봉기에서 모터를 이용한 이송량 및 이송방향 제어 장치및 방법
RU2240543C2 (ru) * 2002-10-17 2004-11-20 Открытое акционерное общество "Горно-металлургическая компания" "Норильский никель" Способ рентгенофлуоресцентного анализа элементного состава вещества
US7488107B2 (en) * 2005-08-18 2009-02-10 General Electric Company Method and apparatus to detect and correct alignment errors in x-ray systems used to generate 3D volumetric images
US7536266B2 (en) * 2006-04-17 2009-05-19 Lincoln Global, Inc. Universal X-ray fluorescence calibration technique for wire surface analysis
US7495766B2 (en) * 2006-06-22 2009-02-24 Linccln Global, Inc. Spectroscopic analysis technique for measuring the amount of surface material on wire
RU2375703C1 (ru) * 2008-04-02 2009-12-10 Акционерная компания "АЛРОСА" (Закрытое акционерное общество) Способ оценки величины относительной погрешности полученного экспериментально процентного содержания элемента к аттестованному процентному содержанию элемента посредством рентгенофлуоресцентного анализа
RU2444004C2 (ru) * 2010-12-15 2012-02-27 Общество с ограниченной ответственностью "АНАЛИТНАУЧЦЕНТР" (ООО "АНАЛИТНАУЧЦЕНТР") Устройство для рентгенорадиометрического анализа состава пульп и растворов
RU2442147C2 (ru) * 2010-12-15 2012-02-10 Общество с ограниченной ответственностью "АНАЛИТНАУЧЦЕНТР" (ООО "АНАЛИТНАУЧЦЕНТР") Способ рентгенорадиометрического анализа состава вещества
RU2524559C1 (ru) * 2013-05-16 2014-07-27 Алексей Никифорович Никифоров Рентгеноспектральный анализ негомогенных материалов
CN103323478B (zh) * 2013-05-21 2015-07-29 杨东华 一种全反射x射线荧光光谱仪
US9575018B2 (en) * 2013-09-16 2017-02-21 Cerium Laboratories, Llc System and method for testing ceramic coatings
JP6305247B2 (ja) * 2014-06-13 2018-04-04 株式会社日立ハイテクサイエンス 蛍光ｘ線分析装置
WO2016103834A1 (ja) * 2014-12-25 2016-06-30 株式会社リガク 斜入射蛍光ｘ線分析装置および方法
CN107209132B (zh) * 2015-08-28 2019-06-21 株式会社理学 荧光x射线分析装置
CN116106352B (zh) * 2015-11-02 2023-12-19 诺威量测设备公司 确定集成电路ic的层的性质的方法
JP6979650B2 (ja) * 2018-03-13 2021-12-15 株式会社リガク 蛍光ｘ線分析方法、蛍光ｘ線分析装置またはプログラム
JP2020003306A (ja) * 2018-06-27 2020-01-09 株式会社リガク 全反射蛍光ｘ線分析装置及び測定方法
RU2714223C2 (ru) * 2019-06-17 2020-02-13 Общество с ограниченной ответственностью "АНАЛИТНАУЧЦЕНТР" (ООО "АНАЛИТНАУЧЦЕНТР") Многоэлементный рентгенорадиометрический анализатор состава вещества
EP4474800A4 (en) 2022-01-31 2026-01-07 Canon Anelva Corp INSPECTION DEVICE AND INSPECTION PROCEDURE

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE450530B (sv) * 1982-01-12 1987-06-29 Elementanalys Almen & Gronberg Rontgenfluorescensanalysator for bestemning av halten av ett emne som har hogre atomnummer en 47
JPS59214743A (ja) * 1983-05-20 1984-12-04 Jeol Ltd Ｘ線分析装置
JP2564896B2 (ja) * 1988-06-28 1996-12-18 株式会社島津製作所 Ｘ線分光マッピング装置
JP2619149B2 (ja) * 1991-04-01 1997-06-11 理学電機工業株式会社 蛍光ｘ線スペクトルのバックグラウンド成分の推定方法
JPH05240808A (ja) * 1992-02-29 1993-09-21 Horiba Ltd 蛍光ｘ線定量方法
US5246216A (en) * 1992-10-30 1993-09-21 Oberst E Ernest Vise jaw attachment for irregular shaped workpieces
JPH06174663A (ja) * 1992-12-01 1994-06-24 Toshiba Corp 汚染元素分析方法
DE4244242A1 (de) * 1992-12-24 1994-06-30 Geesthacht Gkss Forschung Verfahren zur Bestimmung des effektiven Einfallswinkels von aus einer Röntgenquelle austretender Röntgenstrahlung zur Analyse oberflächennaher Materialschichten
JP2954819B2 (ja) * 1993-10-07 1999-09-27 株式会社東芝 全反射蛍光ｘ線分析装置の校正方法
JPH07167804A (ja) * 1993-12-14 1995-07-04 Sumitomo Metal Ind Ltd ２層めっき鋼板のオンライン分析方法及びオンライン分析装置

Also Published As

Publication number Publication date
TW305934B (https=) 1997-05-21
US6041096A (en) 2000-03-21
KR19990028265A (ko) 1999-04-15
WO1997006430A1 (fr) 1997-02-20

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