JPWO2023233896A5 - - Google Patents
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- Publication number
- JPWO2023233896A5 JPWO2023233896A5 JP2024515545A JP2024515545A JPWO2023233896A5 JP WO2023233896 A5 JPWO2023233896 A5 JP WO2023233896A5 JP 2024515545 A JP2024515545 A JP 2024515545A JP 2024515545 A JP2024515545 A JP 2024515545A JP WO2023233896 A5 JPWO2023233896 A5 JP WO2023233896A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- mass
- polyimide resin
- resin composition
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920001721 polyimide Polymers 0.000 claims description 22
- 239000009719 polyimide resin Substances 0.000 claims description 22
- 125000004432 carbon atom Chemical group C* 0.000 claims description 21
- 239000002243 precursor Substances 0.000 claims description 18
- 239000011342 resin composition Substances 0.000 claims description 18
- 125000000962 organic group Chemical group 0.000 claims description 17
- 125000005843 halogen group Chemical group 0.000 claims description 13
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 12
- 239000004202 carbamide Substances 0.000 claims description 12
- 239000002904 solvent Substances 0.000 claims description 12
- 239000003960 organic solvent Substances 0.000 claims description 11
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 10
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 10
- 125000001931 aliphatic group Chemical group 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 125000001624 naphthyl group Chemical group 0.000 claims description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 5
- 125000000542 sulfonic acid group Chemical group 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 125000003545 alkoxy group Chemical group 0.000 claims description 3
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 3
- 239000003505 polymerization initiator Substances 0.000 claims description 3
- SNDGLCYYBKJSOT-UHFFFAOYSA-N 1,1,3,3-tetrabutylurea Chemical compound CCCCN(CCCC)C(=O)N(CCCC)CCCC SNDGLCYYBKJSOT-UHFFFAOYSA-N 0.000 claims description 2
- UWHSPZZUAYSGTB-UHFFFAOYSA-N 1,1,3,3-tetraethylurea Chemical compound CCN(CC)C(=O)N(CC)CC UWHSPZZUAYSGTB-UHFFFAOYSA-N 0.000 claims description 2
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 claims description 2
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 claims description 2
- GUVUOGQBMYCBQP-UHFFFAOYSA-N dmpu Chemical compound CN1CCCN(C)C1=O GUVUOGQBMYCBQP-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022090502 | 2022-06-02 | ||
| JP2022090502 | 2022-06-02 | ||
| PCT/JP2023/016824 WO2023233896A1 (ja) | 2022-06-02 | 2023-04-28 | 感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023233896A1 JPWO2023233896A1 (https=) | 2023-12-07 |
| JPWO2023233896A5 true JPWO2023233896A5 (https=) | 2024-05-15 |
| JP7505140B2 JP7505140B2 (ja) | 2024-06-24 |
Family
ID=89026351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024515545A Active JP7505140B2 (ja) | 2022-06-02 | 2023-04-28 | 感光性樹脂組成物 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250321481A1 (https=) |
| JP (1) | JP7505140B2 (https=) |
| KR (1) | KR20250017721A (https=) |
| TW (1) | TW202401167A (https=) |
| WO (1) | WO2023233896A1 (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009155433A (ja) * | 2007-12-26 | 2009-07-16 | Mitsui Chemicals Inc | ポリイミドおよびポリアミド酸 |
| JP5571990B2 (ja) * | 2009-06-04 | 2014-08-13 | 旭化成イーマテリアルズ株式会社 | ネガ型感光性樹脂組成物、硬化レリーフパターン形成・製造方法、並びに半導体装置 |
| CN104885009B (zh) * | 2012-12-28 | 2020-04-28 | 东京应化工业株式会社 | 能量敏感树脂组合物 |
| JP6087655B2 (ja) * | 2013-02-18 | 2017-03-01 | 東京応化工業株式会社 | 現像液、及び感光性樹脂組成物の現像処理方法 |
| JP6789900B2 (ja) | 2017-09-01 | 2020-11-25 | Ntn株式会社 | 減速装置 |
| JP7704516B2 (ja) * | 2020-10-30 | 2025-07-08 | 東京応化工業株式会社 | ワニス組成物、及びポリイミド膜の製造方法 |
-
2023
- 2023-04-28 US US18/870,210 patent/US20250321481A1/en active Pending
- 2023-04-28 WO PCT/JP2023/016824 patent/WO2023233896A1/ja not_active Ceased
- 2023-04-28 KR KR1020247043105A patent/KR20250017721A/ko active Pending
- 2023-04-28 JP JP2024515545A patent/JP7505140B2/ja active Active
- 2023-05-17 TW TW112118303A patent/TW202401167A/zh unknown
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