JPWO2023032821A5 - - Google Patents
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- Publication number
- JPWO2023032821A5 JPWO2023032821A5 JP2023545515A JP2023545515A JPWO2023032821A5 JP WO2023032821 A5 JPWO2023032821 A5 JP WO2023032821A5 JP 2023545515 A JP2023545515 A JP 2023545515A JP 2023545515 A JP2023545515 A JP 2023545515A JP WO2023032821 A5 JPWO2023032821 A5 JP WO2023032821A5
- Authority
- JP
- Japan
- Prior art keywords
- resin
- composition according
- resin composition
- group
- cured product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 claims 18
- 239000011347 resin Substances 0.000 claims 15
- 229920005989 resin Polymers 0.000 claims 15
- 238000004519 manufacturing process Methods 0.000 claims 7
- 125000003118 aryl group Chemical group 0.000 claims 4
- 239000004202 carbamide Substances 0.000 claims 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 4
- 125000004849 alkoxymethyl group Chemical group 0.000 claims 2
- 239000003431 cross linking reagent Substances 0.000 claims 2
- 125000005843 halogen group Chemical group 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 claims 2
- 125000005647 linker group Chemical group 0.000 claims 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 2
- 125000000962 organic group Chemical group 0.000 claims 2
- 239000002243 precursor Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000006467 substitution reaction Methods 0.000 claims 2
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 claims 2
- 239000002253 acid Substances 0.000 claims 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 claims 1
- 238000012644 addition polymerization Methods 0.000 claims 1
- 229920001577 copolymer Polymers 0.000 claims 1
- 239000011229 interlayer Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021141455 | 2021-08-31 | ||
| PCT/JP2022/032120 WO2023032821A1 (ja) | 2021-08-31 | 2022-08-25 | 樹脂組成物、硬化物、積層体、硬化物の製造方法、積層体の製造方法、半導体デバイスの製造方法、及び、半導体デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023032821A1 JPWO2023032821A1 (https=) | 2023-03-09 |
| JPWO2023032821A5 true JPWO2023032821A5 (https=) | 2024-05-23 |
Family
ID=85412613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023545515A Pending JPWO2023032821A1 (https=) | 2021-08-31 | 2022-08-25 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2023032821A1 (https=) |
| KR (1) | KR20240037331A (https=) |
| CN (1) | CN117940516A (https=) |
| TW (1) | TW202319410A (https=) |
| WO (1) | WO2023032821A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025033036A1 (ja) * | 2023-08-09 | 2025-02-13 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、樹脂、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
| WO2025220442A1 (ja) * | 2024-04-18 | 2025-10-23 | 日産化学株式会社 | 絶縁膜形成用感光性樹脂組成物 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07196917A (ja) | 1993-12-28 | 1995-08-01 | Shin Etsu Chem Co Ltd | 感光性樹脂組成物及びそれを用いるパターン化されたポリイミド皮膜の形成方法 |
| US9267004B2 (en) | 2008-07-22 | 2016-02-23 | Kaneka Corporation | Polyimide precursor composition and use thereof |
| JP7352176B2 (ja) * | 2018-10-12 | 2023-09-28 | 東レ株式会社 | 感光性樹脂組成物、硬化膜、および該硬化膜を用いた表示装置 |
| KR102880471B1 (ko) * | 2018-12-27 | 2025-11-03 | 닛산 가가쿠 가부시키가이샤 | 액정 배향제, 액정 배향막, 액정 표시 소자 및 신규 모노머 |
| JP7638174B2 (ja) * | 2020-08-04 | 2025-03-03 | 信越化学工業株式会社 | ネガ型感光性樹脂組成物、パターン形成方法、硬化被膜形成方法、層間絶縁膜、表面保護膜、及び電子部品 |
-
2022
- 2022-08-25 KR KR1020247006374A patent/KR20240037331A/ko active Pending
- 2022-08-25 CN CN202280058501.8A patent/CN117940516A/zh active Pending
- 2022-08-25 TW TW111132042A patent/TW202319410A/zh unknown
- 2022-08-25 JP JP2023545515A patent/JPWO2023032821A1/ja active Pending
- 2022-08-25 WO PCT/JP2022/032120 patent/WO2023032821A1/ja not_active Ceased
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