JPWO2023190060A5 - - Google Patents
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- JPWO2023190060A5 JPWO2023190060A5 JP2024512285A JP2024512285A JPWO2023190060A5 JP WO2023190060 A5 JPWO2023190060 A5 JP WO2023190060A5 JP 2024512285 A JP2024512285 A JP 2024512285A JP 2024512285 A JP2024512285 A JP 2024512285A JP WO2023190060 A5 JPWO2023190060 A5 JP WO2023190060A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- formula
- monovalent
- independently
- cured product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022053721 | 2022-03-29 | ||
| PCT/JP2023/011589 WO2023190060A1 (ja) | 2022-03-29 | 2023-03-23 | 感光性樹脂組成物、硬化物、積層体、硬化物の製造方法、積層体の製造方法、半導体デバイスの製造方法、及び、半導体デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023190060A1 JPWO2023190060A1 (https=) | 2023-10-05 |
| JPWO2023190060A5 true JPWO2023190060A5 (https=) | 2024-12-13 |
Family
ID=88202158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024512285A Pending JPWO2023190060A1 (https=) | 2022-03-29 | 2023-03-23 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2023190060A1 (https=) |
| KR (1) | KR102933491B1 (https=) |
| CN (1) | CN118974658A (https=) |
| TW (1) | TW202349118A (https=) |
| WO (1) | WO2023190060A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI879506B (zh) * | 2024-03-22 | 2025-04-01 | 奇美實業股份有限公司 | 感光性樹脂組成物、硬化膜圖案及其製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2826978B2 (ja) * | 1995-05-22 | 1998-11-18 | 旭化成工業株式会社 | ｉ線露光用組成物 |
| CN104870523B (zh) | 2012-12-21 | 2017-10-31 | 日立化成杜邦微系统股份有限公司 | 聚酰亚胺前体、包含该聚酰亚胺前体的感光性树脂组合物、使用其的图案固化膜的制造方法和半导体装置 |
| CN114207520B (zh) * | 2019-08-01 | 2025-12-05 | 东丽株式会社 | 感光性树脂组合物、感光性片、固化膜、固化膜的制造方法、层间绝缘膜及电子部件 |
| KR102681938B1 (ko) * | 2020-01-30 | 2024-07-04 | 아사히 가세이 가부시키가이샤 | 네거티브형 감광성 수지 조성물 및 경화 릴리프 패턴의 제조 방법 |
| JP7530736B2 (ja) | 2020-04-20 | 2024-08-08 | 旭化成株式会社 | 感光性樹脂組成物、硬化レリーフパターンの製造方法、硬化レリーフパターン、半導体装置及び表示体装置 |
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2023
- 2023-03-23 CN CN202380031623.2A patent/CN118974658A/zh active Pending
- 2023-03-23 KR KR1020247032414A patent/KR102933491B1/ko active Active
- 2023-03-23 JP JP2024512285A patent/JPWO2023190060A1/ja active Pending
- 2023-03-23 WO PCT/JP2023/011589 patent/WO2023190060A1/ja not_active Ceased
- 2023-03-27 TW TW112111413A patent/TW202349118A/zh unknown