JPWO2023190063A5 - - Google Patents
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- Publication number
- JPWO2023190063A5 JPWO2023190063A5 JP2024512288A JP2024512288A JPWO2023190063A5 JP WO2023190063 A5 JPWO2023190063 A5 JP WO2023190063A5 JP 2024512288 A JP2024512288 A JP 2024512288A JP 2024512288 A JP2024512288 A JP 2024512288A JP WO2023190063 A5 JPWO2023190063 A5 JP WO2023190063A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- cured product
- film
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022053723 | 2022-03-29 | ||
| PCT/JP2023/011592 WO2023190063A1 (ja) | 2022-03-29 | 2023-03-23 | 硬化物の製造方法、半導体デバイスの製造方法、処理液、及び、樹脂組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023190063A1 JPWO2023190063A1 (https=) | 2023-10-05 |
| JPWO2023190063A5 true JPWO2023190063A5 (https=) | 2024-12-13 |
Family
ID=88202087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024512288A Pending JPWO2023190063A1 (https=) | 2022-03-29 | 2023-03-23 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2023190063A1 (https=) |
| KR (1) | KR20240157714A (https=) |
| CN (1) | CN118946611A (https=) |
| TW (1) | TW202402906A (https=) |
| WO (1) | WO2023190063A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW202528448A (zh) * | 2023-11-13 | 2025-07-16 | 日商富士軟片股份有限公司 | 樹脂組成物、硬化物、積層體、硬化物之製造方法、積層體之製造方法、半導體元件之製造方法及半導體元件 |
| WO2026023557A1 (ja) * | 2024-07-25 | 2026-01-29 | 富士フイルム株式会社 | 樹脂組成物、硬化物、積層体、硬化物の製造方法、積層体の製造方法、半導体デバイスの製造方法、半導体デバイス、及び、樹脂 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2635901B2 (ja) | 1992-03-13 | 1997-07-30 | インターナショナル・ビジネス・マシーンズ・コーポレイション | ポリイミドのネガティブ像形成方法 |
| JP3501877B2 (ja) * | 1995-06-12 | 2004-03-02 | 日本ゼオン株式会社 | 感光性ポリイミド用現像液 |
| CN110431483B (zh) * | 2019-01-23 | 2022-02-11 | 律胜科技股份有限公司 | 感光性树脂组合物及其应用 |
| JP7443970B2 (ja) * | 2020-07-22 | 2024-03-06 | Ｈｄマイクロシステムズ株式会社 | 感光性樹脂組成物、硬化物、パターン硬化物の製造方法、及び電子部品 |
| KR102827423B1 (ko) * | 2020-09-07 | 2025-07-01 | 후지필름 가부시키가이샤 | 경화물의 제조 방법, 적층체의 제조 방법, 및, 반도체 디바이스의 제조 방법 |
| CN116113884A (zh) * | 2020-09-07 | 2023-05-12 | 富士胶片株式会社 | 固化物的制造方法、层叠体的制造方法及电子器件的制造方法 |
| WO2022070730A1 (ja) * | 2020-09-29 | 2022-04-07 | 富士フイルム株式会社 | 硬化物の製造方法、積層体の製造方法、及び、半導体デバイスの製造方法 |
| JP7619050B2 (ja) * | 2021-01-19 | 2025-01-22 | Ｈｄマイクロシステムズ株式会社 | 樹脂組成物、積層体の製造方法及び硬化膜 |
| KR102627683B1 (ko) * | 2021-08-31 | 2024-01-23 | 후지필름 가부시키가이샤 | 경화물의 제조 방법, 적층체의 제조 방법, 및, 반도체 디바이스의 제조 방법, 및, 처리액 |
-
2023
- 2023-03-23 CN CN202380031626.6A patent/CN118946611A/zh active Pending
- 2023-03-23 WO PCT/JP2023/011592 patent/WO2023190063A1/ja not_active Ceased
- 2023-03-23 KR KR1020247032371A patent/KR20240157714A/ko not_active Ceased
- 2023-03-23 JP JP2024512288A patent/JPWO2023190063A1/ja active Pending
- 2023-03-27 TW TW112111592A patent/TW202402906A/zh unknown
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