JPWO2024090486A5 - - Google Patents
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- Publication number
- JPWO2024090486A5 JPWO2024090486A5 JP2024553107A JP2024553107A JPWO2024090486A5 JP WO2024090486 A5 JPWO2024090486 A5 JP WO2024090486A5 JP 2024553107 A JP2024553107 A JP 2024553107A JP 2024553107 A JP2024553107 A JP 2024553107A JP WO2024090486 A5 JPWO2024090486 A5 JP WO2024090486A5
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- group
- resin composition
- formula
- composition according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022173650 | 2022-10-28 | ||
| PCT/JP2023/038561 WO2024090486A1 (ja) | 2022-10-28 | 2023-10-25 | 感光性樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2024090486A1 JPWO2024090486A1 (https=) | 2024-05-02 |
| JPWO2024090486A5 true JPWO2024090486A5 (https=) | 2025-03-31 |
Family
ID=90830900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024553107A Pending JPWO2024090486A1 (https=) | 2022-10-28 | 2023-10-25 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20260036904A1 (https=) |
| JP (1) | JPWO2024090486A1 (https=) |
| KR (1) | KR20250034472A (https=) |
| CN (1) | CN120129875A (https=) |
| TW (1) | TWI904490B (https=) |
| WO (1) | WO2024090486A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW202540292A (zh) * | 2024-02-22 | 2025-10-16 | 日商富士軟片股份有限公司 | 樹脂組成物、硬化物、積層體、硬化物之製造方法、積層體之製造方法、半導體元件之製造方法及半導體元件、以及聚醯胺酸酯之製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6190805B2 (ja) * | 2012-05-07 | 2017-08-30 | 旭化成株式会社 | ネガ型感光性樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置 |
| JP2014201696A (ja) * | 2013-04-08 | 2014-10-27 | 日立化成デュポンマイクロシステムズ株式会社 | ポリイミド前駆体、該ポリイミド前駆体を含む感光性樹脂組成物、及びそれを用いたパターン硬化膜の製造方法 |
| TWI895462B (zh) * | 2020-07-22 | 2025-09-01 | 日商富士軟片股份有限公司 | 樹脂組成物、膜、濾光器、固體攝像元件、圖像顯示裝置、樹脂及化合物 |
-
2023
- 2023-10-25 KR KR1020257004025A patent/KR20250034472A/ko active Pending
- 2023-10-25 US US19/123,551 patent/US20260036904A1/en active Pending
- 2023-10-25 JP JP2024553107A patent/JPWO2024090486A1/ja active Pending
- 2023-10-25 WO PCT/JP2023/038561 patent/WO2024090486A1/ja not_active Ceased
- 2023-10-25 CN CN202380074432.4A patent/CN120129875A/zh active Pending
- 2023-10-27 TW TW112141185A patent/TWI904490B/zh active
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