JPWO2023188755A5 - - Google Patents

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Publication number
JPWO2023188755A5
JPWO2023188755A5 JP2024511306A JP2024511306A JPWO2023188755A5 JP WO2023188755 A5 JPWO2023188755 A5 JP WO2023188755A5 JP 2024511306 A JP2024511306 A JP 2024511306A JP 2024511306 A JP2024511306 A JP 2024511306A JP WO2023188755 A5 JPWO2023188755 A5 JP WO2023188755A5
Authority
JP
Japan
Prior art keywords
source
semiconductor device
trench
semiconductor layer
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024511306A
Other languages
English (en)
Japanese (ja)
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JPWO2023188755A1 (https=
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/002429 external-priority patent/WO2023188755A1/ja
Publication of JPWO2023188755A1 publication Critical patent/JPWO2023188755A1/ja
Publication of JPWO2023188755A5 publication Critical patent/JPWO2023188755A5/ja
Pending legal-status Critical Current

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JP2024511306A 2022-03-28 2023-01-26 Pending JPWO2023188755A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022051509 2022-03-28
PCT/JP2023/002429 WO2023188755A1 (ja) 2022-03-28 2023-01-26 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023188755A1 JPWO2023188755A1 (https=) 2023-10-05
JPWO2023188755A5 true JPWO2023188755A5 (https=) 2024-12-09

Family

ID=88200244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024511306A Pending JPWO2023188755A1 (https=) 2022-03-28 2023-01-26

Country Status (4)

Country Link
US (1) US20250015151A1 (https=)
JP (1) JPWO2023188755A1 (https=)
CN (1) CN118922948A (https=)
WO (1) WO2023188755A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120261746A1 (en) * 2011-03-14 2012-10-18 Maxpower Semiconductor, Inc. Double-Trench Vertical Devices and Methods with Self-Alignment Between Gate and Body Contact
US20130164895A1 (en) * 2011-12-12 2013-06-27 Maxpower Semiconductor, Inc. Trench-Gated Power Devices with Two Types of Trenches and Reliable Polycidation
US11257944B2 (en) * 2015-04-27 2022-02-22 Rohm Co., Ltd. Semiconductor device and semiconductor device manufacturing method
JP6666671B2 (ja) * 2015-08-24 2020-03-18 ローム株式会社 半導体装置

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