JPWO2023189053A5 - - Google Patents

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Publication number
JPWO2023189053A5
JPWO2023189053A5 JP2024511470A JP2024511470A JPWO2023189053A5 JP WO2023189053 A5 JPWO2023189053 A5 JP WO2023189053A5 JP 2024511470 A JP2024511470 A JP 2024511470A JP 2024511470 A JP2024511470 A JP 2024511470A JP WO2023189053 A5 JPWO2023189053 A5 JP WO2023189053A5
Authority
JP
Japan
Prior art keywords
trench
resistor
semiconductor device
buried
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024511470A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023189053A1 (https=
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/006632 external-priority patent/WO2023189053A1/ja
Publication of JPWO2023189053A1 publication Critical patent/JPWO2023189053A1/ja
Publication of JPWO2023189053A5 publication Critical patent/JPWO2023189053A5/ja
Pending legal-status Critical Current

Links

JP2024511470A 2022-03-31 2023-02-24 Pending JPWO2023189053A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022061315 2022-03-31
PCT/JP2023/006632 WO2023189053A1 (ja) 2022-03-31 2023-02-24 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023189053A1 JPWO2023189053A1 (https=) 2023-10-05
JPWO2023189053A5 true JPWO2023189053A5 (https=) 2024-12-10

Family

ID=88200440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024511470A Pending JPWO2023189053A1 (https=) 2022-03-31 2023-02-24

Country Status (4)

Country Link
US (1) US20250022796A1 (https=)
JP (1) JPWO2023189053A1 (https=)
CN (1) CN118974945A (https=)
WO (1) WO2023189053A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022172625A1 (ja) * 2021-02-15 2022-08-18 パナソニックIpマネジメント株式会社 半導体装置
JP2023131415A (ja) * 2022-03-09 2023-09-22 ルネサスエレクトロニクス株式会社 半導体装置
WO2025121036A1 (ja) * 2023-12-05 2025-06-12 ローム株式会社 半導体装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6533613B2 (ja) * 2013-08-28 2019-06-19 ローム株式会社 半導体装置
DE112015004374B4 (de) * 2014-09-26 2019-02-14 Mitsubishi Electric Corporation Halbleitervorrichtung
JP6600475B2 (ja) * 2015-03-27 2019-10-30 ローム株式会社 半導体装置
JP7234713B2 (ja) * 2019-03-14 2023-03-08 富士電機株式会社 半導体装置

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