JPWO2023176118A5 - - Google Patents

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Publication number
JPWO2023176118A5
JPWO2023176118A5 JP2024507532A JP2024507532A JPWO2023176118A5 JP WO2023176118 A5 JPWO2023176118 A5 JP WO2023176118A5 JP 2024507532 A JP2024507532 A JP 2024507532A JP 2024507532 A JP2024507532 A JP 2024507532A JP WO2023176118 A5 JPWO2023176118 A5 JP WO2023176118A5
Authority
JP
Japan
Prior art keywords
trench
field plate
semiconductor device
plan
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024507532A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023176118A1 (https=
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/000741 external-priority patent/WO2023176118A1/ja
Publication of JPWO2023176118A1 publication Critical patent/JPWO2023176118A1/ja
Publication of JPWO2023176118A5 publication Critical patent/JPWO2023176118A5/ja
Pending legal-status Critical Current

Links

JP2024507532A 2022-03-14 2023-01-13 Pending JPWO2023176118A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022039009 2022-03-14
PCT/JP2023/000741 WO2023176118A1 (ja) 2022-03-14 2023-01-13 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023176118A1 JPWO2023176118A1 (https=) 2023-09-21
JPWO2023176118A5 true JPWO2023176118A5 (https=) 2024-11-20

Family

ID=88022723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024507532A Pending JPWO2023176118A1 (https=) 2022-03-14 2023-01-13

Country Status (5)

Country Link
US (1) US20240421199A1 (https=)
JP (1) JPWO2023176118A1 (https=)
CN (1) CN118843942A (https=)
DE (1) DE112023001369T5 (https=)
WO (1) WO2023176118A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4270487A1 (en) * 2022-04-28 2023-11-01 Infineon Technologies Austria AG Power transistor device and method of fabricating a transistor device
JP7841399B2 (ja) * 2022-09-16 2026-04-07 サンケン電気株式会社 半導体装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6666671B2 (ja) * 2015-08-24 2020-03-18 ローム株式会社 半導体装置
JP6676947B2 (ja) * 2015-12-14 2020-04-08 富士電機株式会社 半導体装置
JP6761389B2 (ja) * 2017-09-19 2020-09-23 株式会社東芝 半導体装置
JP2020167333A (ja) * 2019-03-29 2020-10-08 ローム株式会社 半導体装置

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