JPWO2020213254A1 - 半導体装置および製造方法 - Google Patents
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Abstract
Description
[先行技術文献]
[特許文献]
特許文献1 特開2010−147381号公報
特許文献2 特開2012−156564号公報
特許文献3 特開2010−147380号公報
Claims (10)
- 半導体基板と、
前記半導体基板の上面の上方に設けられたエミッタ電極と
を備え、
前記半導体基板は、
第1導電型のドリフト領域と、
前記ドリフト領域と前記半導体基板の上面との間に設けられた、第2導電型のベース領域と、
前記ベース領域と前記半導体基板の上面との間に設けられ、前記ベース領域よりもドーピング濃度の高い第2導電型のコンタクト領域と、
前記エミッタ電極に接続され、且つ、前記コンタクト領域を貫通して設けられた、導電材料のトレンチコンタクトと、
前記トレンチコンタクトの底部と接して設けられた、前記コンタクト領域よりもドーピング濃度の高い第2導電型の高濃度プラグ領域と
を有する半導体装置。 - 前記半導体基板の深さ方向において、前記高濃度プラグ領域の厚みは、前記コンタクト領域の厚みより小さい
請求項1に記載の半導体装置。 - 前記高濃度プラグ領域の下端は、前記ベース領域の下端よりも上側に配置されている
請求項2に記載の半導体装置。 - 前記半導体基板は、前記ベース領域と前記半導体基板の上面との間に設けられ、前記ドリフト領域よりもドーピング濃度の高い第1導電型のエミッタ領域を更に有し、
前記コンタクト領域は、前記エミッタ領域よりも深い位置まで設けられている
請求項1から3のいずれか一項に記載の半導体装置。 - 前記半導体基板は、
前記半導体基板の上面から前記ドリフト領域まで設けられた複数のトレンチ部と、
前記複数のトレンチ部のうちの2つのトレンチ部に挟まれたメサ部と
を有し、
前記半導体装置は、トランジスタ部およびダイオード部を有し、
前記トランジスタ部は、前記ダイオード部と接する境界部を有し、
前記境界部の前記メサ部に、前記トレンチコンタクトおよび前記高濃度プラグ領域が設けられている
請求項1から4のいずれか一項に記載の半導体装置。 - 前記トレンチコンタクトおよび前記高濃度プラグ領域は、前記境界部以外の前記トランジスタ部にも設けられている
請求項5に記載の半導体装置。 - 前記トレンチコンタクトおよび前記高濃度プラグ領域は、前記ダイオード部にも設けられている
請求項5または6に記載の半導体装置。 - 前記トレンチ部は、
導電部と、
前記導電部および前記エミッタ電極の間に設けられた層間絶縁膜と
を有し、
前記エミッタ電極は、前記メサ部の上面に接触している
請求項5から7のいずれか一項に記載の半導体装置。 - 第1導電型のドリフト領域を有する半導体基板を備える半導体装置の製造方法であって、
前記ドリフト領域と前記半導体基板の上面との間に設けられた、第2導電型のベース領域と、前記ベース領域と前記半導体基板の上面との間に設けられ、前記ベース領域よりもドーピング濃度の高い第2導電型のコンタクト領域とを形成する段階と、
前記半導体基板の上面において前記コンタクト領域を貫通するコンタクト用トレンチを形成する段階と、
前記コンタクト用トレンチの底部と接し、前記コンタクト領域よりもドーピング濃度の高い第2導電型の高濃度プラグ領域を形成する段階と、
前記コンタクト用トレンチの内部に導電材料を設けて、トレンチコンタクトを形成する段階と
を備える製造方法。 - 前記コンタクト用トレンチの内部と、前記半導体基板の上面に層間絶縁膜を形成し、且つ、前記半導体基板の上面の前記層間絶縁膜をエッチバックする段階と
を備える請求項9に記載の製造方法。
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WO2022264697A1 (ja) * | 2021-06-18 | 2022-12-22 | 富士電機株式会社 | 半導体装置 |
CN117099215A (zh) * | 2021-10-15 | 2023-11-21 | 富士电机株式会社 | 半导体装置 |
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