JPWO2020086828A5 - - Google Patents

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JPWO2020086828A5
JPWO2020086828A5 JP2021523047A JP2021523047A JPWO2020086828A5 JP WO2020086828 A5 JPWO2020086828 A5 JP WO2020086828A5 JP 2021523047 A JP2021523047 A JP 2021523047A JP 2021523047 A JP2021523047 A JP 2021523047A JP WO2020086828 A5 JPWO2020086828 A5 JP WO2020086828A5
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optical system
detector
intensity pattern
measurement
responds
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JP2021523047A
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Japanese (ja)
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JP7286765B2 (ja
JP2022505956A (ja
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Priority claimed from US16/171,883 external-priority patent/US10670391B2/en
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JP2021523047A 2018-10-26 2019-10-24 共焦点光学分度器 Active JP7286765B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023084719A JP7607077B2 (ja) 2018-10-26 2023-05-23 共焦点光学分度器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/171,883 2018-10-26
US16/171,883 US10670391B2 (en) 2018-10-26 2018-10-26 Confocal optical protractor
PCT/US2019/057834 WO2020086828A2 (en) 2018-10-26 2019-10-24 Confocal optical protractor

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JP2023084719A Division JP7607077B2 (ja) 2018-10-26 2023-05-23 共焦点光学分度器

Publications (3)

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JP2022505956A JP2022505956A (ja) 2022-01-14
JPWO2020086828A5 true JPWO2020086828A5 (enExample) 2022-05-17
JP7286765B2 JP7286765B2 (ja) 2023-06-05

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JP2021523047A Active JP7286765B2 (ja) 2018-10-26 2019-10-24 共焦点光学分度器
JP2021522943A Active JP7372968B2 (ja) 2018-10-26 2019-10-24 共焦点光学分度器および構造化光照明によって角度を判定するための方法
JP2023084719A Active JP7607077B2 (ja) 2018-10-26 2023-05-23 共焦点光学分度器
JP2023180547A Active JP7674436B2 (ja) 2018-10-26 2023-10-19 共焦点光学分度器および構造化光照明によって角度を判定するための方法

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JP2021522943A Active JP7372968B2 (ja) 2018-10-26 2019-10-24 共焦点光学分度器および構造化光照明によって角度を判定するための方法
JP2023084719A Active JP7607077B2 (ja) 2018-10-26 2023-05-23 共焦点光学分度器
JP2023180547A Active JP7674436B2 (ja) 2018-10-26 2023-10-19 共焦点光学分度器および構造化光照明によって角度を判定するための方法

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US (2) US10670391B2 (enExample)
EP (3) EP4177565B1 (enExample)
JP (4) JP7286765B2 (enExample)
KR (2) KR102741489B1 (enExample)
BR (3) BR112021007652B1 (enExample)
WO (2) WO2020086828A2 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7235153B2 (ja) * 2017-12-29 2023-03-08 株式会社三洋物産 遊技機
JP7235154B2 (ja) * 2018-02-15 2023-03-08 株式会社三洋物産 遊技機
JP7231076B2 (ja) * 2018-03-08 2023-03-01 株式会社三洋物産 遊技機
US10670391B2 (en) * 2018-10-26 2020-06-02 Northrop Grumman Systems Corporation Confocal optical protractor
JP2020103418A (ja) * 2018-12-26 2020-07-09 株式会社三洋物産 遊技機
JP2021186294A (ja) * 2020-05-29 2021-12-13 株式会社三洋物産 遊技機
CN115077390B (zh) * 2021-03-11 2023-03-24 山东大学 一种基于双波长涡旋光自共轭干涉的大量程皮米级位移测量系统及方法
JP2022166647A (ja) * 2021-04-21 2022-11-02 パナソニックIpマネジメント株式会社 光学測定装置、実装基板の組立装置、および、実装基板の組立方法
KR102608513B1 (ko) 2021-11-24 2023-12-04 한국과학기술원 유니버셜 메타표면을 포함하는 자유경로 동적 광집속 분포 생성기
KR102736223B1 (ko) * 2021-11-25 2024-12-03 한국기초과학지원연구원 광학 시스템
JP2023053387A (ja) * 2022-02-04 2023-04-12 株式会社三洋物産 遊技機
CN115406379B (zh) * 2022-08-15 2024-09-20 重庆邮电大学 一种基于光斑形变的大量程自准直测角方法
TWI836633B (zh) * 2022-09-28 2024-03-21 致茂電子股份有限公司 多自由度誤差校正方法及設備
CN116773850B (zh) * 2023-05-16 2024-07-23 苏州大学 一种基于单光子探测器测量转速和转角的装置及方法
CN116298373B (zh) * 2023-05-24 2023-10-20 之江实验室 一种基于旋转多普勒效应测量物体角速度的装置和方法
CN116772741B (zh) * 2023-08-25 2023-11-07 北京建筑大学 一种变形检测系统及变形检测方法
CN118500294B (zh) * 2024-05-15 2025-04-22 邯郸学院 一种基于共轭涡旋光干涉的微小角位移测量系统

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3790284A (en) 1972-05-08 1974-02-05 Hewlett Packard Co Interferometer system for measuring straightness and roll
US3975102A (en) 1974-07-29 1976-08-17 Zygo Corporation Scanning photoelectric autocollimator
US3977789A (en) 1975-04-07 1976-08-31 Zygo Corporation Scanning differential photoelectric autocollimator
US4257164A (en) * 1978-11-09 1981-03-24 The United States Of America As Represented By The Secretary Of The Air Force Optical protractor
US4443103A (en) * 1980-12-18 1984-04-17 The Boeing Company Retro-reflective electro-optical angle measuring system
US4746216A (en) 1986-03-28 1988-05-24 Zygo Corporation Angle measuring interferometer
US5028137A (en) 1989-02-13 1991-07-02 Zygo Corporation Angular displacement measuring interferometer
US5283796A (en) * 1992-04-21 1994-02-01 Hughes Aircraft Company Phase plate or spiral phase wheel driven linear frequency chirped laser
IL117503A0 (en) * 1996-03-14 1996-07-23 Yeda Res & Dev Optical resonator
IL120754A0 (en) * 1997-05-01 1998-01-04 Yeda Res & Dev Optical resonators with discontinuous phase elements
US6188078B1 (en) 1999-05-04 2001-02-13 Lockheed Martin Missiles & Space Company Optical metrology device for precision angular measurement of a pointing mirror
US6870628B2 (en) 2001-05-11 2005-03-22 Fibersense Technology Corporation Alignment of optical fiber to optical port of integrated optical circuit
US20040216315A1 (en) 2003-05-01 2004-11-04 Ellis Merle R. Angle measuring device
EP1503175A1 (de) 2003-07-28 2005-02-02 Leica Geosystems AG Vorrichtung und Verfahren zum Kalibrieren der Ausrichtung eines Prüflings
JP2008014935A (ja) * 2006-06-05 2008-01-24 Hitachi High-Technologies Corp 表面検査装置及びその方法
US8248599B2 (en) * 2006-06-21 2012-08-21 University Of Dayton Methods of polarization engineering and their applications
WO2009036418A1 (en) * 2007-09-13 2009-03-19 Duke University Apparatuses, systems, and methods for low-coherence interferometry (lci)
JP2010066090A (ja) * 2008-09-10 2010-03-25 Mitsutoyo Corp 光学測定装置
JP5322099B2 (ja) * 2008-10-21 2013-10-23 国立大学法人東北大学 角度センサ
JP2012509464A (ja) * 2008-11-17 2012-04-19 ファロ テクノロジーズ インコーポレーテッド 六自由度計測装置及び方法
US8099876B1 (en) 2008-11-21 2012-01-24 The Boeing Company Azimuth determination system and method therefor
EP2619526B8 (de) 2010-09-20 2016-12-14 Trioptics GmbH Autokollimationsfernrohr mit kamera
EP2706406B1 (en) * 2011-06-07 2016-09-21 National University Corporation Chiba University Optical vortex laser vibration method and optical vortex laser vibration device
CN104412125B (zh) * 2012-03-29 2019-04-05 Npl管理有限公司 测量装置、系统和方法
EP2705812A1 (de) * 2012-09-05 2014-03-12 Universität zu Lübeck Vorrichtung zum Laserschneiden innerhalb transparenter Materialien
WO2014110299A1 (en) 2013-01-10 2014-07-17 Xiaotian Steve Yao Non-interferometric optical gyroscope based on polarization sensing
US9395174B2 (en) * 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
JP6544907B2 (ja) * 2014-10-16 2019-07-17 株式会社トプコン 変位測定方法及び変位測定装置
PL3037800T3 (pl) 2014-12-24 2018-11-30 Trioptics Gmbh Pomiar pozycji środków krzywizny powierzchni optycznych jedno- lub wielosoczewkowego układu optycznego
US9423360B1 (en) * 2015-02-09 2016-08-23 Microsoft Technology Licensing, Llc Optical components
US9753241B2 (en) 2015-09-08 2017-09-05 Lockheed Martin Corporation Laser autocollimator using optical parasitic interference
US10107650B2 (en) 2016-06-15 2018-10-23 The Boeing Company Systems and methods for measuring angular position of a laser beam emitter
JP6253830B2 (ja) * 2017-05-17 2017-12-27 オリンパス株式会社 超解像顕微鏡
US10323934B1 (en) * 2018-04-02 2019-06-18 Northrop Grumman Systems Corporation Optical protractor to measure roll angle on a static surface and rotating surface
US10218145B1 (en) * 2018-07-02 2019-02-26 National Sun Yat-Sen University Vortex laser generation device in degenerate cavity with spiral phase element and vortex laser generation method
US10670391B2 (en) * 2018-10-26 2020-06-02 Northrop Grumman Systems Corporation Confocal optical protractor

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