KR102741489B1 - 공초점 광학 프로트랙터 - Google Patents
공초점 광학 프로트랙터 Download PDFInfo
- Publication number
- KR102741489B1 KR102741489B1 KR1020217014384A KR20217014384A KR102741489B1 KR 102741489 B1 KR102741489 B1 KR 102741489B1 KR 1020217014384 A KR1020217014384 A KR 1020217014384A KR 20217014384 A KR20217014384 A KR 20217014384A KR 102741489 B1 KR102741489 B1 KR 102741489B1
- Authority
- KR
- South Korea
- Prior art keywords
- detector
- optical system
- reflected
- intensity pattern
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C1/00—Measuring angles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/004—Systems comprising a plurality of reflections between two or more surfaces, e.g. cells, resonators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/04—Prisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08018—Mode suppression
- H01S3/0804—Transverse or lateral modes
- H01S3/08045—Single-mode emission
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/171,883 | 2018-10-26 | ||
| US16/171,883 US10670391B2 (en) | 2018-10-26 | 2018-10-26 | Confocal optical protractor |
| PCT/US2019/057834 WO2020086828A2 (en) | 2018-10-26 | 2019-10-24 | Confocal optical protractor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20210080426A KR20210080426A (ko) | 2021-06-30 |
| KR102741489B1 true KR102741489B1 (ko) | 2024-12-11 |
Family
ID=68582385
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020217014384A Active KR102741489B1 (ko) | 2018-10-26 | 2019-10-24 | 공초점 광학 프로트랙터 |
| KR1020217014453A Active KR102741494B1 (ko) | 2018-10-26 | 2019-10-24 | 각도를 결정하도록 구조화된 광 조명을 갖는 공초점 광학 프로트랙터를 위한 방법 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020217014453A Active KR102741494B1 (ko) | 2018-10-26 | 2019-10-24 | 각도를 결정하도록 구조화된 광 조명을 갖는 공초점 광학 프로트랙터를 위한 방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10670391B2 (enExample) |
| EP (3) | EP3870933B1 (enExample) |
| JP (4) | JP7372968B2 (enExample) |
| KR (2) | KR102741489B1 (enExample) |
| BR (3) | BR122022018325B1 (enExample) |
| WO (2) | WO2020086828A2 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7235153B2 (ja) * | 2017-12-29 | 2023-03-08 | 株式会社三洋物産 | 遊技機 |
| JP7235154B2 (ja) * | 2018-02-15 | 2023-03-08 | 株式会社三洋物産 | 遊技機 |
| JP7231076B2 (ja) * | 2018-03-08 | 2023-03-01 | 株式会社三洋物産 | 遊技機 |
| US10670391B2 (en) * | 2018-10-26 | 2020-06-02 | Northrop Grumman Systems Corporation | Confocal optical protractor |
| JP2020103418A (ja) * | 2018-12-26 | 2020-07-09 | 株式会社三洋物産 | 遊技機 |
| JP2021186294A (ja) * | 2020-05-29 | 2021-12-13 | 株式会社三洋物産 | 遊技機 |
| CN115077390B (zh) * | 2021-03-11 | 2023-03-24 | 山东大学 | 一种基于双波长涡旋光自共轭干涉的大量程皮米级位移测量系统及方法 |
| JP2022166647A (ja) * | 2021-04-21 | 2022-11-02 | パナソニックIpマネジメント株式会社 | 光学測定装置、実装基板の組立装置、および、実装基板の組立方法 |
| KR102608513B1 (ko) | 2021-11-24 | 2023-12-04 | 한국과학기술원 | 유니버셜 메타표면을 포함하는 자유경로 동적 광집속 분포 생성기 |
| KR102736223B1 (ko) * | 2021-11-25 | 2024-12-03 | 한국기초과학지원연구원 | 광학 시스템 |
| JP2023053387A (ja) * | 2022-02-04 | 2023-04-12 | 株式会社三洋物産 | 遊技機 |
| CN115406379B (zh) * | 2022-08-15 | 2024-09-20 | 重庆邮电大学 | 一种基于光斑形变的大量程自准直测角方法 |
| TWI836633B (zh) * | 2022-09-28 | 2024-03-21 | 致茂電子股份有限公司 | 多自由度誤差校正方法及設備 |
| CN116773850B (zh) * | 2023-05-16 | 2024-07-23 | 苏州大学 | 一种基于单光子探测器测量转速和转角的装置及方法 |
| CN116298373B (zh) * | 2023-05-24 | 2023-10-20 | 之江实验室 | 一种基于旋转多普勒效应测量物体角速度的装置和方法 |
| CN116772741B (zh) * | 2023-08-25 | 2023-11-07 | 北京建筑大学 | 一种变形检测系统及变形检测方法 |
| CN118500294B (zh) * | 2024-05-15 | 2025-04-22 | 邯郸学院 | 一种基于共轭涡旋光干涉的微小角位移测量系统 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010101622A (ja) | 2008-10-21 | 2010-05-06 | Tohoku Univ | 角度センサ |
| JP2014066728A (ja) | 2008-11-17 | 2014-04-17 | Faro Technologies Inc | 六自由度計測装置及び方法 |
Family Cites Families (34)
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| US3790284A (en) | 1972-05-08 | 1974-02-05 | Hewlett Packard Co | Interferometer system for measuring straightness and roll |
| US3975102A (en) | 1974-07-29 | 1976-08-17 | Zygo Corporation | Scanning photoelectric autocollimator |
| US3977789A (en) | 1975-04-07 | 1976-08-31 | Zygo Corporation | Scanning differential photoelectric autocollimator |
| US4257164A (en) * | 1978-11-09 | 1981-03-24 | The United States Of America As Represented By The Secretary Of The Air Force | Optical protractor |
| US4443103A (en) * | 1980-12-18 | 1984-04-17 | The Boeing Company | Retro-reflective electro-optical angle measuring system |
| US4746216A (en) | 1986-03-28 | 1988-05-24 | Zygo Corporation | Angle measuring interferometer |
| US5028137A (en) | 1989-02-13 | 1991-07-02 | Zygo Corporation | Angular displacement measuring interferometer |
| US5283796A (en) * | 1992-04-21 | 1994-02-01 | Hughes Aircraft Company | Phase plate or spiral phase wheel driven linear frequency chirped laser |
| IL117503A0 (en) * | 1996-03-14 | 1996-07-23 | Yeda Res & Dev | Optical resonator |
| IL120754A0 (en) * | 1997-05-01 | 1998-01-04 | Yeda Res & Dev | Optical resonators with discontinuous phase elements |
| US6188078B1 (en) | 1999-05-04 | 2001-02-13 | Lockheed Martin Missiles & Space Company | Optical metrology device for precision angular measurement of a pointing mirror |
| US6870628B2 (en) | 2001-05-11 | 2005-03-22 | Fibersense Technology Corporation | Alignment of optical fiber to optical port of integrated optical circuit |
| US20040216315A1 (en) | 2003-05-01 | 2004-11-04 | Ellis Merle R. | Angle measuring device |
| EP1503175A1 (de) | 2003-07-28 | 2005-02-02 | Leica Geosystems AG | Vorrichtung und Verfahren zum Kalibrieren der Ausrichtung eines Prüflings |
| JP2008014935A (ja) * | 2006-06-05 | 2008-01-24 | Hitachi High-Technologies Corp | 表面検査装置及びその方法 |
| US8248599B2 (en) | 2006-06-21 | 2012-08-21 | University Of Dayton | Methods of polarization engineering and their applications |
| JP5579606B2 (ja) * | 2007-09-13 | 2014-08-27 | デユーク・ユニバーシテイ | 低コヒーレンス干渉法(lci)のための装置、システムおよび方法 |
| JP2010066090A (ja) | 2008-09-10 | 2010-03-25 | Mitsutoyo Corp | 光学測定装置 |
| US8099876B1 (en) | 2008-11-21 | 2012-01-24 | The Boeing Company | Azimuth determination system and method therefor |
| EP2619526B8 (de) | 2010-09-20 | 2016-12-14 | Trioptics GmbH | Autokollimationsfernrohr mit kamera |
| WO2012169578A2 (ja) * | 2011-06-07 | 2012-12-13 | 国立大学法人 千葉大学 | 光渦レーザー発振方法及び光渦レーザー発振装置 |
| ES2865077T3 (es) * | 2012-03-29 | 2021-10-14 | Npl Management Ltd | Dispositivo, sistema y método de medición |
| EP2705812A1 (de) | 2012-09-05 | 2014-03-12 | Universität zu Lübeck | Vorrichtung zum Laserschneiden innerhalb transparenter Materialien |
| WO2014110299A1 (en) | 2013-01-10 | 2014-07-17 | Xiaotian Steve Yao | Non-interferometric optical gyroscope based on polarization sensing |
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| JP6544907B2 (ja) | 2014-10-16 | 2019-07-17 | 株式会社トプコン | 変位測定方法及び変位測定装置 |
| EP3037800B1 (de) | 2014-12-24 | 2018-04-04 | Trioptics GmbH | Messung der Positionen von Krümmungsmittelpunkten optischer Flächen eines ein-oder mehrlinsigen optischen Systems |
| US9423360B1 (en) * | 2015-02-09 | 2016-08-23 | Microsoft Technology Licensing, Llc | Optical components |
| US9753241B2 (en) | 2015-09-08 | 2017-09-05 | Lockheed Martin Corporation | Laser autocollimator using optical parasitic interference |
| US10107650B2 (en) | 2016-06-15 | 2018-10-23 | The Boeing Company | Systems and methods for measuring angular position of a laser beam emitter |
| JP6253830B2 (ja) | 2017-05-17 | 2017-12-27 | オリンパス株式会社 | 超解像顕微鏡 |
| US10323934B1 (en) * | 2018-04-02 | 2019-06-18 | Northrop Grumman Systems Corporation | Optical protractor to measure roll angle on a static surface and rotating surface |
| US10218145B1 (en) * | 2018-07-02 | 2019-02-26 | National Sun Yat-Sen University | Vortex laser generation device in degenerate cavity with spiral phase element and vortex laser generation method |
| US10670391B2 (en) * | 2018-10-26 | 2020-06-02 | Northrop Grumman Systems Corporation | Confocal optical protractor |
-
2018
- 2018-10-26 US US16/171,883 patent/US10670391B2/en active Active
-
2019
- 2019-05-14 US US16/411,921 patent/US10809057B2/en active Active
- 2019-10-24 BR BR122022018325-5A patent/BR122022018325B1/pt active IP Right Grant
- 2019-10-24 WO PCT/US2019/057834 patent/WO2020086828A2/en not_active Ceased
- 2019-10-24 BR BR112021007644-1A patent/BR112021007644B1/pt active IP Right Grant
- 2019-10-24 EP EP19804963.7A patent/EP3870933B1/en active Active
- 2019-10-24 WO PCT/US2019/057846 patent/WO2020086837A1/en not_active Ceased
- 2019-10-24 JP JP2021522943A patent/JP7372968B2/ja active Active
- 2019-10-24 KR KR1020217014384A patent/KR102741489B1/ko active Active
- 2019-10-24 EP EP19812883.7A patent/EP3870934B1/en active Active
- 2019-10-24 JP JP2021523047A patent/JP7286765B2/ja active Active
- 2019-10-24 BR BR112021007652-2A patent/BR112021007652B1/pt active IP Right Grant
- 2019-10-24 EP EP22206818.1A patent/EP4177565B1/en active Active
- 2019-10-24 KR KR1020217014453A patent/KR102741494B1/ko active Active
-
2023
- 2023-05-23 JP JP2023084719A patent/JP7607077B2/ja active Active
- 2023-10-19 JP JP2023180547A patent/JP7674436B2/ja active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010101622A (ja) | 2008-10-21 | 2010-05-06 | Tohoku Univ | 角度センサ |
| JP2014066728A (ja) | 2008-11-17 | 2014-04-17 | Faro Technologies Inc | 六自由度計測装置及び方法 |
Non-Patent Citations (3)
| Title |
|---|
| Y.S.Rumala et al., "Multiple beam interference in spiral phase plates", Department of Physics, University of Michigan, Ann Arbor, MI 48109, USA |
| Y.S.Rumala, "Propagation of structured light beams after multiple reflections in a spiral phase plate", Optical Engineering 54(11), 111306 |
| Y.S.Rumala, "Sensitivity in frequency dependent angular rotation of optical vortices", Applied Optics, Vol. 55, No. 8 / March 10 2016 |
Also Published As
| Publication number | Publication date |
|---|---|
| BR112021007644A2 (pt) | 2021-07-27 |
| US10809057B2 (en) | 2020-10-20 |
| BR112021007644B1 (pt) | 2022-12-13 |
| JP7607077B2 (ja) | 2024-12-26 |
| JP7372968B2 (ja) | 2023-11-01 |
| JP2022505869A (ja) | 2022-01-14 |
| WO2020086828A3 (en) | 2020-05-22 |
| JP2024016064A (ja) | 2024-02-06 |
| US20200132443A1 (en) | 2020-04-30 |
| BR112021007652B1 (pt) | 2022-12-13 |
| EP3870933B1 (en) | 2022-11-30 |
| WO2020086828A2 (en) | 2020-04-30 |
| EP3870934A1 (en) | 2021-09-01 |
| EP3870933A2 (en) | 2021-09-01 |
| BR122022018325B1 (pt) | 2023-05-09 |
| JP7674436B2 (ja) | 2025-05-09 |
| KR20210080426A (ko) | 2021-06-30 |
| JP2022505956A (ja) | 2022-01-14 |
| EP4177565A1 (en) | 2023-05-10 |
| EP4177565B1 (en) | 2024-01-31 |
| US20200132444A1 (en) | 2020-04-30 |
| KR102741494B1 (ko) | 2024-12-11 |
| US10670391B2 (en) | 2020-06-02 |
| EP3870934B1 (en) | 2023-04-05 |
| JP2023120198A (ja) | 2023-08-29 |
| KR20210080431A (ko) | 2021-06-30 |
| JP7286765B2 (ja) | 2023-06-05 |
| WO2020086837A1 (en) | 2020-04-30 |
| BR112021007652A2 (pt) | 2021-07-27 |
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