JPWO2017168756A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JPWO2017168756A1 JPWO2017168756A1 JP2018508340A JP2018508340A JPWO2017168756A1 JP WO2017168756 A1 JPWO2017168756 A1 JP WO2017168756A1 JP 2018508340 A JP2018508340 A JP 2018508340A JP 2018508340 A JP2018508340 A JP 2018508340A JP WO2017168756 A1 JPWO2017168756 A1 JP WO2017168756A1
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- substrate
- terminal
- semiconductor element
- conductor substrate
- conductor
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Abstract
Description
(実施の形態1)
まず本実施の形態の半導体装置の構成について図1および図2を用いて説明する。なお図1は図2中のI−I線に沿う部分の概略断面図である。図1を参照して、本実施の形態の半導体装置100は、基板材1と、半導体素子3と、端子5と、接続材7と、樹脂9とを主に有している。接続材7は接続材7A,7B,7Cを有している。
図1を再度参照して、仮に第2経路の第2の導体基板12の上方の領域にも半導体素子が配置されれば、その半導体素子自体の発熱により、この部分に半導体素子が存在しない本実施の形態の構成に比べて、図1の半導体素子3の上方から端子5を伝わる第2経路での放熱作用が弱められる。また半導体素子を構成する炭化珪素などの材料は、導体材料に比べて熱抵抗が大きいことによっても、第2経路での放熱作用が弱められる。
図3は図4中のIII−III線に沿う部分の概略断面図である。図3および図4を参照して、本実施の形態の半導体装置200は、大筋で実施の形態1の半導体装置100の構成と同様の構成を有している。このため同一の構成要素については同一の参照番号を付し、その説明を繰り返さない。半導体装置200においては、第1の導体基板11の真上における端子5の半導体素子3と反対側すなわち図3の上側に第1の熱容量体31が配置されている。第1の熱容量体31は、端子5の上側の表面と接続材7Dにより接続されている。つまり接続材7は接続材7A,7B,7C,7Dを有している。
図5は図6中のV−V線に沿う部分の概略断面図である。図5および図6を参照して、本実施の形態の半導体装置300は、大筋で実施の形態1,2の半導体装置100,200の構成と同様の構成を有している。このため同一の構成要素については同一の参照番号を付し、その説明を繰り返さない。半導体装置300においては、第2の導体基板12の真上における端子5の基板材1と反対側すなわち図5の上側に第2の熱容量体32が配置されている。第2の熱容量体32は、端子5の上側の表面と接続材7Dにより接続されている。つまり接続材7は接続材7A,7B,7C,7Dを有している。第2の熱容量体32は第1の熱容量体31と同様の材質を用いて、同様の製法により、同様のサイズのものが形成されるため、詳細な説明を省略する。
図7は図8中のVII−VII線に沿う部分の概略断面図である。図7および図8を参照して、本実施の形態の半導体装置400は、大筋で実施の形態1〜3の半導体装置100〜300の構成と同様の構成を有している。このため同一の構成要素については同一の参照番号を付し、その説明を繰り返さない。半導体装置400においては、実施の形態1の半導体装置100と異なり、端子5は第2の導体基板12と直接接続されてはおらず、両者の間に接続材7以外の部材が配置された構成を有している。具体的には、端子5は第2の導体基板12と、第3の熱容量体33を介して接続されている。第3の熱容量体33は、第1の熱容量体31および第2の熱容量体32と同様に銅板の打ち抜き加工により、直方体状のヒートシンクとして形成される。このため第3の熱容量体33についての詳細な説明を省略する。第3の熱容量体33は、第2の導体基板12の基板材1と反対側すなわち図7の上側に、接続材7Cにより接続されている。また第3の熱容量体33は、その図7の上側において、接続材7Dにより端子5と接続されている。第3の熱容量体33は第1の導体基板11および第2の導体基板12よりも熱容量が大きいことが好ましい。
図9は図10中のIX−IX線に沿う部分の概略断面図である。図9および図10を参照して、本実施の形態の半導体装置500は、大筋で実施の形態4の半導体装置400の構成と同様の構成を有している。このため同一の構成要素については同一の参照番号を付し、その説明を繰り返さない。しかし半導体装置500においては、半導体装置400の第3の熱容量体33および接続材7Dの部分が、端子5と一体として構成されている。このため端子5は、半導体装置400の端子5と同様の第1の導体基板11上の領域から第2の導体基板12上の領域まで平坦に延びる領域と、半導体装置400の第3の熱容量体33および接続材7Dの部分に相当する突起部5Tとが合体された、銅板からなる構造となっている。言い換えれば、端子5は、基板材1側の第1の端子表面が、第2の導体基板12の真上において基板材1側に突起する突起部5Tを有している。これにより第1の端子表面は、第2の導体基板12の真上において第1の導体基板11の真上に比べて基板材1からの距離が短くなっている。
Claims (12)
- 絶縁基板と、前記絶縁基板の一方の主表面上に互いに間隔をあけて配置された第1および第2の導体基板と、前記絶縁基板の前記一方の主表面と反対側の他方の主表面上に配置された第3の導体基板とを含む基板材と、
前記第1の導体基板の前記絶縁基板と反対側に接続される半導体素子と、
前記半導体素子の前記第1の導体基板と反対側に接続される端子とを備え、
前記端子は前記半導体素子上の領域から前記第2の導体基板の上の領域まで延びるとともに、前記第2の導体基板と接続されており、
前記基板材、前記半導体素子および前記端子の少なくとも一部は樹脂により封止され、
前記第3の導体基板は前記樹脂から露出している、半導体装置。 - 前記端子は前記第2の導体基板と直接接続される、請求項1に記載の半導体装置。
- 前記端子の前記基板材側にある第1の端子表面は、前記第2の導体基板の真上において前記第1の導体基板の真上に比べて前記基板材からの距離が短い、請求項1または2に記載の半導体装置。
- 前記端子は前記第1の導体基板より熱容量が大きい、請求項1〜3のいずれか1項に記載の半導体装置。
- 前記第1の導体基板の真上における前記端子の前記半導体素子と反対側に第1の熱容量体をさらに備え、
前記第1の熱容量体は、前記第1および第2の導体基板より熱容量が大きい、請求項1〜4のいずれか1項に記載の半導体装置。 - 前記第2の導体基板の真上における前記端子の前記基板材と反対側に第2の熱容量体をさらに備え、
前記第2の熱容量体は、前記第1および第2の導体基板より熱容量が大きい、請求項1〜5のいずれか1項に記載の半導体装置。 - 前記端子は前記第2の導体基板と、第3の熱容量体を介して接続される、請求項1に記載の半導体装置。
- 前記端子の前記基板材と反対側にある第2の端子表面は、少なくとも前記第1および第2の導体基板の真上において前記樹脂に覆われる、請求項1〜7のいずれか1項に記載の半導体装置。
- 前記半導体素子は、スイッチとしての機能と、還流用ダイオードとしての機能との双方を有する、請求項1〜8のいずれか1項に記載の半導体装置。
- 前記半導体素子はワイドバンドギャップ半導体からなる、請求項1〜9のいずれか1項に記載の半導体装置。
- 前記半導体素子はシリコンとカーボンとを主成分とする化合物からなる、請求項1〜10のいずれか1項に記載の半導体装置。
- 前記基板材は、前記絶縁基板の前記一方の主表面上に、前記第1および第2の導体基板と互いに間隔をあけて配置された第4の導体基板をさらに含み、さらに、
前記第4の導体基板の前記絶縁基板と反対側に接続される他の半導体素子と、
前記他の半導体素子の前記第4の導体基板と反対側に接続される他の端子とを備え、
前記第1の導体基板は、前記半導体素子が接続された第1領域と、前記第1領域以外の第2領域とを含み、
前記他の端子は前記他の半導体素子上の領域から前記第1の導体基板上の前記第2領域まで延びるとともに、前記第1の導体基板の前記第2領域と接続される、請求項1〜11のいずれか1項に記載の半導体装置。
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JP2009124082A (ja) * | 2007-11-19 | 2009-06-04 | Mitsubishi Electric Corp | 電力用半導体装置 |
JP2012043875A (ja) * | 2010-08-17 | 2012-03-01 | Mitsubishi Electric Corp | 電力用半導体装置 |
JP2014150203A (ja) * | 2013-02-04 | 2014-08-21 | Mitsubishi Electric Corp | パワーモジュール、およびパワーモジュールの製造方法 |
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US10825751B2 (en) | 2020-11-03 |
WO2017168756A1 (ja) | 2017-10-05 |
CN209150089U (zh) | 2019-07-23 |
JP6849660B2 (ja) | 2021-03-24 |
US20190067159A1 (en) | 2019-02-28 |
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