JPWO2017145633A1 - 太陽電池セルおよび太陽電池セルの製造方法 - Google Patents
太陽電池セルおよび太陽電池セルの製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000000034 method Methods 0.000 title description 22
- 229910021419 crystalline silicon Inorganic materials 0.000 claims abstract description 185
- 238000002161 passivation Methods 0.000 claims abstract description 110
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 95
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 29
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 6
- 239000010410 layer Substances 0.000 claims description 342
- 239000002019 doping agent Substances 0.000 claims description 43
- 239000001257 hydrogen Substances 0.000 claims description 16
- 229910052739 hydrogen Inorganic materials 0.000 claims description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- 239000001301 oxygen Substances 0.000 claims description 14
- 238000002425 crystallisation Methods 0.000 claims description 10
- 230000008025 crystallization Effects 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 7
- 239000011241 protective layer Substances 0.000 claims description 7
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 2
- 210000004027 cell Anatomy 0.000 description 68
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 11
- 229910052796 boron Inorganic materials 0.000 description 11
- 229910052698 phosphorus Inorganic materials 0.000 description 11
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 10
- 125000004429 atom Chemical group 0.000 description 10
- 239000011574 phosphorus Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000000137 annealing Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
Description
(1)n型結晶性シリコンウェーハ11の一方の面上に、酸化シリコン、炭化シリコン、または窒化シリコンを主成分として構成される第1パッシベーション層12を形成する工程。
(2)第1パッシベーション層12上にn型結晶性シリコン層13を形成する工程。
(3)n型結晶性シリコン層13が形成されたn型結晶性シリコンウェーハ11の他方の面上に第2パッシベーション層16を形成する工程。
(4)第2パッシベーション層16上にp型非晶質シリコン層17を形成する工程。
Claims (17)
- 結晶性シリコンウェーハと、
前記結晶性シリコンウェーハの受光面上に形成され、酸化シリコン、炭化シリコン、または窒化シリコンを主成分として構成される第1パッシベーション層と、
前記第1パッシベーション層上に形成されたn型結晶性シリコン層と、
前記結晶性シリコンウェーハの裏面上に形成された第2パッシベーション層と、
前記第2パッシベーション層上に形成されたp型非晶質シリコン層と、
を備えた、太陽電池セル。 - 前記第2パッシベーション層は、実質的に真性な非晶質シリコンか、または前記p型非晶質シリコン層よりドーパント濃度が低い非晶質シリコンを含み、前記第1パッシベーション層より厚い、請求項1に記載の太陽電池セル。
- 前記p型非晶質シリコン層の結晶化率は、前記n型結晶性シリコン層の結晶化率より低く、
前記n型結晶性シリコン層の結晶化率は、前記結晶性シリコンウェーハの結晶化率より低い、請求項1または2に記載の太陽電池セル。 - 前記結晶性シリコンウェーハは、n型結晶性シリコンウェーハであり、前記第1パッシベーション層と接する界面およびその近傍に、n型にドーピングされ他の領域よりドーパント濃度が高いn+層を有する、請求項1〜3のいずれか1項に記載の太陽電池セル。
- 前記結晶性シリコンウェーハは、前記第1パッシベーション層と接する界面およびその近傍における不純物濃度が、前記第2パッシベーション層と接する界面およびその近傍における不純物濃度より高い、請求項4に記載の太陽電池セル。
- 前記第1パッシベーション層は、酸化シリコンを主成分として構成され、前記第2パッシベーション層より酸素濃度が高い、請求項1に記載の太陽電池セル。
- 前記第1パッシベーション層における酸素濃度は、1.0×1021atoms/cm3以上である、請求項6に記載の太陽電池セル。
- 前記n型結晶性シリコン層は、前記p型非晶質シリコン層より水素濃度が低い、請求項7に記載の太陽電池セル。
- 前記n型結晶性シリコン層は、前記第2パッシベーション層より水素濃度が低い、請求項8に記載の太陽電池セル。
- 前記第1パッシベーション層におけるn型ドーパントの濃度は、前記第2パッシベーション層におけるp型ドーパントの濃度より高い、請求項1〜9のいずれか1項に記載の太陽電池セル。
- 前記n型結晶性シリコン層上に形成され、金属酸化物を含む第1透明導電層と、
前記第1透明導電層上に形成された、細線状の複数のフィンガー部を含む第1集電極と、
前記p型非晶質シリコン層上に形成され、金属酸化物を含む第2透明導電層と
前記第2透明導電層上に形成された、第2集電極と、
を更に備えた、請求項1に記載の太陽電池セル。 - 前記n型結晶性シリコン層の屈折率は、前記第1透明導電層の屈折率に対して2.5倍以上である、請求項11に記載の太陽電池セル。
- 前記n型結晶性シリコン層上に形成され、絶縁物を主成分とする保護層と、
前記p型非晶質シリコン層上に形成され、金属酸化物を含む第2透明導電層と、
前記第2透明導電層上に形成された、集電極と、
を更に備えた、請求項1に記載の太陽電池セル。 - 結晶性シリコンウェーハの一方の面上に、酸化シリコン、炭化シリコン、または窒化シリコンを主成分として構成される第1パッシベーション層を形成する工程と、
前記第1パッシベーション層上にn型結晶性シリコン層を形成する工程と、
前記n型結晶性シリコン層が形成された前記結晶性シリコンウェーハの他方の面上に第2パッシベーション層を形成する工程と、
前記第2パッシベーション層上にp型非晶質シリコン層を形成する工程と、
を備える、太陽電池セルの製造方法。 - 前記第2パッシベーション層は、実質的に真性な非晶質シリコンか、または前記p型非晶質シリコン層よりドーパント濃度が低い非晶質シリコンを含み、前記第1パッシベーション層より厚く形成される、請求項14に記載の太陽電池セルの製造方法。
- 前記n型結晶性シリコン層は、前記第1パッシベーション層上に非晶質シリコン層を形成した後、前記非晶質シリコン層を結晶化して形成される、請求項14または15に記載の太陽電池セルの製造方法。
- 前記第1パッシベーション層を形成した後、前記第2パッシベーション層を形成する前に、前記結晶性シリコンウェーハの前記第1パッシベーション層と接する界面およびその近傍をn型にドーピングして、当該界面およびその近傍にn+層を形成する、請求項14〜16のいずれか1項に記載の太陽電池セルの製造方法。
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WO2021030236A2 (en) | 2019-08-09 | 2021-02-18 | Leading Edge Equipment Technologies, Inc. | Producing a ribbon or wafer with regions of low oxygen concentration |
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CN112018208B (zh) * | 2020-08-06 | 2022-10-04 | 隆基绿能科技股份有限公司 | 一种太阳能电池及制备方法 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005135986A (ja) * | 2003-10-28 | 2005-05-26 | Kaneka Corp | 積層型光電変換装置 |
US20090211623A1 (en) * | 2008-02-25 | 2009-08-27 | Suniva, Inc. | Solar module with solar cell having crystalline silicon p-n homojunction and amorphous silicon heterojunctions for surface passivation |
JP2011003639A (ja) * | 2009-06-17 | 2011-01-06 | Kaneka Corp | 結晶シリコン系太陽電池とその製造方法 |
JP2012060080A (ja) * | 2010-09-13 | 2012-03-22 | Ulvac Japan Ltd | 結晶太陽電池及びその製造方法 |
JP2013211392A (ja) * | 2012-03-30 | 2013-10-10 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP2014216334A (ja) * | 2013-04-22 | 2014-11-17 | 長州産業株式会社 | 光発電素子 |
WO2015060012A1 (ja) * | 2013-10-25 | 2015-04-30 | シャープ株式会社 | 光電変換素子 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101030447B1 (ko) * | 2009-02-27 | 2011-04-25 | 성균관대학교산학협력단 | 이종접합 실리콘 태양전지와 그 제조방법 |
WO2010123974A1 (en) * | 2009-04-21 | 2010-10-28 | Tetrasun, Inc. | High-efficiency solar cell structures and methods of manufacture |
CN201699034U (zh) * | 2010-01-28 | 2011-01-05 | 上海超日太阳能科技股份有限公司 | 一种硅基异质结太阳电池 |
FR2996058B1 (fr) * | 2012-09-24 | 2014-09-26 | Commissariat Energie Atomique | Cellule photovoltaique a hererojonction et procede de fabrication d'une telle cellule |
-
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005135986A (ja) * | 2003-10-28 | 2005-05-26 | Kaneka Corp | 積層型光電変換装置 |
US20090211623A1 (en) * | 2008-02-25 | 2009-08-27 | Suniva, Inc. | Solar module with solar cell having crystalline silicon p-n homojunction and amorphous silicon heterojunctions for surface passivation |
JP2011003639A (ja) * | 2009-06-17 | 2011-01-06 | Kaneka Corp | 結晶シリコン系太陽電池とその製造方法 |
JP2012060080A (ja) * | 2010-09-13 | 2012-03-22 | Ulvac Japan Ltd | 結晶太陽電池及びその製造方法 |
JP2013211392A (ja) * | 2012-03-30 | 2013-10-10 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JP2014216334A (ja) * | 2013-04-22 | 2014-11-17 | 長州産業株式会社 | 光発電素子 |
WO2015060012A1 (ja) * | 2013-10-25 | 2015-04-30 | シャープ株式会社 | 光電変換素子 |
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