JPWO2017119066A1 - 炭化珪素半導体装置 - Google Patents
炭化珪素半導体装置 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 39
- 239000004065 semiconductor Substances 0.000 title claims description 24
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 description 13
- 239000012535 impurity Substances 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 6
- 238000011084 recovery Methods 0.000 description 5
- 238000002513 implantation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
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- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
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Abstract
Description
図1は、本実施の形態のダイオード91(炭化珪素半導体装置)の等価回路の構成を概略的に示す回路図である。ダイオード91の等価回路は、アノード端子ADと、カソード端子CDと、ショットキーバリアダイオードSBpと、ショットキーバリアダイオードSBnとを有している。ショットキーバリアダイオードSBpおよびショットキーバリアダイオードSBnの各々のアノード側はアノード端子ADに接続されている。ショットキーバリアダイオードSBpおよびショットキーバリアダイオードSBnの各々のカソード側はカソード端子CDに接続されている。言い換えれば、ショットキーバリアダイオードSBpおよびショットキーバリアダイオードSBnは、同一の順方向で並列接続されている。
図3は、本実施の形態のダイオード92(炭化珪素半導体装置)の構成を概略的に示す断面図である。ダイオード92は、炭化珪素基板50中にp型ウェル14を有している。p型ウェル14は、n型領域10のn-領域11上において、第1の面S1を部分的になしている。よって第1のアノード電極32は、n-領域11に加えてp型ウェル14にも接している。p型ウェル14は、n型領域10のn-領域11上における、注入マスクを使用した選択的な不純物注入によって形成し得る。深さ方向におけるp型ウェル14の不純物濃度プロファイルは、p+領域22とほぼ同様であってもよい。この場合、p型ウェル14とp+領域22とを一括して形成し得る。
図4は、本実施の形態のダイオード93(炭化珪素半導体装置)の構成を概略的に示す断面図である。ダイオード93は、炭化珪素基板50中にn型ウェル24を有している。n型ウェル24は、p型領域20のp-領域21上において、第2の面S2を部分的になしている。よって第2のカソード電極42は、p-領域21に加えてn型ウェル24にも接している。n型ウェル24は、p型領域20のp-領域21上における、注入マスクを使用した選択的な不純物注入によって形成し得る。深さ方向におけるn型ウェル24の不純物濃度プロファイルは、n+領域12とほぼ同様であってもよい。この場合、n型ウェル24とn+領域12とを一括して形成し得る。
図5は、本実施の形態のダイオード94(炭化珪素半導体装置)の構成を概略的に示す断面図である。ダイオード94においては、p型領域20は、n型領域10の幅よりも小さい幅(図中の横方向における寸法、言い換えれば、厚み方向に直交する方向における寸法)を有している。この構成により、平面視において、p型領域20は、n型領域10の面積よりも小さい面積を有し得る。言い換えれば、p型領域20の有効面積は、n型領域10の有効面積よりも小さい。
図6は、本実施の形態のダイオード95(炭化珪素半導体装置)の構成を概略的に示す断面図である。ダイオード95においては、第2のアノード電極41は、第2のカソード電極42の面積よりも大きい面積を有している。なお、それ以外の構成については、上述した実施の形態1〜3のいずれかの構成とほぼ同じであるため、同一または対応する要素について同一の符号を付し、その説明を繰り返さない。
Claims (7)
- 第1の面(S1)と前記第1の面(S1)と反対の第2の面(S2)とが設けられ、前記第1の面(S1)と前記第2の面(S2)とをつなぐn型領域(10)と、前記n型領域(10)と接し前記第1の面(S1)と前記第2の面(S2)とをつなぐp型領域(20)と、を有する炭化珪素基板(50)と、
前記第1の面(S1)上で前記n型領域(10)にショットキー接合された第1のアノード電極(32)と、
前記第2の面(S2)上で前記n型領域(10)にオーミック接合された第1のカソード電極(31)と、
前記第1の面(S1)上で前記p型領域(20)にオーミック接合された第2のアノード電極(41)と、
前記第2の面(S2)上で前記p型領域(20)にショットキー接合された第2のカソード電極(42)と、
を備える、
炭化珪素半導体装置(91〜95)。 - 前記n型領域(10)上において前記第1の面(S1)を部分的になすp型ウェル(14)をさらに備える、請求項1に記載の炭化珪素半導体装置(92)。
- 前記p型領域(20)上において前記第2の面(S2)を部分的になすn型ウェル(24)をさらに備える、請求項1または2に記載の炭化珪素半導体装置(93)。
- 前記p型領域(20)は、前記n型領域(10)の幅よりも小さい幅を有する、請求項1から3のいずれか1項に記載の炭化珪素半導体装置(94)。
- 前記第2のアノード電極は、前記第2のカソード電極の面積よりも大きい面積を有している、請求項1から4のいずれか1項に記載の炭化珪素半導体装置(95)。
- 前記第1のアノード電極(32)は第1の金属元素を含有しており、前記第2のアノード電極(41)は、前記第1の金属元素と異なる第2の金属元素を含有している、請求項1から5のいずれか1項に記載の炭化珪素半導体装置(91〜95)。
- 前記第1のカソード電極(31)および前記第2のカソード電極(42)は共通の金属元素を含有している、請求項1から6のいずれか1項に記載の炭化珪素半導体装置(91〜95)。
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CN (1) | CN108475703B (ja) |
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US6313482B1 (en) * | 1999-05-17 | 2001-11-06 | North Carolina State University | Silicon carbide power devices having trench-based silicon carbide charge coupling regions therein |
JP2007042997A (ja) * | 2005-08-05 | 2007-02-15 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
US20080191305A1 (en) * | 2007-02-14 | 2008-08-14 | Freescale Semiconductor, Inc. | Bipolar schottky diode and method |
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JP2007042997A (ja) * | 2005-08-05 | 2007-02-15 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
US20080191305A1 (en) * | 2007-02-14 | 2008-08-14 | Freescale Semiconductor, Inc. | Bipolar schottky diode and method |
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