JPWO2017033621A1 - 取出装置及び保管装置 - Google Patents
取出装置及び保管装置 Download PDFInfo
- Publication number
- JPWO2017033621A1 JPWO2017033621A1 JP2017536685A JP2017536685A JPWO2017033621A1 JP WO2017033621 A1 JPWO2017033621 A1 JP WO2017033621A1 JP 2017536685 A JP2017536685 A JP 2017536685A JP 2017536685 A JP2017536685 A JP 2017536685A JP WO2017033621 A1 JPWO2017033621 A1 JP WO2017033621A1
- Authority
- JP
- Japan
- Prior art keywords
- load
- foup
- take
- support
- support part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0435—Storage devices mechanical using stacker cranes with pulling or pushing means on either stacking crane or stacking area
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
Description
図1及び図2に示されるように、搬送システム100は、ビークル102、ストッカ104、及びビークル102が走行するためのレールRを備えている。また、搬送システム100は、制御系として、搬送指示部106、ビークルコントローラ108及びストッカコントローラ110を備えている。搬送システム100は、半導体素子製造における搬送スケジュールに従って、各種製造装置及びストッカ104などに対してFOUP(Front-Opening Unified Pod)120の搬送を行うと共に、ストッカ104においてFOUP120の収容或いは保管を行う。
次に、上述の構成を有するストッカ104内部で使用される取出装置1について説明する。取出装置1は、ストッカ104内部において、手動によりFOUP120を棚134から取り出すための装置である。取出装置1は、例えば自動搬送装置136が使用できない場合に、FOUP120を棚134の手前の空間S(図2参照)まで取り出し可能に構成されている。図4において、前後方向、左右方向、及び上下方向をそれぞれ設定した。なお、左右方向を幅方向、上下方向を高さ方向と称する場合もある。
続いて、取出装置1を用いたFOUP120の取り出し方法について説明する。最初に、図2に示されるチェーンブロック140のチェーン142に設けられたフックを、取出装置1の連結部9,11に取り付ける。図2に示されるように、チェーンブロック140は、本体部130の天井に設けられたフック(図示しない)に取り付けられている。フックは、本体部130の天井に、所定の間隔をあけて複数配置されている。チェーンブロック140は、取り出し対象のFOUP120に対して最も近い位置に配置されたフックに取り付けられる。チェーンブロック140は、取出装置1を構成する一要素である。なお、チェーン142は、取出装置1の連結部9,11に予め取り付けられていてもよい。また、連結部9,11とチェーン142との連結する手段は、フック以外の手段であってもよい。チェーンブロック140は、本体部130の天井に設けられたレールに吊り下げられてもよい。
Claims (6)
- 前方に開口する開口部を介して荷が出し入れされる棚を備える保管装置において、前記荷を前記棚から前記開口部を介して取り出すための取出装置であって、
前記荷の前方側から前記荷の前方部を支持する支持部と、
前記支持部を上下方向に移動させることが可能な移動装置に連結部材を介して連結される連結部と、
前記連結部を間に挟んで前記支持部と反対側に設けられた把持部と、を備える、取出装置。 - 前記支持部は、前記荷の底面を支持する第1支持部と、当該第1支持部に支持された前記荷の移動を規制する第2支持部と、を有する、請求項1に記載の取出装置。
- 前記第2支持部は、前記第1支持部よりも上方に設けられており、前記荷の上下方向の移動を規制する、請求項2に記載の取出装置。
- 前記把持部側に設けられ、重り部材を着脱可能に支持する取付部を備える、請求項1〜3のいずれか一項に記載の取出装置。
- 前記把持部は、前記支持部よりも上方に配置された第1把持部と、前記支持部よりも下方に配置された第2把持部と、を有する、請求項1〜4のいずれか一項に記載の取出装置。
- 筐体と、
前記筐体内において複数備えられ、前方に開口する開口部を介して荷が出し入れされる棚と、
前記荷の入出庫を行うポートと、
前記棚と前記ポートとの間において前記荷を移載する移載装置と、
前記荷を前記棚から前記開口部を介して前方に取り出すための取出装置と、を備える保管装置であって、
前記取出装置は、
前記荷の前方側から前記荷の前方部を支持する支持部と、
前記支持部を上下方向に移動させることが可能な移動装置に連結部材を介して連結される連結部と、
前記連結部を間に挟んで前記支持部と反対側に設けられた把持部と、を備える、保管装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015167627 | 2015-08-27 | ||
JP2015167627 | 2015-08-27 | ||
PCT/JP2016/071139 WO2017033621A1 (ja) | 2015-08-27 | 2016-07-19 | 取出装置及び保管装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017033621A1 true JPWO2017033621A1 (ja) | 2018-05-24 |
JP6460245B2 JP6460245B2 (ja) | 2019-01-30 |
Family
ID=58099794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017536685A Active JP6460245B2 (ja) | 2015-08-27 | 2016-07-19 | 取出装置及び保管装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10643877B2 (ja) |
JP (1) | JP6460245B2 (ja) |
CN (1) | CN108349649B (ja) |
TW (1) | TWI667181B (ja) |
WO (1) | WO2017033621A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11084505B2 (en) * | 2017-02-06 | 2021-08-10 | Murata Machinery, Ltd. | Overhead conveyance vehicle |
JP6720906B2 (ja) * | 2017-03-22 | 2020-07-08 | 株式会社ダイフク | 参拝設備 |
US10867824B2 (en) * | 2018-05-29 | 2020-12-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Substrate detecting system in a substrate storage container |
CN110077775B (zh) * | 2019-05-06 | 2021-07-30 | 北京云迹科技有限公司 | 货物配送系统、方法、配送机器人及货柜 |
CN113727918B (zh) * | 2019-05-13 | 2023-04-07 | 村田机械株式会社 | 高架输送车 |
JP7236550B2 (ja) * | 2019-09-20 | 2023-03-09 | 株式会社Fuji | 保管庫 |
JP7188615B2 (ja) * | 2019-11-05 | 2022-12-13 | 村田機械株式会社 | 搬送車システム |
JP2022101200A (ja) * | 2020-12-24 | 2022-07-06 | 株式会社ダイフク | 物品搬送車 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0834506A (ja) * | 1994-05-17 | 1996-02-06 | Kawamura Kogyo Kk | 物品搬送装置 |
JP2011001149A (ja) * | 2009-06-17 | 2011-01-06 | Muratec Automation Co Ltd | 保管庫 |
JP2015012222A (ja) * | 2013-07-01 | 2015-01-19 | 信越ポリマー株式会社 | 基板収納容器 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3622574A (en) | 1968-07-26 | 1971-11-23 | American Cyanamid Co | N-(morpholino alkyl)-benzo{8 b{9 thiophene-2-carboxamides |
US4000923A (en) * | 1975-06-26 | 1977-01-04 | Matt Baldwin | Gabion basket emplacement apparatus and method |
JPS62152446A (ja) | 1985-12-24 | 1987-07-07 | 株式会社日本メデイカル・サプライ | 血管吻合のための器具 |
EP0271610B1 (en) | 1986-12-19 | 1992-03-04 | Agfa-Gevaert N.V. | Photographic processing apparatus and method |
DE3718601A1 (de) * | 1987-06-03 | 1988-12-22 | Bat Cigarettenfab Gmbh | Vorrichtung zum abheben mindestens eines material-stapels |
DE3835032A1 (de) * | 1988-10-14 | 1990-04-19 | Niepmann Traylift Transport | Verfahren und vorrichtung zum entstapeln von blockweise auf paletten gestapelten zuschnitten |
JP2584998Y2 (ja) | 1992-01-10 | 1998-11-11 | 宮崎沖電気株式会社 | ウェハキャリア保持機構 |
EP0616874B1 (de) * | 1993-03-24 | 1997-09-10 | Hauni Maschinenbau Aktiengesellschaft | Robotarm eines Flächenportalroboters |
JP3669057B2 (ja) * | 1996-06-03 | 2005-07-06 | アシスト シンコー株式会社 | ストッカへの搬送システム |
ES2139431T3 (es) * | 1997-02-25 | 2000-02-01 | Cat System S R L | Aparato para la ubicacion de grupos de productos en paletas. |
US6082797A (en) * | 1998-11-02 | 2000-07-04 | Fanuc Robotics North America, Inc. | Gripping tool assembly |
DE10162101A1 (de) * | 2001-12-18 | 2003-09-04 | Topack Verpacktech Gmbh | Verfahren und Vorrichtung zum Entpalettieren von Zuschnittstapeln |
JP3832745B2 (ja) * | 2003-02-10 | 2006-10-11 | 村田機械株式会社 | 天井走行車システム |
JP4466264B2 (ja) * | 2004-08-03 | 2010-05-26 | ムラテックオートメーション株式会社 | ストッカ |
TW200626460A (en) * | 2004-08-23 | 2006-08-01 | Brooks Automation Inc | Elevator-based tool loading and buffering system |
JP4842879B2 (ja) | 2007-04-16 | 2011-12-21 | 信越ポリマー株式会社 | 基板収納容器及びそのハンドル |
JP2009062153A (ja) * | 2007-09-06 | 2009-03-26 | Asyst Technologies Japan Inc | 保管庫 |
EP2072430B1 (de) * | 2007-12-20 | 2011-08-10 | Müller Martini Holding AG | Paketgreifer für eine Palettiervorrichtung und Verfahren zum Palettieren von Paketen |
US8087869B1 (en) * | 2008-03-18 | 2012-01-03 | Binford Wallace R | Method and apparatus for loading palletized articles for blast freezing |
US7967354B2 (en) * | 2008-05-06 | 2011-06-28 | Fanuc Robotics America, Inc. | Mixed size product handling end of arm tool |
EP2554494B1 (en) * | 2010-04-02 | 2020-02-05 | Murata Machinery, Ltd. | Side buffer for a transport vehicle that travels along the ceiling, and transport vehicle system |
SG195228A1 (en) * | 2011-05-31 | 2013-12-30 | Murata Machinery Ltd | Drawer device and storage device |
US9061868B1 (en) * | 2012-07-19 | 2015-06-23 | Wepco., Inc. | Vacuum-assisted carton or box lifter |
KR102127113B1 (ko) * | 2013-10-29 | 2020-06-29 | 삼성전자 주식회사 | 카세트 이송장치 및 이를 이용하여 카세트 이송방법 |
US10023385B2 (en) * | 2013-11-12 | 2018-07-17 | Daifuku Co., Ltd. | Article storage facility |
JP6327124B2 (ja) * | 2014-11-12 | 2018-05-23 | 株式会社ダイフク | 物品搬送車 |
JP6559413B2 (ja) * | 2014-11-13 | 2019-08-14 | 株式会社東芝 | 移載装置及び荷物取出方法 |
US9617075B2 (en) * | 2015-03-24 | 2017-04-11 | Joseph Porat | System and method for overhead warehousing |
US10475684B2 (en) * | 2015-03-26 | 2019-11-12 | Murata Machinery, Ltd. | Supporting device and supporting method for articles |
CN108290687B (zh) * | 2016-02-15 | 2020-04-28 | 村田机械株式会社 | 保管装置以及输送系统 |
JP6693356B2 (ja) * | 2016-09-09 | 2020-05-13 | 株式会社ダイフク | 物品搬送装置 |
-
2016
- 2016-07-19 JP JP2017536685A patent/JP6460245B2/ja active Active
- 2016-07-19 WO PCT/JP2016/071139 patent/WO2017033621A1/ja active Application Filing
- 2016-07-19 US US15/752,872 patent/US10643877B2/en active Active
- 2016-07-19 CN CN201680045249.1A patent/CN108349649B/zh active Active
- 2016-08-26 TW TW105127430A patent/TWI667181B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0834506A (ja) * | 1994-05-17 | 1996-02-06 | Kawamura Kogyo Kk | 物品搬送装置 |
JP2011001149A (ja) * | 2009-06-17 | 2011-01-06 | Muratec Automation Co Ltd | 保管庫 |
JP2015012222A (ja) * | 2013-07-01 | 2015-01-19 | 信越ポリマー株式会社 | 基板収納容器 |
Also Published As
Publication number | Publication date |
---|---|
TW201722807A (zh) | 2017-07-01 |
CN108349649B (zh) | 2020-07-28 |
US10643877B2 (en) | 2020-05-05 |
JP6460245B2 (ja) | 2019-01-30 |
US20180233391A1 (en) | 2018-08-16 |
WO2017033621A1 (ja) | 2017-03-02 |
TWI667181B (zh) | 2019-08-01 |
CN108349649A (zh) | 2018-07-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6460245B2 (ja) | 取出装置及び保管装置 | |
US9899245B2 (en) | Conveying method and substrate processing apparatus | |
KR102312786B1 (ko) | 용기 반송 설비 | |
JP5369419B2 (ja) | 保管庫、保管庫セット及び保管庫付き搬送システム | |
JP5463758B2 (ja) | 保管庫 | |
JP2009062153A (ja) | 保管庫 | |
JP6693356B2 (ja) | 物品搬送装置 | |
JP5626464B2 (ja) | 引出し装置及び保管装置 | |
JP5228504B2 (ja) | 保管庫及び入出庫方法 | |
JP6211938B2 (ja) | 基板熱処理装置、基板熱処理装置の設置方法 | |
JP2019011179A (ja) | 物品支持棚 | |
WO2013150841A1 (ja) | 搬送システム | |
JP5515443B2 (ja) | 保管庫 | |
JP2009154983A (ja) | 保管庫及び入出庫方法 | |
JP2009062155A (ja) | 保管庫セット及び保管庫付き搬送システム | |
JP5470691B2 (ja) | 保管庫及び保管庫付き搬送システム | |
US11923224B2 (en) | Carrier positioning member and carrier placement platform | |
JP2010111476A (ja) | 保管庫及び入出庫方法 | |
JP2009096610A (ja) | 保管庫セット及び保管庫付き搬送システム | |
JP6627699B2 (ja) | 物品搬送設備及び落下防止装置 | |
JP2009096609A (ja) | 保管庫、保管庫セット及び保管庫付き搬送システム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180129 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20181204 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20181217 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6460245 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |