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Application filed by Brooks Automation IncfiledCriticalBrooks Automation Inc
Publication of TW200626460ApublicationCriticalpatent/TW200626460A/en
A substrate processing apparatus comprising: a casing with a processing device within for processing substrates; a load port interface connected to the casing for loading substrates into the processing device; and a carrier holding station connected to the casing, the carrier holding station being adapted for holding at least one substrate transport carrier at the load port interface, wherein the carrier holding station is arranged to provide a fast swap section for replacement of the at least one substrate transport carrier from the carrier holding station.
TW094128694A2004-08-232005-08-23Elevator-based tool loading and buffering system
TW200626460A
(en)