TW200626460A - Elevator-based tool loading and buffering system - Google Patents

Elevator-based tool loading and buffering system

Info

Publication number
TW200626460A
TW200626460A TW094128694A TW94128694A TW200626460A TW 200626460 A TW200626460 A TW 200626460A TW 094128694 A TW094128694 A TW 094128694A TW 94128694 A TW94128694 A TW 94128694A TW 200626460 A TW200626460 A TW 200626460A
Authority
TW
Taiwan
Prior art keywords
elevator
carrier
holding station
buffering system
casing
Prior art date
Application number
TW094128694A
Other languages
Chinese (zh)
Inventor
Ulysses Gilchrist
Michael L Bufano
William Fosnight
Christopher Hofmeister
Gerald M Friedman
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of TW200626460A publication Critical patent/TW200626460A/en

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Abstract

A substrate processing apparatus comprising: a casing with a processing device within for processing substrates; a load port interface connected to the casing for loading substrates into the processing device; and a carrier holding station connected to the casing, the carrier holding station being adapted for holding at least one substrate transport carrier at the load port interface, wherein the carrier holding station is arranged to provide a fast swap section for replacement of the at least one substrate transport carrier from the carrier holding station.
TW094128694A 2004-08-23 2005-08-23 Elevator-based tool loading and buffering system TW200626460A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60409904P 2004-08-23 2004-08-23

Publications (1)

Publication Number Publication Date
TW200626460A true TW200626460A (en) 2006-08-01

Family

ID=57808786

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094128694A TW200626460A (en) 2004-08-23 2005-08-23 Elevator-based tool loading and buffering system

Country Status (1)

Country Link
TW (1) TW200626460A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI667181B (en) * 2015-08-27 2019-08-01 日商村田機械股份有限公司 Take-out device and storage device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI667181B (en) * 2015-08-27 2019-08-01 日商村田機械股份有限公司 Take-out device and storage device

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