JPWO2016157935A1 - 電力用半導体装置の製造方法 - Google Patents
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Abstract
Description
この明細書でいう電力用半導体装置とは、電力の制御または供給を行う半導体装置(電力用半導体装置)である。たとえば、交流を直流に変換する、電圧を5Vまたは3Vに降圧する等して、モータを駆動させる、バッテリに充電する、マイコン(Central processing Unit)またはLSI(Large Scale Integrated circuit)を動作させる等のために用いられる半導体装置をいい、マイコンそのもの、または、メモリ等に用いられるLSIそのものではない。
炭素濃度をほぼ一定にして、酸素濃度を変化させた半導体基板を用いてIGBTを試作した。試作したIGBTに対して、酸素濃度と、飽和エミッタ−コレクタ電圧の変化率との関係を評価した。ここで、変化率は、次のように定義される。まず、それぞれ検査用のゲート電圧およびエミッタ電圧を流したときの、コレクタ−エミッタ間電圧の値をA(初期値)とし、次に、それぞれ負荷試験用のゲート−エミッタ間電圧およびコレクタ電流を流したときの、コレクタ−エミッタ間電圧の値をBとすると、変化率は(B−A)/Aによって表される。ここでは、この変化率を用いて間接的にスイッチング特性の安定性を評価した。すなわち、飽和エミッタ−コレクタ電圧の変化率が小さいほど、電力用半導体装置として安定していることになる。
上述した電力用半導体装置の製造方法では、半導体基板として、FZ法によって成長させた、比較的酸素濃度の低い半導体基板を用い、第1工程において、半導体基板に酸素をさらに拡散させる場合について説明した。
上述した電力用半導体装置の製造方法では、半導体基板に形成される電力用半導体装置として、縦型のトレンチ構造を有するIGBTを例に挙げて説明した。
Claims (6)
- 炭素濃度が1×1014cm−3以上、1×1016cm−3以下であり、酸素濃度が1×1016cm−3以上、2×1018cm−3以下である領域を有するシリコンの半導体基板に、電力用半導体装置を形成する工程と、
前記半導体基板に電子線を照射する工程と、
前記半導体基板に、250℃以上、400℃以下の温度条件のもとで熱処理を行う工程と
を備えた、電力用半導体装置の製造方法。 - 前記半導体基板を製造する工程は、
FZ法によって、第1状態の半導体基板を成長させる工程と、
前記第1状態の半導体基板に酸素を拡散させることによって、前記半導体基板としての第2状態の半導体基板を形成する工程と
を含む、請求項1記載の電力用半導体装置の製造方法。 - 前記第2状態の半導体基板を形成する工程は、
前記第1状態の半導体基板を覆うように、シリコン酸化膜を形成する工程と、
熱処理を施すことによって、前記シリコン酸化膜中の酸素を前記第1状態の半導体基板に拡散させる工程と
を含む、請求項2記載の電力用半導体装置の製造方法。 - 前記領域は、前記半導体基板の厚み方向の全域とされた、請求項1記載の電力用半導体装置の製造方法。
- 前記半導体基板として、CZ法およびMCZ法のいずれかの方法によって成長させた半導体基板を用いる、請求項4記載の電力用半導体装置の製造方法。
- 前記電力用半導体装置を形成する工程は、IGBTおよびダイオードのいずれかを形成する工程を含む、請求項1記載の電力用半導体装置の製造方法。
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CA2830085A1 (en) | 2011-03-23 | 2012-09-27 | Nxstage Medical, Inc. | Peritoneal dialysis systems, devices, and methods |
JP2018098266A (ja) * | 2016-12-08 | 2018-06-21 | キヤノン株式会社 | 光電変換装置、光電変換装置の製造方法およびカメラ |
WO2019181852A1 (ja) | 2018-03-19 | 2019-09-26 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7251616B2 (ja) | 2019-04-26 | 2023-04-04 | 富士電機株式会社 | 半導体装置および製造方法 |
CN113711364A (zh) | 2019-10-11 | 2021-11-26 | 富士电机株式会社 | 半导体装置和半导体装置的制造方法 |
JP7515428B2 (ja) | 2021-02-16 | 2024-07-12 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
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JPS53146569A (en) * | 1977-05-26 | 1978-12-20 | Nec Corp | Manufacture of semiconductor device |
JPS5527612A (en) * | 1978-08-19 | 1980-02-27 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Silicon base |
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