JPS53146569A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53146569A JPS53146569A JP6194777A JP6194777A JPS53146569A JP S53146569 A JPS53146569 A JP S53146569A JP 6194777 A JP6194777 A JP 6194777A JP 6194777 A JP6194777 A JP 6194777A JP S53146569 A JPS53146569 A JP S53146569A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- annealing
- irradiation
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Thyristors (AREA)
Abstract
PURPOSE: To obtain a semiconductor device featuring a high-speed switching performance by coating the metal containing Ni- or Ni itself on the substrate and having annealing through irradiation of the radiant rays.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6194777A JPS5949691B2 (en) | 1977-05-26 | 1977-05-26 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6194777A JPS5949691B2 (en) | 1977-05-26 | 1977-05-26 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53146569A true JPS53146569A (en) | 1978-12-20 |
JPS5949691B2 JPS5949691B2 (en) | 1984-12-04 |
Family
ID=13185886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6194777A Expired JPS5949691B2 (en) | 1977-05-26 | 1977-05-26 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5949691B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2016157935A1 (en) * | 2015-04-02 | 2017-04-27 | 三菱電機株式会社 | Method for manufacturing power semiconductor device |
-
1977
- 1977-05-26 JP JP6194777A patent/JPS5949691B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2016157935A1 (en) * | 2015-04-02 | 2017-04-27 | 三菱電機株式会社 | Method for manufacturing power semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5949691B2 (en) | 1984-12-04 |
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