JPS5295177A - Electronic beam mask and manufacture - Google Patents
Electronic beam mask and manufactureInfo
- Publication number
- JPS5295177A JPS5295177A JP1127976A JP1127976A JPS5295177A JP S5295177 A JPS5295177 A JP S5295177A JP 1127976 A JP1127976 A JP 1127976A JP 1127976 A JP1127976 A JP 1127976A JP S5295177 A JPS5295177 A JP S5295177A
- Authority
- JP
- Japan
- Prior art keywords
- electronic beam
- manufacture
- beam mask
- stopping part
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To improve the mechanical tension and precision by forming the mesh type holding body on the passing part of the electronic beam to hold the stopping part of electronic beam and by radiating the heat caused when the beam clashes into the stopping part and the charge to the electronic beam mask wave.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1127976A JPS5295177A (en) | 1976-02-06 | 1976-02-06 | Electronic beam mask and manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1127976A JPS5295177A (en) | 1976-02-06 | 1976-02-06 | Electronic beam mask and manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5295177A true JPS5295177A (en) | 1977-08-10 |
JPS5334459B2 JPS5334459B2 (en) | 1978-09-20 |
Family
ID=11773541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1127976A Granted JPS5295177A (en) | 1976-02-06 | 1976-02-06 | Electronic beam mask and manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5295177A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183926A (en) * | 1985-02-08 | 1986-08-16 | Toshiba Corp | Charged beam irradiation unit |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0520305Y2 (en) * | 1986-05-26 | 1993-05-26 |
-
1976
- 1976-02-06 JP JP1127976A patent/JPS5295177A/en active Granted
Non-Patent Citations (1)
Title |
---|
IBM TECHNICAL DISCLOSURE BULLETIN#N11=1973 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183926A (en) * | 1985-02-08 | 1986-08-16 | Toshiba Corp | Charged beam irradiation unit |
Also Published As
Publication number | Publication date |
---|---|
JPS5334459B2 (en) | 1978-09-20 |
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